JP5974329B2 - 光電式エンコーダ - Google Patents
光電式エンコーダ Download PDFInfo
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- JP5974329B2 JP5974329B2 JP2012030933A JP2012030933A JP5974329B2 JP 5974329 B2 JP5974329 B2 JP 5974329B2 JP 2012030933 A JP2012030933 A JP 2012030933A JP 2012030933 A JP2012030933 A JP 2012030933A JP 5974329 B2 JP5974329 B2 JP 5974329B2
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- light
- receiving element
- light receiving
- receiving
- photoelectric encoder
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- 238000003491 array Methods 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 description 23
- 239000004065 semiconductor Substances 0.000 description 12
- 238000001514 detection method Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35383—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using multiple sensor devices using multiplexing techniques
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Description
発光ダイオード3から光Lをスケール5の光学格子11に照射すると、光学格子11によってX方向に光の明暗パターンが生じる。そして、ホルダ19をX方向に移動させることによって生じる明暗パターンの変化(正弦波状の光信号)を、受光部7に形成された各フォトダイオードで検出する。
受光部7は、例えば、p−型の半導体基板を備える。p−型の半導体基板としては、例えば、シリコン基板を用いることができる。半導体基板の表面には、X方向に所定のピッチで、例えば、n+型の半導体領域が形成されている。この半導体領域は、不純物領域ということもできる。半導体領域は、X方向と直交するY方向が長手方向となるように形成される。この構造によって、p−型の半導体基板とn+型の半導体領域との接合部がフォトダイオード(受光素子)となる。また、半導体基板の表面のうち、半導体領域が形成された領域がフォトダイオードの受光面となる。
Claims (6)
- 光源と、
前記光源から照射された光により測定軸に沿った第1方向に光の明暗パターンを生成するスケールと、
前記第1方向に配列された前記光の明暗パターンを検出する複数の受光素子からなる第1及び第2の受光素子列、並びに、前記受光素子の受光面上に形成され前記光の明暗パターンを遮る遮光部分及び前記光の明暗パターンを通す透光部分からなる遮光層を有する受光部と
を備え、
前記第1及び第2の受光素子列は、前記第1及び第2の受光素子列の受光素子の配置パターンが前記第1方向において周期が同じで且つ位相が異なるように前記第1方向と直交する第2方向にずらして配置され、
前記第1の受光素子列の受光素子の受光面上の透光部分と前記第2の受光素子列の受光面上の透光部分とは、前記第2方向にずらしたときに相互に重ならないように形成されて、
1つの前記受光面上において、1つの前記透光部分とこの透光部分を前記第1方向で挟む前記遮光部分が形成されている
ことを特徴とする光電式エンコーダ。 - 前記第1及び第2の受光素子列の受光素子の配置パターンの前記第1方向のずれは、前記受光素子の受光面の前記第1方向の幅よりも狭い
ことを特徴とする請求項1記載の光電式エンコーダ。 - 前記遮光層の透光部分の前記第1方向の幅は、前記受光素子の受光面の前記第1方向の幅の1/2よりも広い
ことを特徴とする請求項1又は2記載の光電式エンコーダ。 - 前記受光素子の受光面のうち前記遮光層の透光部分が形成された領域を受光領域とした場合、
前記遮光層の遮光部分は、前記第1の受光素子列上において、前記第1の受光素子列の受光面と前記第2の受光素子列の受光領域との前記第1方向における重複領域上を含むように形成されている
ことを特徴とする請求項1〜3のいずれか1項記載の光電式エンコーダ。 - 前記第1及び第2の受光素子列の受光素子の配置パターンの前記第1方向における位相差は、180度である
ことを特徴とする請求項1又は2記載の光電式エンコーダ。 - 前記受光部は、前記第2方向に交互に配置された複数の第1及び第2の受光素子列を有する
ことを特徴とする請求項1〜5のいずれか1項記載の光電式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012030933A JP5974329B2 (ja) | 2012-02-15 | 2012-02-15 | 光電式エンコーダ |
EP13154928.9A EP2629064B1 (en) | 2012-02-15 | 2013-02-12 | Photoelectric encoder |
US13/766,077 US9719811B2 (en) | 2012-02-15 | 2013-02-13 | Photoelectric encoder including light-receiving element and light-blocking layer that forms light-blocking portion and light-transmitting portion on light-receiving element |
CN201310052343.8A CN103256948B (zh) | 2012-02-15 | 2013-02-18 | 光电编码器 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2012030933A JP5974329B2 (ja) | 2012-02-15 | 2012-02-15 | 光電式エンコーダ |
Publications (2)
Publication Number | Publication Date |
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JP2013167536A JP2013167536A (ja) | 2013-08-29 |
JP5974329B2 true JP5974329B2 (ja) | 2016-08-23 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012030933A Active JP5974329B2 (ja) | 2012-02-15 | 2012-02-15 | 光電式エンコーダ |
Country Status (4)
Country | Link |
---|---|
US (1) | US9719811B2 (ja) |
EP (1) | EP2629064B1 (ja) |
JP (1) | JP5974329B2 (ja) |
CN (1) | CN103256948B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6355349B2 (ja) * | 2014-02-04 | 2018-07-11 | 株式会社ミツトヨ | リニアエンコーダ |
JP6359340B2 (ja) * | 2014-05-27 | 2018-07-18 | 株式会社ミツトヨ | スケール及び光学式エンコーダ |
TWI633282B (zh) * | 2016-04-15 | 2018-08-21 | 曾信得 | 正向對焦掃描式導光編碼器 |
JP6512639B2 (ja) * | 2017-02-10 | 2019-05-15 | 信得 曾 | 光学走査式導光エンコーダ |
CN106949837B (zh) * | 2017-03-14 | 2020-09-08 | 广东工业大学 | 一种阶梯形光电传感器阵列高灵敏度的光栅尺 |
US10168189B1 (en) * | 2017-06-29 | 2019-01-01 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis |
CN107462168A (zh) * | 2017-08-31 | 2017-12-12 | 广东工业大学 | 一种新型阵列光电传感器光栅位移检测***及方法 |
CN108195293B (zh) * | 2018-03-26 | 2024-05-10 | 磐石电气(常州)有限公司 | 一种数字式位移传感器及其位移测量方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59221667A (ja) * | 1983-05-31 | 1984-12-13 | Matsushita Electric Ind Co Ltd | 光学式回転検出装置 |
DE102004004634B4 (de) | 2003-01-31 | 2014-01-09 | Mitsubishi Denki K.K. | Photoelektrische Codiereinrichtung |
JP4350417B2 (ja) * | 2003-05-13 | 2009-10-21 | 株式会社ミツトヨ | 光電式エンコーダ |
JP4372566B2 (ja) | 2004-01-26 | 2009-11-25 | 株式会社ミツトヨ | 光電式エンコーダ |
JP2006138775A (ja) | 2004-11-12 | 2006-06-01 | Toshiba Corp | 光学式エンコーダ用受光素子及び光学式エンコーダ |
JP4951884B2 (ja) * | 2005-06-29 | 2012-06-13 | ミツミ電機株式会社 | エンコーダ装置 |
JP5378316B2 (ja) * | 2009-07-29 | 2013-12-25 | 山洋電気株式会社 | 光学式エンコーダ装置 |
-
2012
- 2012-02-15 JP JP2012030933A patent/JP5974329B2/ja active Active
-
2013
- 2013-02-12 EP EP13154928.9A patent/EP2629064B1/en active Active
- 2013-02-13 US US13/766,077 patent/US9719811B2/en active Active
- 2013-02-18 CN CN201310052343.8A patent/CN103256948B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
EP2629064B1 (en) | 2017-04-19 |
US20130206970A1 (en) | 2013-08-15 |
EP2629064A3 (en) | 2015-01-28 |
EP2629064A2 (en) | 2013-08-21 |
CN103256948B (zh) | 2017-04-05 |
CN103256948A (zh) | 2013-08-21 |
US9719811B2 (en) | 2017-08-01 |
JP2013167536A (ja) | 2013-08-29 |
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