JP5790759B2 - 強誘電体薄膜およびその製造方法 - Google Patents
強誘電体薄膜およびその製造方法 Download PDFInfo
- Publication number
- JP5790759B2 JP5790759B2 JP2013504613A JP2013504613A JP5790759B2 JP 5790759 B2 JP5790759 B2 JP 5790759B2 JP 2013504613 A JP2013504613 A JP 2013504613A JP 2013504613 A JP2013504613 A JP 2013504613A JP 5790759 B2 JP5790759 B2 JP 5790759B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- thin film
- ferroelectric thin
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010409 thin film Substances 0.000 title claims description 96
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000010408 film Substances 0.000 claims description 143
- 238000002156 mixing Methods 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 53
- 238000000034 method Methods 0.000 claims description 37
- 230000008569 process Effects 0.000 claims description 20
- 239000003989 dielectric material Substances 0.000 claims description 12
- 239000013077 target material Substances 0.000 claims description 10
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 5
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000013329 compounding Methods 0.000 description 28
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 28
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 28
- 239000000654 additive Substances 0.000 description 24
- 230000000996 additive effect Effects 0.000 description 22
- 230000015572 biosynthetic process Effects 0.000 description 19
- 239000013078 crystal Substances 0.000 description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 230000001747 exhibiting effect Effects 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910052746 lanthanum Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 229910052726 zirconium Inorganic materials 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 229910052745 lead Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910003087 TiOx Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 description 2
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 241000907681 Morpho Species 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- BQJCRHHNABKAKU-KBQPJGBKSA-N morphine Chemical compound O([C@H]1[C@H](C=C[C@H]23)O)C4=C5[C@@]12CCN(C)[C@@H]3CC5=CC=C4O BQJCRHHNABKAKU-KBQPJGBKSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/088—Oxides of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/025—Epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
- C30B29/32—Titanates; Germanates; Molybdates; Tungstates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02197—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides the material having a perovskite structure, e.g. BaTiO3
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02266—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
- Y10T428/12812—Diverse refractory group metal-base components: alternative to or next to each other
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Description
図4に実施例1の成膜フローを示す。実施例1は、基板がシリコン基板であり、添加物がLaであって、PZTにLaを添加した複合酸化物であるPLZT薄膜を成膜している。また、それぞれZr配合割合が異なる二種類のPLZTターゲットを用いて、積層方向に、Zrの配合割合が小さい第一層とZrの配合割合が大きな第二層を積層する圧電体膜成膜工程を備える構成としている。
図6に実施例2の成膜フローを示す。実施例2は、基板がシリコン基板であり、添加物がLaであって、PZTにLaを添加した複合酸化物であるPLZT薄膜を成膜している。また、それぞれZr配合割合が異なる二種類のPLZTターゲットを用いて、積層方向に、Zrの配合割合が小さい第一層とZrの配合割合が大きな第二層を積層する圧電体膜成膜工程を備える構成としていることは実施例1と同じである。ただし、本実施形態の圧電体膜成膜工程は、順次成膜工程ではなく、繰り返し成膜工程であることが相違している。
図8Aは、本実施形態で作製した強誘電体薄膜を備えた圧電デバイス20をダイヤフラム(振動板)に応用したときの構成を示す平面図であり、図8Bは、図8AのVIIIB−VIIIB断面図である。強誘電体薄膜L4(圧電体膜)は、基板B1の必要な領域に、2次元の千鳥状に配置されている。基板B1において強誘電体薄膜L4の形成領域に対応する領域は、厚さ方向の一部が断面円形で除去された凹部B1aとなっており、基板B1における凹部B1aの上部(凹部B1aの底部側)には、薄い板状の領域B1bが残っている。下部電極層D1および上部電極層D2は、図示しない配線により、外部の制御回路と接続されている。
以上、添加物としてLaを用いたPLZTについて説明したが、本発明は、Laに限らず、圧電特性を発揮可能なその他の添加物を用いることができる。例えば、ABO3構成のペロブスカイト構造におけるAサイトには、置換される添加物であって、Ba、La、Sr、Bi、Li、Na、Ca、Cd、Mg、Kの群から選ばれた少なくとも1種の金属材料を用いることができる。また、Bサイトには、V、Nb、Ta、Cr、Mo、W、Mn、Sc、Co、Cu、In、Sn、Ga、Cd、Fe、Niの群から選ばれた少なくとも1種の金属材料を用いることができる。また、AサイトとBサイトの両方に添加物が含まれていてもよい。
L1 熱酸化膜
D1 下部電極層
D2 上部電極層
L4 強誘電体薄膜(圧電体膜)
L4A 強誘電体薄膜(順次成膜工程による)
L4B 強誘電体薄膜(繰り返し成膜工程による)
S3 第一圧電体膜成膜(順次成膜工程)
S4 第二圧電体膜成膜(順次成膜工程)
S16 繰り返し成膜工程
10 成膜装置
Claims (4)
- Si基板上にSiO 2 膜、Ti膜、Pt膜、をこの順に設け、当該Pt膜上にペロブスカイト構造の誘電体材料を成膜した強誘電体薄膜であって、
前記薄膜は、Zr/Ti比の異なる層を備え、前記Pt膜上にZrの配合割合が小さい第一層を有し、この第一層の上にZrの配合割合が大きな第二層を有し、
前記第一層と前記第二層は、何れもLaを配合濃度7〜8%で含み、(100)もしくは(111)に主配向したPLZT膜であり、
前記第一層のZr/Ti比において、Zrの配合割合は53%以下であることを特徴とする強誘電体薄膜。 - 前記薄膜は、前記第二層の上に、前記第一層及び前記第二層で構成される積層構造と同等の積層構造を有することを特徴とする請求項1に記載の強誘電体薄膜。
- 前記薄膜の全厚みを3〜5μmとしたことを特徴とする請求項1または2に記載の強誘電体薄膜。
- 請求項1から3のいずれかに記載された強誘電体薄膜の製造方法であって、誘電体材料をターゲット材にして前記Pt膜上に成膜するスパッタ方式の成膜装置を用いると共に、前記ターゲット材として、それぞれ異なる所定のZr/Ti比のターゲット材を用いて、前記Pt膜上に前記第一層を形成し、当該第一層の上に前記第二層を形成する圧電体膜成膜工程を有することを特徴とする強誘電体薄膜の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013504613A JP5790759B2 (ja) | 2011-03-15 | 2012-02-08 | 強誘電体薄膜およびその製造方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011056081 | 2011-03-15 | ||
JP2011056081 | 2011-03-15 | ||
PCT/JP2012/052805 WO2012124409A1 (ja) | 2011-03-15 | 2012-02-08 | 強誘電体薄膜およびその製造方法 |
JP2013504613A JP5790759B2 (ja) | 2011-03-15 | 2012-02-08 | 強誘電体薄膜およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012124409A1 JPWO2012124409A1 (ja) | 2014-07-17 |
JP5790759B2 true JP5790759B2 (ja) | 2015-10-07 |
Family
ID=46830487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013504613A Active JP5790759B2 (ja) | 2011-03-15 | 2012-02-08 | 強誘電体薄膜およびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9246080B2 (ja) |
EP (1) | EP2688116B1 (ja) |
JP (1) | JP5790759B2 (ja) |
WO (1) | WO2012124409A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015017703A2 (en) * | 2013-08-01 | 2015-02-05 | The Regents Of The University Of California | Pyroelectric aluminum nitride mems infrared sensor with selective wavelength infrared absorber |
WO2015125520A1 (ja) * | 2014-02-19 | 2015-08-27 | コニカミノルタ株式会社 | 強誘電体薄膜、圧電薄膜付き基板、圧電アクチュエータ、インクジェットヘッド、インクジェットプリンタおよび強誘電体薄膜の製造方法 |
JP6596634B2 (ja) * | 2014-10-23 | 2019-10-30 | アドバンストマテリアルテクノロジーズ株式会社 | 強誘電体セラミックス、電子部品及び強誘電体セラミックスの製造方法 |
JP6613596B2 (ja) * | 2015-04-06 | 2019-12-04 | セイコーエプソン株式会社 | 圧電素子、これを備えた液体吐出ヘッド、及び、液体吐出装置 |
JP6392469B2 (ja) | 2015-11-16 | 2018-09-19 | 富士フイルム株式会社 | 圧電体膜、圧電素子、および液体吐出装置 |
JP6632450B2 (ja) * | 2016-03-30 | 2020-01-22 | 日本碍子株式会社 | 圧電素子 |
DE112017003384B4 (de) | 2016-08-31 | 2020-02-20 | Fujifilm Corporation | Piezoelektrischer Film und piezoelektrisches Element mit einem solchen Film |
CN109722631B (zh) * | 2019-01-24 | 2019-12-17 | 中国地质大学(武汉) | 基于TiN衬底的NiFe磁性合金薄膜及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002009358A (ja) * | 2000-06-21 | 2002-01-11 | Canon Inc | 圧電素子構造および液体噴射記録ヘッドとその製造方法 |
JP2004063750A (ja) * | 2002-07-29 | 2004-02-26 | Murata Mfg Co Ltd | 配向性強誘電体薄膜素子 |
JP2007335779A (ja) * | 2006-06-19 | 2007-12-27 | Matsushita Electric Ind Co Ltd | 圧電体薄膜素子、インクジェットヘッドおよびインクジェット式記録装置 |
JP2008004781A (ja) * | 2006-06-23 | 2008-01-10 | Fujifilm Corp | 圧電膜、圧電素子、インクジェット式記録ヘッド、及びインクジェット式記録装置 |
JP2010214800A (ja) * | 2009-03-17 | 2010-09-30 | Seiko Epson Corp | 液体噴射ヘッドの製造方法、圧電素子の製造方法 |
JP2010219079A (ja) * | 2009-03-13 | 2010-09-30 | Mitsubishi Materials Corp | 強誘電体薄膜形成用組成物、強誘電体薄膜の形成方法並びに該方法により形成された強誘電体薄膜 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06290983A (ja) | 1993-04-06 | 1994-10-18 | Matsushita Electric Ind Co Ltd | 誘電体薄膜及びその製造方法 |
US20020186948A1 (en) * | 2001-06-12 | 2002-12-12 | Michael Bazylenko | Electro-optic waveguide structure |
JP3903056B2 (ja) * | 2005-06-20 | 2007-04-11 | キヤノン株式会社 | 圧電素子の製造方法および液体噴射記録ヘッドの製造方法 |
JP5158299B2 (ja) | 2005-08-05 | 2013-03-06 | セイコーエプソン株式会社 | 圧電素子、アクチュエータ装置、液体噴射ヘッド、液体噴射装置及び圧電素子の製造方法 |
JP2006303519A (ja) * | 2006-05-30 | 2006-11-02 | Canon Inc | 液体噴射記録ヘッドおよびその製造方法 |
WO2009145272A1 (ja) | 2008-05-28 | 2009-12-03 | 三菱マテリアル株式会社 | 強誘電体薄膜形成用組成物、強誘電体薄膜の形成方法並びに該方法により形成された強誘電体薄膜 |
US20110081137A1 (en) * | 2009-10-06 | 2011-04-07 | Advantest Corporation | Manufacturing equipment and manufacturing method |
EP2846370B1 (en) * | 2012-05-01 | 2016-07-06 | Konica Minolta, Inc. | Piezoelectric element |
-
2012
- 2012-02-08 JP JP2013504613A patent/JP5790759B2/ja active Active
- 2012-02-08 US US14/005,200 patent/US9246080B2/en active Active
- 2012-02-08 WO PCT/JP2012/052805 patent/WO2012124409A1/ja active Application Filing
- 2012-02-08 EP EP12758057.9A patent/EP2688116B1/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002009358A (ja) * | 2000-06-21 | 2002-01-11 | Canon Inc | 圧電素子構造および液体噴射記録ヘッドとその製造方法 |
JP2004063750A (ja) * | 2002-07-29 | 2004-02-26 | Murata Mfg Co Ltd | 配向性強誘電体薄膜素子 |
JP2007335779A (ja) * | 2006-06-19 | 2007-12-27 | Matsushita Electric Ind Co Ltd | 圧電体薄膜素子、インクジェットヘッドおよびインクジェット式記録装置 |
JP2008004781A (ja) * | 2006-06-23 | 2008-01-10 | Fujifilm Corp | 圧電膜、圧電素子、インクジェット式記録ヘッド、及びインクジェット式記録装置 |
JP2010219079A (ja) * | 2009-03-13 | 2010-09-30 | Mitsubishi Materials Corp | 強誘電体薄膜形成用組成物、強誘電体薄膜の形成方法並びに該方法により形成された強誘電体薄膜 |
JP2010214800A (ja) * | 2009-03-17 | 2010-09-30 | Seiko Epson Corp | 液体噴射ヘッドの製造方法、圧電素子の製造方法 |
Non-Patent Citations (1)
Title |
---|
JPN6014042677; Wasa, Kiyotaka, et al.: '"Effects of PLT-buffer layer on microstructures of sputtered PLZT thin films epitaxially grown on sa' Journal of Materials Research Vol. 9, No. 11, 199411, pp. 2959-2967 * |
Also Published As
Publication number | Publication date |
---|---|
US9246080B2 (en) | 2016-01-26 |
EP2688116B1 (en) | 2016-06-08 |
EP2688116A4 (en) | 2015-01-14 |
WO2012124409A1 (ja) | 2012-09-20 |
JPWO2012124409A1 (ja) | 2014-07-17 |
EP2688116A1 (en) | 2014-01-22 |
US20140004379A1 (en) | 2014-01-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5790759B2 (ja) | 強誘電体薄膜およびその製造方法 | |
EP2846370B1 (en) | Piezoelectric element | |
JP5471612B2 (ja) | 圧電性薄膜素子の製造方法及び圧電薄膜デバイスの製造方法 | |
JP5035378B2 (ja) | 圧電薄膜素子及びその製造方法、並びに圧電薄膜デバイス | |
JP5836754B2 (ja) | 圧電体素子及びその製造方法 | |
JP5599185B2 (ja) | 圧電材料および圧電素子 | |
JP6176942B2 (ja) | 圧電素子、液体吐出ヘッドおよび液体吐出装置 | |
US8310135B2 (en) | Piezoelectric thin film element and piezoelectric thin film device including the same | |
WO2012005032A1 (ja) | 圧電膜素子および圧電膜デバイス | |
JP2011181764A (ja) | 圧電体素子及びその製造方法 | |
JP4998652B2 (ja) | 強誘電体薄膜、強誘電体薄膜の製造方法、圧電体素子の製造方法 | |
JP5728890B2 (ja) | 圧電素子およびその製造方法 | |
WO2020250591A1 (ja) | 圧電素子 | |
WO2012165110A1 (ja) | 強誘電体膜およびそれを備えた圧電素子 | |
JP6850870B2 (ja) | 圧電体膜、圧電素子、及び、圧電素子の製造方法 | |
CN104628380A (zh) | 压电组合物和压电元件 | |
WO2017002341A1 (ja) | 積層薄膜構造体の製造方法、積層薄膜構造体及びそれを備えた圧電素子 | |
WO2017018078A1 (ja) | スパッタリング装置及び絶縁膜の製造方法 | |
JP2010135669A (ja) | 薄膜圧電体付き基板、薄膜圧電体素子、薄膜圧電体デバイスおよび薄膜圧電体付き基板の製造方法 | |
JPWO2017018222A1 (ja) | 圧電体膜及びその製造方法、バイモルフ素子、圧電体素子及びその製造方法 | |
JP2008305821A (ja) | 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、およびインクジェット式記録装置 | |
WO2013058064A1 (ja) | 圧電素子およびその製造方法 | |
WO2018042946A1 (ja) | 圧電体膜及びそれを備えた圧電素子 | |
WO2022024529A1 (ja) | 圧電膜付き基板及び圧電素子 | |
JP2002359287A (ja) | 薄膜素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141007 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141202 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20141202 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20150303 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150602 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20150609 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150707 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150720 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5790759 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |