JP5689891B2 - 平坦なワークピースを両面加工する装置および方法 - Google Patents
平坦なワークピースを両面加工する装置および方法 Download PDFInfo
- Publication number
- JP5689891B2 JP5689891B2 JP2012535678A JP2012535678A JP5689891B2 JP 5689891 B2 JP5689891 B2 JP 5689891B2 JP 2012535678 A JP2012535678 A JP 2012535678A JP 2012535678 A JP2012535678 A JP 2012535678A JP 5689891 B2 JP5689891 B2 JP 5689891B2
- Authority
- JP
- Japan
- Prior art keywords
- working
- torque
- pressure
- holes
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 18
- 239000007788 liquid Substances 0.000 claims description 13
- 238000003754 machining Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000005498 polishing Methods 0.000 description 25
- 239000012530 fluid Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
- B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009052070A DE102009052070A1 (de) | 2009-11-05 | 2009-11-05 | Vorrichtung und Verfahren zur Doppelseitenbearbeitung flacher Werkstücke |
DE102009052070.8 | 2009-11-05 | ||
PCT/EP2010/006602 WO2011054481A1 (de) | 2009-11-05 | 2010-10-28 | Vorrichtung und verfahren zur doppelseitenbearbeitung flacher werkstücke mit optimierter zufuhr des flüssigen arbeitsmittels |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013510007A JP2013510007A (ja) | 2013-03-21 |
JP5689891B2 true JP5689891B2 (ja) | 2015-03-25 |
Family
ID=43589852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012535678A Active JP5689891B2 (ja) | 2009-11-05 | 2010-10-28 | 平坦なワークピースを両面加工する装置および方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20120220197A1 (de) |
EP (1) | EP2496384A1 (de) |
JP (1) | JP5689891B2 (de) |
KR (1) | KR101824564B1 (de) |
CN (1) | CN102666015A (de) |
DE (1) | DE102009052070A1 (de) |
WO (1) | WO2011054481A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5671735B2 (ja) * | 2011-01-18 | 2015-02-18 | 不二越機械工業株式会社 | 両面研磨装置 |
DE102012221484A1 (de) | 2012-11-23 | 2014-05-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Maschinenbaugruppe, Fertigungsmaschine mit Maschinenbaugruppe sowie Verwendung und Verfahren zur Fertigung von Rotationsbauteilen |
JP6197598B2 (ja) * | 2013-11-18 | 2017-09-20 | 株式会社Sumco | ワークの両面研磨装置及び両面研磨方法 |
DE102014116598A1 (de) * | 2014-11-13 | 2016-05-19 | Vorwerk & Co. Interholding Gesellschaft mit beschränkter Haftung | Vorrichtung, Verwendung einer Vorrichtung und Verfahren zur Oberflächenbearbeitung |
DE102018202059A1 (de) * | 2018-02-09 | 2019-08-14 | Siltronic Ag | Verfahren zum Polieren einer Halbleiterscheibe |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5919257U (ja) * | 1982-07-30 | 1984-02-06 | ホ−ヤ株式会社 | 両面加工装置 |
US4549917A (en) * | 1983-02-01 | 1985-10-29 | Adolph Coors Company | Die cut window laminating device |
JP4308344B2 (ja) * | 1998-07-24 | 2009-08-05 | 不二越機械工業株式会社 | 両面研磨装置 |
US6299514B1 (en) * | 1999-03-13 | 2001-10-09 | Peter Wolters Werkzeugmachinen Gmbh | Double-disk polishing machine, particularly for tooling semiconductor wafers |
DE10007390B4 (de) | 1999-03-13 | 2008-11-13 | Peter Wolters Gmbh | Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern |
JP2000271857A (ja) * | 1999-03-25 | 2000-10-03 | Super Silicon Kenkyusho:Kk | 大口径ウェーハの両面加工方法及び装置 |
DE19937784B4 (de) * | 1999-08-10 | 2006-02-16 | Peter Wolters Werkzeugmaschinen Gmbh | Zweischeiben-Feinschleifmaschine |
JP2002187062A (ja) * | 2000-12-22 | 2002-07-02 | Toshiba Mach Co Ltd | 平面研磨装置、平面研磨方法及びそれに使用される砥石 |
US6641462B2 (en) * | 2001-06-27 | 2003-11-04 | Speedfam-Ipec Corporation | Method and apparatus for distributing fluid to a polishing surface during chemical mechanical polishing |
JP4163485B2 (ja) * | 2002-10-25 | 2008-10-08 | 不二越機械工業株式会社 | 両面研磨装置およびこれを用いた研磨加工方法 |
JP2004216541A (ja) * | 2002-11-21 | 2004-08-05 | Toshiba Ceramics Co Ltd | ラッピング装置 |
CN100566938C (zh) * | 2002-12-27 | 2009-12-09 | 株式会社荏原制作所 | 基片抛光方法 |
AU2003250921A1 (en) * | 2003-07-09 | 2005-01-28 | Peter Wolters Surface Technologies Gmbh And Co. Kg | Holder for flat workpieces, in particular semiconductor wafers for mechanochemical polishing |
US7040958B2 (en) * | 2004-05-21 | 2006-05-09 | Mosel Vitelic, Inc. | Torque-based end point detection methods for chemical mechanical polishing tool which uses ceria-based CMP slurry to polish to protective pad layer |
JP4673137B2 (ja) * | 2005-06-13 | 2011-04-20 | リバーエレテック株式会社 | 平面ラップ盤 |
JP2007021680A (ja) * | 2005-07-19 | 2007-02-01 | Shin Etsu Handotai Co Ltd | ウエーハの両面研磨方法 |
JP2007123523A (ja) * | 2005-10-27 | 2007-05-17 | Ebara Corp | 研磨方法及び研磨装置、並びに電解研磨装置 |
JP2007152499A (ja) * | 2005-12-06 | 2007-06-21 | Fujikoshi Mach Corp | ワーク研磨方法 |
-
2009
- 2009-11-05 DE DE102009052070A patent/DE102009052070A1/de active Pending
-
2010
- 2010-10-28 JP JP2012535678A patent/JP5689891B2/ja active Active
- 2010-10-28 CN CN2010800499645A patent/CN102666015A/zh active Pending
- 2010-10-28 EP EP10781601A patent/EP2496384A1/de not_active Withdrawn
- 2010-10-28 WO PCT/EP2010/006602 patent/WO2011054481A1/de active Application Filing
- 2010-10-28 KR KR1020127011032A patent/KR101824564B1/ko active IP Right Grant
- 2010-10-28 US US13/505,439 patent/US20120220197A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
KR20120101371A (ko) | 2012-09-13 |
CN102666015A (zh) | 2012-09-12 |
DE102009052070A1 (de) | 2011-05-12 |
JP2013510007A (ja) | 2013-03-21 |
US20120220197A1 (en) | 2012-08-30 |
EP2496384A1 (de) | 2012-09-12 |
KR101824564B1 (ko) | 2018-02-01 |
WO2011054481A1 (de) | 2011-05-12 |
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