JP5838347B2 - 赤外線式炎検知器 - Google Patents
赤外線式炎検知器 Download PDFInfo
- Publication number
- JP5838347B2 JP5838347B2 JP2011545201A JP2011545201A JP5838347B2 JP 5838347 B2 JP5838347 B2 JP 5838347B2 JP 2011545201 A JP2011545201 A JP 2011545201A JP 2011545201 A JP2011545201 A JP 2011545201A JP 5838347 B2 JP5838347 B2 JP 5838347B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- wavelength
- filter
- film
- infrared light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010408 film Substances 0.000 claims description 185
- 230000003287 optical effect Effects 0.000 claims description 110
- 239000010409 thin film Substances 0.000 claims description 108
- 239000000463 material Substances 0.000 claims description 84
- 239000000758 substrate Substances 0.000 claims description 84
- 230000005540 biological transmission Effects 0.000 claims description 80
- 239000012788 optical film Substances 0.000 claims description 34
- 239000011358 absorbing material Substances 0.000 claims description 32
- 230000005855 radiation Effects 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000010410 layer Substances 0.000 description 84
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 52
- 239000007789 gas Substances 0.000 description 25
- 238000000411 transmission spectrum Methods 0.000 description 21
- 238000010521 absorption reaction Methods 0.000 description 20
- 238000010884 ion-beam technique Methods 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 18
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 17
- 238000001514 detection method Methods 0.000 description 17
- 238000000034 method Methods 0.000 description 16
- 238000011156 evaluation Methods 0.000 description 14
- 238000005530 etching Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 9
- 238000004088 simulation Methods 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000010030 laminating Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 230000000737 periodic effect Effects 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000007735 ion beam assisted deposition Methods 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000009751 slip forming Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910002665 PbTe Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Inorganic materials [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000005394 sealing glass Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Inorganic materials [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0014—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation from gases, flames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0014—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation from gases, flames
- G01J5/0018—Flames, plasma or welding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0801—Means for wavelength selection or discrimination
- G01J5/0802—Optical filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0875—Windows; Arrangements for fastening thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
- G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B17/00—Fire alarms; Alarms responsive to explosion
- G08B17/12—Actuation by presence of radiation or particles, e.g. of infrared radiation or of ions
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B17/00—Fire alarms; Alarms responsive to explosion
- G08B17/12—Actuation by presence of radiation or particles, e.g. of infrared radiation or of ions
- G08B17/125—Actuation by presence of radiation or particles, e.g. of infrared radiation or of ions by using a video camera to detect fire or smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Business, Economics & Management (AREA)
- Emergency Management (AREA)
- Multimedia (AREA)
- Plasma & Fusion (AREA)
- Power Engineering (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Fire-Detection Mechanisms (AREA)
Description
I1=(Is1+Id1)×G1
I2=(Is2+Id2)×G2
となる。したがって、減算器164の出力信号は、
I1−I2=(Is1+Id1)×G1−(Is2+Id2)×G2
となる。しかしながら、外乱光による直流バイアス成分Id1,Id2が非常に大きい場合、各増幅部1631,1632の飽和が起こるので、S/N比が低下してしまう。
I=(Is1+Id1)−(Is2+Id2)
となる。ここで、外乱光の放射スペクトルは一般的にはブロードなので、第1の選択波長と第2の選択波長とを、外乱光の放射強度が略同じとなる波長帯域に含まれるように選択しておけば、
Id1=Id2
とみなすことができ、
I=Is1−Is2
となり、太陽光などの外乱光による直流バイアス成分の影響をキャンセルすることができ(つまり、火災が発生しておらず、CO2ガスの共鳴放射に起因した赤外線の発生がない場合には、赤外線受光素子40の出力は略ゼロとなり)、赤外線受光素子40の出力を増幅する増幅部63aのゲインを大きくできてS/N比の向上が可能となる。
Claims (5)
- 赤外線受光素子がパッケージ内に収納され、前記パッケージにおいて前記赤外線受光素子の前方に赤外線光学フィルタが配置された赤外線式炎検知器であって、
前記パッケージは、ステムと、前記赤外線受光素子を覆うように前記ステムに固着された金属製のキャップとを備え、
前記赤外線受光素子は、互いに極性の異なる2つ1組の焦電素子が焦電素子形成用基板において並設され且つ逆直列もしくは逆並列に接続されてなり、
前記赤外線光学フィルタは、赤外線透過材料からなるフィルタ形成用基板と、前記フィルタ形成用基板の一表面側において前記各焦電素子それぞれに対応する部位に形成され、炎に起因するCO2ガスの共鳴放射により発生する特定波長からなる第1の選択波長の赤外線および当該特定波長以外の参照波長である第2の選択波長の赤外線それぞれを選択的に透過させる2つ1組の狭帯域透過フィルタ部と、前記フィルタ形成用基板の他表面側に形成され、前記各狭帯域透過フィルタ部により設定される赤外線の反射帯域よりも長波長の赤外線を吸収する広帯域遮断フィルタ部とを備え、
前記2つ1組の狭帯域透過フィルタ部の各々は、屈折率が異なり且つ光学膜厚が等しい複数種類の薄膜が積層された第1のλ/4多層膜と、前記第1のλ/4多層膜における前記フィルタ形成用基板側とは反対側に形成され前記複数種類の薄膜が積層された第2のλ/4多層膜と、前記第1のλ/4多層膜と前記第2のλ/4多層膜との間に介在し前記選択波長に応じて光学膜厚を前記各薄膜の光学膜厚とは異ならせた波長選択層とを有してなり、
前記2つ1組の狭帯域透過フィルタ部のうち前記第1の選択波長の赤外線を選択的に透過させる狭帯域透過フィルタ部と、前記第2の選択波長の赤外線を選択的に透過させる狭帯域透過フィルタ部と、は、前記第1のλ/4多層膜及び前記第2のλ/4多層膜の薄膜構造が共通であり、
前記2つ1組の狭帯域透過フィルタ部の各々は、前記第1のλ/4多層膜及び前記第2のλ/4多層膜により共通の反射帯域が形成され、
前記2つ1組の狭帯域透過フィルタ部の反射帯域を決める、前記各薄膜に共通する光学膜厚の4倍に相当する設定波長をλ 0 とすれば、前記各薄膜の物理膜厚は、高屈折率材料の屈折率をn H 、低屈折率材料の屈折率をn L とすると、それぞれλ 0 /4n H 、λ 0 /4n L となるように設定されており、
前記第1の選択波長の赤外線を選択的に透過させる狭帯域透過フィルタ部の前記波長選択層は、前記反射帯域の中に前記第1の選択波長の赤外線を選択的に透過させる狭帯域の透過帯域が局在するように光学膜厚が設定され、
前記第2の選択波長の赤外線を選択的に透過させる狭帯域透過フィルタ部の前記波長選択層は、前記反射帯域の中に前記第2の選択波長の赤外線を選択的に透過させる狭帯域の透過帯域が局在するように光学膜厚が設定され、
前記赤外線光学フィルタは、前記キャップにおける前記赤外線受光素子の前方の窓部を閉塞する形で、導電性の接合材料からなる接合部により前記パッケージに接合されていることを特徴とする赤外線式炎検知器。 - 前記広帯域遮断フィルタ部は、屈折率が異なる複数種類の薄膜が積層された多層膜からなり、当該複数種類の薄膜のうち少なくとも1種類の薄膜が遠赤外線を吸収する遠赤外線吸収材料により形成されてなることを特徴とする請求項1記載の赤外線式炎検知器。
- 前記フィルタ形成用基板は、Si基板もしくはGe基板であることを特徴とする請求項1記載の赤外線式炎検知器。
- 前記フィルタ形成用基板が前記パッケージに電気的に接続されてなることを特徴とする請求項3記載の赤外線式炎検知器。
- 前記赤外線受光素子の出力を増幅する増幅回路の構成部品が前記パッケージ内に収納されてなることを特徴とする請求項4記載の赤外線式炎検知器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011545201A JP5838347B2 (ja) | 2009-12-09 | 2010-12-06 | 赤外線式炎検知器 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009279693 | 2009-12-09 | ||
JP2009279693 | 2009-12-09 | ||
JP2011545201A JP5838347B2 (ja) | 2009-12-09 | 2010-12-06 | 赤外線式炎検知器 |
PCT/JP2010/071813 WO2011071011A1 (ja) | 2009-12-09 | 2010-12-06 | 赤外線式炎検知器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011071011A1 JPWO2011071011A1 (ja) | 2013-04-22 |
JP5838347B2 true JP5838347B2 (ja) | 2016-01-06 |
Family
ID=44145555
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011545201A Expired - Fee Related JP5838347B2 (ja) | 2009-12-09 | 2010-12-06 | 赤外線式炎検知器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20120298867A1 (ja) |
EP (1) | EP2511679A1 (ja) |
JP (1) | JP5838347B2 (ja) |
KR (1) | KR101372989B1 (ja) |
CN (1) | CN102713540A (ja) |
TW (1) | TWI421475B (ja) |
WO (1) | WO2011071011A1 (ja) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5226883B2 (ja) * | 2011-02-01 | 2013-07-03 | Necトーキン株式会社 | 焦電型赤外線センサ |
CN102384788B (zh) * | 2011-11-11 | 2013-07-03 | 山东省科学院自动化研究所 | 手持式防爆红紫外火焰探测器现场检测装置 |
US9587987B2 (en) | 2012-03-12 | 2017-03-07 | Honeywell International Inc. | Method and device for detection of multiple flame types |
WO2014014534A2 (en) * | 2012-04-26 | 2014-01-23 | Xyratex Technology Ltd. | Monitoring radiated infrared |
US9103986B2 (en) * | 2012-06-08 | 2015-08-11 | Empire Technology Development Llc | Multi frequency filter arrays for low cost spectrometers |
JP6042137B2 (ja) * | 2012-08-31 | 2016-12-14 | 旭化成エレクトロニクス株式会社 | 赤外線センサモジュール |
US9939323B2 (en) * | 2012-12-28 | 2018-04-10 | Illinois Tool Works Inc. | IR sensor with increased surface area |
US9528879B2 (en) | 2013-01-21 | 2016-12-27 | Panasonic Intellectual Property Management Co., Ltd. | Infrared detection element, infrared detector, and infrared type gas sensor |
JP6057254B2 (ja) * | 2013-01-23 | 2017-01-11 | パナソニックIpマネジメント株式会社 | 赤外線受光ユニット、赤外線式ガスセンサ |
CN103405875B (zh) * | 2013-08-05 | 2015-06-24 | 同济大学 | 可旋转火焰探测装置 |
JP6390117B2 (ja) | 2014-02-26 | 2018-09-19 | セイコーエプソン株式会社 | 光学モジュール、及び電子機器 |
JP6430795B2 (ja) * | 2014-11-27 | 2018-11-28 | ホーチキ株式会社 | 炎検出装置 |
EP3290882A4 (en) * | 2015-06-02 | 2019-03-06 | Dongguan Tranesen Optoelectronics Co., Ltd | PYROELECTRIC SENSOR |
CN105205969B (zh) * | 2015-09-23 | 2016-05-25 | 陈一平 | 三维空间火源探测智能定位装置 |
DE102015223362A1 (de) * | 2015-11-25 | 2017-06-01 | Minimax Gmbh & Co. Kg | Explosionsgeschütztes Gehäuse für Mittel zum Senden und Empfangen elektromagnetischer Strahlung |
US10444076B2 (en) * | 2015-11-26 | 2019-10-15 | Sensirion Ag | Infrared device |
CN106932104A (zh) * | 2015-12-30 | 2017-07-07 | 上海新微技术研发中心有限公司 | 一种双元火焰探测传感器 |
JP6738632B2 (ja) * | 2016-03-30 | 2020-08-12 | 能美防災株式会社 | 炎検知器 |
JP2017201262A (ja) * | 2016-05-06 | 2017-11-09 | 国立大学法人神戸大学 | 焦電型赤外線センサ素子 |
EP3455837B1 (de) * | 2016-05-13 | 2020-03-11 | Siemens Schweiz AG | Brandmelder mit einer photodiode zur erfassung von umgebungslicht, um davon abhängig die ausgabe eines möglichen brandalarms zu beschleunigen |
US10012545B2 (en) * | 2016-12-07 | 2018-07-03 | Wing Lam | Flame detector with proximity sensor for self-test |
CN106698323A (zh) * | 2017-01-16 | 2017-05-24 | 北京芯创睿胜科技有限公司 | 一种红外吸收结构及其与红外传感器件的集成方法 |
US20180235478A1 (en) * | 2017-02-18 | 2018-08-23 | VVV IP Holdings Limited | Multi-Vital Sign Detector in an Electronic Medical Records System |
KR101767980B1 (ko) | 2017-04-11 | 2017-08-14 | 김수언 | 적외선 열화상을 이용한 지능형 불꽃 검출 장치 및 방법 |
US10690057B2 (en) | 2017-04-25 | 2020-06-23 | General Electric Company | Turbomachine combustor end cover assembly with flame detector sight tube collinear with a tube of a bundled tube fuel nozzle |
JP6989291B2 (ja) * | 2017-05-29 | 2022-01-05 | ホーチキ株式会社 | 火炎検出装置 |
JP6998144B2 (ja) * | 2017-07-12 | 2022-01-18 | リンナイ株式会社 | フレームロッド |
EP3462149B1 (en) | 2017-09-28 | 2023-10-25 | Sensirion AG | Infrared device |
WO2019131642A1 (ja) * | 2017-12-28 | 2019-07-04 | 株式会社村田製作所 | 光検出器 |
JP7032982B2 (ja) * | 2018-04-18 | 2022-03-09 | ホーチキ株式会社 | 炎検出装置 |
CN111365730B (zh) * | 2018-12-26 | 2022-06-24 | Abb瑞士股份有限公司 | 火焰检测器 |
EP3913340A4 (en) * | 2019-01-16 | 2022-03-02 | Panasonic Intellectual Property Management Co., Ltd. | LIGHT DETECTION DEVICE AND SYSTEM, AND FILTER SET |
CN113167650B (zh) * | 2019-01-16 | 2024-05-10 | 松下知识产权经营株式会社 | 光学滤光器、光检测装置及光检测*** |
JP7275946B2 (ja) * | 2019-07-10 | 2023-05-18 | セイコーエプソン株式会社 | 光学フィルター、及び電子機器 |
JPWO2022004507A1 (ja) * | 2020-06-29 | 2022-01-06 | ||
CN113238311B (zh) * | 2021-07-12 | 2021-10-01 | 翼捷安全设备(昆山)有限公司 | 一种红外滤光片及其制备方法、红外气体传感器 |
CN114180081A (zh) * | 2021-11-19 | 2022-03-15 | 中国直升机设计研究所 | 一种直升机光感式火警探测及逻辑判断方法 |
CN117705270B (zh) * | 2024-02-06 | 2024-04-30 | 华中科技大学 | 一种高精度太阳能辐射测量装置及方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05249313A (ja) * | 1992-03-05 | 1993-09-28 | Fujikura Ltd | 光学多層膜フィルタ |
JPH0581667U (ja) * | 1992-03-31 | 1993-11-05 | 国際技術開発株式会社 | 赤外線受光装置 |
JPH07159234A (ja) * | 1993-12-11 | 1995-06-23 | Horiba Ltd | 赤外線検出器 |
JPH1078510A (ja) * | 1996-09-05 | 1998-03-24 | Yokogawa Electric Corp | フィルタ |
JPH10339698A (ja) * | 1997-06-09 | 1998-12-22 | Itachibori Seisakusho Kk | 赤外線式ガス検出装置 |
JP2007225455A (ja) * | 2006-02-23 | 2007-09-06 | Matsushita Electric Works Ltd | 赤外線検出器 |
JP2010186147A (ja) * | 2009-02-13 | 2010-08-26 | Panasonic Electric Works Co Ltd | 赤外線光学フィルタおよびその製造方法 |
JP2010186146A (ja) * | 2009-02-13 | 2010-08-26 | Panasonic Electric Works Co Ltd | 赤外線光学フィルタおよびその製造方法 |
JP2011027699A (ja) * | 2009-06-25 | 2011-02-10 | Panasonic Electric Works Co Ltd | 赤外線式ガス検知器および赤外線式ガス計測装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60125530A (ja) * | 1983-12-09 | 1985-07-04 | Kureha Chem Ind Co Ltd | 赤外線センサ |
JPH0378899A (ja) | 1989-08-23 | 1991-04-04 | Nippon Mining Co Ltd | 火災検知装置 |
JPH0760119B2 (ja) | 1989-09-30 | 1995-06-28 | 株式会社堀場製作所 | 赤外線検出器 |
JPH0772078A (ja) | 1993-09-02 | 1995-03-17 | Matsushita Electric Ind Co Ltd | 赤外線式ガスセンサー |
US5574375A (en) * | 1995-03-15 | 1996-11-12 | Kureha Kagaku Kogyo Kabushiki Kaisha | Dual pyroelectric sensor |
JP3472906B2 (ja) | 1997-04-09 | 2003-12-02 | 松下電工株式会社 | 焦電型赤外線検出装置 |
US5831537A (en) * | 1997-10-27 | 1998-11-03 | Slc Technologies, Inc. | Electrical current saving combined smoke and fire detector |
CN2532483Y (zh) * | 2001-11-09 | 2003-01-22 | 周流 | 红外线火焰探测器 |
KR100680386B1 (ko) * | 2004-01-15 | 2007-02-08 | 마츠시타 덴끼 산교 가부시키가이샤 | 고체촬상장치, 고체촬상장치의 제조방법 및 이를 이용한카메라 |
CN100487900C (zh) * | 2004-01-15 | 2009-05-13 | 松下电器产业株式会社 | 固体成像装置,其制造方法,和使用固体成像装置的相机 |
DE102004028433B4 (de) * | 2004-06-14 | 2006-08-31 | Danfoss A/S | IR-Sensor, insbesondere CO2-Sensor |
TWI407387B (zh) * | 2007-02-09 | 2013-09-01 | Multi - band flame detection device and method thereof | |
CN102326104A (zh) * | 2009-02-13 | 2012-01-18 | 松下电工株式会社 | 红外滤光器及红外滤光器的制造方法 |
US20120235038A1 (en) * | 2009-06-25 | 2012-09-20 | Takayuki Nishikawa | Infrared gas detector and infrared gas measuring device |
-
2010
- 2010-12-06 EP EP10835931A patent/EP2511679A1/en not_active Withdrawn
- 2010-12-06 US US13/514,631 patent/US20120298867A1/en not_active Abandoned
- 2010-12-06 WO PCT/JP2010/071813 patent/WO2011071011A1/ja active Application Filing
- 2010-12-06 KR KR1020127016801A patent/KR101372989B1/ko not_active IP Right Cessation
- 2010-12-06 JP JP2011545201A patent/JP5838347B2/ja not_active Expired - Fee Related
- 2010-12-06 CN CN2010800559006A patent/CN102713540A/zh active Pending
- 2010-12-07 TW TW099142661A patent/TWI421475B/zh not_active IP Right Cessation
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05249313A (ja) * | 1992-03-05 | 1993-09-28 | Fujikura Ltd | 光学多層膜フィルタ |
JPH0581667U (ja) * | 1992-03-31 | 1993-11-05 | 国際技術開発株式会社 | 赤外線受光装置 |
JPH07159234A (ja) * | 1993-12-11 | 1995-06-23 | Horiba Ltd | 赤外線検出器 |
JPH1078510A (ja) * | 1996-09-05 | 1998-03-24 | Yokogawa Electric Corp | フィルタ |
JPH10339698A (ja) * | 1997-06-09 | 1998-12-22 | Itachibori Seisakusho Kk | 赤外線式ガス検出装置 |
JP2007225455A (ja) * | 2006-02-23 | 2007-09-06 | Matsushita Electric Works Ltd | 赤外線検出器 |
JP2010186147A (ja) * | 2009-02-13 | 2010-08-26 | Panasonic Electric Works Co Ltd | 赤外線光学フィルタおよびその製造方法 |
JP2010186146A (ja) * | 2009-02-13 | 2010-08-26 | Panasonic Electric Works Co Ltd | 赤外線光学フィルタおよびその製造方法 |
JP2011027699A (ja) * | 2009-06-25 | 2011-02-10 | Panasonic Electric Works Co Ltd | 赤外線式ガス検知器および赤外線式ガス計測装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2511679A1 (en) | 2012-10-17 |
JPWO2011071011A1 (ja) | 2013-04-22 |
WO2011071011A1 (ja) | 2011-06-16 |
US20120298867A1 (en) | 2012-11-29 |
CN102713540A (zh) | 2012-10-03 |
TWI421475B (zh) | 2014-01-01 |
KR101372989B1 (ko) | 2014-03-12 |
KR20120103662A (ko) | 2012-09-19 |
TW201142256A (en) | 2011-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5838347B2 (ja) | 赤外線式炎検知器 | |
JP5374297B2 (ja) | 赤外線式ガス検知器および赤外線式ガス計測装置 | |
KR101311322B1 (ko) | 적외선식 가스 검지기 및 적외선식 가스 계측 장치 | |
US10753858B2 (en) | Wafer arrangement | |
US9528879B2 (en) | Infrared detection element, infrared detector, and infrared type gas sensor | |
US6756594B2 (en) | Micromachined tuned-band hot bolometer emitter | |
US10444076B2 (en) | Infrared device | |
JP5223298B2 (ja) | 赤外線光源 | |
JP2007524828A (ja) | 熱光学フィルタ及びそれを用いた赤外線センサ | |
US5668376A (en) | Double radiation source assembly and transducer | |
US11209353B2 (en) | Infrared device | |
KR101034647B1 (ko) | 웨이퍼 레벨 패키징을 이용한 ndir 방식의 가스 센서용적외선 감지소자 및 그의 제조방법 | |
JP2014142319A (ja) | 赤外線応用装置 | |
JP6330909B2 (ja) | 熱型赤外線センサおよびガス測定装置 | |
US20060104319A1 (en) | Device for reflecting and detecting electromagnetic radiation | |
JP2020091388A (ja) | 光学フィルタ装置、及び光学フィルタ装置の制御方法 | |
KR101449655B1 (ko) | 파장 선택적 광 감지 센서 및 이를 이용한 센싱 방법 | |
JPH03134798A (ja) | 赤外線センサ | |
CN116008228A (zh) | 一种芯片集成式ndir气体传感器及其制备方法 | |
WO2022090106A1 (en) | Optical detector and method for determining at least one property of at least one substance | |
JP2022127448A (ja) | 赤外線検出器および赤外線検出器を備えたガスセンサ | |
JPH06213807A (ja) | 火災感知器及び受光素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140107 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140303 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140805 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20141008 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20141209 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150309 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20150317 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150519 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150612 |
|
LAPS | Cancellation because of no payment of annual fees |