JP5645678B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5645678B2 JP5645678B2 JP2011005546A JP2011005546A JP5645678B2 JP 5645678 B2 JP5645678 B2 JP 5645678B2 JP 2011005546 A JP2011005546 A JP 2011005546A JP 2011005546 A JP2011005546 A JP 2011005546A JP 5645678 B2 JP5645678 B2 JP 5645678B2
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Description
本願において、実施の態様の記載は、必要に応じて、便宜上複数のセクション等に分けて記載するが、特にそうでない旨明示した場合を除き、これらは相互に独立別個のものではなく、記載の前後を問わず、単一の例の各部分、一方が他方の一部詳細または一部または全部の変形例等である。また、原則として、同様の部分は繰り返しの説明を省略する。また、実施の態様における各構成要素は、特にそうでない旨明示した場合、理論的にその数に限定される場合および文脈から明らかにそうでない場合を除き、必須のものではない。
まず、本実施の形態の半導体装置1の構成の概要について、図1〜図4を用いて説明する。図4に示すように、本実施の形態の半導体装置1は、配線基板2と、配線基板2上に搭載される半導体チップ3と、半導体チップ3と配線基板2を電気的に接続する複数のワイヤ(導電性部材)4と、を備えている。また、半導体チップ3および複数のワイヤ4は、配線基板2の上面2a上に形成された封止体(硬化した樹脂体)5により封止されている。図1に示す封止体5および図2、図3に示す配線基板2は、平面視において、四辺形(四角形)を成す。
次に、本実施の形態の半導体装置の製造方法について説明する。本実施の形態における半導体装置1は、図5に示すフローに沿って製造される。図5は、本実施の形態の半導体装置の製造工程の概要を示す説明図である。各工程の詳細については、図6〜図23を用いて、以下に説明する。
まず、図5に示す半導体チップ準備工程について説明する。図5に示すように、半導体チップ準備工程は、ウエハ準備工程、ウエハ固定工程、裏面研削工程、分割工程、破砕層除去工程、およびチップ取得工程を有している。
ウエハ準備工程では、図6および図7に示すウエハ10を準備する。図6は、図5に示すウエハ準備工程で準備する半導体ウエハの主面側の平面を示す平面図である。また図7は図6に示す半導体ウエハの断面図である。
次に、ウエハ固定工程では、図8に示すように、ウエハ10を支持部材15に固定する。図8は図7に示す半導体ウエハが支持部材に固定された状態を示す断面図である。図5に示す裏面研削工程や分割工程では、加工ステージ上にウエハ10を固定した状態でウエハ10に加工を施す。このため、加工時にウエハ10の表面3aを保護するため、裏面研削工程および分割工程の前に、ウエハ10の表面3aを支持部材15の接着面(図8では下面)15aと対向させた状態で、接着材16を介してウエハ10を支持部材15に接着固定する。加工時にウエハ10の表面3aを保護する観点からは、樹脂フィルム(基材)の一方の面に糊材(粘着材)が配置された接着テープ(バックグラインドテープあるいはダイシングテープと呼ばれる)をウエハ10の表面3aに貼り付けた状態で加工する方法を用いることができる。つまり、上記接着テープを支持部材として用いる方法を適用することができる。しかし、本実施の形態では、後述する裏面研削工程で、ウエハ10の厚さが例えば50μm以下となるまでウエハ10の裏面10bを研削する。このように、ウエハ10の厚さを50μm以下まで薄くする場合には、加工中、あるいは加工工程間のハンドリング時にウエハ10が変形あるいは破損してしまうことを抑制する必要がある。支持部材15は、薄くなったウエハ10の変形を防止ないしは抑制するため、薄くなったウエハ10よりも剛性(支持強度)が高い部材が好ましい。樹脂フィルムのようにウエハ10よりも剛性が低い部材の場合、ウエハ10の変形や破損を十分に抑制できないからである。そこで、ウエハ10よりも厚く、ウエハ10と同程度の硬さを有するガラス板を支持部材15として用いる。例えば、本実施の形態では、ウエハ10の厚さが700μm〜800μm程度であるのに対し、支持部材15の厚さは1mm〜2mm程度である。これにより後述する裏面研削工程や分割工程におけるストレスによりウエハ10が破損することを防止ないしは抑制することができる。また、詳細は後述するが、本実施の形態では、接着材16として紫外線硬化性樹脂層16aおよび光熱変換(Light to Heat Conversion:LTHC)層16bの積層体を用いており、紫外線およびレーザ光の透過効率を向上させる観点から、紫外線および可視光の透過率がウエハ10を構成する半導体基板(例えばシリコン)よりも高いガラス板を用いることが好ましい。ただし、ウエハ10を支持部材15に固定してから取り外すまでの各工程で、接着材16やウエハ10の表面3a側に紫外線やレーザ光を照射するプロセスを含まない場合(例えば、紫外線硬化性樹脂層16aに代えて熱硬化性樹脂を用いる場合)には、ガラス板よりも透過率の低い部材(例えば、シリコン基板)を用いることもできる。
次に、裏面研削工程では、図11および図12に示すように、ウエハ10が支持部材15に固定された状態でウエハ10の裏面10b(図11参照)を研削し、裏面10bよりも表面3a側に位置する裏面3b(図12参照)を露出させる。図11は、図5に示す裏面研削工程を示す拡大断面図、図12は、図11に示す裏面研削後のウエハの状態を示す拡大断面図である。
次に、分割工程では、図14に示すようにウエハ10が支持部材15に固定された状態で、ウエハ10のダイシング領域10dに沿ってブレード27を走行させることで、ウエハ10をチップ領域10c毎に分割する。図14は図5に示す分割工程を示す拡大断面図である。また、図15は、図6に示すウエハの一部の表面側を拡大して示す拡大平面図である。
次に、破砕層除去工程では、図17に示すようにウエハ10を裏面3b側からエッチングして、図16に示す破砕層30を取り除く。図17は、図5に示す破砕層除去工程を示す拡大断面図、図18は、図16に示すウエハにエッチング処理を施した後の状態を示す拡大断面図である。なお、図17では、ウエハ10の裏面3b側からチップ領域10cの裏面3bおよび側面3cに向かってエッチング材を供給した状態を示しており、エッチング材は、所謂、プラズマエッチングに用いるエッチングガス、またはウェットエッチングに用いるエッチング液である。
次に、破砕層除去工程では、図10に示すようにウエハ10から支持部材15を剥離する支持部材剥離工程を行った後、図10に示す固定テープ(接着テープ)22から各チップ領域10cを個別に取り出して、図3および図4に示す半導体チップ3を複数個取得する。支持部材剥離工程は、既に説明したので、重複する説明は省略する。また、固定テープ(接着テープ)22から各チップ領域10cを個別に取り出す工程は、ダイシングテープから個片化された半導体チップを取り出す一般的な技術を応用して適用することができる。例えば、固定テープ22の糊材中に硬化前の紫外線硬化性樹脂成分を予め含ませておく。そして、図10に示すように、チップ領域10cの表面3a側から接着材16を剥離させた後で、固定テープ22に紫外線を照射し、糊材を硬化させると、固定テープ22の接着強度が低下する。固定テープ22の接着強度が低下させれば、例えばコレット(図示は省略)と呼ばれる保持治具(ピックアップ治具)を用いて、個々のチップ領域10c(図3および図4に示す半導体チップ3)を容易に取り出すことができる。ところで、本工程では、厚さが50μm以下と、非常に薄い半導体チップ3を支持部材15(図10参照)に支持されない状態で取り出すこととなる。しかし、前記した分割工程で、個片化された半導体チップ3は、表面3aおよび裏面3bの平面積が、一体化したウエハ10(例えば図12参照)よりも小さいため、ハンドリング時の変形や損傷は発生し難い。
次に、図1〜図4に示す半導体装置1の組み立て工程を、図5に沿って簡単に説明する。
次に、前記実施の形態で説明した態様の変形例について説明する。まず、図5に示す工程順序の変形例について説明する。図24は、図5に対する変形例を示す説明図、図25は、図14に対する変形例を示す拡大断面図である。図24に示す例では、前記実施の形態で説明した分割工程を、裏面研削工程の前に行う。その他の点は、図5と同様である。つまり、図25に示すように、ウエハ10の裏面10bを研削する前に、先にブレード27による切削加工を行って、チップ領域10c毎に個片化する。その後、前記した図11と同様に裏面研削処理を行うと、前記実施の形態と同様に半導体チップ3(図4参照)が取得できる。図24に示す工程フローでは、裏面研削工程を分割後に行うため、裏面研削工程において、隣り合うチップ領域10cの間の隙間に研削液や研削屑が入り込む場合がある。しかし、ウエハ固定工程において、ウエハ10の表面3a側は、硬化した紫外線硬化性樹脂層16a(図8参照)と密着しているため、ウエハ10の表面3a側の汚染を抑制することができる。ただし、チップ領域の側面3cに破砕層30b(図16参)が形成された状態で裏面研削処理を行うと、裏面研削時の外力により、破砕層30bの傷が進展する懸念がある。したがって、図5に示すように、分割工程は、裏面研削工程の後で行うことが特に好ましい。また、図24に示すように分割工程を裏面研削工程の前に行う場合には、裏面研削工程の前に、一旦破砕層除去工程を行うことが好ましい。つまり、半導体装置の強度低下を防止ないしは抑制する観点からは、チップ領域10cの側面3cに形成された破砕層30bを除去する工程と、裏面3b(図)に形成された破砕層30a(図16参照)を除去する工程をそれぞれ別個に行うことが好ましい。言い換えれば、図5に示す工程フローによれば、破砕層除去工程を1回行えば良く、かつ、半導体装置の強度低下を防止ないしは抑制することができる。
2 配線基板(基板)
2a 上面(チップ搭載面、表面)
2b 下面(実装面、裏面)
2c ボンディングリード(端子)
2d ランド(端子)
2e 配線
2f コア層
2g 絶縁膜
3 半導体チップ
3a 表面(主面、上面)
3b 裏面(主面、下面)
3c 側面
3d パッド(電極、チップ電極)
3e アライメントマーク
3f 金属パターン
3g 角部(エッジ部)
4 ワイヤ(導電性部材)
5 封止体(樹脂体)
6 半田ボール(突起電極)
7 接着材(ダイボンド材)
10 ウエハ(半導体ウエハ、半導体基板)
10b 裏面
10c チップ領域
10d ダイシング領域
11 半導体基板
11a 主面
12 配線層
12a 上面
12c 配線
12d 絶縁層(層間絶縁膜)
13 絶縁層(パッシベーション膜)
13a 開口部
15 支持部材
15a 接着面
15b 面
16 接着材
16a 紫外線硬化性樹脂層
16b 光熱変換層
16c 紫外線硬化性樹脂
17 ステージ
18 保持具
19 真空チャンバ(減圧チャンバ)
20 紫外線
21 フレーム
22 固定テープ
23 レーザ
24 剥離テープ
25 研削部材
26 保持治具
27 ブレード
28 保持治具
29 エッチング材(エッチングガス)
30 破砕層
30a 破砕層(裏面側破砕層)
30b 破砕層(側面側破砕層)
40 配線基板(基板)
40a デバイス領域
40b 枠部(枠体)
40c ダイシング領域
41 チップ搭載治具
42 ヒータ
43 キャピラリ
50 接着テープ
50a 樹脂フィルム(基材)
50b 糊材
51 レーザ
60 半導体装置
61 半導体チップ
62 バンプ電極(表面側突起電極)
63 アンダフィル樹脂(封止体)
64 接着材
65 半導体チップ
66 バンプ電極(表面側突起電極)
67 バンプ電極(裏面側突起電極)
68 配線(導電性部材)
68a 貫通孔
Claims (10)
- 以下の工程を含むことを特徴とする半導体装置の製造方法:
(a)表面、前記表面に形成された複数のチップ領域、前記複数のチップ領域のうちの互いに隣り合うチップ領域間に形成されたダイシング領域、および前記表面とは反対側の裏面を有する半導体ウエハの前記表面を支持部材に固定する工程;
(b)前記半導体ウエハが前記支持部材に固定された状態で、前記半導体ウエハの前記裏面を研削する工程;
(c)前記半導体ウエハが前記支持部材に固定された状態で、前記半導体ウエハの前記ダイシング領域にブレードを走行させることで、前記半導体ウエハを前記チップ領域毎に分割する工程;
(d)前記(c)工程の後、分割された前記複数のチップ領域のそれぞれの側面をエッチングし、前記(c)工程により前記複数のチップ領域のそれぞれの前記側面に形成された破砕層を除去する工程;
(e)前記(d)工程の後、分割された前記複数のチップ領域を前記支持部材から剥離させて、複数の半導体チップを取得する工程、
ここで、
前記(c)工程で、前記ブレードを走行させる前記半導体ウエハの前記ダイシング領域には、金属パターンが配置されている。 - 請求項1において、
前記(c)工程は、前記(b)工程の後に行うことを特徴とする半導体装置の製造方法。 - 請求項2において、
前記支持部材の厚さは、前記(b)工程により研削された後の前記半導体ウエハの厚さよりも厚いことを特徴とする半導体装置の製造方法。 - 請求項3において、
前記支持部材は、前記(b)工程により研削された後の前記半導体ウエハよりも剛性が高いことを特徴とする半導体装置の製造方法。 - 請求項4において、
前記支持部材は、前記半導体ウエハの前記表面と対向させる接着面を有し、
前記(a)工程は、
前記半導体ウエハの前記表面または前記支持部材の前記接着面のうちいずれか一方または両方に、液状の接着材を塗布する工程、
前記半導体ウエハと前記支持部材を、前記接着材を介して接着する工程、
および、前記接着材を硬化させて前記半導体ウエハと前記支持部材を固定する工程を含んでいることを特徴とする半導体装置の製造方法。 - 請求項5において、
前記接着材は、紫外線硬化性樹脂を含み、かつ、前記支持部材はガラス板であることを特徴とする半導体装置の製造方法。 - 請求項1において、前記(c)工程では、
前記ダイシング領域に沿って前記ブレードを一回のみ走行させることで、前記半導体ウエハを前記チップ領域毎に分割することを特徴とする半導体装置の製造方法。 - 請求項1において、
前記(a)工程で準備する前記半導体ウエハの前記複数のチップ領域のそれぞれには、前記表面から突出する複数の表面側突起電極が形成されていることを特徴とする半導体装置の製造方法。 - 請求項8において、
さらに以下の工程を含むことを特徴とする半導体装置の製造方法:
(f)前記(b)工程の後、かつ、前記(c)工程の前に、前記複数のチップ領域の前記裏面側から前記表面側に向かって複数の貫通孔を形成する工程;
(g)前記(f)工程の後、かつ、前記(c)工程の前に、前記複数の貫通孔のそれぞれに導電性部材を埋め込み、前記複数の表面側突起電極と前記導電性部材を電気的に接続する工程;
(h)前記(g)工程の後、かつ、前記(c)工程の前に、前記複数のチップ領域の前記裏面のそれぞれに複数の裏面側突起電極を形成し、前記導電性部材と電気的に接続する工程。 - 請求項1において、
さらに以下の工程を含むことを特徴とする半導体装置の製造方法:
(f)前記(e)工程の後、基板上に前記複数の半導体チップのうちの第1半導体チップを搭載する工程;
(g)前記(f)工程の後、前記第1半導体チップ上に、第2半導体チップを搭載する工程。
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