JP5971566B2 - 無線モジュール - Google Patents
無線モジュール Download PDFInfo
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- JP5971566B2 JP5971566B2 JP2013548093A JP2013548093A JP5971566B2 JP 5971566 B2 JP5971566 B2 JP 5971566B2 JP 2013548093 A JP2013548093 A JP 2013548093A JP 2013548093 A JP2013548093 A JP 2013548093A JP 5971566 B2 JP5971566 B2 JP 5971566B2
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- 239000000758 substrate Substances 0.000 claims description 232
- 239000004065 semiconductor Substances 0.000 claims description 28
- 230000008054 signal transmission Effects 0.000 claims description 13
- 239000010949 copper Substances 0.000 description 14
- 230000010287 polarization Effects 0.000 description 14
- 239000011347 resin Substances 0.000 description 12
- 229920005989 resin Polymers 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q21/00—Antenna arrays or systems
- H01Q21/06—Arrays of individually energised antenna units similarly polarised and spaced apart
- H01Q21/061—Two dimensional planar arrays
- H01Q21/065—Patch antenna array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/144—Stacked arrangements of planar printed circuit boards
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16238—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area protruding from the surface of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
- H01L2924/15321—Connection portion the connection portion being formed on the die mounting surface of the substrate being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/2283—Supports; Mounting means by structural association with other equipment or articles mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q9/00—Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
- H01Q9/04—Resonant antennas
- H01Q9/0407—Substantially flat resonant element parallel to ground plane, e.g. patch antenna
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
- H05K1/186—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or connecting to patterned circuits before or during embedding
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/04—Assemblies of printed circuits
- H05K2201/042—Stacked spaced PCBs; Planar parts of folded flexible circuits having mounted components in between or spaced from each other
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10098—Components for radio transmission, e.g. radio frequency identification [RFID] tag, printed or non-printed antennas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10234—Metallic balls
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Power Engineering (AREA)
- Variable-Direction Aerials And Aerial Arrays (AREA)
- Waveguide Connection Structure (AREA)
- Combinations Of Printed Boards (AREA)
Description
従来の無線モジュールにおいて、複数の基板間を接続する接続部材は、基板に設けられた配線パッドに電気的に接続される。接続部材及び配線パッドは、基板上に実装する素子及び基板の配線パターンのレイアウトに応じて配置される。接続部材の配置によっては、製造の際に、例えば、基板のたわみ、基板間の封止材料の充填量の偏りが発生し、モジュールの厚さが不均一になる可能性がある。モジュールの厚さが不均一であると、例えば、基板にねじれ応力がかかり、素子の接点の接続が不完全となる実装不良が生じる可能性がある。また、無線モジュールのアンテナ面の傾きによっては、アンテナの指向特性が変化する可能性がある。
図1は、従来の無線モジュールの構成の一例を示す図であり、(A)は断面図、(B)は第2基板を除いた状態であって上から見た平面図、(C)は第2基板の上から見た平面図である。
図2は、本開示の第1の実施形態に係る無線モジュールの構成を示す断面図である。
第1の実施形態の変形例を示す。図4は、第1の実施形態の変形例に係る無線モジュールの構成を示す断面図であり、(A)は第1変形例、(B)は第2変形例を示している。なお、図2に示した第1の実施形態では、図中左側の接続部材18Aと右側の接続部材18Bの双方がそれぞれ第1基板11と第2基板12の両方に接続されている。
図5は、第2の実施形態の無線モジュールにおける接続部材の配置構成を示す平面図である。図5では、無線モジュールの第2基板を除いた状態であって上から見た平面図、すなわち無線モジュール内のCuコアボールによる接続部材18A、18Bの配置状態を説明するための図である。また、第2基板12の他面側に設けられるアンテナ20を破線によって示す。
図6は、第3の実施形態の無線モジュールにおける接続部材の配置構成を示す平面図である。図6では、無線モジュールの第2基板を除いた状態であって上から見た平面図、すなわち無線モジュール内のCuコアボールによる接続部材18A、18Bの配置状態を説明するための図である。
従来、半導体基板上に、高周波信号を発生させる発信器を持つ高周波回路とパッチアンテナとが一方の面に形成された半導体チップが、MMIC(Monolithic Microwave Integrated Circuits)基板に実装された撮像装置が知られている(参考特許文献:特開2004−205402号公報参照)。
図9は本発明の第4の実施形態における無線モジュールの構成例を示す側断面図である。
図9に示す無線モジュール200において、モジュール基板210は、多層基板であり、ICの配線等を行う。モジュール基板210の第1の面211(図9では上面)には、アンテナ部220やTcxo230(Temperature compensated crystal Oscillator:温度補償水晶発振器)等の電子部品が実装されている。したがって、第1の面211は、アンテナ部220が設けられるアンテナ実装面である。
図10は本発明の第5の実施形態における無線モジュールの構成例を示す側断面図である。
図10に示す無線モジュール200Bと図9に示した無線モジュール200との相違点は、無線モジュール200Bが導波部280を備える点である。
本開示の第1の無線モジュールは、
無線回路の実装部品を搭載する第1基板と、
前記第1基板に対して積層して配置する第2基板と、
前記第1基板と前記第2基板の少なくとも一方と接続され、前記第1基板と前記第2基板との間に前記実装部品を搭載可能な間隔を形成する接続部材と、
を備え、
前記接続部材は、複数の接続部材が前記第1基板及び前記第2基板間において均等な位置に配置される。
前記複数の接続部材は、前記第1基板及び前記第2基板間において、基板平面方向の中心部に対して対称の位置に配置される。
前記第2基板には一つまたは複数のアンテナ素子によるアンテナが配置され、
前記複数の接続部材は、前記アンテナの平面方向の中心部に対して対称の位置に配置される。
前記複数の接続部材は、前記実装部品の中心部に対して対称の位置に配置される。
前記複数の接続部材のうちの少なくとも一つは、前記第1基板と前記第2基板のいずれか一方に接続される。
前記複数の接続部材のうちの少なくとも一つは、他の接続部材と外形寸法が異なる。
前記接続部材は、グランド用の接続部材を含み、
前記グランド用の接続部材と接続される前記第1基板または前記第2基板に形成された第1の配線パッドと、
前記第1の配線パッドと前記第1基板又は前記第2基板のグランドとを接続する第1のビアと、
を備える。
前記接続部材は、信号伝送用の接続部材を含み、
前記信号伝送用の接続部材と接続される前記第1基板または前記第2基板に形成された第2の配線パッドと、
前記第2の配線パッドと前記第1基板又は前記第2基板の配線部とを接続する第2のビアと、
を備え、
前記第2のビアの周囲の少なくとも一部は、複数の前記第1のビアにより包囲される。
12 第2基板
13,39,42 配線パターン
14 半導体素子
15,16,31,34,37,40 配線パッド
17,33,36 グランドパターン
18、18A、18B、18C、18D、18E,18P,18Q 接続部材
20 アンテナ
21,32,35,38,41 貫通ビア
22 封止樹脂
200、200B 無線モジュール
210 モジュール基板
220 アンテナ部
230 Tcxo
240 チップ部品
250 IC部品
260 枠基板
261 電極
270 モールド部
280 導波部
300 セット基板
211 モジュール基板の第1の面(アンテナ実装面)
212 モジュール基板の第2の面
213 モールド部の周端面(モールド面)
Claims (4)
- 半導体素子を搭載する第1基板と、
前記第1基板に対して積層して配置する第2基板と、
前記第1基板と前記第2基板の少なくとも一方と接続され、前記第1基板と前記第2基板との間に前記半導体素子を搭載可能な間隔を形成する複数の接続部材と、
を備え、
前記第2基板には複数のアンテナ素子によるアンテナが配置され、
前記複数の接続部材は、前記アンテナの平面方向の中心部に対して点対称の位置に配置される、無線モジュール。 - 請求項1に記載の無線モジュールであって、
前記複数の接続部材のうちの少なくとも一つは、他の接続部材と外形寸法が異なる、無線モジュール。 - 請求項1または2に記載の無線モジュールであって、
前記接続部材は、グランド用の接続部材を含み、
前記グランド用の接続部材と接続される前記第1基板または前記第2基板に形成された第1の配線パッドと、
前記第1の配線パッドと前記第1基板又は前記第2基板のグランドとを接続する第1のビアと、
を備える、無線モジュール。 - 請求項3に記載の無線モジュールであって、
前記接続部材は、信号伝送用の接続部材を含み、
前記信号伝送用の接続部材と接続される前記第1基板または前記第2基板に形成された第2の配線パッドと、
前記第2の配線パッドと前記第1基板又は前記第2基板の配線部とを接続する第2のビアと、
を備え、
前記第2のビアの周囲の少なくとも一部は、複数の前記第1のビアにより包囲される、無線モジュール。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011268042 | 2011-12-07 | ||
JP2011268042 | 2011-12-07 | ||
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PCT/JP2012/007826 WO2013084496A1 (ja) | 2011-12-07 | 2012-12-06 | 無線モジュール |
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JPWO2013084496A1 JPWO2013084496A1 (ja) | 2015-04-27 |
JP5971566B2 true JP5971566B2 (ja) | 2016-08-17 |
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US (1) | US20140140031A1 (ja) |
JP (1) | JP5971566B2 (ja) |
TW (1) | TWI593334B (ja) |
WO (1) | WO2013084496A1 (ja) |
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JP6474879B1 (ja) * | 2017-11-29 | 2019-02-27 | 株式会社フジクラ | 配線基板、及び、配線基板の製造方法 |
CN109962332A (zh) * | 2017-12-26 | 2019-07-02 | 三星电机株式会社 | 天线模块和天线装置 |
CN110061345A (zh) * | 2018-01-18 | 2019-07-26 | 三星电机株式会社 | 天线模块 |
KR20190104978A (ko) * | 2018-01-18 | 2019-09-11 | 삼성전기주식회사 | 안테나 모듈 |
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JP6027905B2 (ja) * | 2013-01-31 | 2016-11-16 | 新光電気工業株式会社 | 半導体装置 |
WO2015133454A1 (ja) * | 2014-03-03 | 2015-09-11 | 株式会社フジクラ | アンテナモジュール、及び、その実装方法 |
JP6299878B2 (ja) * | 2014-10-07 | 2018-03-28 | 株式会社村田製作所 | 高周波通信モジュール及び高周波通信装置 |
JP6591909B2 (ja) * | 2015-07-27 | 2019-10-16 | 京セラ株式会社 | アンテナモジュール |
KR102028714B1 (ko) * | 2017-12-06 | 2019-10-07 | 삼성전자주식회사 | 안테나 모듈 및 안테나 모듈 제조 방법 |
KR102003840B1 (ko) | 2018-03-12 | 2019-07-25 | 삼성전자주식회사 | 안테나 모듈 |
JP2019176202A (ja) * | 2018-03-26 | 2019-10-10 | 富士通コンポーネント株式会社 | 無線モジュール |
US11336032B2 (en) * | 2020-05-15 | 2022-05-17 | Raytheon Company | Reactive array |
US11791535B2 (en) | 2020-09-28 | 2023-10-17 | Samsung Electronics Co., Ltd. | Non-galvanic interconnect for planar RF devices |
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JP3226703B2 (ja) * | 1994-03-18 | 2001-11-05 | 株式会社日立製作所 | 半導体装置及びその製法 |
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JP2001144244A (ja) * | 1999-11-17 | 2001-05-25 | Sony Corp | 電子回路装置の製造方法 |
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- 2012-12-06 TW TW101145916A patent/TWI593334B/zh not_active IP Right Cessation
- 2012-12-06 JP JP2013548093A patent/JP5971566B2/ja not_active Expired - Fee Related
- 2012-12-06 US US14/131,847 patent/US20140140031A1/en not_active Abandoned
- 2012-12-06 WO PCT/JP2012/007826 patent/WO2013084496A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
---|---|
WO2013084496A1 (ja) | 2013-06-13 |
US20140140031A1 (en) | 2014-05-22 |
JPWO2013084496A1 (ja) | 2015-04-27 |
TW201332411A (zh) | 2013-08-01 |
TWI593334B (zh) | 2017-07-21 |
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