JP5956877B2 - 吸着テーブル - Google Patents
吸着テーブル Download PDFInfo
- Publication number
- JP5956877B2 JP5956877B2 JP2012193716A JP2012193716A JP5956877B2 JP 5956877 B2 JP5956877 B2 JP 5956877B2 JP 2012193716 A JP2012193716 A JP 2012193716A JP 2012193716 A JP2012193716 A JP 2012193716A JP 5956877 B2 JP5956877 B2 JP 5956877B2
- Authority
- JP
- Japan
- Prior art keywords
- bar
- support
- suction
- elevating
- lift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Accommodation For Nursing Or Treatment Tables (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Description
12 被検査体(表示パネル)
26 支持台
26a 吸着面
32 凹所
34 昇降バー
36 支持機構
38 昇降装置
40 梁部材
54 支柱
56 衝撃緩和機構
58 支柱の凹部
58b 凹部の底壁
60 スロット
62 ガイドピン
64 圧縮コイルスプリング
68 止めねじ部材(調整ねじ)
70 逃げ溝
72 高さ調整機構
88 係止ピン
90 ばね部材(引張りコイルばね)
Claims (5)
- 表示パネルを保持する吸着テーブルであって、
負圧開口が開放する吸着面を有する支持台と、
前記吸着面を横切って配置される複数の昇降バーと、
前記昇降バーを前記吸着面から突出することなく前記支持台内に収容すべく前記吸着面に互いに並行して設けられる複数の凹所と、
前記複数の凹所が開放する前記支持台の側部で前記昇降バーを昇降可能に支持する支持機構と、
前記昇降バーを前記凹所から突出する上昇位置と、前記凹所に収容される下降位置との間で昇降すべく前記支持機構に関連して設けられる昇降装置とを含み、
前記支持機構は、前記昇降バーを該昇降バーの両端部で支持するための一対の支柱と、該支柱及び前記昇降バーのいずれか一方に支持されたガイドピンと、該ガイドピンの貫通を許すべく前記支柱及び前記昇降バーの他方に設けられたスロットとを備える、吸着テーブル。 - 前記一対の支柱又は前記昇降バーの両端部にそれぞれ設けられた一対のスロットの少なくとも一方は前記昇降バーの長手方向に沿って伸長する細長いスロットである、請求項1に記載の吸着テーブル。
- 前記スロットは、前記昇降バーに設けられ、該昇降バーをその厚さ方向に貫通しかつ該昇降バーの長手方向に沿って伸長する、請求項2に記載の吸着テーブル。
- 前記支持機構には、前記ガイドピンに関連して対応する前記昇降バーに該昇降バーの長手方向外方へ向けての張力を付与するばね部材が設けられている、請求項3に記載の吸着テーブル。
- 前記昇降バーには、該昇降バーの前記スロットが設けられた位置よりも内方に位置する端部近傍に前記ガイドピンと平行な対応する係止ピンが設けられ、前記ばね部材は前記ガイドピンとこれに対応する前記係止ピンとに両端を係止された引張りコイルばねから成る、請求項4に記載の吸着テーブル。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012193716A JP5956877B2 (ja) | 2012-09-04 | 2012-09-04 | 吸着テーブル |
TW102121067A TWI505401B (zh) | 2012-09-04 | 2013-06-14 | 吸著台 |
KR20130087141A KR101485966B1 (ko) | 2012-09-04 | 2013-07-24 | 흡착 테이블 |
CN201310395196.4A CN103681436B (zh) | 2012-09-04 | 2013-09-03 | 吸附台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012193716A JP5956877B2 (ja) | 2012-09-04 | 2012-09-04 | 吸着テーブル |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014049703A JP2014049703A (ja) | 2014-03-17 |
JP5956877B2 true JP5956877B2 (ja) | 2016-07-27 |
Family
ID=50318586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012193716A Active JP5956877B2 (ja) | 2012-09-04 | 2012-09-04 | 吸着テーブル |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5956877B2 (ja) |
KR (1) | KR101485966B1 (ja) |
CN (1) | CN103681436B (ja) |
TW (1) | TWI505401B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108897156B (zh) * | 2018-08-16 | 2023-10-27 | 武汉精测电子集团股份有限公司 | 一种垂直压接pogo导通装置 |
KR102537104B1 (ko) * | 2021-02-05 | 2023-05-26 | 주식회사 야스 | 기판 전면부 접촉 없이 다 모델 대응 가능한 분할형 기판 홀딩 장치 |
CN114967189B (zh) * | 2021-02-22 | 2024-02-06 | 广州视源电子科技股份有限公司 | 贴合装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3457900B2 (ja) * | 1998-11-18 | 2003-10-20 | 東京エレクトロン株式会社 | 基板熱処理装置及び基板熱処理方法 |
KR100519369B1 (ko) * | 2002-03-05 | 2005-10-07 | 엘지.필립스 엘시디 주식회사 | 액정표시소자용 합착 장치 |
JP2005165015A (ja) * | 2003-12-03 | 2005-06-23 | Seiko Epson Corp | 膜形成用マスク、膜形成装置、電気光学装置および電子機器 |
CN100485874C (zh) * | 2004-04-16 | 2009-05-06 | 东京毅力科创株式会社 | 被处理体的处理装置 |
CN100510874C (zh) * | 2004-11-24 | 2009-07-08 | 喜开理株式会社 | 附带倾斜功能的浮起单元及浮起装置 |
JP2006201330A (ja) * | 2005-01-19 | 2006-08-03 | Fujitsu Ltd | 貼合せ基板製造装置及び貼合せ基板製造方法 |
JP2007086186A (ja) * | 2005-09-20 | 2007-04-05 | Sharp Corp | 基板加熱装置 |
JP2010016053A (ja) * | 2008-07-01 | 2010-01-21 | Tokyo Electron Ltd | 被検査体の受け渡し機構 |
JP4964861B2 (ja) * | 2008-12-03 | 2012-07-04 | アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド | 基板支持装置 |
JP2011029565A (ja) * | 2009-07-29 | 2011-02-10 | Toppan Printing Co Ltd | 基板保持装置 |
KR101130969B1 (ko) * | 2009-09-17 | 2012-04-03 | 주성엔지니어링(주) | 기판 지지부재와 이를 포함하는 기판 가열 장치 |
TWI447846B (zh) * | 2011-12-23 | 2014-08-01 | Au Optronics Corp | 基板固定裝置 |
-
2012
- 2012-09-04 JP JP2012193716A patent/JP5956877B2/ja active Active
-
2013
- 2013-06-14 TW TW102121067A patent/TWI505401B/zh active
- 2013-07-24 KR KR20130087141A patent/KR101485966B1/ko active IP Right Grant
- 2013-09-03 CN CN201310395196.4A patent/CN103681436B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR101485966B1 (ko) | 2015-01-23 |
KR20140031101A (ko) | 2014-03-12 |
TW201411771A (zh) | 2014-03-16 |
JP2014049703A (ja) | 2014-03-17 |
CN103681436B (zh) | 2016-08-17 |
TWI505401B (zh) | 2015-10-21 |
CN103681436A (zh) | 2014-03-26 |
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