JP5460706B2 - X線検出器 - Google Patents
X線検出器 Download PDFInfo
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- JP5460706B2 JP5460706B2 JP2011515364A JP2011515364A JP5460706B2 JP 5460706 B2 JP5460706 B2 JP 5460706B2 JP 2011515364 A JP2011515364 A JP 2011515364A JP 2011515364 A JP2011515364 A JP 2011515364A JP 5460706 B2 JP5460706 B2 JP 5460706B2
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- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
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- QWUZMTJBRUASOW-UHFFFAOYSA-N cadmium tellanylidenezinc Chemical compound [Zn].[Cd].[Te] QWUZMTJBRUASOW-UHFFFAOYSA-N 0.000 description 1
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
- H10K39/30—Devices controlled by radiation
- H10K39/36—Devices specially adapted for detecting X-ray radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/10—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/30—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/30—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
- H10K30/35—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains comprising inorganic nanostructures, e.g. CdSe nanoparticles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
- Measurement Of Radiation (AREA)
Description
しかして、X線検出器に関する課題は、本発明によれば、基板の上に1つ電極と、バルクヘテロ接合を形成する少なくとも1つの有機活性層と、その上に1つの上側電極とを有し、半導体有機マトリクスの活性層内に、X線を電荷に直接変換することを可能にする半導体ナノ粒子が加えられていることによって解決される(請求項1)。
本発明によるX線検出器の優れた実施態様は次の通りである。
・ナノ粒子がナノ結晶として存在する(請求項2)。
・ナノ粒子つまりナノ結晶が化学合成により作られる(請求項3)。
・ナノ粒子がII−VI族、IV族またはIII−V族の化合物半導体である(請求項4)。
・ナノ粒子が、硫化鉛(PbS)、セレン化鉛(PbSe)、硫化水銀(HgS)、セレン化水銀(HgSe)、テルル化水銀(HgTe)のうちの少なくとも1つから成る(請求項5)。
・ナノ粒子が1〜20nmの典型的な直径を有する(請求項6)。
・X線検出器の有機活性層が100μm以上の層厚を有する(請求項7)。
・層厚が中間層を備えた有機活性層の多重化により得られる(請求項8)。
・層厚がフォトダイオードの積層により生じる(請求項9)。
・金属層がフォトダイオードの上に配置されている(請求項10)。
・有機活性層内のナノ粒子が少なくとも50%の体積割合にある(請求項11)。
X線検出器の製造方法に関する課題は、本発明によれば、少なくとも有機活性層が溶液(湿式化学法)から作られることによって解決される。
本発明によるX線検出器の製造方法の優れた実施態様は次の通りである。
・有機活性層がスピンコーティング、ブレイドコーティング、プリンティング、ドクターブレイディング、スプレイコーティング、ローリングのうちの少なくとも1つにより作られる。
・作業工程が最大200℃までの温度で行われる。
a)僅かな暗流と埋め込まれたX線吸収材(ナノ粒子またはナノ結晶)を備えた有機フォトダイオードまたは有機光電導体
b)定められた直径を備えた(溶液から作られた)ナノ粒子またはナノ結晶が機械的に粉砕されたため定めにくいナノ粒子と比べて電荷担体トラップの少ない再生可能な吸収材に導かれる。
c)湿式化学的処理により、X線の直接変換用のTFTパネルへのダイオード製造が真空技術および古典的な半導体製法技術を使用せずに実施できる。
d)半導体ポリマー内へのナノ結晶性X線吸収材の埋め込みが大面積処理を可能にする。
e)有機ダイオードの製造がフレキシブルTFT基板上で低い(200℃以下の)処理温度で行うことができる。
f)十分なX線吸収能力を有する数100μmの層がスプレイ被覆法または多重被覆法で得られる。
3 下側電極
4 正孔伝導層
5 有機光伝導層
6 上側電極
7 ナノ粒子
8,12 パッシベーション層
14 X線
15 電子
16 正孔
17 中間層
Claims (11)
- 基板(2)の上に1つ電極(3)と、バルクヘテロ接合を形成する少なくとも1つの有機活性層(5)と、その上に1つの上側電極(6)とを有し、前記有機活性層(5)が電子アクセプタおよび電子ドナーのブレンドを含み、半導体有機マトリクスの活性層内に、X線を電荷に直接変換することを可能にする半導体ナノ粒子(7)が加えられているX線検出器。
- ナノ粒子(7)がナノ結晶として存在する請求項1記載のX線検出器、
- ナノ粒子(7)が化学合成により作られる請求項1または2記載のX線検出器。
- ナノ粒子(7)がII−VI族、IV族またはIII−V族の化合物半導体である請求項1ないし3の1つに記載のX線検出器。
- ナノ粒子(7)が、硫化鉛(PbS)、セレン化鉛(PbSe)、硫化水銀(HgS)、セレン化水銀(HgSe)、テルル化水銀(HgTe)のうちの少なくとも1つから成る請求項1ないし4の1つに記載のX線検出器。
- ナノ粒子(7)が1〜20nmの直径を有する請求項1ないし5の1つに記載のX線検出器。
- 有機活性層(5)が100μm以上の層厚を有する請求項1ないし6の1つに記載のX線検出器。
- 層厚が中間層(17)を備えた有機活性層(5)の多重化により得られる請求項7記載のX線検出器。
- 層厚がフォトダイオードの積層により生じる請求項7記載のX線検出器。
- 金属層がフォトダイオード(1)の上に配置されている請求項1ないし9の1つに記載のX線検出器。
- 有機活性層(5)内のナノ粒子(7)が少なくとも50%の体積割合にある請求項1ないし10の1つに記載のX線検出器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008029782A DE102008029782A1 (de) | 2008-06-25 | 2008-06-25 | Photodetektor und Verfahren zur Herstellung dazu |
DE102008029782.8 | 2008-06-25 | ||
PCT/EP2009/057864 WO2009156419A1 (de) | 2008-06-25 | 2009-06-24 | Photodetektor und verfahren zur herstellung dazu |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011526071A JP2011526071A (ja) | 2011-09-29 |
JP2011526071A5 JP2011526071A5 (ja) | 2011-11-10 |
JP5460706B2 true JP5460706B2 (ja) | 2014-04-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011515364A Expired - Fee Related JP5460706B2 (ja) | 2008-06-25 | 2009-06-24 | X線検出器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20110095266A1 (ja) |
EP (1) | EP2291861A1 (ja) |
JP (1) | JP5460706B2 (ja) |
CN (1) | CN102077352B (ja) |
DE (1) | DE102008029782A1 (ja) |
WO (1) | WO2009156419A1 (ja) |
Cited By (3)
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JP2018157170A (ja) * | 2017-03-21 | 2018-10-04 | 株式会社東芝 | 放射線検出器 |
US10193093B2 (en) | 2017-03-21 | 2019-01-29 | Kabushiki Kaisha Toshiba | Radiation detector |
US10522773B2 (en) | 2017-03-03 | 2019-12-31 | Kabushiki Kaisha Toshiba | Radiation detector |
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DE102008039337A1 (de) | 2008-03-20 | 2009-09-24 | Siemens Aktiengesellschaft | Vorrichtung zum Besprühen, Verfahren dazu sowie organisches elektronisches Bauelement |
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CN109801951B (zh) * | 2019-02-13 | 2022-07-12 | 京东方科技集团股份有限公司 | 阵列基板、电致发光显示面板及显示装置 |
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US7777303B2 (en) * | 2002-03-19 | 2010-08-17 | The Regents Of The University Of California | Semiconductor-nanocrystal/conjugated polymer thin films |
SG176316A1 (en) * | 2001-12-05 | 2011-12-29 | Semiconductor Energy Lab | Organic semiconductor element |
CN100380684C (zh) * | 2002-03-19 | 2008-04-09 | 加利福尼亚大学董事会 | 半导体-纳米晶体/共轭聚合物薄膜 |
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US20060255282A1 (en) * | 2005-04-27 | 2006-11-16 | The Regents Of The University Of California | Semiconductor materials matrix for neutron detection |
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CN102017147B (zh) * | 2007-04-18 | 2014-01-29 | 因维萨热技术公司 | 用于光电装置的材料、***和方法 |
DE102008039337A1 (de) | 2008-03-20 | 2009-09-24 | Siemens Aktiengesellschaft | Vorrichtung zum Besprühen, Verfahren dazu sowie organisches elektronisches Bauelement |
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Cited By (4)
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US10522773B2 (en) | 2017-03-03 | 2019-12-31 | Kabushiki Kaisha Toshiba | Radiation detector |
JP2018157170A (ja) * | 2017-03-21 | 2018-10-04 | 株式会社東芝 | 放射線検出器 |
US10186555B2 (en) | 2017-03-21 | 2019-01-22 | Kabushiki Kaisha Toshiba | Radiation detector |
US10193093B2 (en) | 2017-03-21 | 2019-01-29 | Kabushiki Kaisha Toshiba | Radiation detector |
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DE102008029782A1 (de) | 2012-03-01 |
EP2291861A1 (de) | 2011-03-09 |
CN102077352A (zh) | 2011-05-25 |
WO2009156419A1 (de) | 2009-12-30 |
US20110095266A1 (en) | 2011-04-28 |
JP2011526071A (ja) | 2011-09-29 |
CN102077352B (zh) | 2013-06-05 |
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