JP5563765B2 - 排水処理システム及び排水処理方法 - Google Patents
排水処理システム及び排水処理方法 Download PDFInfo
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- JP5563765B2 JP5563765B2 JP2008551005A JP2008551005A JP5563765B2 JP 5563765 B2 JP5563765 B2 JP 5563765B2 JP 2008551005 A JP2008551005 A JP 2008551005A JP 2008551005 A JP2008551005 A JP 2008551005A JP 5563765 B2 JP5563765 B2 JP 5563765B2
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- wastewater
- treated
- silicon processing
- water
- treatment system
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- 238000004065 wastewater treatment Methods 0.000 title claims description 48
- 239000002351 wastewater Substances 0.000 claims description 97
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 71
- 229910052710 silicon Inorganic materials 0.000 claims description 71
- 239000010703 silicon Substances 0.000 claims description 71
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 58
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 58
- 238000001914 filtration Methods 0.000 claims description 55
- 239000001569 carbon dioxide Substances 0.000 claims description 29
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 28
- 238000002347 injection Methods 0.000 claims description 18
- 239000007924 injection Substances 0.000 claims description 18
- 239000002699 waste material Substances 0.000 claims description 14
- 230000002378 acidificating effect Effects 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 8
- 239000012528 membrane Substances 0.000 description 45
- 239000007789 gas Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 239000000706 filtrate Substances 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000008235 industrial water Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 235000020681 well water Nutrition 0.000 description 2
- 239000002349 well water Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012510 hollow fiber Substances 0.000 description 1
- 239000010842 industrial wastewater Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005374 membrane filtration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/18—Details relating to membrane separation process operations and control pH control
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
- C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/06—Controlling or monitoring parameters in water treatment pH
Landscapes
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
図1に示す構成の排水処理システム20、及び表1に示すシリコン加工排水(被処理排水)を用意した。次に、運転待機要求時(1)と運転待機解除時(15時間後)の運転状態を表2に示す状態としてシリコン加工排水の処理を行った。即ち、運転待機要求時(1)には、濾過水及び濃縮水を排水タンク2に送液するように流路切り替えバルブ13,14をそれぞれ切り替えるとともに、排水タンク2中の被処理排水のpHを5.2に調整し、濾過膜11に連続的に送液(連続循環運転)した。運転待機解除後(運転再開後)における排水処理システム20の運転状態を確認した結果を「運転再開結果」として表2に示す。
運転待機要求時と運転待機解除時(15時間後)の運転状態を表2に示す状態としてシリコン加工排水の処理を行ったこと以外は、前述の実施例1と同様にしてシリコン加工排水の処理を行った。運転待機解除後(運転再開後)における排水処理システム20の運転状態を確認した結果を「運転再開結果」として表2に示す。
図1に示す構成の排水処理システム20、及び表1に示すシリコン加工排水(被処理排水)を使用し、運転待機要求時(2)と運転待機解除時(15時間後)の運転状態を表2に示す状態としてシリコン加工排水の処理を行った。即ち、運転待機要求時(2)には、先ず、炭酸ガスの注入のみ継続してそれ以外の運転は停止するとともに、運転待機解除時には、濃縮水を系外に排出するように流路切り替えバルブ12,13,14をそれぞれ切り替え、排水タンク2の直後から濾過膜11の直前までの間の流路の内部に滞留した被処理排水を系外に排出した。次いで、通常の排水処理システムの運転を再開した。運転待機解除後(運転再開後)における排水処理システム20の運転状態を確認した結果を「運転再開結果」として表3に示す。
Claims (3)
- シリコン加工屑を含有するシリコン加工排水を濾過処理する排水処理システムであって、
前記シリコン加工排水に酸性流体を注入してそのpHが4.0〜6.5の被処理排水を得る酸性流体注入手段と、
前記被処理排水を貯留する排水貯留手段と、
前記被処理排水を濾過して、前記シリコン加工屑の含有割合が増加した濃縮水と濾過水に分離する濾過手段と、
前記被処理排水を前記排水貯留手段から前記濾過手段に送液する送液手段と、
前記排水貯留手段に貯留される前記被処理排水の量が基準量を下回った場合、又は分離された濃縮水及び/若しくは濾過水の量が基準量を上回った場合に、前記濾過手段に流入する直前における前記被処理排水のpHと連動して、連続的又は間欠的に、前記被処理排水のpHを4.0〜6.5に調整して前記濾過手段に送液するとともに、前記濃縮水、又は前記濃縮水と前記濾過水を前記排水貯留手段に送液することが可能な循環送液制御手段と、を備えた排水処理システム。 - 前記酸性流体が、炭酸ガスである請求項1に記載の排水処理システム。
- シリコン加工屑を含有するシリコン加工排水を濾過処理する排水処理方法であって、
請求項1または2に記載の排水処理システムを使用する排水処理方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008551005A JP5563765B2 (ja) | 2006-12-25 | 2007-11-28 | 排水処理システム及び排水処理方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006348049 | 2006-12-25 | ||
JP2006348049 | 2006-12-25 | ||
PCT/JP2007/072958 WO2008078498A1 (ja) | 2006-12-25 | 2007-11-28 | 排水処理システム及び排水処理方法 |
JP2008551005A JP5563765B2 (ja) | 2006-12-25 | 2007-11-28 | 排水処理システム及び排水処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2008078498A1 JPWO2008078498A1 (ja) | 2010-04-22 |
JP5563765B2 true JP5563765B2 (ja) | 2014-07-30 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008551005A Active JP5563765B2 (ja) | 2006-12-25 | 2007-11-28 | 排水処理システム及び排水処理方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7922915B2 (ja) |
JP (1) | JP5563765B2 (ja) |
CN (1) | CN101573298B (ja) |
MY (1) | MY146285A (ja) |
WO (1) | WO2008078498A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101426723B (zh) * | 2006-02-24 | 2011-12-14 | Ihi压缩和机器株式会社 | 硅粒的处理方法和装置 |
KR100985861B1 (ko) * | 2008-09-24 | 2010-10-08 | 씨앤지하이테크 주식회사 | 반도체용 슬러리 공급장치 및 슬러리 공급방법 |
EP2489641A1 (en) * | 2011-02-15 | 2012-08-22 | Ostara Nutrient Recovery Technologies Inc. | Methods and apparatus for struvite recovery using upstream CO2 injection |
JP2012178418A (ja) * | 2011-02-25 | 2012-09-13 | Nomura Micro Sci Co Ltd | 研磨剤の回収方法および研磨剤の回収装置 |
CN102233539A (zh) * | 2011-07-05 | 2011-11-09 | 大连隆正光饰机制造有限公司 | 光饰机水循环*** |
JP5868150B2 (ja) * | 2011-12-06 | 2016-02-24 | 株式会社ディスコ | 廃液処理装置 |
WO2013091129A1 (en) * | 2011-12-19 | 2013-06-27 | General Electric Company | Membrane filtration process for industrial process water treatment and recovery |
CA2975934A1 (en) * | 2015-02-03 | 2016-08-11 | Chelan, Inc. | Improved fluid treatment apparatus and processes |
CN109704342B (zh) * | 2018-12-26 | 2024-05-03 | 山东辰宇稀有材料科技有限公司 | 一种硅粉废液回收设备 |
JP2021094674A (ja) | 2019-12-19 | 2021-06-24 | 株式会社ディスコ | 廃液処理装置及び加工水再生システム |
Citations (12)
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JPS6261691A (ja) * | 1985-09-12 | 1987-03-18 | Japan Organo Co Ltd | 濾過膜による濾過方法 |
JPH07316846A (ja) * | 1994-05-27 | 1995-12-05 | Asahi Chem Ind Co Ltd | ケミカルメカニカルポリッシング液の再生方法 |
JPH08115892A (ja) * | 1994-10-14 | 1996-05-07 | Kurita Water Ind Ltd | 研磨剤粒子の回収方法 |
JPH1066971A (ja) * | 1996-08-28 | 1998-03-10 | Toray Ind Inc | 純水製造装置および純水製造方法 |
JPH11156164A (ja) * | 1997-11-26 | 1999-06-15 | Mitsubishi Heavy Ind Ltd | 酢酸セルロース膜の保管方法及びホウ酸廃液処理装置 |
JP2001038153A (ja) * | 1999-05-27 | 2001-02-13 | Sanyo Electric Co Ltd | 排水の再生システム |
JP2001198825A (ja) * | 2000-01-14 | 2001-07-24 | Kurita Water Ind Ltd | 研磨材の回収装置 |
JP2002050596A (ja) * | 2000-08-02 | 2002-02-15 | Sanyo Electric Co Ltd | 半導体結晶物の処理システムおよび半導体ウェハの処理システム |
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JP2005021805A (ja) * | 2003-07-02 | 2005-01-27 | Sumitomo Mitsubishi Silicon Corp | 排水処理方法及び排水処理システム |
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-
2007
- 2007-11-28 WO PCT/JP2007/072958 patent/WO2008078498A1/ja active Application Filing
- 2007-11-28 MY MYPI20092475A patent/MY146285A/en unknown
- 2007-11-28 JP JP2008551005A patent/JP5563765B2/ja active Active
- 2007-11-28 CN CN2007800481847A patent/CN101573298B/zh active Active
-
2009
- 2009-06-03 US US12/477,380 patent/US7922915B2/en active Active
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JPS6261691A (ja) * | 1985-09-12 | 1987-03-18 | Japan Organo Co Ltd | 濾過膜による濾過方法 |
JPH07316846A (ja) * | 1994-05-27 | 1995-12-05 | Asahi Chem Ind Co Ltd | ケミカルメカニカルポリッシング液の再生方法 |
JPH08115892A (ja) * | 1994-10-14 | 1996-05-07 | Kurita Water Ind Ltd | 研磨剤粒子の回収方法 |
JPH1066971A (ja) * | 1996-08-28 | 1998-03-10 | Toray Ind Inc | 純水製造装置および純水製造方法 |
JPH11156164A (ja) * | 1997-11-26 | 1999-06-15 | Mitsubishi Heavy Ind Ltd | 酢酸セルロース膜の保管方法及びホウ酸廃液処理装置 |
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JP2005021805A (ja) * | 2003-07-02 | 2005-01-27 | Sumitomo Mitsubishi Silicon Corp | 排水処理方法及び排水処理システム |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008078498A1 (ja) | 2010-04-22 |
US7922915B2 (en) | 2011-04-12 |
CN101573298B (zh) | 2012-11-14 |
WO2008078498A1 (ja) | 2008-07-03 |
MY146285A (en) | 2012-07-31 |
US20090236292A1 (en) | 2009-09-24 |
CN101573298A (zh) | 2009-11-04 |
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