JP5542735B2 - リード構造の算出方法 - Google Patents
リード構造の算出方法 Download PDFInfo
- Publication number
- JP5542735B2 JP5542735B2 JP2011098883A JP2011098883A JP5542735B2 JP 5542735 B2 JP5542735 B2 JP 5542735B2 JP 2011098883 A JP2011098883 A JP 2011098883A JP 2011098883 A JP2011098883 A JP 2011098883A JP 5542735 B2 JP5542735 B2 JP 5542735B2
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- JP
- Japan
- Prior art keywords
- stylus
- measurement
- measured values
- estimated value
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004364 calculation method Methods 0.000 title description 3
- 238000005259 measurement Methods 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 29
- 230000003746 surface roughness Effects 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 5
- 238000012937 correction Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000006870 function Effects 0.000 description 10
- 241001422033 Thestylus Species 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- PXFBZOLANLWPMH-UHFFFAOYSA-N 16-Epiaffinine Natural products C1C(C2=CC=CC=C2N2)=C2C(=O)CC2C(=CC)CN(C)C1C2CO PXFBZOLANLWPMH-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
Δxは、単位がmmの、軸線方向の走査区間幅であり、
ΔΦは、単位が°の、円周方向の走査区間幅であり、
前記変数は、
λ:単位がmmの、軸線方向の周期成分の波長、
DG:整数の、線条数、
Ak:単位がμmの、コサイン関数の振幅、及び
φk:単位がラジアンの、コサイン関数の角度変位、
であることによって解決される。
Δx:軸方向の触針間隔(mm)
ΔΦ:円周方向の触針間隔(°)
ならびに、パラメータは、
λ:軸方向の周期成分の波長(mm)
DG:整数の線条数(単位無し)
Αk:コサイン関数の振幅(μm)
φk:コサイン関数の角変位(ラジアン)
となる。
Claims (5)
- 少なくとも部分的に円筒状の加工品の表面粗さのうねり曲線を算出するための方法であって、
前記加工品の軸線方向に延在し、円周方向に互いに間隔をあけた複数の触針区間が、この加工品の対象とする表面領域内で走査され、
前記うねり曲線の少なくとも1つの変数の値が、前記複数の触針区間によって得られる複数の測定値に基づいて算出される当該方法において、
前記うねり曲線の少なくとも1つの変数に対する1つの推定値が、1つの第1触針区間に割り当てられた複数の測定値に基づいて算出され、
この推定値が、少なくとも1つの第2触針区間に割り当てられた複数の測定値に基づいて補正され、
前記推定値は、等化関数:
Δxは、単位がmmの、軸線方向の走査区間幅であり、
ΔΦは、単位が°の、円周方向の走査区間幅であり、
前記変数は、
λ:単位がmmの、軸線方向の周期成分の波長、
DG:整数の、線条数、
Ak:単位がμmの、コサイン関数の振幅、及び
φk:単位がラジアンの、コサイン関数の角度変位、
であることを特徴とする方法。 - 1つ又は複数の推定値が、新たな触針区間によって得られた測定値に基づいて補正されることを特徴とする請求項1に記載の方法。
- 前記変数の最終結果を算出するため、全ての触針区間の測定値が測定されるまで、前記推定値の補正が繰り返されることを特徴とする請求項1又は2に記載の方法。
- うねり深さ及び周期長に対する推定値が、前記1つの第1触針区間に割り当てられた前記複数の測定値に基づいて算出されることを特徴とする請求項1〜3のいずれか1項に記載の方法。
- 前記うねり曲線の前記線条数に対する1つの推定値が、前記第2触針区間の走査後に算出されることを特徴とする請求項4に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201010018820 DE102010018820B3 (de) | 2010-04-29 | 2010-04-29 | Verfahren zur Ermittlung einer Drallstruktur |
DE102010018820.4 | 2010-04-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011232342A JP2011232342A (ja) | 2011-11-17 |
JP5542735B2 true JP5542735B2 (ja) | 2014-07-09 |
Family
ID=44246327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011098883A Active JP5542735B2 (ja) | 2010-04-29 | 2011-04-27 | リード構造の算出方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8973280B2 (ja) |
EP (1) | EP2383541B1 (ja) |
JP (1) | JP5542735B2 (ja) |
CN (1) | CN102252644B (ja) |
DE (1) | DE102010018820B3 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009032353A1 (de) * | 2009-07-08 | 2011-09-08 | Hommel-Etamic Gmbh | Verfahren zur Ermittlung der Form eines Werkstücks |
DE102010018820B3 (de) | 2010-04-29 | 2011-10-13 | Hommel-Etamic Gmbh | Verfahren zur Ermittlung einer Drallstruktur |
DE102010035147B4 (de) | 2010-08-23 | 2016-07-28 | Jenoptik Industrial Metrology Germany Gmbh | Meßvorrichtung |
DE102012018580B4 (de) | 2012-09-20 | 2015-06-11 | Jenoptik Industrial Metrology Germany Gmbh | Messvorrichtung und Messverfahren zur Inprozess-Messung an Prüflingen während eines Bearbeitungsvorganges an einer Bearbeitungsmaschine, insbesondere einer Schleifmaschine |
CN104061897B (zh) * | 2014-07-10 | 2017-01-11 | 二重集团(德阳)重型装备股份有限公司 | 大型分体式螺母柱共面度检测方法 |
DE102016107135A1 (de) | 2016-04-18 | 2017-10-19 | Jenoptik Industrial Metrology Germany Gmbh | Messanordnung |
DE102016122695A1 (de) | 2016-07-20 | 2018-01-25 | Jenoptik Industrial Metrology Germany Gmbh | Oberflächenmessvorrichtung |
DE102017106741B4 (de) | 2017-03-29 | 2019-11-14 | Jenoptik Industrial Metrology Germany Gmbh | Oberflächenmessgerät |
DE102018103420A1 (de) | 2018-02-15 | 2019-08-22 | Jenoptik Industrial Metrology Germany Gmbh | Messgerät zur Oberflächen- oder Konturmessung |
ES2935357T3 (es) | 2018-09-13 | 2023-03-06 | Innovent Ev | Método de determinación óptica de macrotorsión en piezas de trabajo cilíndricas mediante mediciones de luz difusa |
DE102019105059A1 (de) | 2018-12-19 | 2020-06-25 | Jenoptik Industrial Metrology Germany Gmbh | Verfahren zum Betreiben eines Oberflächenmessgeräts |
DE102020108182A1 (de) | 2019-05-07 | 2020-11-12 | Jenoptik Industrial Metrology Germany Gmbh | Oberflächenmessgerät |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1673865A1 (de) | 1968-03-16 | 1971-09-30 | Perthen Johannes Dr Ing | Verfahren und Einrichtung zur Bestimmung eines Oberflaechenmasses |
DE3841439A1 (de) | 1988-12-09 | 1990-06-13 | Pietzsch Automatisierungstech | Vorrichtung zum gleichzeitigen vermessen hintereinanderliegender zylinderbohrungen |
DE3900106C2 (de) | 1989-01-04 | 1994-01-05 | Bbc Pat Mestechnik Gmbh | Verfahren und Vorrichtung zum Vermessen der Form von Zylinderbohrungen in Werkstücken |
JPH05187859A (ja) * | 1992-01-14 | 1993-07-27 | Tokyo Seimitsu Co Ltd | 物体の輪郭形状測定方法 |
DE4315745A1 (de) | 1993-05-11 | 1994-11-17 | Ba Be D Gmbh | Verfahren zum Bestimmen der Oberflächengüte eines Prüflings |
JPH0968421A (ja) * | 1995-08-31 | 1997-03-11 | Mitsubishi Heavy Ind Ltd | 表面粗度異常品の自動検出方法及び装置 |
GB9612383D0 (en) * | 1995-12-07 | 1996-08-14 | Rank Taylor Hobson Ltd | Surface form measurement |
DE19740141C1 (de) * | 1997-09-12 | 1999-04-29 | Daimler Chrysler Ag | Verfahren zur Ermittlung einer Drallstruktur in der Oberflächenrauheit eines feinbearbeiteten Wellenzapfens |
DE19817406C1 (de) | 1998-04-20 | 2000-02-24 | Mahr Gmbh | Gerät und Verfahren zur Messung von Werkstückoberflächen, insbesondere zur Rauheitsmessung |
JP2001033233A (ja) * | 1999-07-23 | 2001-02-09 | Sumitomo Metal Ind Ltd | 管状および棒状被検査物の検査方法 |
DE19952592C1 (de) | 1999-11-02 | 2001-05-10 | Hommelwerke Gmbh | Taster zur Abtastung des Verlaufs einer Oberfläche eines Werkstücks |
JP4331097B2 (ja) * | 2004-12-10 | 2009-09-16 | 株式会社東芝 | 表面粗さの計測方法および装置およびタービンの劣化診断方法 |
DE102006001799B4 (de) * | 2006-01-12 | 2007-10-31 | Carl Mahr Holding Gmbh | Verfahren und Vorrichtung zur Erfassung von Drallstrukturen |
DE102010018820B3 (de) | 2010-04-29 | 2011-10-13 | Hommel-Etamic Gmbh | Verfahren zur Ermittlung einer Drallstruktur |
-
2010
- 2010-04-29 DE DE201010018820 patent/DE102010018820B3/de not_active Revoked
-
2011
- 2011-04-11 EP EP20110003013 patent/EP2383541B1/de active Active
- 2011-04-26 CN CN201110104544.9A patent/CN102252644B/zh active Active
- 2011-04-27 JP JP2011098883A patent/JP5542735B2/ja active Active
- 2011-04-28 US US13/096,375 patent/US8973280B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2011232342A (ja) | 2011-11-17 |
US20110283784A1 (en) | 2011-11-24 |
EP2383541A1 (de) | 2011-11-02 |
CN102252644B (zh) | 2015-03-11 |
US8973280B2 (en) | 2015-03-10 |
CN102252644A (zh) | 2011-11-23 |
DE102010018820B3 (de) | 2011-10-13 |
EP2383541B1 (de) | 2013-06-26 |
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