JP5899519B2 - 固体撮像装置 - Google Patents
固体撮像装置 Download PDFInfo
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- JP5899519B2 JP5899519B2 JP2009254404A JP2009254404A JP5899519B2 JP 5899519 B2 JP5899519 B2 JP 5899519B2 JP 2009254404 A JP2009254404 A JP 2009254404A JP 2009254404 A JP2009254404 A JP 2009254404A JP 5899519 B2 JP5899519 B2 JP 5899519B2
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- 238000003384 imaging method Methods 0.000 title claims description 126
- 230000010287 polarization Effects 0.000 claims description 149
- 230000002269 spontaneous effect Effects 0.000 claims description 129
- 239000000758 substrate Substances 0.000 claims description 84
- 239000004065 semiconductor Substances 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 35
- 239000013078 crystal Substances 0.000 claims description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 18
- 229910052739 hydrogen Inorganic materials 0.000 claims description 18
- 230000004888 barrier function Effects 0.000 claims description 15
- 239000011368 organic material Substances 0.000 claims description 11
- 229910002367 SrTiO Inorganic materials 0.000 claims description 4
- 229910052797 bismuth Inorganic materials 0.000 claims description 4
- 230000007547 defect Effects 0.000 claims description 4
- 229920002313 fluoropolymer Polymers 0.000 claims description 4
- 239000004811 fluoropolymer Substances 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 80
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 48
- 238000009825 accumulation Methods 0.000 description 41
- 239000011787 zinc oxide Substances 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 22
- 238000010586 diagram Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000002033 PVDF binder Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 5
- 229910002601 GaN Inorganic materials 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 4
- -1 aluminum ions Chemical class 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910004465 TaAlO Inorganic materials 0.000 description 1
- 229910010052 TiAlO Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- RZEADQZDBXGRSM-UHFFFAOYSA-N bismuth lanthanum Chemical compound [La].[Bi] RZEADQZDBXGRSM-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
図1は、本発明の第1の実施形態に係る固体撮像装置100の回路構成を示す図である。
次に、本発明の第2の実施形態に係る固体撮像装置200について図6を参照して説明する。図6は、本発明の第2の実施形態に係る固体撮像装置200における画素の断面を模式的に表した図である。
次に、本発明の第3の実施形態に係る固体撮像装置300について、図7を参照して説明する。図7は、本発明の第3の実施形態に係る固体撮像装置300における画素の断面を模式的に表した図である。
101 画素
102 撮像領域
103 垂直シフトレジスタ
104 出力信号線
105 水平シフトレジスタ
106 光電変換素子
107 転送トランジスタ
108 増幅トランジスタ
109 電源電圧供給部
110 リセットトランジスタ
111 選択トランジスタ
112,113,114 出力パルス線
201 半導体基板
201a 第1面
201b 第2面
202 受光部
203 配線層
204 自発分極膜
205 素子分離部
206 支持基板
207a,207b 配線
208 層間絶縁膜
301 絶縁膜
601,602 水素バリア膜
204a 第1の自発分極膜
204b 第2の自発分極膜
800,900 固体撮像装置
801 p型半導体基板
802 第1のn型半導体層
803 第2のn型半導体層
804 p型半導体層
805 シリコン酸化膜
806 ゲート電極
807 負電荷領域
901 半導体基板
902 受光部
903 周辺回路部
904 界面準位を下げる膜
905 負の固定電荷を有する膜
906,908 絶縁膜
907 遮光膜
909 カラーフィルター層
910 集光レンズ
911 ホール蓄積層
Claims (9)
- 半導体基板の第1面側に形成された配線層と、前記第1面側とは反対側の第2面側から入射される光を光電変換する受光部とを有する裏面照射型の固体撮像装置であって、
前記受光部の受光面上に自発分極を有する材料からなる第1の自発分極膜が形成され、
前記第1の自発分極膜の上に自発分極を有する材料からなる第2の自発分極膜が形成され、
前記第1の自発分極膜及び前記第2の自発分極膜はそれぞれ、第1の領域及び前記第1の領域よりも分極の強い第2の領域を有し、
前記第1の自発分極膜及び前記第2の自発分極膜の分極の向きが、前記第1面から前記第2面に向かう向きであること
を特徴とする固体撮像装置。 - 前記第1の自発分極膜及び前記第2の自発分極膜は、結晶が配向している材料であること
を特徴とする請求項1記載の固体撮像装置。 - 前記結晶が配向している材料は、
ZnO、GaN、AlN、SrTiO3、Pb(Zr,Ti)O3、SrBi2Ta2O9、(Bi,La)4Ti3O12、BaTiO3、BiFeO3、BaxSr(1-x)TiO3の中
から選ばれるいずれか1つであること
を特徴とする請求項2記載の固体撮像装置。 - 前記結晶が配向している材料がZnOであり、
前記ZnOの導電型がp型であること
を特徴とする請求項2記載の固体撮像装置。 - 前記結晶が配向している材料がZnOであり、
前記ZnOの酸素欠陥濃度が1×1017(/cm3)以下であること
を特徴とする請求項2記載の固体撮像装置。 - 前記第1の自発分極膜及び前記第2の自発分極膜は、分極を有する有機材料からなり、
当該有機材料の配向によって、当該有機材料の分極電荷が当該有機材料の膜の成長方向に発生していること
を特徴とする請求項1記載の固体撮像装置。 - 前記第1の自発分極膜及び前記第2の自発分極膜は、フッ素重合体であること
を特徴とする請求項6記載の固体撮像装置。 - 前記第1の自発分極膜及び前記第2の自発分極膜は、水素バリア膜によって覆われていること
を特徴とする請求項1〜7のいずれか1項に記載の固体撮像装置。 - 前記第1の自発分極膜及び前記第2の自発分極膜は、水素バリア膜によって挟まれていること
を特徴とする請求項1〜7のいずれか1項に記載の固体撮像装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009254404A JP5899519B2 (ja) | 2009-11-05 | 2009-11-05 | 固体撮像装置 |
PCT/JP2010/004921 WO2011055475A1 (ja) | 2009-11-05 | 2010-08-05 | 固体撮像装置 |
US13/462,889 US8704321B2 (en) | 2009-11-05 | 2012-05-03 | Solid-state imaging device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009254404A JP5899519B2 (ja) | 2009-11-05 | 2009-11-05 | 固体撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011100845A JP2011100845A (ja) | 2011-05-19 |
JP5899519B2 true JP5899519B2 (ja) | 2016-04-06 |
Family
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JP2009254404A Active JP5899519B2 (ja) | 2009-11-05 | 2009-11-05 | 固体撮像装置 |
Country Status (3)
Country | Link |
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US (1) | US8704321B2 (ja) |
JP (1) | JP5899519B2 (ja) |
WO (1) | WO2011055475A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5899519B2 (ja) * | 2009-11-05 | 2016-04-06 | パナソニックIpマネジメント株式会社 | 固体撮像装置 |
KR102007279B1 (ko) | 2013-02-08 | 2019-08-05 | 삼성전자주식회사 | 3차원 이미지 센서의 거리 픽셀, 이를 포함하는 3차원 이미지 센서 및 3차원 이미지 센서의 거리 픽셀의 구동 방법 |
JP2015012126A (ja) * | 2013-06-28 | 2015-01-19 | ソニー株式会社 | 固体撮像素子および駆動方法、並びに電子機器 |
JP6260764B2 (ja) | 2013-09-26 | 2018-01-17 | セイコーエプソン株式会社 | 光電変換素子及びその製造方法 |
TWI753351B (zh) | 2013-11-29 | 2022-01-21 | 日商索尼半導體解決方案公司 | 攝像元件及電子機器 |
JP2015191967A (ja) * | 2014-03-27 | 2015-11-02 | 三菱電機株式会社 | 太陽電池セルおよびその製造方法 |
JP6598436B2 (ja) * | 2014-08-08 | 2019-10-30 | キヤノン株式会社 | 光電変換装置、撮像システム、及び光電変換装置の製造方法 |
KR102143778B1 (ko) * | 2018-10-19 | 2020-08-12 | 한국과학기술연구원 | 차원 혼합 포토 다이오드를 포함한 이미지 센서 |
JP7481811B2 (ja) * | 2019-07-26 | 2024-05-13 | キヤノン株式会社 | 半導体装置 |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0438872A (ja) | 1990-06-04 | 1992-02-10 | Mitsubishi Electric Corp | 固体撮像素子 |
JPH04343472A (ja) * | 1991-05-21 | 1992-11-30 | Nec Corp | 固体撮像素子 |
JPH0621064A (ja) * | 1992-07-06 | 1994-01-28 | Seiko Epson Corp | 半導体装置の製造方法 |
JP3783245B2 (ja) * | 1995-05-12 | 2006-06-07 | 株式会社村田製作所 | 配向性ZnO系圧電材料の製造方法 |
JPH10167896A (ja) * | 1996-12-05 | 1998-06-23 | Fuji Xerox Co Ltd | 酸化物薄膜、及びその作製方法 |
JP4940494B2 (ja) * | 2001-01-05 | 2012-05-30 | ソニー株式会社 | 不揮発性半導体記憶装置およびその製造方法 |
JP2003037268A (ja) * | 2001-07-24 | 2003-02-07 | Minolta Co Ltd | 半導体素子及びその製造方法 |
US7186380B2 (en) * | 2002-07-01 | 2007-03-06 | Hewlett-Packard Development Company, L.P. | Transistor and sensors made from molecular materials with electric dipoles |
US7119334B2 (en) * | 2003-11-03 | 2006-10-10 | Namal Technologies Ltd. | Thermal imaging system and method |
US7173842B2 (en) * | 2004-03-31 | 2007-02-06 | Intel Corporation | Metal heater for in situ heating and crystallization of ferroelectric polymer memory film |
JP4025316B2 (ja) * | 2004-06-09 | 2007-12-19 | 株式会社東芝 | 半導体装置の製造方法 |
US7821019B2 (en) * | 2004-10-04 | 2010-10-26 | Svt Associates, Inc. | Triple heterostructure incorporating a strained zinc oxide layer for emitting light at high temperatures |
US7462884B2 (en) * | 2005-10-31 | 2008-12-09 | Nichia Corporation | Nitride semiconductor device |
JP2007165478A (ja) * | 2005-12-12 | 2007-06-28 | National Univ Corp Shizuoka Univ | 光電面及び光検出器 |
JP4876242B2 (ja) * | 2005-12-16 | 2012-02-15 | 国立大学法人静岡大学 | 結晶成長方法及び結晶成長装置 |
JP4755961B2 (ja) * | 2006-09-29 | 2011-08-24 | パナソニック株式会社 | 窒化物半導体装置及びその製造方法 |
JP5064094B2 (ja) * | 2007-04-16 | 2012-10-31 | パナソニック株式会社 | 半導体記憶装置およびその製造方法 |
TWI436474B (zh) | 2007-05-07 | 2014-05-01 | Sony Corp | A solid-state image pickup apparatus, a manufacturing method thereof, and an image pickup apparatus |
JP2009021540A (ja) * | 2007-06-13 | 2009-01-29 | Rohm Co Ltd | ZnO系薄膜及びZnO系半導体素子 |
JP5032965B2 (ja) * | 2007-12-10 | 2012-09-26 | パナソニック株式会社 | 窒化物半導体トランジスタ及びその製造方法 |
JP2009152235A (ja) * | 2007-12-18 | 2009-07-09 | Panasonic Corp | 強誘電体積層構造及びその製造方法、電界効果トランジスタ及びその製造方法、並びに強誘電体キャパシタ及びその製造方法 |
JP2009218438A (ja) * | 2008-03-11 | 2009-09-24 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
JP2009231508A (ja) * | 2008-03-21 | 2009-10-08 | Panasonic Corp | 半導体装置 |
US7956369B2 (en) * | 2008-05-07 | 2011-06-07 | The United States Of America As Represented By The Secretary Of The Army | Light emitting diode |
US8415761B2 (en) * | 2008-11-06 | 2013-04-09 | Carrier Corporation | Polarization aligned and polarization graded thermoelectric materials and method of forming thereof |
WO2010097862A1 (ja) * | 2009-02-24 | 2010-09-02 | パナソニック株式会社 | 半導体メモリセル及びその製造方法並びに半導体記憶装置 |
US8106403B2 (en) * | 2009-03-04 | 2012-01-31 | Koninklijke Philips Electronics N.V. | III-nitride light emitting device incorporation boron |
US8373153B2 (en) * | 2009-05-26 | 2013-02-12 | University Of Seoul Industry Cooperation Foundation | Photodetectors |
US8227793B2 (en) * | 2009-07-06 | 2012-07-24 | University Of Seoul Industry Cooperation Foundation | Photodetector capable of detecting the visible light spectrum |
US9123653B2 (en) * | 2009-07-23 | 2015-09-01 | Sony Corporation | Solid-state imaging device, method of manufacturing the same, and electronic apparatus |
JP5899519B2 (ja) * | 2009-11-05 | 2016-04-06 | パナソニックIpマネジメント株式会社 | 固体撮像装置 |
WO2011129766A1 (en) * | 2010-04-12 | 2011-10-20 | Agency For Science, Technology And Research | A photovoltaic uv detector |
US8269222B2 (en) * | 2010-05-25 | 2012-09-18 | The United States Of America As Represented By The Secretary Of The Army | Semiconductor photodetector with transparent interface charge control layer and method thereof |
US8269223B2 (en) * | 2010-05-27 | 2012-09-18 | The United States Of America As Represented By The Secretary Of The Army | Polarization enhanced avalanche photodetector and method thereof |
JP2013026332A (ja) * | 2011-07-19 | 2013-02-04 | Sony Corp | 固体撮像素子および製造方法、並びに電子機器 |
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US8704321B2 (en) | 2014-04-22 |
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