JP5724014B1 - 基板支持装置及び基板処理装置 - Google Patents
基板支持装置及び基板処理装置 Download PDFInfo
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- JP5724014B1 JP5724014B1 JP2014088157A JP2014088157A JP5724014B1 JP 5724014 B1 JP5724014 B1 JP 5724014B1 JP 2014088157 A JP2014088157 A JP 2014088157A JP 2014088157 A JP2014088157 A JP 2014088157A JP 5724014 B1 JP5724014 B1 JP 5724014B1
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- 239000000758 substrate Substances 0.000 title claims abstract description 178
- 238000010438 heat treatment Methods 0.000 claims abstract description 27
- 238000001035 drying Methods 0.000 claims description 7
- 239000011521 glass Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 229920006015 heat resistant resin Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Solid Materials (AREA)
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Abstract
Description
すなわち、本発明においては、前記揺動手段及び制御手段により、被処理基板の加熱等処理中、前記基板が、その下面がホットプレートに固定された各支持ピンの上端部に接触している状態のまま、前記基板の下面と平行な方向において2次元的に、前記基板が前記ホットプレートの加熱面に対向する位置に存在する範囲内で(前記基板が前記ホットプレートからの加熱作用が及ぶ範囲の外側に移動しない範囲内で)、前記各支持ピンからの熱が前記基板の特定箇所に集中しないように、常に前記基板の下面の特定箇所が前記各支持ピンの上端部に接触した状態のまま固定的に位置しないように揺動するように、前記基板を揺動させるようにしている。よって、本発明によれば、各支持ピンからの熱が例えば数秒などの短い時間でも被処理基板の下面の所定箇所に集中的に加えられてしまうことを避けることができ、その結果、加熱等処理された基板にピン跡が発生してしまうことをほぼ完全に防止することができるようになる。
以下、本発明の実施形態1を図面を参照して説明する。図1は、本発明の一実施形態の概念を説明するための模式図で、(a)は従来方式とその問題点を示す図、(b)は本実施形態1を示す図である。
次に本発明の実施形態2による基板支持装置を図4を参照して説明する。本実施形態2の構成は前記実施形態1と基本的に同一であるので、以下では異なる部分についてのみ説明する。図4は本実施形態2に係る基板支持装置に使用される支持ピン12を示す側面図である。図4において、12bはホットプレート1から基板10方向に突出する略円柱状のピン本体、12aは前記ピン本体12bの上端に配置された略半球状の低摩擦上端部、12cは前記ピン本体12bの図示下方に形成された略円柱状の基部、12dは前記基部12cの外周面に形成された雄ネジである。前記略半球状の低摩擦上端部12aは、例えば耐熱樹脂の表面を摩擦係数が極めて小さくなるように研磨等することにより形成されている。
次に本発明の実施形態3を図5を参照して説明する。図5において、21はホットプレート、21aは前記ホットプレート21の上面側の複数箇所にそれぞれ形成された溝部、22は支持ピン、22aは支持ピンの上端に設けられたボール状ローラー(前記実施形態1のボール状ローラー2aと同様のもの)である。また23は、前記複数の支持ピン22をそれらが互いに所定間隔を介して略直線状に並ぶように配置し固定した、細長い棒状のピン保持体である。
2,12,22 支持ピン
2a,22a ボール状ローラー
2b,12b ピン本体
2c,12c 基部
2d,12d 雄ネジ
4 アーム
5 モーター
6 制御部
7 リフトピン
10 被処理基板
12a 低摩擦上端部
21a 溝部
23 ピン保持体
Claims (5)
- 被処理基板の加熱等処理中に、ホットプレートの上方に配置された被処理基板を支持する基板支持装置であって、
前記基板の下面の中の複数の箇所に自らの各上端部がそれぞれ当接することにより前記基板を支持する複数の支持ピンであって、前記ホットプレートから前記基板の方向に突出するように、前記ホットプレートにそれぞれ固定されている複数の支持ピンと、
前記複数の支持ピンにより支持されている前記基板を、前記基板の端部を把持し前記基板の端部を介して揺動させる揺動手段であって、前記基板が前記基板の下面と平行な方向に2次元的に移動するように、且つ前記基板が前記ホットプレートからの加熱作用が及ぶ範囲内で移動するように、前記基板を揺動させる揺動手段と
前記基板の加熱等処理中に、「前記複数の支持ピンの各上端部がそれぞれ前記基板の下面の同じ場所に当接したままの状態が継続すること」がないように、前記基板が揺動するように、前記揺動手段を制御する制御手段と、
を備えた基板支持装置。 - 前記支持ピンの上端に、前記支持ピンの本体に対して回転可能なボール状ローラーが備えられている、請求項1に記載の基板支持装置。
- 前記のそれぞれがボール状ローラーを備えた複数の支持ピンが互いに所定間隔を介して略直線状に並ぶように配置されて成る、複数の細長い略棒状のピン保持体と、
前記ホットプレートの上面に形成された複数の溝部であって、前記各ピン保持体がそれぞれ挿入及び取外し可能な、複数の溝部と、
をさらに備えた請求項2に記載の基板支持装置。 - 前記支持ピンの上端に、自らと当接している前記基板下面が低摩擦で摺動可能な低摩擦部が備えられ又は形成されている、請求項1に記載の基板支持装置。
- 基板を加熱及び/又は乾燥等するための基板処理装置であって、請求項1から4までのいずれかに記載の基板支持装置を含む、基板処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014088157A JP5724014B1 (ja) | 2014-04-22 | 2014-04-22 | 基板支持装置及び基板処理装置 |
TW104107403A TW201546933A (zh) | 2014-04-22 | 2015-03-09 | 基板支持裝置及基板處理裝置 |
KR1020150034474A KR20150122054A (ko) | 2014-04-22 | 2015-03-12 | 기판 지지장치 및 기판 처리장치 |
CN201510192055.1A CN105047583A (zh) | 2014-04-22 | 2015-04-21 | 基板支承装置及基板处理装置 |
Applications Claiming Priority (1)
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JP2014088157A JP5724014B1 (ja) | 2014-04-22 | 2014-04-22 | 基板支持装置及び基板処理装置 |
Publications (2)
Publication Number | Publication Date |
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JP5724014B1 true JP5724014B1 (ja) | 2015-05-27 |
JP2015206558A JP2015206558A (ja) | 2015-11-19 |
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JP2014088157A Active JP5724014B1 (ja) | 2014-04-22 | 2014-04-22 | 基板支持装置及び基板処理装置 |
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JP (1) | JP5724014B1 (ja) |
KR (1) | KR20150122054A (ja) |
CN (1) | CN105047583A (ja) |
TW (1) | TW201546933A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016199689A1 (ja) * | 2015-06-11 | 2016-12-15 | シャープ株式会社 | 基板処理装置 |
CN110286563A (zh) * | 2019-06-19 | 2019-09-27 | 深圳凯世光研股份有限公司 | 一种循环式扫描曝光机 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101895933B1 (ko) * | 2016-06-30 | 2018-09-10 | 세메스 주식회사 | 기판 처리 장치 |
CN106873203A (zh) * | 2017-04-21 | 2017-06-20 | 武汉华星光电技术有限公司 | 玻璃基板顶针及真空干燥装置 |
US20200384500A1 (en) * | 2017-09-29 | 2020-12-10 | Sharp Kabushiki Kaisha | Uv light irradiation method |
JP7066455B2 (ja) * | 2018-03-06 | 2022-05-13 | 株式会社ジャパンディスプレイ | 表示装置の製造方法及び製造装置 |
CN113063272B (zh) * | 2021-04-14 | 2023-11-17 | 创微微电子(常州)有限公司 | 晶圆烘干槽、晶圆烘干方法和晶圆烘干装置 |
CN113391474A (zh) * | 2021-06-28 | 2021-09-14 | 深圳市华星光电半导体显示技术有限公司 | 显示模组的加热设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000007146A (ja) * | 1998-06-18 | 2000-01-11 | Olympus Optical Co Ltd | ガラス基板保持具 |
WO2006022232A1 (ja) * | 2004-08-24 | 2006-03-02 | Kabushiki Kaisha Ishiihyoki | 塗布膜用乾燥炉 |
JP2013228170A (ja) * | 2012-04-26 | 2013-11-07 | Chugai Ro Co Ltd | 定盤ユニット |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008016543A (ja) * | 2006-07-04 | 2008-01-24 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP5372695B2 (ja) * | 2009-10-19 | 2013-12-18 | 大日本スクリーン製造株式会社 | 基板処理装置 |
-
2014
- 2014-04-22 JP JP2014088157A patent/JP5724014B1/ja active Active
-
2015
- 2015-03-09 TW TW104107403A patent/TW201546933A/zh unknown
- 2015-03-12 KR KR1020150034474A patent/KR20150122054A/ko active Search and Examination
- 2015-04-21 CN CN201510192055.1A patent/CN105047583A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000007146A (ja) * | 1998-06-18 | 2000-01-11 | Olympus Optical Co Ltd | ガラス基板保持具 |
WO2006022232A1 (ja) * | 2004-08-24 | 2006-03-02 | Kabushiki Kaisha Ishiihyoki | 塗布膜用乾燥炉 |
JP2013228170A (ja) * | 2012-04-26 | 2013-11-07 | Chugai Ro Co Ltd | 定盤ユニット |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016199689A1 (ja) * | 2015-06-11 | 2016-12-15 | シャープ株式会社 | 基板処理装置 |
CN110286563A (zh) * | 2019-06-19 | 2019-09-27 | 深圳凯世光研股份有限公司 | 一种循环式扫描曝光机 |
Also Published As
Publication number | Publication date |
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KR20150122054A (ko) | 2015-10-30 |
TW201546933A (zh) | 2015-12-16 |
JP2015206558A (ja) | 2015-11-19 |
CN105047583A (zh) | 2015-11-11 |
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