JP5580415B2 - 短レスポンス時間及び高感度を持つ熱流センサ集積回路 - Google Patents
短レスポンス時間及び高感度を持つ熱流センサ集積回路 Download PDFInfo
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
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- A61B5/103—Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
- A61B5/11—Measuring movement of the entire body or parts thereof, e.g. head or hand tremor, mobility of a limb
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
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- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
- A61B5/6802—Sensor mounted on worn items
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
- A61B5/683—Means for maintaining contact with the body
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- A61M16/0003—Accessories therefor, e.g. sensors, vibrators, negative pressure
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- A—HUMAN NECESSITIES
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- A61M16/10—Preparation of respiratory gases or vapours
- A61M16/104—Preparation of respiratory gases or vapours specially adapted for anaesthetics
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- A61M16/10—Preparation of respiratory gases or vapours
- A61M16/14—Preparation of respiratory gases or vapours by mixing different fluids, one of them being in a liquid phase
- A61M16/18—Vaporising devices for anaesthetic preparations
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
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- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
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- B05B17/0653—Details
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- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/0006—Indicating or recording presence, absence, or direction, of movement of fluids or of granulous or powder-like substances
- G01P13/006—Indicating or recording presence, absence, or direction, of movement of fluids or of granulous or powder-like substances by using thermal variables
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/02—Alarms for ensuring the safety of persons
- G08B21/04—Alarms for ensuring the safety of persons responsive to non-activity, e.g. of elderly persons
- G08B21/0438—Sensor means for detecting
- G08B21/0446—Sensor means for detecting worn on the body to detect changes of posture, e.g. a fall, inclination, acceleration, gait
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
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-
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- A61M16/0003—Accessories therefor, e.g. sensors, vibrators, negative pressure
- A61M2016/0015—Accessories therefor, e.g. sensors, vibrators, negative pressure inhalation detectors
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- A61M2016/0021—Accessories therefor, e.g. sensors, vibrators, negative pressure inhalation detectors electrical with a proportional output signal, e.g. from a thermistor
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- A61M16/00—Devices for influencing the respiratory system of patients by gas treatment, e.g. mouth-to-mouth respiration; Tracheal tubes
- A61M16/0003—Accessories therefor, e.g. sensors, vibrators, negative pressure
- A61M2016/0027—Accessories therefor, e.g. sensors, vibrators, negative pressure pressure meter
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- A61M16/0003—Accessories therefor, e.g. sensors, vibrators, negative pressure
- A61M2016/003—Accessories therefor, e.g. sensors, vibrators, negative pressure with a flowmeter
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
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- A61M2205/00—General characteristics of the apparatus
- A61M2205/33—Controlling, regulating or measuring
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
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- A61M2205/33—Controlling, regulating or measuring
- A61M2205/3375—Acoustical, e.g. ultrasonic, measuring means
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- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
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Description
上記チャネルに面するよう構成される上記熱流センサデバイスの前面側に電気的に駆動される熱要素を形成するステップと、
上記熱流センサデバイスとの電気接点を作るため、上記電気的に駆動される熱要素に電気的に結合される結合パッドを形成するステップとを有し、上記結合パッドが、上記熱流センサデバイスの背面側から接点にアクセス可能であるよう、上記前面側からそれる方向を向くよう構成される。導電層の背面側は、熱流センサデバイスの前面側からそれる方向を向く。これらの方法ステップは、標準的なCMOS処理フローと互換性があり、このことは、安価な製造を可能にする。
上記流体チャネルに面するよう構成される上記集積回路の前面側に電気的に駆動される熱要素、例えば温度感知要素を形成するステップと、
上記集積回路との電気接点を作るため、上記電気的に駆動される熱要素又は温度感知要素に電気的に結合される結合パッドを形成するステップとを有し、上記結合パッドが、上記流体チャネルからそれる方向を向くよう構成される。
流体チャネルに面する集積回路の前面側にある温度感知要素と、
集積回路との電気接点を作るため、温度感知要素に電気的に結合される結合パッドとを持ち、結合パッドが、集積回路の背面側から接点にアクセス可能であるよう、前面側からそれる方向を向くよう構成される。
流体チャネルに面するよう構成される集積回路の前面側の例えば温度感知要素といった電気的に駆動される熱要素を形成するステップと、
集積回路の電気接点を作るため、例えば温度感知要素といった電気的に駆動される熱要素に電気的に結合される結合パッドを形成するステップとを有し、この結合パッドが、流体チャネルからそれる方向を向くよう構成される。
Claims (25)
- 温度測定に基づき流体チャネルにおけるフローを検出する熱流センサデバイスであって、
前記チャネルに面するよう構成される前記熱流センサデバイスの前面側にある電気的に駆動される熱要素と、
前記熱流センサデバイスとの電気接点を作るため、前記電気的に駆動される熱要素に電気的に結合される結合パッドとを有し、
前記結合パッドが、前記熱流センサデバイスの背面側から接点にアクセス可能であるよう、前記前面側からそれる方向を向くよう構成され、
基板を有し、前記電気的に駆動される熱要素が、前記基板の前面側に配置され、前記基板は、背面側に1つ又は複数の柱を形成するようパターン化され、前記結合パッドが、前記柱の1つにおいて前記基板の背面側に配置される、熱流センサデバイス。 - 前記電気的に駆動される熱要素及び前記結合パッドの間の電気接続のため、前記熱流センサデバイスの前面側に導電層を有し、前記結合パッドが、前記導電層の背面側に配置され、前記導電層の背面側は、前記熱流センサデバイスの前面側からそれる方向を向く、請求項1に記載の熱流センサデバイス。
- 前記チャネルにおいて流体から前記熱流センサデバイスを電気的に絶縁する絶縁層を有する、請求項1に記載の熱流センサデバイス。
- 前記絶縁層が、ポリイミドを有する、請求項3に記載の熱流センサデバイス。
- 前記基板が、前記結合パッドを露出させる開口を提供するようパターン化され、前記開口を介して前記結合パッドとの接触が可能にされる、請求項1に記載の熱流センサデバイス。
- 前記1つ又は複数の柱が、電気抵抗性材料の被覆を具備する、請求項1に記載の熱流センサデバイス。
- 前記被覆が、パリレンを有する、請求項6に記載の熱流センサデバイス。
- 前記電気的に駆動される熱要素が、前記チャネルに面するよう、前記熱流センサデバイスの前面側に加熱要素又は温度センサ要素を有する、請求項1に記載の熱流センサデバイス。
- 前記加熱要素が、レジスタとして形成される、請求項8に記載の熱流センサデバイス。
- 前記レジスタが、多結晶シリコンでできている、請求項9に記載の熱流センサデバイス。
- 集積回路として形成される、請求項1に記載の熱流センサデバイス。
- シリコンオンインシュレータ集積回路として形成される、請求項1に記載の熱流センサデバイス。
- プリント回路基板と、前記プリント回路基板に取り付けられる請求項1に記載の熱流センサデバイスとを有し、結合パッドが、前記プリント回路基板の対応する接点に結合される、アセンブリ。
- チャネルを持つシステムであって、前記チャネルが、壁を持ち、前記壁が、リセスを持ち、前記リセスに請求項1に記載の熱流センサデバイス又は請求項13に記載のアセンブリが取り付けられ、電気的に駆動される熱要素が前記チャネルに面する、システム。
- 請求項1乃至12のいずれか一項に記載の熱流センサデバイスを有するネビュライザシステム。
- 温度測定に基づき流体チャネルにおけるフローを検出する熱流センサデバイスの製造方法において、
前記チャネルに面するよう構成される前記熱流センサデバイスの前面側に電気的に駆動される熱要素を形成するステップと、
前記熱流センサデバイスとの電気接点を作るため、前記電気的に駆動される熱要素に電気的に結合される結合パッドを形成するステップとを有し、前記結合パッドが、前記熱流センサデバイスの背面側から接点にアクセス可能であるよう、前記前面側からそれる方向を向くよう構成され、
前記熱流センサデバイスが、基板を持ち、前記電気的に駆動される熱要素は、前記基板の前記前面側に配置され、前記方法が、背面側に柱を形成するため前記基板をパターン化するステップを有し、前記方法が更に、前記柱に前記結合パッドを形成するステップを有する、製造方法。 - 前記電気的に駆動される要素を形成するステップが、シリコン基板の前面側に多結晶シリコン層を堆積及びパターン化するステップを有する、請求項16に記載の方法。
- 前記電気的に駆動される熱要素及び前記結合パッドの間の電気接続に関する導電層を形成するステップを有し、前記結合パッドが、前記導電層の背面側に配置され、前記導電層の背面側は、前記熱流センサデバイスの前面側からそれる方向を向く、請求項16に記載の方法。
- 前記チャネルにおける流体から前記熱流センサデバイスを電気的に絶縁する絶縁層を形成するステップを有する、請求項16に記載の方法。
- 前記絶縁層が、ポリイミドを有する、請求項19に記載の方法。
- 前記方法は、前記結合パッドを露出させる開口を提供するため前記基板をパターン化するステップを持ち、前記開口を介して前記結合パッドとの接触が可能にされる、請求項16に記載の方法。
- 前記柱に電気抵抗性材料の被覆を形成するステップを有する、請求項16に記載の方法。
- 前記被覆が、パリレンを有する、請求項22に記載の方法。
- プリント回路基板上へ前記熱流センサデバイスを組み立てるステップと、前記プリント回路基板上の対応する接点に前記結合パッドを結合させるステップとを有する、請求項16に記載の方法。
- 流体フローに関するチャネルの壁におけるリセスに前記熱流センサデバイスを取り付けるステップを持つ、請求項16に記載の方法。
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