JP5700631B2 - コーディエライト質焼結体 - Google Patents
コーディエライト質焼結体 Download PDFInfo
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- JP5700631B2 JP5700631B2 JP2010236587A JP2010236587A JP5700631B2 JP 5700631 B2 JP5700631 B2 JP 5700631B2 JP 2010236587 A JP2010236587 A JP 2010236587A JP 2010236587 A JP2010236587 A JP 2010236587A JP 5700631 B2 JP5700631 B2 JP 5700631B2
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
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- C04B2235/3472—Alkali metal alumino-silicates other than clay, e.g. spodumene, alkali feldspars such as albite or orthoclase, micas such as muscovite, zeolites such as natrolite
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- Chemical & Material Sciences (AREA)
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Description
Claims (5)
- コーディエライトを主成分とし、X線回折法においてコーディエライト以外のピークの高さがコーディエライトの最大ピーク高さに対して3%以下であり、La,Ce,Sm,Gd,Dy,Er,Yb,Yの一種以上を酸化物換算で1〜8質量%含み、加圧ガス雰囲気での熱処理により焼結されたコーディエライト質焼結体であって、その主成分の質量比が、3.85≦SiO2/MgO≦4.60、2.50≦Al2O3/MgO≦2.70の範囲であり、その精密研磨面の平均表面粗さ(Ra)が1nm以下であるコーディエライト質焼結体。
- 精密研磨面の平均表面粗さ(Ra)が0.5nm以下である請求項1に記載のコーディエライト質焼結体。
- 20〜25℃における熱膨張係数の絶対値が0.2×10−6/℃以下である請求項1に記載のコーディエライト質焼結体。
- 弾性率が130GPa以上である請求項1に記載のコーディエライト質焼結体。
- 1年間当たりの長さ寸法経時変化が、100mm長さ換算で10nm以下である請求項1に記載のコーディエライト質焼結体。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010236587A JP5700631B2 (ja) | 2010-10-21 | 2010-10-21 | コーディエライト質焼結体 |
US12/910,061 US8242039B2 (en) | 2010-10-21 | 2010-10-22 | Cordierite-based sintered body |
PCT/JP2011/071581 WO2012053312A1 (ja) | 2010-10-21 | 2011-09-22 | コーディエライト質焼結体 |
CN201180036277.4A CN103025679B (zh) | 2010-10-21 | 2011-09-22 | 堇青石质烧结体 |
EP11834154.4A EP2631223B1 (en) | 2010-10-21 | 2011-09-22 | Cordierite sintered body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010236587A JP5700631B2 (ja) | 2010-10-21 | 2010-10-21 | コーディエライト質焼結体 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014234837A Division JP2015051921A (ja) | 2014-11-19 | 2014-11-19 | コーディエライト質焼結体 |
Publications (2)
Publication Number | Publication Date |
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JP2012087026A JP2012087026A (ja) | 2012-05-10 |
JP5700631B2 true JP5700631B2 (ja) | 2015-04-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010236587A Active JP5700631B2 (ja) | 2010-10-21 | 2010-10-21 | コーディエライト質焼結体 |
Country Status (5)
Country | Link |
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US (1) | US8242039B2 (ja) |
EP (1) | EP2631223B1 (ja) |
JP (1) | JP5700631B2 (ja) |
CN (1) | CN103025679B (ja) |
WO (1) | WO2012053312A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
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US9726388B2 (en) | 2009-07-20 | 2017-08-08 | Lennox Industries Inc. | Reflective ultraviolet light shield for a HVAC unit |
ES2362533B1 (es) * | 2009-12-21 | 2012-05-17 | Consejo Superior De Investigaciones Cientificas (Csic) | Material compuesto con coeficiente de expansión térmica controlado con cer�?micas ox�?dicas y su procedimiento de obtención. |
WO2012057215A1 (ja) * | 2010-10-26 | 2012-05-03 | 京セラ株式会社 | コージェライト質セラミックスおよびこれを用いた半導体製造装置用部材 |
DE102013204276A1 (de) | 2013-03-12 | 2014-09-18 | Hug Engineering Ag | Verfahren zur Herstellung eines Formkörpers und Formkörper |
CN106104775B (zh) * | 2014-01-31 | 2019-05-21 | 应用材料公司 | 腔室涂层 |
WO2015153774A1 (en) * | 2014-04-02 | 2015-10-08 | Zygo Corporation | Photo-masks for lithography |
KR101687145B1 (ko) | 2014-06-06 | 2016-12-15 | 엔지케이 인슐레이터 엘티디 | 코디어라이트 소결체, 그 제법, 복합 기판 및 전자 디바이스 |
DE102014219442A1 (de) * | 2014-09-25 | 2016-03-31 | Schott Ag | Porenfreie Keramikkomponente |
JP6078094B2 (ja) * | 2015-04-21 | 2017-02-08 | 黒崎播磨株式会社 | コーディエライト質焼結体 |
KR102377658B1 (ko) * | 2016-03-23 | 2022-03-24 | 엔지케이 인슐레이터 엘티디 | 코디어라이트질 소결체, 그 제법 및 복합 기판 |
JP6940959B2 (ja) * | 2016-03-23 | 2021-09-29 | 日本碍子株式会社 | コージェライト質焼結体、その製法及び複合基板 |
JP7019830B2 (ja) * | 2018-09-26 | 2022-02-15 | 京セラ株式会社 | コーディエライト質セラミックスおよび望遠鏡用部材 |
CN110204323A (zh) * | 2019-05-31 | 2019-09-06 | 武汉科技大学 | 一种节能型堇青石锆英石复相材料及其制备方法 |
US11731907B2 (en) | 2020-08-04 | 2023-08-22 | Applied Materials, Inc. | Ceramic material with high thermal shock resistance and high erosion resistance |
CN112876228A (zh) * | 2021-01-26 | 2021-06-01 | 中国兵器工业第五二研究所烟台分所 | 一种高模量堇青石基低热膨胀陶瓷及其制备方法 |
CN115974540B (zh) * | 2022-12-03 | 2023-11-24 | 昆明理工大学 | 一种稀土掺杂堇青石陶瓷材料及其制备方法 |
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JPS5738371A (en) | 1980-08-16 | 1982-03-03 | Kogyo Gijutsuin | Cordierite ceramic composition |
JPS5815461B2 (ja) | 1981-01-23 | 1983-03-25 | 旭硝子株式会社 | コ−デイエライト質の緻密質低膨脹焼結体 |
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