JP5796237B2 - フェノール系分子性ガラス、およびフェノール系分子ガラスを含むフォトレジスト組成物、および基板上にレジスト像を発生させるための方法 - Google Patents
フェノール系分子性ガラス、およびフェノール系分子ガラスを含むフォトレジスト組成物、および基板上にレジスト像を発生させるための方法 Download PDFInfo
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- JP5796237B2 JP5796237B2 JP2013543609A JP2013543609A JP5796237B2 JP 5796237 B2 JP5796237 B2 JP 5796237B2 JP 2013543609 A JP2013543609 A JP 2013543609A JP 2013543609 A JP2013543609 A JP 2013543609A JP 5796237 B2 JP5796237 B2 JP 5796237B2
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- group
- substituted
- alkyl
- fluoroalcohol
- molecular glass
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- 0 *C(c(c(O*)c1*)c(*)c(C(*)c(c(O*)c2*)c(*)c(C(c(c(O*)c3*)c(*)c(C(c(c(O*)c4*)c5*)I)c3O*)I)c2O*)c1O*)c5c4O* Chemical compound *C(c(c(O*)c1*)c(*)c(C(*)c(c(O*)c2*)c(*)c(C(c(c(O*)c3*)c(*)c(C(c(c(O*)c4*)c5*)I)c3O*)I)c2O*)c1O*)c5c4O* 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
- C07C39/24—Halogenated derivatives
- C07C39/42—Halogenated derivatives containing six-membered aromatic rings and other rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
- C07C69/96—Esters of carbonic or haloformic acids
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0381—Macromolecular compounds which are rendered insoluble or differentially wettable using a combination of a phenolic resin and a polyoxyethylene resin
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2603/00—Systems containing at least three condensed rings
- C07C2603/92—Systems containing at least three condensed rings with a condensed ring system consisting of at least two mutually uncondensed aromatic ring systems, linked by an annular structure formed by carbon chains on non-adjacent positions of the aromatic system, e.g. cyclophanes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
である。
を含む。
を有する酸に不安定な官能基である。
[式中、R1は、直鎖または分枝アルキレン基、置換または非置換脂環式基、置換または非置換アリーレン基、置換または非置換ヘテロアリーレン基、置換または非置換複素環式基であり、R2およびR3は、それぞれ独立に、フッ素化アルキル基であり、ここで、該フッ素化アルキル基は、同じであっても異なっていてもよい]
のものである。
[式中、mは0から4であり、nは0または1であり、かつR4はCR5R6R7またはSiR8R9R10であり、ここで、R5、R6およびR7は、独立に、水素、アルキル、アルコキシ、アリールもしくはアリールオキシであり、典型的には、水素、低級アルキルもしくは低級アルコキシであるか、または連結してシクロアルキルもしくはシクロオキシアルキル環、典型的には5から12員環を形成し、かつ、R8、R9およびR10は、同じであるかまたは異なっており、それぞれアルキル置換基、典型的には低級アルキル置換基である]
を有する部分を含むがこれらに限定されない。
1H-NMR (DMSO-d6): (ppm) 5.62 (s, CH, 4H),6.16 (s, ArH, 4H), 6.21 (広幅なs, ArH, 2H), 6.69 (広幅なs, ArH, 2H), 6.81 (d, ArH,8H), 7.39 (d, ArH, 8H), 8.38 (s, HFA-OH, 4H), 8.74 (d, Ar-OH, 8H).
1H-NMR (DMSO-d6): (ppm) 1.14 (s, CH3, 36H),1.42 (s, CH3, 36H), 5.56 (s, CH, 4H), 6.33 (s, ArH, 4H), 6.78 (広幅なs, ArH,8H), 7.07 (d, ArH, 2H), 7.12 (d,ArH, 2H), 7.25 (d, ArH, 8H), 8.6 (s, HFA-OH, 4H).
多分散性:1.02。
Claims (9)
- 少なくとも1つのフルオロアルコール含有ユニットを有する、フェノール系分子性ガラスであって、該フェノール系分子性ガラスが、下記構造式(I)のカリックス[4]レソルシナレン:
であり、
前記少なくとも1つのフルオロアルコール含有ユニットが、構造式(II):
であり、
前記Rが、構造式(III):
を有する酸に不安定な官能基である、フェノール系分子性ガラス。 - 少なくとも1つのフルオロアルコール含有ユニットを有する、フェノール系分子性ガラスを含むフォトレジスト組成物であって、該フェノール系分子性ガラスが、下記構造式(I)のカリックス[4]レソルシナレン:
であり、
前記少なくとも1つのフルオロアルコール含有ユニットが、構造式(II):
であって、
前記Rが、構造式(III):
を有する酸に不安定な官能基である、フォトレジスト組成物。 - 前記フォトレジスト組成物が、架橋剤を含む、請求項2に記載のフォトレジスト組成物。
- 顔料、増感剤、防腐剤、酸拡散制御剤、接着促進剤、コーティング助剤、可塑剤、表面改質剤または溶解抑制剤あるいはその組合せをさらに含む、請求項2に記載のフォトレジスト組成物。
- 基板上にレジスト像を発生させるための方法であって、
少なくとも1つのフルオロアルコール官能基を有するフェノール系分子性ガラス、光酸発生剤および溶媒を含むフォトレジスト組成物を含むフィルムで、基板をコーティングするステップと、
前記フィルムを放射線に像様暴露して、その中に潜像を形成するステップと、
前記レジスト像を塩基水溶液の現像液で現像するステップと
を含み、
該フェノール系分子性ガラスが、下記構造式(I)のカリックス[4]レソルシナレン:
であり、前記少なくとも1つのフルオロアルコール含有ユニットが、構造式(II):
であって、
前記Rが、構造式(III):
- 前記フォトレジスト組成物が、架橋剤を含む、請求項5に記載の方法。
- 前記フィルムを放射線に像様暴露するステップの後、かつ現像するステップの前に、前記フィルムを25℃から150℃の範囲内の温度に加熱する、請求項5に記載の方法。
- 前記放射線が、紫外線放射、X線、EUVまたは電子ビームである、請求項5に記載の方法。
- 顔料、増感剤、防腐剤、酸拡散制御剤、接着促進剤、コーティング助剤、可塑剤、表面改質剤または溶解抑制剤あるいはその組合せをさらに含む、請求項5に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/971,292 US8530136B2 (en) | 2010-12-17 | 2010-12-17 | Fluoroalcohol containing molecular photoresist materials and processes of use |
US12/971,292 | 2010-12-17 | ||
PCT/EP2011/070579 WO2012079919A1 (en) | 2010-12-17 | 2011-11-21 | Fluoroalcohol containing molecular photoresist materials and processes of use |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014502646A JP2014502646A (ja) | 2014-02-03 |
JP2014502646A5 JP2014502646A5 (ja) | 2014-08-14 |
JP5796237B2 true JP5796237B2 (ja) | 2015-10-21 |
Family
ID=45047757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013543609A Expired - Fee Related JP5796237B2 (ja) | 2010-12-17 | 2011-11-21 | フェノール系分子性ガラス、およびフェノール系分子ガラスを含むフォトレジスト組成物、および基板上にレジスト像を発生させるための方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8530136B2 (ja) |
EP (1) | EP2651865B1 (ja) |
JP (1) | JP5796237B2 (ja) |
KR (1) | KR101531773B1 (ja) |
CN (1) | CN103261137A (ja) |
TW (1) | TWI598683B (ja) |
WO (1) | WO2012079919A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102648173A (zh) * | 2009-10-06 | 2012-08-22 | 三菱瓦斯化学株式会社 | 环状化合物、其生产方法、放射线敏感性组合物和抗蚀图案的形成方法 |
EP2505576B1 (en) * | 2009-11-27 | 2019-04-24 | Mitsubishi Gas Chemical Company, Inc. | Cyclic compound, process for production thereof, radiation-sensitive composition, and resist pattern formation method |
CN103752208A (zh) * | 2014-01-28 | 2014-04-30 | 扬州大学 | 一种起泡剂和稳泡剂及其合成方法 |
CN107533288B (zh) | 2015-05-28 | 2021-10-19 | 英特尔公司 | 用于解耦合光致抗蚀剂的扩散和溶解性切换机制的手段 |
WO2019021758A1 (ja) * | 2017-07-27 | 2019-01-31 | Dic株式会社 | レジスト材料 |
CN108363275A (zh) * | 2018-02-07 | 2018-08-03 | 江苏艾森半导体材料股份有限公司 | 一种用于oled阵列制造的正性光刻胶 |
CN108897192B (zh) * | 2018-04-19 | 2022-04-05 | 中科院广州化学有限公司南雄材料生产基地 | 一种巯基-烯纳米压印光刻胶及其使用方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4189323A (en) | 1977-04-25 | 1980-02-19 | Hoechst Aktiengesellschaft | Radiation-sensitive copying composition |
EP0058638B1 (de) | 1981-02-13 | 1985-08-28 | Ciba-Geigy Ag | Härtbare Zusammensetzung auf Basis eines säurehärtbaren Harzes und Verfahren zu dessen Härtung |
JPH01293339A (ja) | 1988-05-23 | 1989-11-27 | Tosoh Corp | フォトレジスト組成物 |
JP3116751B2 (ja) | 1993-12-03 | 2000-12-11 | ジェイエスアール株式会社 | 感放射線性樹脂組成物 |
JP3486341B2 (ja) | 1997-09-18 | 2004-01-13 | 株式会社東芝 | 感光性組成物およびそれを用いたパターン形成法 |
JPH11217385A (ja) * | 1998-01-30 | 1999-08-10 | Nihon Schering Kk | 含フッ素ポルフィリン錯体およびそれを含有する造影剤 |
US6093517A (en) | 1998-07-31 | 2000-07-25 | International Business Machines Corporation | Calixarenes for use as dissolution inhibitors in lithographic photoresist compositions |
US6713225B2 (en) | 2002-03-15 | 2004-03-30 | Toyo Gosei Kogyo Co., Ltd. | 1,2-Naphthoquinone-2-diazidesulfonate ester photosensitive agent, method for producing the photosensitive agent, and photoresist composition |
JP2006208765A (ja) * | 2005-01-28 | 2006-08-10 | Matsushita Electric Ind Co Ltd | レジスト材料及びそれを用いたパターン形成方法 |
JP5111106B2 (ja) | 2005-06-01 | 2012-12-26 | 博雄 木下 | カリックスレゾルシナレン化合物、並びに、それからなるフォトレジスト基材及びその組成物 |
US7781157B2 (en) | 2006-07-28 | 2010-08-24 | International Business Machines Corporation | Method for using compositions containing fluorocarbinols in lithographic processes |
KR101588903B1 (ko) | 2006-11-02 | 2016-01-26 | 미츠비시 가스 가가쿠 가부시키가이샤 | 감방사선성 조성물 |
WO2009143357A2 (en) | 2008-05-23 | 2009-11-26 | Cornell University | Orthogonal processing of organic materials used in electronic and electrical devices |
-
2010
- 2010-12-17 US US12/971,292 patent/US8530136B2/en not_active Expired - Fee Related
-
2011
- 2011-11-10 TW TW100141116A patent/TWI598683B/zh active
- 2011-11-21 WO PCT/EP2011/070579 patent/WO2012079919A1/en active Application Filing
- 2011-11-21 JP JP2013543609A patent/JP5796237B2/ja not_active Expired - Fee Related
- 2011-11-21 KR KR1020137012373A patent/KR101531773B1/ko not_active IP Right Cessation
- 2011-11-21 CN CN2011800601309A patent/CN103261137A/zh active Pending
- 2011-11-21 EP EP11788423.9A patent/EP2651865B1/en not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
JP2014502646A (ja) | 2014-02-03 |
KR101531773B1 (ko) | 2015-06-25 |
KR20130122634A (ko) | 2013-11-07 |
TW201234104A (en) | 2012-08-16 |
EP2651865B1 (en) | 2017-07-12 |
US8530136B2 (en) | 2013-09-10 |
EP2651865A1 (en) | 2013-10-23 |
CN103261137A (zh) | 2013-08-21 |
TWI598683B (zh) | 2017-09-11 |
WO2012079919A1 (en) | 2012-06-21 |
US20120156611A1 (en) | 2012-06-21 |
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