JP5812262B2 - 磁気角度センサ - Google Patents
磁気角度センサ Download PDFInfo
- Publication number
- JP5812262B2 JP5812262B2 JP2011147162A JP2011147162A JP5812262B2 JP 5812262 B2 JP5812262 B2 JP 5812262B2 JP 2011147162 A JP2011147162 A JP 2011147162A JP 2011147162 A JP2011147162 A JP 2011147162A JP 5812262 B2 JP5812262 B2 JP 5812262B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- hall
- hall sensors
- angle
- sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
Description
領域に配置されるホール・センサを連結する連結線は互いに関して平行である、または、単一の共通の線を形成する。
半導体チップ6はまた、ホール要素の動作のために要求される電子回路と、ホール・センサによって供給される測定された信号の評価のために要求されアナログおよびデジタル回路を含むことができる電子評価システムとを含む。
Claims (4)
- 半導体チップ(6)と、該半導体チップ(6)の表面に配置される平らな形状の少なくとも2つの磁場集中装置(7、8)であって、互いに距離をおいて配置される磁場集中装置(7、8)と、4つのホール・センサ(9−12)とを含む磁気角度センサであって、各々の該ホール・センサは該磁場集中装置(7、8)の1つに割り当てられ、ホール要素またはホール要素の一群を含み、該ホール要素は該半導体チップ(6)において一体化され、該割り当てられた磁場集中装置(7、8)の端の領域で配置されて、前記ホール要素は、該磁場集中装置(7、8)の端の領域において該半導体チップ(6)の表面にほぼ垂直に延長する磁場の磁力線によって貫かれ、そこにおいて、2つのホール・センサ(9、11)は、磁場の第1の構成要素を測定するためのセンサの第1の対を形成し、他の2つのホール・センサ(10、12)は、磁場の第2の構成要素を測定するためのセンサの第2の対を形成し、そして、同じ該磁場集中装置の端の領域に配置される該ホール・センサを連結する連結線は互いに関して平行である、または、単一の共通の線(13)を形成する、磁気角度センサ。
- 前記磁場集中装置(7、8)が円形であることにおいて特徴付けられる、請求項1記載の磁気角度センサ。
- 前記磁場の第1の構成要素および前記連結線は−45°の角度を含み、前記磁場の第2の構成要素および前記連結線は45°の角度を含むことにおいて特徴付けられる、請求項1または2記載の磁気角度センサ。
- 4つの前記ホール・センサ(9−12)は、半導体チップ(6)の表面に配置された円形の前記磁場集中装置(7、8)の端の領域に配置され、円形の前記磁場集中装置(7、8)が互いに重なり合うように配置されると、4つの前記ホール・センサ(9−12)は前記磁場集中装置(7、8)の中心に対して互いに90°の角度を有するように配置されることにおいて特徴づけられる、請求項1から3のいずれか1項に記載の磁気角度センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH01108/10 | 2010-07-05 | ||
CH01108/10A CH703405B1 (de) | 2010-07-05 | 2010-07-05 | Magnetischer Winkelsensor. |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012013705A JP2012013705A (ja) | 2012-01-19 |
JP2012013705A5 JP2012013705A5 (ja) | 2014-08-14 |
JP5812262B2 true JP5812262B2 (ja) | 2015-11-11 |
Family
ID=44863359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011147162A Active JP5812262B2 (ja) | 2010-07-05 | 2011-07-01 | 磁気角度センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US8664945B2 (ja) |
EP (1) | EP2405240A3 (ja) |
JP (1) | JP5812262B2 (ja) |
CH (1) | CH703405B1 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130253864A1 (en) * | 2012-03-22 | 2013-09-26 | Asahi Kasei Microdevices Corporation | Magnetic-Field Direction Measuring Apparatus, Rotation Angle Measuring Apparatus, and Magnetic-Field Measuring Apparatus |
US8939028B2 (en) * | 2012-05-10 | 2015-01-27 | Infineon Technologies Ag | Integrated sensors and sensing methods |
JP6463268B2 (ja) | 2012-09-07 | 2019-01-30 | コヒラス・バイオサイエンシズ・インコーポレイテッド | 安定水性アダリムマブ製剤 |
US9671214B2 (en) | 2013-07-17 | 2017-06-06 | Infineon Technologies Ag | Discrete magnetic angle sensor device, a magnetic angle sensor arrangement, a method for generating an angle signal and a method for providing a sensor signal |
US10435464B1 (en) | 2014-09-05 | 2019-10-08 | Coherus Biosciences, Inc. | Methods for making recombinant proteins |
US11583584B1 (en) | 2015-10-28 | 2023-02-21 | Coherus Biosciences, Inc. | Stable protein compositions and methods of their use |
US11229702B1 (en) | 2015-10-28 | 2022-01-25 | Coherus Biosciences, Inc. | High concentration formulations of adalimumab |
JP6692624B2 (ja) * | 2015-11-10 | 2020-05-13 | 東洋電装株式会社 | 回転角検出センサー |
US10275055B2 (en) | 2016-03-31 | 2019-04-30 | Azoteq (Pty) Ltd | Rotational sensing |
US11071782B2 (en) | 2016-04-20 | 2021-07-27 | Coherus Biosciences, Inc. | Method of filling a container with no headspace |
JP6934708B2 (ja) | 2016-07-20 | 2021-09-15 | メレキシス テクノロジーズ エス エーMelexis Technologies SA | 変位検出装置 |
JP2018013391A (ja) * | 2016-07-20 | 2018-01-25 | メレキシス テクノロジーズ エス エー | 変位検出装置 |
US10261138B2 (en) | 2017-07-12 | 2019-04-16 | Nxp B.V. | Magnetic field sensor with magnetic field shield structure and systems incorporating same |
US10718825B2 (en) | 2017-09-13 | 2020-07-21 | Nxp B.V. | Stray magnetic field robust magnetic field sensor and system |
US10816363B2 (en) | 2018-02-27 | 2020-10-27 | Nxp B.V. | Angular sensor system and method of stray field cancellation |
US10670425B2 (en) | 2018-03-30 | 2020-06-02 | Nxp B.V. | System for measuring angular position and method of stray field cancellation |
US10914611B2 (en) | 2018-08-27 | 2021-02-09 | Nxp B.V. | Magnetic field sensor system and method for rotation angle measurement |
JP2021001879A (ja) * | 2019-06-21 | 2021-01-07 | 旭化成エレクトロニクス株式会社 | 回転角センサ、角度信号算出方法及びプログラム |
US11486742B2 (en) | 2019-08-16 | 2022-11-01 | Nxp B.V. | System with magnetic field shield structure |
EP3992652A1 (en) * | 2020-11-03 | 2022-05-04 | Melexis Technologies SA | Magnetic sensor device |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0740776B1 (de) | 1994-11-22 | 2002-06-12 | Robert Bosch Gmbh | Anordnung zur berührungslosen drehwinkelerfassung eines drehbaren elements |
JP4936299B2 (ja) * | 2000-08-21 | 2012-05-23 | メレクシス・テクノロジーズ・ナムローゼフェンノートシャップ | 磁場方向検出センサ |
JP3982611B2 (ja) * | 2001-12-25 | 2007-09-26 | 旭化成エレクトロニクス株式会社 | 集積化方位センサ |
TWI266887B (en) * | 2002-03-22 | 2006-11-21 | Asahi Kasei Emd Corp | Angle examining apparatus and angle examining system |
KR20050035251A (ko) * | 2002-08-01 | 2005-04-15 | 젠트론 아크티엔게젤샤프트 | 자기장 센서 및 자기장 센서의 작동 방법 |
DE10320057A1 (de) * | 2003-05-06 | 2004-12-02 | Schödlbauer, Dieter, Dipl.-Phys. Dr. | Redundant ausgeführter Winkelaufnehmer mit Hall-Effekt-Elementen |
WO2005029106A1 (de) * | 2003-08-22 | 2005-03-31 | Sentron Ag | Sensor für die detektion der richtung eines magnetfeldes in einer ebene |
AU2003298316A1 (en) * | 2003-11-24 | 2005-06-24 | Sentron Ag | Angle sensor for measuring the angle of a magnetic angle transmitter |
EP1772737A3 (de) * | 2005-10-08 | 2008-02-20 | Melexis Technologies SA | Baugruppe zur Strommessung |
EP2060875B1 (en) * | 2006-09-12 | 2019-11-06 | Asahi Kasei Microdevices Corporation | Physical quantity measuring instrument and signal processing method thereof |
FR2911690B1 (fr) * | 2007-01-19 | 2009-03-06 | Thales Sa | Dispositif d'amplification magnetique comportant un capteur magnetique a sensibilite longitudinale |
US9116195B2 (en) * | 2007-03-23 | 2015-08-25 | Asahi Kasei Emd Corporation | Magnetic sensor and sensitivity measuring method thereof |
-
2010
- 2010-07-05 CH CH01108/10A patent/CH703405B1/de unknown
-
2011
- 2011-06-29 US US13/172,059 patent/US8664945B2/en active Active
- 2011-07-01 EP EP11172314.4A patent/EP2405240A3/de not_active Withdrawn
- 2011-07-01 JP JP2011147162A patent/JP5812262B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US8664945B2 (en) | 2014-03-04 |
CH703405B1 (de) | 2014-05-15 |
CH703405A2 (de) | 2012-01-13 |
JP2012013705A (ja) | 2012-01-19 |
US20120001620A1 (en) | 2012-01-05 |
EP2405240A2 (de) | 2012-01-11 |
EP2405240A3 (de) | 2017-01-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5812262B2 (ja) | 磁気角度センサ | |
US10690515B2 (en) | Dual Z-axis magnetoresistive angle sensor | |
KR101365349B1 (ko) | 각도 측정 시스템, 샤프트의 각 위치 결정 방법, 샤프트의 절대 각도 위치 결정 방법 및 시스템 | |
CN107110670B (zh) | 旋转编码器和手术器械 | |
JP5460191B2 (ja) | 磁界の空間成分を測定する磁界センサ装置 | |
CN102141371B (zh) | 用于确定传感器装置和磁场之间角度的角度传感器和方法 | |
JP6023695B2 (ja) | 磁気式ロータリエンコーダ | |
CN108489379A (zh) | 具有扰动场抑制的角度传感器 | |
US9268001B2 (en) | Differential perpendicular on-axis angle sensor | |
WO2012116660A1 (zh) | 独立封装的磁电阻角度传感器 | |
JP2013156255A (ja) | 磁気センサ | |
JP2012013705A5 (ja) | ||
CN102016513A (zh) | 旋转角度检测装置 | |
GB2344424A (en) | Rotary position sensor including magnetic field concentrator array | |
CN108204785A (zh) | 磁性角度传感器设备和操作方法 | |
CN103403500A (zh) | 旋转角度检测装置 | |
WO2008050581A1 (fr) | Détecteur d'angle de rotation | |
JP5991031B2 (ja) | 磁気センサ | |
CN101667262B (zh) | 正交分布双传感器的旋转体转数无差错计数方法 | |
JP2017219539A (ja) | 一体化された磁場コンセントレータを有する磁場センサ | |
JP6799450B2 (ja) | 磁気センサ | |
JP5427619B2 (ja) | 回転検出装置 | |
US9880024B2 (en) | Measurement device for determining angular position | |
ATE271686T1 (de) | Anordnung zum erfassen des drehwinkels eines drehbaren elements | |
CN109974753A (zh) | 用于处理来自磁场传感器的测量信号的装置和方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140630 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140630 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140731 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150303 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150427 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150811 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150908 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5812262 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |