JP5702154B2 - 滑らかで凝集しないCuシード層を用いた気泡の存在しない凹部のCu充填体 - Google Patents
滑らかで凝集しないCuシード層を用いた気泡の存在しない凹部のCu充填体 Download PDFInfo
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- JP5702154B2 JP5702154B2 JP2010549242A JP2010549242A JP5702154B2 JP 5702154 B2 JP5702154 B2 JP 5702154B2 JP 2010549242 A JP2010549242 A JP 2010549242A JP 2010549242 A JP2010549242 A JP 2010549242A JP 5702154 B2 JP5702154 B2 JP 5702154B2
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- Prior art keywords
- metal
- substrate
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- gas
- ruthenium
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- MNWRORMXBIWXCI-UHFFFAOYSA-N tetrakis(dimethylamido)titanium Chemical compound CN(C)[Ti](N(C)C)(N(C)C)N(C)C MNWRORMXBIWXCI-UHFFFAOYSA-N 0.000 description 2
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- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76861—Post-treatment or after-treatment not introducing additional chemical elements into the layer
- H01L21/76864—Thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76873—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroplating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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Description
制御装置590は、制御データをシステム構成要素へ供給し、かつそのシステム構成要素からプロセス及び/又は状態データを受け取るように備えられて良い。それに加えて、制御装置590は他の制御システム(図示されていない)と結合し、かつ前記他の制御システムと情報をやりとりして良い。たとえば制御装置590は、マイクロプロセッサ、メモリ(たとえば揮発性又は不揮発性)、及びデジタルI/Oポートを有する。デジタルI/Oポートは、IPVDシステム500からの出力を監視するのみならず、IPVDシステム500の入力をやり取りし、かつ起動させるのに十分な制御電圧を発生させる能力を有する。しかも制御装置590はシステム構成要素と情報をやり取りして良い。メモリ内に記憶されたプログラムは、記憶されたプロセスレシピに従ってIPVDシステム500の上記構成要素を制御するのに利用されて良い。それに加えて、制御装置590は、プロセス及び/又は状態データの解析、プロセス及び/又は状態データと所望のプロセス及び/又は状態データとの比較、並びに前記比較結果を利用したプロセスの変更及び/又はシステム構成要素の制御を行うように備えられて良い。それに加えて制御装置590は、プロセス及び/又は状態データの解析、プロセス及び/又は状態データと過去のプロセス及び/又は状態データとの比較、並びに前記比較結果を利用した故障の予測、防止、及び/又は宣言を行うように備えられて良い。
Claims (18)
- 基板上のCuのアグロメレーションを制御する方法であって、
当該方法は:
上面、及び少なくとも側面と底面を有する少なくとも1つの凹部を有する表面構造を有する基板を供する工程;
前記基板の表面構造上にバリア膜を堆積する工程;
前記バリア膜上にルテニウム(Ru)金属含有ウエッティング膜を堆積する工程;
銅金属ターゲットから銅金属をスパッタリングする工程;
0℃より高温でかつ200℃以下の基板温度で、前記ルテニウム(Ru)金属含有ウエッティング膜を前記のスパッタリングされた銅金属に曝露する工程;
を有する方法であって、
前記のスパッタリングされた銅金属に曝露する工程は、前記凹部の入口の前記ルテニウム(Ru)金属含有ウエッティング膜上で突出しないように、連続的な銅金属シード層を堆積する、
方法。 - 前記ルテニウム(Ru)金属含有ウエッティング膜は、ルテニウム(Ru)金属、パラジウム(Pd)金属、ロジウム(Rh)金属、若しくは銀(Ag)金属、又は、窒素、酸素、炭素、ホウ素、若しくはリンをさらに有するRu、Pd、Rh、若しくはAgの化合物を有する、請求項1に記載の方法。
- 不活性ガス、H2ガス、又はH2ガスと不活性ガスの混合ガスが存在する中で、100℃乃至400℃の温度で、前記ルテニウム(Ru)金属含有ウエッティング膜を熱処理する工程をさらに有する、請求項1に記載の方法。
- 不活性ガス、H2ガス、又はH2ガスと不活性ガスの混合ガスが存在する中で、100℃乃至400℃の温度で、前記金属シード層を熱処理する工程をさらに有する、請求項1に記載の方法。
- 前記バリア膜が、TaN、TiN、WN、TaSiN、TiSiN、WSiN、又は上記の混合物を有する、請求項1に記載の方法。
- 前記少なくとも1つの凹部が誘電体材料中に形成される、請求項1に記載の方法。
- 基板を処理する方法であって:
上面、及び少なくとも側面と底面を有する少なくとも1つの凹部を有する表面構造を有する基板を供する工程;
前記基板の表面構造上にバリア膜を堆積する工程であって、前記バリア膜は、前記少なくとも1つの凹部内で1nm乃至10nmの厚さを有する、工程;
前記バリア膜上にルテニウム(Ru)金属含有ウエッティング膜を堆積する工程であって、前記ルテニウム(Ru)金属含有ウエッティング膜は、ルテニウム(Ru)金属、パラジウム(Pd)金属、ロジウム(Rh)金属、若しくは銀(Ag)金属、又は、窒素、酸素、炭素、ホウ素、若しくはリンをさらに有するRu、Pd、Rh、若しくはAgの化合物を有する、工程;
銅金属ターゲットから銅金属をスパッタリングする工程;
0℃より高温でかつ200℃以下の基板温度で、前記ルテニウム(Ru)金属含有ウエッティング膜を前記のスパッタリングされた銅金属に曝露する工程であって、前記のスパッタリングされた銅金属に曝露する工程は、前記凹部の入口の前記ルテニウム(Ru)金属含有ウエッティング膜上で突出しないように、連続的な銅金属シード層を堆積する、工程;並びに、
前記少なくとも1つの凹部内に気泡の存在しないバルクのCu金属をメッキする工程;
を有する方法。 - 前記メッキする工程は、前記少なくとも1つの凹部を充填又は過剰充填する、請求項7に記載の方法。
- 不活性ガス、H2ガス、又はH2ガスと不活性ガスの混合ガスが存在する中で、100℃乃至400℃の温度で、前記ルテニウム(Ru)金属含有ウエッティング膜を熱処理する工程をさらに有する、請求項7に記載の方法。
- 不活性ガス、H2ガス、又はH2ガスと不活性ガスの混合ガスが存在する中で、100℃乃至400℃の温度で、前記金属シード層を熱処理する工程をさらに有する、請求項7に記載の方法。
- 前記バリア膜が、TaN、TiN、WN、TaSiN、TiSiN、WSiN、又は上記の混合物を有する、請求項7に記載の方法。
- 基板を処理する方法であって:
上面、及び少なくとも側面と底面を有する少なくとも1つの凹部を有する表面構造を有する基板を供する工程であって、前記少なくとも1つの凹部は、ビア、溝、又は上記の組み合わせを有する、工程;
前記基板の表面構造上にバリア膜を堆積する工程であって、前記バリア膜は、前記少なくとも1つの凹部内で1nm乃至10nmの厚さを有する、工程;
銅金属ターゲットから銅金属をスパッタリングする工程;
0℃より高温でかつ200℃以下の基板温度で、ルテニウム(Ru)金属含有ウエッティング膜を前記のスパッタリングされた銅金属に曝露する工程であって、前記のスパッタリングされた銅金属に曝露する工程は、前記凹部の入口の前記ルテニウム(Ru)金属含有ウエッティング膜上で突出しないように、連続的な銅金属シード層を堆積する、工程;並びに、
前記少なくとも1つの凹部内に気泡の存在しないバルクのCu金属をメッキする工程であって、前記メッキする工程は前記少なくとも1つの凹部を充填又は過剰充填する、工程;
を有する方法。 - 不活性ガス、H2ガス、又はH2ガスと不活性ガスの混合ガスが存在する中で、100℃乃至400℃の温度で、前記ルテニウム(Ru)金属含有ウエッティング膜を熱処理する工程をさらに有する、請求項12に記載の方法。
- 不活性ガス、H2ガス、又はH2ガスと不活性ガスの混合ガスが存在する中で、100℃乃至400℃の温度で、前記金属シード層を熱処理する工程をさらに有する、請求項12に記載の方法。
- 前記バリア膜が、TaN、TiN、WN、TaSiN、TiSiN、WSiN、又は上記の混合物を有する、請求項12に記載の方法。
- 前記凹部は、100nm以下の幅、及び2:1よりも大きなアスペクト比を有する、請求項12に記載の方法。
- 前記基板温度が0℃乃至100℃である、請求項1に記載の方法。
- 前記基板温度が0℃乃至100℃である、請求項15に記載の方法。
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US12/044,191 US8247030B2 (en) | 2008-03-07 | 2008-03-07 | Void-free copper filling of recessed features using a smooth non-agglomerated copper seed layer |
PCT/IB2009/050910 WO2009109934A1 (en) | 2008-03-07 | 2009-03-05 | Void-free copper filling of recessed features using a smooth non-agglomerated copper seed layer |
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