JP5853331B2 - レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法 - Google Patents
レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法 Download PDFInfo
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- JP5853331B2 JP5853331B2 JP2011053721A JP2011053721A JP5853331B2 JP 5853331 B2 JP5853331 B2 JP 5853331B2 JP 2011053721 A JP2011053721 A JP 2011053721A JP 2011053721 A JP2011053721 A JP 2011053721A JP 5853331 B2 JP5853331 B2 JP 5853331B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/359—Working by laser beam, e.g. welding, cutting or boring for surface treatment by providing a line or line pattern, e.g. a dotted break initiation line
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Laser Beam Processing (AREA)
- Optical Filters (AREA)
Description
先ず、ステップS1においては、レーザ発振器1のパワーが後述の第1のレーザ光(266nm)によって後述の青色カラーフィルタ20Bを剥離し得る程度に設定された状態で、レーザ発振器1によって、1064nmの基本波からその第4高調波である266nmの第1のレーザ光、及び第3高調波の355nmの第2のレーザ光を生成し、それらの混合光を同一の光路上に出力する。さらに、混合光は、ビーム径がビームエキスパンダによってマスク5に設けられたスリット2の形成領域を十分にカバーし得る程度に拡大される。
2…スリット
2A…第1のスリット
2B…第2のスリット
3…遮光手段
4…対物レンズ
5…マスク
17…液晶表示パネル
18R,18B,18G…液晶セル
19…対向電極基板(基板)
20R,20B,20G…カラーフィルタ
21…隙間
22…ブラックマトリクス
23…黒色粉塵
Ob…照射対象物
L…レーザ光
L1…第1のレーザ光
L2…第2のレーザ光
Claims (7)
- 波長の異なる複数のレーザ光からその照射目的に応じて波長を選択して照射対象物に照射し得るようにしたレーザ照射装置であって、
前記複数波長のレーザ光から成る混合光の光路上に、
前記複数波長のレーザ光のうち、少なくとも最短波長のレーザ光の回折限界に相当する幅のスリットを含む複数のスリットを形成したマスクと、
前記複数のスリットを通過したレーザ光を前記照射対象物上に集光する対物レンズと、
を備えたことを特徴とするレーザ照射装置。 - 前記マスクは、前記最短波長のレーザ光の回折限界に相当する幅の第1のスリット及びそれよりも幅広の第2のスリットを横に並べて形成しており、
少なくとも前記第2のスリットを通過するレーザ光の通路を開閉する遮光手段をさらに設けて、前記照射対象物に照射するレーザ光の波長を選択し得るようにしたことを特徴とする請求項1記載のレーザ照射装置。 - 前記第1のスリットは前記混合光の光路中央部に形成され、
前記第2のスリットは、前記第1のスリットに平行に並べてその両側に形成されていることを特徴とする請求項2記載のレーザ照射装置。 - 少なくとも前記第1のスリットは、平行に並べて複数形成されていることを特徴とする請求項2又は3記載のレーザ照射装置。
- 波長の異なる第1及び第2のレーザ光を用いて液晶セルの輝点欠陥を修正する液晶表示パネルの輝点修正方法であって、
前記第1及び第2のレーザ光の混合光を同一の光路に出力させた状態で、
マスクに形成された、波長の短い前記第1のレーザ光の回折限界に相当する幅の第1のスリットを選択的に通過する前記第1のレーザ光の照射により、前記輝点欠陥の液晶セルのカラーフィルタを基板から剥離させて両者間に隙間を形成する段階と、
前記マスクに形成され、前記第1のスリットよりも幅広の第2のスリットを通過した前記第1のレーザ光よりも波長の長い前記第2のレーザ光の照射により、前記輝点欠陥の液晶セル周辺のブラックマトリクスを削って黒色粉塵を発生させる段階と、
前記第1のスリットを通過した前記第1のレーザ光、又は少なくとも前記第2のスリットを通過した前記第1及び第2のレーザ光の照射により、前記黒色粉塵を移動させて前記隙間に分散させる段階と、
を行うことを特徴とする液晶表示パネルの輝点修正方法。 - 前記第1及び第2のスリットは、前記マスクに横に並べて形成され、
前記第2のスリットを通過するレーザ光の通路を遮光手段により開閉して、前記液晶表示パネルに照射するレーザ光の波長を選択し得るようにしたことを特徴とする請求項5記載の液晶表示パネルの輝点修正方法。 - 少なくとも前記第1のスリットは、前記レーザ光の光路中央部に平行に並べて複数本形成され、該複数本の第1のスリットの両側に前記第2のスリットを形成したことを特徴とする請求項6記載の液晶表示パネルの輝点修正方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011053721A JP5853331B2 (ja) | 2011-03-11 | 2011-03-11 | レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法 |
CN201280010962.4A CN103415793B (zh) | 2011-03-11 | 2012-02-28 | 激光照射装置和使用该激光照射装置的液晶显示面板的亮点修正方法 |
PCT/JP2012/054973 WO2012124472A1 (ja) | 2011-03-11 | 2012-02-28 | レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法 |
KR1020137025477A KR20140008526A (ko) | 2011-03-11 | 2012-02-28 | 레이저 조사 장치 및 그것을 사용한 액정 표시 패널의 휘점 수정 방법 |
TW101107812A TWI626499B (zh) | 2011-03-11 | 2012-03-08 | 雷射照射裝置及使用其之液晶顯示面板的輝點修正方法 |
US14/022,617 US9377637B2 (en) | 2011-03-11 | 2013-09-10 | Laser irradiation apparatus and bright point correction method for liquid crystal display panel using the same |
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JP2011053721A JP5853331B2 (ja) | 2011-03-11 | 2011-03-11 | レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法 |
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JP2012187610A JP2012187610A (ja) | 2012-10-04 |
JP5853331B2 true JP5853331B2 (ja) | 2016-02-09 |
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US (1) | US9377637B2 (ja) |
JP (1) | JP5853331B2 (ja) |
KR (1) | KR20140008526A (ja) |
CN (1) | CN103415793B (ja) |
TW (1) | TWI626499B (ja) |
WO (1) | WO2012124472A1 (ja) |
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JP5746065B2 (ja) * | 2012-01-27 | 2015-07-08 | 三菱電機株式会社 | 液晶表示装置の輝点欠陥の暗点化方法及び暗点化装置 |
JP6754557B2 (ja) * | 2015-09-11 | 2020-09-16 | パナソニック株式会社 | 表示装置とその輝度欠陥修正方法 |
KR102492032B1 (ko) * | 2016-04-04 | 2023-01-27 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
IL252056A (en) * | 2017-05-01 | 2018-04-30 | Elbit Systems Ltd | Head-up display device, system and method |
TWI737842B (zh) * | 2017-10-27 | 2021-09-01 | 優顯科技股份有限公司 | 發光裝置之亮度補償方法 |
JP7061036B2 (ja) * | 2018-07-03 | 2022-04-27 | キヤノン株式会社 | 光照射装置、光学評価装置および物品製造方法 |
US20230415271A1 (en) * | 2020-11-30 | 2023-12-28 | Agc Glass Europe | Laser apparatus comprising a closing means and associated method and use |
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JP2002071939A (ja) * | 1995-06-15 | 2002-03-12 | Ntn Corp | カラーフィルタの欠陥修正方法 |
JPH1020201A (ja) * | 1996-06-28 | 1998-01-23 | Nikon Corp | レーザ顕微鏡 |
US6927065B2 (en) * | 1999-08-13 | 2005-08-09 | U.S. Genomics, Inc. | Methods and apparatus for characterization of single polymers |
JP2003305577A (ja) * | 2002-04-11 | 2003-10-28 | Sharp Corp | レーザ加工装置、それを用いた半導体素子の製造方法およびそれを用いた太陽電池素子の製造方法 |
JP2004279753A (ja) * | 2003-03-17 | 2004-10-07 | Chi Mei Electronics Corp | 輝点画素の滅点化方法および液晶モジュール |
JP3842769B2 (ja) * | 2003-09-01 | 2006-11-08 | 株式会社東芝 | レーザ加工装置、レーザ加工方法、及び半導体装置の製造方法 |
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2011
- 2011-03-11 JP JP2011053721A patent/JP5853331B2/ja active Active
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2012
- 2012-02-28 KR KR1020137025477A patent/KR20140008526A/ko not_active Application Discontinuation
- 2012-02-28 CN CN201280010962.4A patent/CN103415793B/zh not_active Expired - Fee Related
- 2012-02-28 WO PCT/JP2012/054973 patent/WO2012124472A1/ja active Application Filing
- 2012-03-08 TW TW101107812A patent/TWI626499B/zh not_active IP Right Cessation
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- 2013-09-10 US US14/022,617 patent/US9377637B2/en active Active
Also Published As
Publication number | Publication date |
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CN103415793A (zh) | 2013-11-27 |
US9377637B2 (en) | 2016-06-28 |
JP2012187610A (ja) | 2012-10-04 |
KR20140008526A (ko) | 2014-01-21 |
TWI626499B (zh) | 2018-06-11 |
TW201300918A (zh) | 2013-01-01 |
CN103415793B (zh) | 2017-04-12 |
WO2012124472A1 (ja) | 2012-09-20 |
US20140009729A1 (en) | 2014-01-09 |
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