JP6083404B2 - 半導体基板の評価方法 - Google Patents
半導体基板の評価方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 75
- 239000004065 semiconductor Substances 0.000 title claims description 74
- 238000011156 evaluation Methods 0.000 title claims description 20
- 230000007547 defect Effects 0.000 claims description 145
- 238000011084 recovery Methods 0.000 claims description 98
- 239000013078 crystal Substances 0.000 claims description 75
- 238000010438 heat treatment Methods 0.000 claims description 41
- 238000000137 annealing Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 37
- 238000005468 ion implantation Methods 0.000 claims description 31
- 229910052710 silicon Inorganic materials 0.000 claims description 28
- 239000010703 silicon Substances 0.000 claims description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 230000007246 mechanism Effects 0.000 claims description 16
- 238000012545 processing Methods 0.000 claims description 15
- 238000005136 cathodoluminescence Methods 0.000 claims description 11
- 238000002796 luminescence method Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 4
- 238000001228 spectrum Methods 0.000 description 13
- 235000012431 wafers Nutrition 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 11
- 239000012535 impurity Substances 0.000 description 9
- 239000000523 sample Substances 0.000 description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 6
- 229910052796 boron Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 229910052724 xenon Inorganic materials 0.000 description 4
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 150000003376 silicon Chemical class 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
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Description
前記欠陥回復熱処理を、フラッシュランプアニールで行い、
前記フラッシュランプアニールの処理条件を制御することによって、回復途中の半導体基板の結晶欠陥を測定する工程と、
該測定の結果に基づいて、前記結晶欠陥の回復メカニズムを解析する工程と
を有することを特徴とする半導体基板の評価方法を提供する。
上記のように、結晶欠陥の回復過程を評価することができる半導体基板の評価方法が求められている。
前記欠陥回復熱処理を、フラッシュランプアニールで行い、
前記フラッシュランプアニールの処理条件を制御することによって、回復途中の半導体基板の結晶欠陥を測定する工程と、
該測定の結果に基づいて、前記結晶欠陥の回復メカニズムを解析する工程と
を有する半導体基板の評価方法が、上記課題を解決できることを見出し、本発明の半導体基板の評価方法を完成させた。
まず、シリコン半導体基板、例えば、ボロン等のドーパントをドープしたP型シリコンウェーハを準備する。次に、このウェーハ表面に不純物拡散層を形成する。不純物拡散層は、例えば、ボロン等のドーパントをイオン注入することによって形成することができる。このイオン注入により点欠陥等のイオン注入欠陥がシリコン半導体基板中に形成される。
次に、欠陥回復熱処理を施した半導体基板の結晶欠陥を測定する。本発明では、欠陥回復熱処理を、フラッシュランプアニールで行い、フラッシュランプアニールの処理条件を制御することによって、回復途中の半導体基板の結晶欠陥を測定する。本発明であれば、結晶欠陥の回復途中の状態を測定することができるので、従来明らかとされていなかった回復過程での結晶欠陥の挙動を捕らえることができる。
次に、上記の測定の結果に基づいて、結晶欠陥の回復メカニズムを解析する。本発明では、上記のように回復途中の半導体基板の結晶欠陥を測定することによって、回復過程での結晶欠陥の挙動を捕らえることができ、回復メカニズムを解析することができる。上述の測定する工程において、更に、イオン注入直後や結晶欠陥の回復後の半導体基板についても測定することによって、本工程でより詳細に回復メカニズムを解析することができる。
本発明は、半導体基板の結晶欠陥、特に、接合を形成する際に発生したイオン注入欠陥の回復過程を評価するのに好適である。特に、ソース/ドレインやゲート電極、WELLなどのように高濃度イオン注入がなされた半導体基板に欠陥回復熱処理を施した際の、欠陥回復過程(欠陥挙動)を評価するのに好適である。従って、本発明は、表面に不純物拡散層を形成する半導体基板を製造する際に適応することができる。
(実施例1)
試料としてリンをドープした直径200mmのN型シリコンウェーハを用いた。このシリコンウェーハの抵抗率は10Ω・cmである。このウェーハにボロンを10keVで1×1013atoms/cm2のイオン注入を行った。次に、図1に示すように、まず、カソードルミネッセンス法を用いてイオン注入直後のウェーハのCLスペクトルを得た。次に、このウェーハに、予備加熱550℃でキセノンランプを光源としたフラッシュランプアニールを施した。この際、二種類の処理条件(照射エネルギー22J/cm2、照射時間0.6ミリ秒、照射温度1100℃及び照射エネルギー22J/cm2、照射時間1.2ミリ秒、照射温度1100℃)でアニールを施した。次に、図1に示すように、二種類の処理条件でアニールを施した後のウェーハのCLスペクトルをそれぞれ得た。
(実施例2:フラッシュランプアニールを用いた評価方法)
試料としてリンをドープした直径200mmのN型シリコンウェーハを用いた。このシリコンウェーハの抵抗率は10Ω・cmである。このウェーハにボロンを10keVで5×1013atoms/cm2のイオン注入を行い、予備加熱550℃でキセノンランプを光源としたフラッシュランプアニール(アニール条件は、照射エネルギー22J/cm2、1.2ミリ秒、照射温度1100℃)を施した。この後、イオン注入欠陥を評価した。
試料としてリンをドープした直径200mmのN型シリコンウェーハを用いた。このシリコンウェーハの抵抗率は10Ω・cmである。このウェーハにボロンを10keVで5×1013atoms/cm2のイオン注入を行い、1000℃/30秒で急速加熱・急速冷却熱処理(RTA処理)を施した。この後、イオン注入欠陥を評価した。
Claims (6)
- 結晶欠陥を有する半導体基板に対して前記結晶欠陥を回復するための欠陥回復熱処理を施した半導体基板の評価方法であって、
前記欠陥回復熱処理を、フラッシュランプアニールで行い、
前記フラッシュランプアニールの処理条件を制御することによって、前記欠陥回復熱処理を施す前の半導体基板の結晶欠陥、回復途中の半導体基板の結晶欠陥、及び前記結晶欠陥の回復後をカソードルミネッセンス法により測定する工程と、
該測定の結果に基づいて、前記結晶欠陥の回復メカニズムを解析する工程と
を有することを特徴とする半導体基板の評価方法。 - 前記変更するフラッシュランプアニールの処理条件を、熱処理時間又は照射エネルギーとすることを特徴とする請求項1に記載の半導体基板の評価方法。
- 前記結晶欠陥を、半導体基板にイオン注入することによって発生したイオン注入欠陥とすることを特徴とする請求項1又は請求項2に記載の半導体基板の評価方法。
- 前記測定する工程において、前記カソードルミネッセンス法により得られる前記結晶欠陥に起因する発光線が消失する前の状態を少なくとも二回測定し、更に、前記発光線が消失した後の状態を測定することを特徴とする請求項1から請求項3のいずれか1項に記載の半導体基板の評価方法。
- 前記解析する工程において、前記発光線の強度の変化を観察することによって回復メカニズムを解析することを特徴とする請求項4に記載の半導体基板の評価方法。
- 前記半導体基板を、シリコン半導体基板とすることを特徴とする請求項1から請求項5のいずれか1項に記載の半導体基板の評価方法。
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JP2014053585A JP6083404B2 (ja) | 2014-03-17 | 2014-03-17 | 半導体基板の評価方法 |
KR1020167023333A KR102188590B1 (ko) | 2014-03-17 | 2015-02-23 | 반도체 기판의 평가 방법 |
US15/117,537 US9748151B2 (en) | 2014-03-17 | 2015-02-23 | Method for evaluating semiconductor substrate |
CN201580013050.6A CN106104756B (zh) | 2014-03-17 | 2015-02-23 | 半导体基板的评价方法 |
PCT/JP2015/000846 WO2015141135A1 (ja) | 2014-03-17 | 2015-02-23 | 半導体基板の評価方法 |
EP15764149.9A EP3121837B1 (en) | 2014-03-17 | 2015-02-23 | Semiconductor substrate evaluation method |
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US11476167B2 (en) | 2017-03-03 | 2022-10-18 | SCREEN Holdings Co., Ltd. | Heat treatment method and heat treatment apparatus of light irradiation type |
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JP3481223B2 (ja) * | 2001-09-07 | 2003-12-22 | 松下電器産業株式会社 | 半導体装置の製造方法 |
JP2005142344A (ja) * | 2003-11-06 | 2005-06-02 | Toshiba Corp | 半導体装置の製造方法および半導体製造装置 |
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JP2010278337A (ja) * | 2009-05-29 | 2010-12-09 | Shin-Etsu Chemical Co Ltd | 表面欠陥密度が少ないsos基板 |
JP5343721B2 (ja) * | 2009-06-12 | 2013-11-13 | 信越半導体株式会社 | シリコン基板の評価方法及び半導体デバイスの製造方法 |
CN102934241B (zh) * | 2011-02-28 | 2015-09-02 | 松下电器产业株式会社 | 红外发光元件的制造方法 |
JP5823780B2 (ja) * | 2011-08-31 | 2015-11-25 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP5720560B2 (ja) * | 2011-12-21 | 2015-05-20 | 信越半導体株式会社 | 半導体基板の評価方法 |
WO2014033982A1 (ja) * | 2012-08-28 | 2014-03-06 | パナソニック株式会社 | 半導体素子の製造方法 |
JP2014241363A (ja) * | 2013-06-12 | 2014-12-25 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
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