JP5474946B2 - パッケージ応力を補償する応力逃がしを有する容量性センサ - Google Patents
パッケージ応力を補償する応力逃がしを有する容量性センサ Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
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- Microelectronics & Electronic Packaging (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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Description
可動要素の第1の端部と第2の端部との間で変位した回転軸に対して相対移動することによって、前記回転軸と前記第1の端部との間の第1のセクションおよび前記回転軸と前記第2の端部との間の第2のセクションを形成する可動要素において、前記第1のセクションは、前記回転軸と前記第2の端部との間の第2の長さより長い前記回転軸と前記第1の端部との間の第1の長さを有し、前記第1のセクションは、前記可動要素を貫通して延在する溝を有している、可動要素と、
前記可動要素の前記第1のセクションに対向している第1の電極要素、および、前記可動要素の前記第2のセクションに対向している第2の電極要素を備えるとともに、前記可動要素から離間している静的導電層とを備える、デバイスが提供される。
Claims (5)
- 微小電気機械システム(MEMS)センサを備えるデバイスにおいて、前記センサは、
可動要素の第1の端部と第2の端部との間で変位した回転軸に対して相対移動することによって、前記回転軸と前記第1の端部との間の第1のセクションおよび前記回転軸と前記第2の端部との間の第2のセクションを形成する可動要素において、前記第1のセクションは、前記回転軸と前記第2の端部との間の第2の長さより長い前記回転軸と前記第1の端部との間の第1の長さを有し、前記第1のセクションは、前記可動要素を貫通して延在する溝を有している、可動要素と、
前記可動要素の前記第1のセクションに対向している第1の電極要素、および、前記可動要素の前記第2のセクションに対向している第2の電極要素とを備え、前記基板上にて前記可動要素から離間して設けられた静的導電層が前記第1および第2の電極要素を含んでなる、デバイス。 - 前記溝はそれぞれ、第1の寸法および第2の寸法を示し、前記第1の寸法は、前記第2の寸法より長い、請求項1に記載のデバイス。
- 前記可動要素は、前記回転軸に直交する対称軸を示し、前記溝は、前記対称軸の両側に均等に分配される請求項1に記載のデバイス。
- 前記第1のセクションは、前記第1のセクション内で前記溝を形成する前に、第1の質量を有し、前記第1のセクションは、前記第1のセクション内で前記溝を形成した後に、前記第1の質量より2〜5パーセント小さい範囲にある第2の質量を有する、請求項1に記載のデバイス。
- 基板を設ける工程と、
第1の電極要素および第2の電極要素を含む静的導電性層を、前記基板上に形成する工程と、
前記静的導電性層上に犠牲層を形成する工程と、
可動要素の第1の端部と第2の端部との間で変位した回転軸に対して相対移動することによって、前記回転軸と前記第1の端部との間の第1のセクションおよび前記回転軸と前記第2の端部との間の第2のセクションを形成する可動要素を前記犠牲層上に形成する、可動要素形成工程であって、前記第1のセクションは、前記回転軸と前記第1の端部との間に延伸するとともに前記回転軸と前記第2の端部との間の第2の長さより長い第1の長さを有し、前記可動要素形成工程は、前記可動要素を貫通して延在する溝を前記第1のセクション内に形成することを含む、可動要素形成工程と、
前記第1の電極要素が前記可動要素の前記第1のセクションに対向し、および、前記第2の電極要素が前記可動要素の前記第2のセクションに対向すべく形成されている導電性層を、前記可動要素から離間させるために、前記犠牲層を選択的に除去する工程とを備える、微小電気機械システム(MEMS)センサを作製するための方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/129,548 US8096182B2 (en) | 2008-05-29 | 2008-05-29 | Capacitive sensor with stress relief that compensates for package stress |
US12/129,548 | 2008-05-29 | ||
PCT/US2009/036755 WO2009145963A1 (en) | 2008-05-29 | 2009-03-11 | Capacitive sensor with stress relief that compensates for package stress |
Publications (3)
Publication Number | Publication Date |
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JP2011521797A JP2011521797A (ja) | 2011-07-28 |
JP2011521797A5 JP2011521797A5 (ja) | 2012-04-26 |
JP5474946B2 true JP5474946B2 (ja) | 2014-04-16 |
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Application Number | Title | Priority Date | Filing Date |
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JP2011511659A Expired - Fee Related JP5474946B2 (ja) | 2008-05-29 | 2009-03-11 | パッケージ応力を補償する応力逃がしを有する容量性センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US8096182B2 (ja) |
JP (1) | JP5474946B2 (ja) |
CN (1) | CN102046514B (ja) |
WO (1) | WO2009145963A1 (ja) |
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2008
- 2008-05-29 US US12/129,548 patent/US8096182B2/en not_active Expired - Fee Related
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2009
- 2009-03-11 WO PCT/US2009/036755 patent/WO2009145963A1/en active Application Filing
- 2009-03-11 JP JP2011511659A patent/JP5474946B2/ja not_active Expired - Fee Related
- 2009-03-11 CN CN2009801198182A patent/CN102046514B/zh not_active Expired - Fee Related
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JP2011521797A (ja) | 2011-07-28 |
WO2009145963A1 (en) | 2009-12-03 |
CN102046514A (zh) | 2011-05-04 |
US20090293616A1 (en) | 2009-12-03 |
US8096182B2 (en) | 2012-01-17 |
CN102046514B (zh) | 2013-03-27 |
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