JP5798669B2 - 酸化物半導体薄膜の評価方法、及び酸化物半導体薄膜の品質管理方法、並びに上記評価方法に用いられる評価装置 - Google Patents
酸化物半導体薄膜の評価方法、及び酸化物半導体薄膜の品質管理方法、並びに上記評価方法に用いられる評価装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 173
- 239000010409 thin film Substances 0.000 title claims description 146
- 238000011156 evaluation Methods 0.000 title claims description 90
- 238000003908 quality control method Methods 0.000 title claims description 12
- 230000005284 excitation Effects 0.000 claims description 80
- 238000005259 measurement Methods 0.000 claims description 60
- 239000010408 film Substances 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 53
- 238000000034 method Methods 0.000 claims description 48
- 230000008859 change Effects 0.000 claims description 26
- 230000001681 protective effect Effects 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 12
- 230000001678 irradiating effect Effects 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 11
- 229910052733 gallium Inorganic materials 0.000 claims description 5
- 229910052738 indium Inorganic materials 0.000 claims description 5
- 230000002123 temporal effect Effects 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 239000000523 sample Substances 0.000 description 66
- 239000000969 carrier Substances 0.000 description 19
- 239000011521 glass Substances 0.000 description 14
- 238000000137 annealing Methods 0.000 description 13
- 230000000875 corresponding effect Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 12
- 230000007547 defect Effects 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 239000011701 zinc Substances 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000001131 transforming effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000005355 Hall effect Effects 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910020994 Sn-Zn Inorganic materials 0.000 description 1
- 229910009069 Sn—Zn Inorganic materials 0.000 description 1
- 229910007541 Zn O Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- YPHMISFOHDHNIV-FSZOTQKASA-N cycloheximide Chemical compound C1[C@@H](C)C[C@H](C)C(=O)[C@@H]1[C@H](O)CC1CC(=O)NC(=O)C1 YPHMISFOHDHNIV-FSZOTQKASA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
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- Thin Film Transistor (AREA)
Description
前記試料の測定部位に対して、マイクロ波を照射するマイクロ波照射手段と、
前記励起光の照射により変化する前記マイクロ波の前記試料からの反射マイクロ波強度を検出する反射マイクロ波強度検出手段と、
前記反射マイクロ波強度検出手段の検出データに基づいて前記試料の電気抵抗率を評価する手段と、
を備えることに要旨を有する。
本実施例では、マイクロ波光導電減衰法に基づいて算出される酸化物半導体薄膜、ここではInGaZnO、IGZOのパラメータと、シート抵抗値との相関関係を評価するため、以下の実験を行った。
まず、ガラス基板として直径100mm×厚さ0.7mmのコーニング社製EAGLE XGを用意した。ガラス基板の上に、下記条件で酸化物半導体薄膜であるIGZOをスパッタリング法で成膜した。本実施例では、酸化物半導体薄膜の膜質を変化させる目的で、スパッタリング時の酸素添加量を変化させた。
スパッタリング装置:(株)アルバック製「CS−200」
スパッタリングターゲットの組成:InGaZnO4[原子比でIn:Ga:Zn=1:1:1]
基板温度:室温
酸化物半導体層の膜厚:200nm
酸素添加量:O2/(Ar+O2)=体積比で0%、4%、8%、12%、16%、20%
ガス圧:1mTorr
パルス幅:15ns
パルスエネルギー:1μJ/pulse
ビーム径:1.5mmφ
1測定におけるパルス数=64ショット
装置:コベルコ科研社製LTA−1820SP
本実施例では、マイクロ波光導電減衰法に基づいて算出される酸化物半導体薄膜としてここではInGaZnO、IGZOのパラメータと、比抵抗値との相関関係を評価するため、以下の実験を行った。
まず、ガラス基板(コーニング社製EAGLE XG、直径100mm×厚さ0.7mm)の上に、下記条件で酸化物半導体薄膜としてIGZOをスパッタリング法で成膜した。スパッタリング装置:(株)アルバック製「SMD−450」スパッタリングターゲットの組成:InGaZnO4[原子比でIn:Ga:Zn=1:1:1]
基板温度:室温
酸化物半導体層の膜厚:40nm
酸素添加量:体積比でO2/(Ar+O2)=4%
ガス圧:1mTorr
上記マイクロ波光導電減衰法評価装置(コベルコ科研社製LTA−1820SP)に上記電気抵抗測定装置(三菱化学アナリテック社製ハイレスタ)を組み込んだ装置を用いて上記実施例2と同様してマイクロ波光導電減衰測定法によるB値解析を行うと共に、電気抵抗測定装置によって比抵抗の測定を行った。
3 マイクロ波照射手段
4 方向性結合器
4a 相位調整器
5 マジックT
6a 第1導波管
6b 第2導波管
6d、6e 開口部
7 反射マイクロ波強度検出手段
8 信号処理装置
9 評価手段
10 ステージコントローラ
11 X−Yステージ
12 光路変更手段
16a 出力調整用パワーモニター
16b 出力調整手段
20 試料
20a 基板
20b 酸化物半導体薄膜
21 励起光照射領域
30 電気抵抗率測定手段
31 電気抵抗率測定ヘッド
32 昇降手段
33 測定値送信ライン
Claims (11)
- 酸化物半導体薄膜が形成された試料に励起光及びマイクロ波を照射し、前記励起光の照射により変化する前記マイクロ波の前記酸化物半導体薄膜からの反射波の最大値を測定した後、前記励起光の照射を停止し、前記励起光の照射停止後の前記マイクロ波の前記酸化物半導体薄膜からの反射波の反射率の時間的な変化を測定する第1の工程と、
前記反射率の時間的な変化から、励起光の照射停止後に見られる遅い減衰に対応するパラメータを算出し、前記酸化物半導体薄膜の電気抵抗率を評価する第2の工程と、を含むことを特徴とする酸化物半導体薄膜の評価方法。 - 前記電気抵抗率はシート抵抗または比抵抗である請求項1に記載の評価方法。
- 前記第2の工程が、前記反射率の変化から、励起光の照射停止後0.1〜10μsに見られる遅い減衰に対応するパラメータを算出し、前記酸化物半導体薄膜の電気抵抗率を評価するものである請求項1または2に記載の評価方法。
- 前記酸化物半導体薄膜が、In、Ga、Zn、およびSnよりなる群から選択される少なくとも1種以上の元素を含むものである請求項1〜3のいずれかに記載の評価方法。
- 前記酸化物半導体薄膜が、ゲート絶縁膜の表面に成膜されているものである請求項1〜4のいずれかに記載の評価方法。
- 前記酸化物半導体薄膜が、その表面に保護膜を有しているものである請求項1〜5のいずれかに記載の評価方法。
- 前記酸化物半導体薄膜が、基板の上に形成されたものである請求項1〜6のいずれかに記載の評価方法。
- 前記酸化物半導体薄膜が、基板の表面に直接形成されたものである請求項1〜6のいずれかに記載の評価方法。
- 半導体製造工程のいずれかの工程に、請求項1〜8のいずれかに記載の評価方法を適用することを特徴とする酸化物半導体薄膜の品質管理方法。
- 請求項1〜8のいずれかに記載の酸化物半導体薄膜の評価方法に用いる装置であって、
酸化物半導体薄膜が形成された試料の測定部位に対して、励起光を照射して前記酸化物半導体薄膜中に電子−正孔対を生成する励起光照射手段と、
前記試料の測定部位に対して、マイクロ波を照射するマイクロ波照射手段と、
前記励起光の照射により変化する前記マイクロ波の前記試料からの反射マイクロ波強度を検出する反射マイクロ波強度検出手段と、
前記反射マイクロ波強度検出手段の検出データに基づいて前記試料の電気抵抗率を評価する手段と、
を備えることを特徴とする酸化物半導体薄膜の評価装置。 - 前記酸化物半導体薄膜の評価装置は、電気抵抗率測定ヘッドと、
前記電気抵抗率測定ヘッドの昇降手段と
を有する電気抵抗測定手段を備えている請求項10に記載の酸化物半導体薄膜の評価装置。
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JP2014104629A JP5798669B2 (ja) | 2013-12-03 | 2014-05-20 | 酸化物半導体薄膜の評価方法、及び酸化物半導体薄膜の品質管理方法、並びに上記評価方法に用いられる評価装置 |
KR1020167010141A KR101647618B1 (ko) | 2013-12-03 | 2014-12-01 | 산화물 반도체 박막의 평가 방법 및 산화물 반도체 박막의 품질 관리 방법, 및 상기 평가 방법에 사용되는 평가 소자 및 평가 장치 |
PCT/JP2014/081744 WO2015083666A1 (ja) | 2013-12-03 | 2014-12-01 | 酸化物半導体薄膜の評価方法、及び酸化物半導体薄膜の品質管理方法、並びに上記評価方法に用いられる評価素子及び評価装置 |
HUE14868640 HUE044851T2 (hu) | 2013-12-03 | 2014-12-01 | Eljárás oxid félvezetõ vékonyfilm értékelésére és az oxid félvezetõ vékonyfilm minõségének biztosítására |
EP14868640.5A EP3079165B1 (en) | 2013-12-03 | 2014-12-01 | Method for evaluating an oxide semiconductor thin film and for managing quality of the oxide semiconductor thin film |
CN201480057464.4A CN105659372A (zh) | 2013-12-03 | 2014-12-01 | 氧化物半导体薄膜的评价方法、和氧化物半导体薄膜的品质管理方法、以及用于所述评价方法的评价元件和评价装置 |
US15/031,990 US9816944B2 (en) | 2013-12-03 | 2014-12-01 | Method for evaluating oxide semiconductor thin film, method for managing quality of oxide semiconductor thin film, and evaluation element and evaluation device used in above evaluation method |
TW103141979A TWI569003B (zh) | 2013-12-03 | 2014-12-03 | Evaluation method of oxide semiconductor thin film and quality management method of oxide semiconductor thin film and evaluation element and evaluation device used in the above evaluation method |
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US (1) | US9816944B2 (ja) |
EP (1) | EP3079165B1 (ja) |
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CN (1) | CN105659372A (ja) |
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US20160005871A1 (en) * | 2014-07-04 | 2016-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5993496B2 (ja) * | 2014-07-16 | 2016-09-14 | 株式会社神戸製鋼所 | 酸化物半導体薄膜、及び前記酸化物半導体薄膜の表面に保護膜を有する積層体の品質評価方法、及び酸化物半導体薄膜の品質管理方法 |
KR102526654B1 (ko) | 2015-03-03 | 2023-04-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막, 상기 산화물 반도체막을 포함하는 반도체 장치, 및 상기 반도체 장치를 포함하는 표시 장치 |
EP3451369A4 (en) * | 2016-04-27 | 2020-01-29 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | METHOD FOR EVALUATING THE QUALITY OF AN OXIDE SEMICONDUCTOR THIN LAYER, METHOD FOR MANAGING THE QUALITY OF AN OXIDE SEMICONDUCTOR THIN LAYER, AND DEVICE FOR PRODUCING A SEMICONDUCTOR BY THIS METHOD |
JP6250855B1 (ja) * | 2016-04-27 | 2017-12-20 | 株式会社神戸製鋼所 | 酸化物半導体薄膜の品質評価方法、及び前記酸化物半導体薄膜の品質管理方法、並びに該品質評価方法を用いる半導体の製造装置 |
JP6957134B2 (ja) * | 2016-07-21 | 2021-11-02 | 株式会社半導体エネルギー研究所 | 酸化物半導体の評価方法 |
JP6957099B2 (ja) | 2017-09-05 | 2021-11-02 | 住友重機械工業株式会社 | レーザアニール装置及びシート抵抗算出装置 |
JP6922688B2 (ja) * | 2017-11-22 | 2021-08-18 | 信越半導体株式会社 | シリコン単結晶基板の選別方法及びシリコン単結晶基板 |
JP6922826B2 (ja) * | 2018-04-25 | 2021-08-18 | 信越半導体株式会社 | シリコン単結晶基板の選別方法 |
CN109030517A (zh) * | 2018-09-17 | 2018-12-18 | 南京航空航天大学 | 微波加热过程中材料反射率/透射率实时测量装置与方法 |
JP7145826B2 (ja) * | 2019-08-27 | 2022-10-03 | 三菱電機株式会社 | Seb耐性評価方法およびseb耐性評価装置 |
CN113990845B (zh) * | 2021-12-28 | 2022-03-18 | 广州粤芯半导体技术有限公司 | 检测结构及其制备方法、膜层内空洞的检测方法 |
KR20230117004A (ko) * | 2022-01-28 | 2023-08-07 | 연세대학교 산학협력단 | 공정 모니터링 방법 및 장치 |
KR102604572B1 (ko) * | 2022-04-20 | 2023-11-21 | (주) 엔지온 | 검출 유니트, 반도체 필름층 검사 장치 및 이를 이용하는 반도체 필름층 검사 방법 |
US12000866B2 (en) | 2022-04-20 | 2024-06-04 | Envigth Co., Ltd. | Detection unit, semiconductor film layer inspection apparatus including the same, and semiconductor film layer inspection method using the same |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2648098B2 (ja) * | 1994-07-29 | 1997-08-27 | 日本電気株式会社 | 薄膜形成装置 |
HU227170B1 (en) * | 2000-02-17 | 2010-09-28 | Semilab Felvezetoe Fiz Lab Rt | Surface passivation method and arrangement for measuring life time of minority carrier of semiconductors |
JP4476462B2 (ja) * | 2000-03-27 | 2010-06-09 | 株式会社栃木ニコン | 半導体の電気特性評価装置 |
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US20030186059A1 (en) * | 2002-02-08 | 2003-10-02 | Masukazu Hirata | Structure matter of thin film particles having carbon skeleton, processes for the production of the structure matter and the thin-film particles and uses thereof |
WO2005098961A1 (ja) * | 2004-04-09 | 2005-10-20 | Tokyo Electron Limited | ゲート絶縁膜の形成方法、記憶媒体、及びコンピュータプログラム |
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JP5389586B2 (ja) * | 2009-09-24 | 2014-01-15 | 株式会社神戸製鋼所 | 半導体薄膜の結晶性評価方法及び結晶性評価装置 |
KR101322591B1 (ko) | 2009-10-06 | 2013-10-28 | 가부시키가이샤 코베루코 카겐 | 반도체 캐리어 수명 측정 장치 및 그 방법 |
CN102313849B (zh) | 2010-06-30 | 2014-08-06 | 株式会社神户制钢所 | 氧化物半导体薄膜的评价方法及氧化物半导体薄膜的质量管理方法 |
JP5814558B2 (ja) | 2010-06-30 | 2015-11-17 | 株式会社神戸製鋼所 | 酸化物半導体薄膜の評価方法、及び酸化物半導体薄膜の品質管理方法 |
JP5350345B2 (ja) | 2010-09-22 | 2013-11-27 | 株式会社神戸製鋼所 | 薄膜半導体の結晶性評価装置および方法 |
US8704224B2 (en) * | 2011-09-23 | 2014-04-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor test structures |
JP6204036B2 (ja) | 2012-03-16 | 2017-09-27 | 株式会社神戸製鋼所 | 酸化物半導体薄膜の評価方法、及び酸化物半導体薄膜の品質管理方法 |
JP6152348B2 (ja) | 2013-01-11 | 2017-06-21 | 株式会社神戸製鋼所 | 酸化物半導体薄膜の評価方法及び酸化物半導体薄膜の品質管理方法 |
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- 2014-12-01 WO PCT/JP2014/081744 patent/WO2015083666A1/ja active Application Filing
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EP3079165A1 (en) | 2016-10-12 |
KR101647618B1 (ko) | 2016-08-10 |
CN105659372A (zh) | 2016-06-08 |
US20160282284A1 (en) | 2016-09-29 |
WO2015083666A1 (ja) | 2015-06-11 |
EP3079165B1 (en) | 2019-07-03 |
KR20160052742A (ko) | 2016-05-12 |
TW201534892A (zh) | 2015-09-16 |
US9816944B2 (en) | 2017-11-14 |
TWI569003B (zh) | 2017-02-01 |
EP3079165A4 (en) | 2017-07-26 |
HUE044851T2 (hu) | 2019-11-28 |
JP2015130477A (ja) | 2015-07-16 |
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