JP5670095B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP5670095B2
JP5670095B2 JP2010109860A JP2010109860A JP5670095B2 JP 5670095 B2 JP5670095 B2 JP 5670095B2 JP 2010109860 A JP2010109860 A JP 2010109860A JP 2010109860 A JP2010109860 A JP 2010109860A JP 5670095 B2 JP5670095 B2 JP 5670095B2
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JP
Japan
Prior art keywords
vane
impeller
side channel
vacuum pump
pump stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010109860A
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English (en)
Japanese (ja)
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JP2010265895A (ja
Inventor
ロナルド・ザックス
アレクサンドル・シリノフ
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by プファイファー・ヴァキューム・ゲーエムベーハー filed Critical プファイファー・ヴァキューム・ゲーエムベーハー
Publication of JP2010265895A publication Critical patent/JP2010265895A/ja
Application granted granted Critical
Publication of JP5670095B2 publication Critical patent/JP5670095B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2010109860A 2009-05-16 2010-05-12 真空ポンプ Active JP5670095B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009021642.1A DE102009021642B4 (de) 2009-05-16 2009-05-16 Vakuumpumpe
DE102009021642.1 2009-05-16

Publications (2)

Publication Number Publication Date
JP2010265895A JP2010265895A (ja) 2010-11-25
JP5670095B2 true JP5670095B2 (ja) 2015-02-18

Family

ID=42272003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010109860A Active JP5670095B2 (ja) 2009-05-16 2010-05-12 真空ポンプ

Country Status (3)

Country Link
EP (1) EP2253851B1 (de)
JP (1) JP5670095B2 (de)
DE (1) DE102009021642B4 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102013108482A1 (de) 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102015113821B4 (de) 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102017215731A1 (de) * 2017-09-07 2019-03-07 Robert Bosch Gmbh Seitenkanalverdichter für ein Brennstoffzellensystem zur Förderung und/oder Verdichtung von einem gasförmigen Medium
EP3623634B1 (de) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210294A (ja) * 1985-03-13 1986-09-18 Nishimura Denki Kk 送風機
JPH0689758B2 (ja) * 1988-06-28 1994-11-14 ダイキン工業株式会社 渦流形ターボ機械
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
DE19649529A1 (de) * 1996-11-29 1998-06-04 Duerr Dental Gmbh Co Kg Seitenkanalmaschine
JPH10196586A (ja) * 1997-01-06 1998-07-31 Hitachi Ltd ターボ真空ポンプ
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3800128B2 (ja) 2001-07-31 2006-07-26 株式会社デンソー インペラ及びタービン式燃料ポンプ
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4524349B2 (ja) 2003-02-25 2010-08-18 日立オートモティブシステムズ株式会社 タービン型燃料ポンプ
DE10334950A1 (de) * 2003-07-31 2004-12-09 Nash_Elmo Industries Gmbh Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
US7033137B2 (en) * 2004-03-19 2006-04-25 Ametek, Inc. Vortex blower having helmholtz resonators and a baffle assembly
DE102005025132A1 (de) 2005-06-01 2006-12-07 Robert Bosch Gmbh Förderaggregat

Also Published As

Publication number Publication date
DE102009021642A1 (de) 2010-11-18
EP2253851A2 (de) 2010-11-24
EP2253851A3 (de) 2014-07-09
DE102009021642B4 (de) 2021-07-22
EP2253851B1 (de) 2016-12-14
JP2010265895A (ja) 2010-11-25

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