JP6061457B2 - インクジェット記録ヘッドの製造方法 - Google Patents
インクジェット記録ヘッドの製造方法 Download PDFInfo
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- JP6061457B2 JP6061457B2 JP2011232040A JP2011232040A JP6061457B2 JP 6061457 B2 JP6061457 B2 JP 6061457B2 JP 2011232040 A JP2011232040 A JP 2011232040A JP 2011232040 A JP2011232040 A JP 2011232040A JP 6061457 B2 JP6061457 B2 JP 6061457B2
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- 238000000034 method Methods 0.000 title claims description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000002904 solvent Substances 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 11
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 229920005989 resin Polymers 0.000 description 12
- 239000011347 resin Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 4
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 3
- 229940057867 methyl lactate Drugs 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910004200 TaSiN Inorganic materials 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000012663 cationic photopolymerization Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
図1を用いて、インクジェット記録ヘッドの製造方法を説明する。
実施例1において、型材4の溶剤8による除去と、型材4へのDeep−UV光の照射を別工程として行った。これ以外は実施例1と同様にした
具体的には、インク供給口7を形成し、続いて大気中で型材4にDeep−UV光を照射した。Deep−UV光の照射を終えた後で、型材を有する基板からなるウェハを溶媒である40℃の乳酸メチル中に浸漬させ、型材4を溶出させた。
Claims (4)
- インクジェット記録ヘッドの製造方法であって、
インク流路となる型材と前記型材を被覆するオリフィス層とを有する基板を用意する工程と、前記基板を溶剤に浸漬させて前記型材を除去する工程とを有し、
前記基板を溶剤に浸漬させる工程において、Deep−UVランプを中心としてDeep−UVランプの周りで前記溶剤を循環させながら、前記溶剤及び前記溶剤に浸漬させた前記基板の前記型材に対して、前記Deep−UVランプからDeep−UV光を照射することを特徴とするインクジェット記録ヘッドの製造方法。 - 前記基板を溶剤に浸漬させる工程において、前記溶剤の蒸発面を覆い、前記基板と前記溶剤の蒸発面との距離を保ちながら前記溶剤及び前記基板の前記型材に対してDeep−UV光を照射する請求項1に記載のインクジェット記録ヘッドの製造方法。
- 前記Deep−UV光の照射は前記基板の前記オリフィス層側から行う請求項1または2に記載のインクジェット記録ヘッドの製造方法。
- 前記Deep−UV光は波長300nm以下の紫外光である請求項1乃至3のいずれか1項に記載の液体吐出ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011232040A JP6061457B2 (ja) | 2011-10-21 | 2011-10-21 | インクジェット記録ヘッドの製造方法 |
US13/655,796 US9211707B2 (en) | 2011-10-21 | 2012-10-19 | Method for manufacturing inkjet recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011232040A JP6061457B2 (ja) | 2011-10-21 | 2011-10-21 | インクジェット記録ヘッドの製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013086475A JP2013086475A (ja) | 2013-05-13 |
JP2013086475A5 JP2013086475A5 (ja) | 2014-12-04 |
JP6061457B2 true JP6061457B2 (ja) | 2017-01-18 |
Family
ID=48134753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011232040A Expired - Fee Related JP6061457B2 (ja) | 2011-10-21 | 2011-10-21 | インクジェット記録ヘッドの製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US9211707B2 (ja) |
JP (1) | JP6061457B2 (ja) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4922265A (en) * | 1986-04-28 | 1990-05-01 | Hewlett-Packard Company | Ink jet printhead with self-aligned orifice plate and method of manufacture |
US4894664A (en) * | 1986-04-28 | 1990-01-16 | Hewlett-Packard Company | Monolithic thermal ink jet printhead with integral nozzle and ink feed |
US6019457A (en) * | 1991-01-30 | 2000-02-01 | Canon Information Systems Research Australia Pty Ltd. | Ink jet print device and print head or print apparatus using the same |
JP2960608B2 (ja) * | 1992-06-04 | 1999-10-12 | キヤノン株式会社 | 液体噴射記録ヘッドの製造方法 |
US6494566B1 (en) * | 1997-01-31 | 2002-12-17 | Kyocera Corporation | Head member having ultrafine grooves and a method of manufacture thereof |
US6234608B1 (en) * | 1997-06-05 | 2001-05-22 | Xerox Corporation | Magnetically actuated ink jet printing device |
JPH11218770A (ja) * | 1998-01-29 | 1999-08-10 | Denso Corp | 液晶セル及びその製造方法 |
JP4111600B2 (ja) * | 1998-08-31 | 2008-07-02 | 東京応化工業株式会社 | 感光性樹脂版の洗い出し装置 |
KR100397604B1 (ko) * | 2000-07-18 | 2003-09-13 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법 |
US6431687B1 (en) * | 2000-12-18 | 2002-08-13 | Industrial Technology Research Institute | Manufacturing method of monolithic integrated thermal bubble inkjet print heads and the structure for the same |
US6698868B2 (en) * | 2001-10-31 | 2004-03-02 | Hewlett-Packard Development Company, L.P. | Thermal drop generator for ultra-small droplets |
KR100529307B1 (ko) * | 2002-09-04 | 2005-11-17 | 삼성전자주식회사 | 모노리틱 잉크제트 프린트 헤드 및 이의 제조 방법 |
KR100480791B1 (ko) * | 2003-06-05 | 2005-04-06 | 삼성전자주식회사 | 일체형 잉크젯 프린트헤드 및 그 제조방법 |
JP4459037B2 (ja) | 2004-12-01 | 2010-04-28 | キヤノン株式会社 | 液体吐出ヘッド |
JP5111544B2 (ja) * | 2009-04-02 | 2013-01-09 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
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2011
- 2011-10-21 JP JP2011232040A patent/JP6061457B2/ja not_active Expired - Fee Related
-
2012
- 2012-10-19 US US13/655,796 patent/US9211707B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20130097861A1 (en) | 2013-04-25 |
US9211707B2 (en) | 2015-12-15 |
JP2013086475A (ja) | 2013-05-13 |
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