JP5680128B2 - 接着剤組成物、接着フィルム、及び貼付方法 - Google Patents
接着剤組成物、接着フィルム、及び貼付方法 Download PDFInfo
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- JP5680128B2 JP5680128B2 JP2013047374A JP2013047374A JP5680128B2 JP 5680128 B2 JP5680128 B2 JP 5680128B2 JP 2013047374 A JP2013047374 A JP 2013047374A JP 2013047374 A JP2013047374 A JP 2013047374A JP 5680128 B2 JP5680128 B2 JP 5680128B2
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- adhesive composition
- wafer
- adhesive
- styrene
- film
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J153/00—Adhesives based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Adhesives based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J153/00—Adhesives based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Adhesives based on derivatives of such polymers
- C09J153/02—Vinyl aromatic monomers and conjugated dienes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J153/00—Adhesives based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Adhesives based on derivatives of such polymers
- C09J153/02—Vinyl aromatic monomers and conjugated dienes
- C09J153/025—Vinyl aromatic monomers and conjugated dienes modified
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Description
本発明に係る接着剤組成物は、ブロック共重合体を含有する接着剤組成物であって、上記接着剤組成物を用いて形成した接着層の23℃におけるヤング率が0.1GPa以上、220℃における貯蔵弾性率(G’)が1.5×105Pa以下、及び220℃における損失係数(tanσ)が1.3以下である。
本発明に係る接着剤組成物に含まれるブロック共重合体は、モノマー単位が連続して結合したブロック部位が2種以上結合した重合体であり、ブロックコポリマーと称することもある。
本発明に係る接着剤組成物を用いて形成した接着層は、23℃におけるヤング率が0.1GPa以上、220℃における貯蔵弾性率(G’)が1.5×105Pa以下、及び220℃における損失係数(tanσ)が1.3以下である。
本発明に係る接着剤組成物に含まれる溶剤は、ブロック共重合体を溶解する機能を有するものであればよく、例えば、非極性の炭化水素系溶剤、極性及び無極性の石油系溶剤等を用いることができる。
本発明において、接着剤組成物は熱重合禁止剤を含有していてもよい。熱重合禁止剤は、熱によるラジカル重合反応を防止する機能を有する。具体的には、熱重合禁止剤はラジカルに対して高い反応性を示すため、モノマーよりも優先的に反応してモノマーの重合を禁止する。そのような熱重合禁止剤を含む接着剤組成物は、高温環境下(特に、250℃〜350℃)において重合反応を抑制する。
また、本発明に係る接着剤組成物は、熱重合禁止剤を溶解し、ブロック共重合体を溶解するための溶剤とは異なる組成からなる添加溶剤を含有する構成であってもよい。添加溶剤としては、特に限定されないが、接着剤組成物に含まれる成分を溶解する有機溶剤を用いることができる。
接着剤組成物には、本発明における本質的な特性を損なわない範囲において、混和性のある他の物質をさらに含んでいてもよい。例えば、接着剤の性能を改良するための付加的樹脂、可塑剤、接着補助剤、安定剤、着色剤及び界面活性剤等、慣用されている各種添加剤をさらに用いることができる。
本発明に係る接着剤組成物の調製方法は特に限定されず、公知の方法を用いればよいが、例えば、ブロック共重合体を主溶剤に溶解させ、既存の攪拌装置を用いて、各組成を攪拌することにより、本発明に係る接着剤組成物を得ることができる。
本発明に係る接着剤組成物は、ウエハと当該ウエハの支持体とを接着するために用いられる。
本発明に係る接着剤組成物は、用途に応じて様々な利用形態を採用することができる。例えば、液状のまま、半導体ウエハなどの被加工体の上に塗布して接着剤層を形成する方法を用いてもよいし、本発明に係る接着フィルム、すなわち、予め可撓性フィルムなどのフィルム上に上記何れかの接着剤組成物を含む接着剤層を形成した後、乾燥させておき、このフィルム(接着フィルム)を、被加工体に貼り付けて使用する方法(接着フィルム法)を用いてもよい。
本発明に係る貼付方法は、本発明に係る接着剤組成物を用いて、ウエハに支持体を貼り付ける貼付工程を包含することを特徴としている。本発明に係る接着剤組成物を用いてウエハと支持体とを貼り付けることによって、高温プロセスに長時間供しても接着剤組成物が流動しないため、これを用いてウエハに支持体を容易に貼り付けることが可能である上に、貼り付け不良が生じない。
(接着剤組成物の調製)
トリブロック共重合体であるH1051(旭化成ケミカルズ社製、SEBS:スチレン−エチレン/ブチレン−スチレンのトリブロック共重合体、スチレン含有量42重量%、分子量78800)100重量部を、主溶剤である下記化学式(I)に示すデカヒドロナフタリン280重量部に溶解した。
まず、調製した実施例1の接着剤組成物をシリコンウエハ(12インチ)上にスピン塗布し、大気圧下のホットプレートにおいて、100℃、160℃、200℃で各3分間焼成して接着層を形成した(厚さ50μm)。ウエハ上に形成した接着層のヤング率を、FISCHERSCOPE Hm2000測定装置(フィッシャー・インストルメンツ社製)を用いて、最大試験荷重5mN、荷重アプリケーション時間20秒、クリープ時間5秒で測定した。接着層の23℃でのヤング率(単位:GPa)は、表1に示すように、0.34GPaであった。
調製した実施例1の接着剤組成物をシリコンウエハ(12インチ)上にスピン塗布し、大気圧下のホットプレートにおいて、100℃、160℃、200℃で各4分間焼成して接着層を形成した(厚さ50μm)。1Pa以下の減圧環境下において、220℃、4000kgの条件で3分間、ガラス支持体(12インチ)と貼り合わせし、積層体を作製した。表1に示すように、この段階において、積層体に貼り付け不良は生じていなかった(○)。
作製した積層体において、ウエハを40μmまで研削して薄化し、薄化後のウエハの外観を顕微鏡で観察した。観察の結果、表1に示すように、積層体においてウエハの剥がれ及び貼り付け不良は生じていなかった(○)。
作製した積層体を、220℃で5分間のプラズマCVDプロセス、及び220℃で3時間、窒素環境下において加熱する硬化プロセスに供した。なお、CVDプロセスは、熱酸化膜又は窒化膜の形成工程に対応し、硬化プロセスは、ポリイミドのような絶縁膜の形成工程に対応する。
実施例2〜16において、ブロック共重合体として、
H1051(旭化成ケミカルズ社製、SEBS、スチレン−エチレン/ブチレン−スチレンのトリブロック共重合体、スチレン含有量42重量%、分子量78800)、
G1726(クレイトンポリマー社製、SEBS/SEB:スチレン−エチレン/ブチレン−スチレンブロックのトリブロック共重合体とスチレン−エチレン/ブチレンのジブロック共重合体との組み合わせ、スチレン含有量30重量%、ジブロック含有量70重量%(G1726全体に対して)、分子量51300)、
G1652(クレイトンポリマー社製、SEBS:スチレン−エチレン/ブチレン−スチレンブロックのトリブロック共重合体、スチレン含有量30重量%、分子量77700)、
HG1043(旭化成ケミカルズ社製、SEBS:スチレン−エチレン/ブチレン−スチレンブロックのトリブロック共重合体 水添スチレン系熱可塑性エラストマー、スチレン含有量67重量%、分子量77000)、
HG252(クラレ社製、SEEPS−OH:ポリスチレン−ポリ(エチレン−エチレン/プロピレン)ブロック−ポリスチレン 末端水酸基変性、スチレン含有量28重量%、分子量67000)、
S4033(クラレ社製、SEPS:ポリスチレン−ポリ(エチレン/プロピレン)ブロック−ポリスチレン、スチレン含有量30重量%、分子量95000)、
MP−10(旭化成ケミカルズ社製、SEBS:スチレン−エチレン/ブチレン−スチレンブロックのトリブロック共重合体 水添スチレン系熱可塑性エラストマー 末端アミン変性、スチレン含有量30重量%、分子量83000)、
S8004(クラレ社製、SEBS:ポリスチレン−ポリ(エチレン/ブチレン)ブロック−ポリスチレンのトリブロック共重合体、スチレン含有量31重量%、分子量98100)
V9827(クラレ社製、SEBS:スチレンブロックが反応架橋型のスチレン−エチレン−ブチレン−スチレンブロックコポリマー、スチレン含有量30%、分子量90000)
S2002(クラレ社製、SEPS:スチレン−イソプレン−スチレンのトリブロック共重合体、スチレン含有量30%、分子量53000)を用い、表1に記載の重量比で混合し、接着剤組成物を調製した。
TOPAS−TM(ポリプラスチックス社製、シクロオレフィンコポリマー、ノルボルネン:エチレン=65:35(重量比)、分子量10100、分散度:2.08)、
A1:(スチレン/ジシクロペンタニルメタクリレート/ステアリルメタクリレート=20/60/20(重量比)の共重合体、分子量10000)、及び、
A2:(スチレン/1−アダマンチルメタクリレート/ステアリルメタクリレート=20/60/20(重量比)の共重合体、分子量10000)から選択した共重合体を、表1に記載の重量比で混合し、接着剤組成物を調製した。
(接着剤組成物の調製)
炭化水素樹脂であるTOPAS−8007(ポリプラスチックス社製、分子量=95,000、分散度=1.9、エチレン:ノルボルネン=35:65(重量比)共重合体)100重量部を、主溶剤であるデカヒドロナフタリン280重量部に溶解した。次に、熱重合禁止剤であるBASF社製の「IRGANOX(商品名)1010」を酢酸ブチルに溶解させた溶液を、トリブロック共重合体100重量部に対して、熱重合禁止剤が1重量部、酢酸ブチルが20重量部になるように添加した。このようにして比較例1の接着剤組成物を調製した。
実施例と同様にシリコンウエハ(12インチ)上に接着層(厚さ50μm)を形成し、FISCHERSCOPE Hm2000測定装置(フィッシャー・インストルメンツ社製)を用いて、実施例と同様にヤング率を測定した。接着層のヤング率は、表2に示すように、3.4GPaであった。
調製した接着剤組成物をシリコンウエハ(12インチ)上にスピン塗布し、大気圧下のホットプレートにおいて、100℃、160℃、200℃で各4分間焼成して接着層を形成した(厚さ50μm)。次に、流量400sccm、圧力700mTorr、高周波電力2500W及び成膜温度240℃の条件下において、反応ガスとしてC4F8を使用したCVD法により、フルオロカーボン膜(1μm)をガラス支持体(12インチ、厚さ700μm)上に形成し、分離層とした。そして、接着層を介して、分離層が形成されたガラス支持体とウエハ基板とを、1Pa以下の減圧環境下において、220℃、4000kgの条件で3分間、貼り合わせし、ウエハ基板、接着層、分離層及びガラス支持体をこの順番に積層した積層体を作製した。表2に示すように、この段階において、積層体に貼り付け不良は生じていなかった(○)。
作製した積層体において、実施例と同様に、ウエハを40μmまで研削して薄化したとき、顕微鏡での観察の結果、表2に示すように、積層体においてウエハの剥がれ及び貼り付け不良は生じていなかった(○)。
作製した積層体を、実施例と同様に、220℃のプラズマCVDプロセス、及び220℃、窒素環境下において加熱する硬化プロセスに供した後、ウエハの外観を顕微鏡で観察した。観察の結果、表2に示すように、エッジ部が流動し、ウエハ剥がれ及び貼り付け不良が生じていた(×)。
Claims (9)
- ブロック共重合体として、主鎖の両端がスチレンブロックであるトリブロック共重合体を含有する接着剤組成物であって、上記接着剤組成物を用いて形成した接着層の
23℃におけるヤング率が0.1GPa以上、
220℃における貯蔵弾性率(G’)が1.5×105Pa以下、及び
220℃における損失係数(tanσ)が1.3以下であり、
上記ブロック共重合体は水添物であり、ガラス転移点が23℃以下のユニットを含んでおり、重量平均分子量が、50,000以上、150,000以下であることを特徴とする接着剤組成物。 - 上記ブロック共重合体は、スチレンブロックを含んでいるジブロック共重合体、及び、上記トリブロック共重合体の組み合わせであることを特徴とする請求項1に記載の接着剤組成物。
- 上記ブロック共重合体のスチレンブロックの含有量は、10重量%以上、65重量%以下であることを特徴とする請求項1又は2に記載の接着剤組成物。
- ウエハと支持体とを接着するために用いられることを特徴とする請求項1〜3のいずれか1項に記載の接着剤組成物。
- 上記ウエハは、上記支持体と接着した後に薄化工程に供されるウエハであることを特徴とする請求項4に記載の接着剤組成物。
- 上記ウエハは、上記支持体と接着した後に220℃以上の環境下に曝されるウエハであることを特徴とする請求項4又は5に記載の接着剤組成物。
- 上記接着剤組成物に含まれる重合体に対する上記トリブロック共重合体の含有量は、15重量%以上であることを特徴とする請求項1〜6のいずれか1項に記載の接着剤組成物。
- フィルム上に、請求項1〜7のいずれか1項に記載の接着剤組成物を含有する接着層が形成されていることを特徴とする接着フィルム。
- 請求項1〜7のいずれか1項に記載の接着剤組成物を用いて、ウエハに支持体を貼り付ける貼付工程を包含することを特徴とする貼付方法。
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EP13776012.0A EP2837668B1 (en) | 2012-04-13 | 2013-03-14 | Adhesive composition, adhesive film, and bonding method |
PCT/JP2013/057208 WO2013153904A1 (ja) | 2012-04-13 | 2013-03-14 | 接着剤組成物、接着フィルム、及び貼付方法 |
US14/391,569 US20150059976A1 (en) | 2012-04-13 | 2013-03-14 | Adhesive composition, adhesive film, and bonding method |
KR1020147031079A KR101502296B1 (ko) | 2012-04-13 | 2013-03-14 | 접착제 조성물, 접착 필름, 및 첩부 방법 |
TW102112692A TWI558781B (zh) | 2012-04-13 | 2013-04-10 | 黏著劑組成物,黏著薄膜及黏貼方法 |
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JP6588404B2 (ja) * | 2015-10-08 | 2019-10-09 | 信越化学工業株式会社 | 仮接着方法及び薄型ウエハの製造方法 |
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WO2024117230A1 (ja) * | 2022-12-01 | 2024-06-06 | 積水化学工業株式会社 | 光硬化性樹脂組成物、粘着シート、及び、積層体の製造方法 |
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US5118762A (en) * | 1990-04-11 | 1992-06-02 | Shell Oil Company | Styrene-isoprene-styrene block copolymer composition for low viscosity low temperature hot melt adhesives |
US5538771A (en) | 1991-06-28 | 1996-07-23 | Furukawa Electric Co., Ltd. | Semiconductor wafer-securing adhesive tape |
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