JP5453599B2 - 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート - Google Patents
地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート Download PDFInfo
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- JP5453599B2 JP5453599B2 JP2011092194A JP2011092194A JP5453599B2 JP 5453599 B2 JP5453599 B2 JP 5453599B2 JP 2011092194 A JP2011092194 A JP 2011092194A JP 2011092194 A JP2011092194 A JP 2011092194A JP 5453599 B2 JP5453599 B2 JP 5453599B2
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- suspension plate
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- proof mass
- vibration
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/181—Geophones
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Geology (AREA)
- Acoustics & Sound (AREA)
- Environmental & Geological Engineering (AREA)
- Electromagnetism (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Geophysics And Detection Of Objects (AREA)
- Vibration Prevention Devices (AREA)
Description
る補助的な支持機能も提供しており、それによって面外沈下の低減に寄与している。
構成例におけるそれら2つの影響をグラフに表すことができる。
Claims (3)
- マイクロ機械加工により中央にプルーフマスが形成され該プルーフマスの両側に複数の可撓性エレメントが形成されたサスペンション・プレートにおいて、前記複数の可撓性エレメントは、前記プルーフマスを該サスペンションの延在平面内の一方向に可動にし、その他全ての方向の運動を規制しており、該サスペンション・プレートは更に、マイクロ機械加工により形成され前記複数の可撓性エレメントの間に介設された少なくとも1つの中間枠体を備えており、
該サスペンション・プレートは更に、スプリング/ガスダンピング構造を備えており、該スプリング/ガスダンピング構造が、
最外側の中間枠体に設けられた台形のピストンを備え、
前記サスペンション・プレートの内側面に設けられた、前記ピストンに対応した嵌合開口を備え、前記最外側の中間枠体が前記サスペンション・プレートの内側面に近付くと、前記ピストンが前記嵌合開口に嵌合してその中へ進入し、これによって、前記最外側の中間枠体が前記サスペンション・プレートの前記内側面に当接する前にダンピング作用が得られるようにしてある、
ことを特徴とするサスペンション・プレート。 - 前記スプリング/ガスダンピング構造の前記ピストンが、
第1半体部分を備え、
第2半体部分を備え、該第2半体部分は、小さな抵抗用スプリングを介して前記第1半体部分に結合されており、前記ピストンが前記スプリング/ガスダンピング構造の前記開口に更に進入する際に、前記ピストンの前記第2半体部分が前記第1半体部分の方へ押し付けられることにより、前記抵抗用スプリングが前記第2半体部分に対して力を作用させるようにしてある、
ことを特徴とする請求項1記載のサスペンション・プレート。 - 前記ピストンが、
第1半体部分を備え、
第2半体部分を備え、
前記第1半体部分と前記第2半体部分との間に介装されたダンピング材を備え、前記ピストンが前記スプリング/ガスダンピング構造の前記開口に更に進入する際に、前記ピストンの前記第2半体部分が前記第1半体部分の方へ押し付けられることにより、前記ダンピング材が前記第2半体部分に対して抵抗力及び散逸力を作用させるようにしてある、
ことを特徴とする請求項1記載のサスペンション・プレート。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/851,029 US7036374B2 (en) | 2002-01-25 | 2004-05-21 | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
US10/851,029 | 2004-05-21 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007517533A Division JP4782114B2 (ja) | 2004-05-21 | 2005-05-20 | 地震計 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013186244A Division JP5699269B2 (ja) | 2004-05-21 | 2013-09-09 | 加速度計及びトランスデューサ |
Publications (2)
Publication Number | Publication Date |
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JP2011185943A JP2011185943A (ja) | 2011-09-22 |
JP5453599B2 true JP5453599B2 (ja) | 2014-03-26 |
Family
ID=36282981
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007517533A Active JP4782114B2 (ja) | 2004-05-21 | 2005-05-20 | 地震計 |
JP2011092194A Active JP5453599B2 (ja) | 2004-05-21 | 2011-04-18 | 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート |
JP2013186244A Active JP5699269B2 (ja) | 2004-05-21 | 2013-09-09 | 加速度計及びトランスデューサ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007517533A Active JP4782114B2 (ja) | 2004-05-21 | 2005-05-20 | 地震計 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013186244A Active JP5699269B2 (ja) | 2004-05-21 | 2013-09-09 | 加速度計及びトランスデューサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US7036374B2 (ja) |
EP (1) | EP1754082B1 (ja) |
JP (3) | JP4782114B2 (ja) |
CN (1) | CN101014879B (ja) |
CA (1) | CA2564680C (ja) |
TW (1) | TWI368045B (ja) |
WO (1) | WO2006059231A2 (ja) |
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US7036374B2 (en) * | 2002-01-25 | 2006-05-02 | William Thomas Pike | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
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US6776042B2 (en) * | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
JP2003344445A (ja) * | 2002-05-24 | 2003-12-03 | Mitsubishi Electric Corp | 慣性力センサ |
FR2840906B1 (fr) | 2002-06-12 | 2004-07-16 | Commissariat Energie Atomique | Derives de per(3,6-anhydro) cyclodextrines, leur preparation et leur utilisation pour separer des ions, notamment des anions a base de chrome et de manganese |
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2004
- 2004-05-21 US US10/851,029 patent/US7036374B2/en not_active Expired - Lifetime
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2005
- 2005-05-19 TW TW094116335A patent/TWI368045B/zh active
- 2005-05-20 CA CA2564680A patent/CA2564680C/en active Active
- 2005-05-20 JP JP2007517533A patent/JP4782114B2/ja active Active
- 2005-05-20 CN CN2005800163915A patent/CN101014879B/zh active Active
- 2005-05-20 WO PCT/IB2005/003998 patent/WO2006059231A2/en not_active Application Discontinuation
- 2005-05-20 EP EP05850742A patent/EP1754082B1/en active Active
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WO2006059231A2 (en) | 2006-06-08 |
EP1754082B1 (en) | 2013-03-27 |
CA2564680A1 (en) | 2006-06-08 |
CN101014879A (zh) | 2007-08-08 |
JP2008500547A (ja) | 2008-01-10 |
CA2564680C (en) | 2014-04-01 |
TWI368045B (en) | 2012-07-11 |
CN101014879B (zh) | 2010-05-05 |
JP2014059303A (ja) | 2014-04-03 |
JP2011185943A (ja) | 2011-09-22 |
US7036374B2 (en) | 2006-05-02 |
JP4782114B2 (ja) | 2011-09-28 |
TW200604556A (en) | 2006-02-01 |
WO2006059231A3 (en) | 2006-08-24 |
US20050097959A1 (en) | 2005-05-12 |
EP1754082A2 (en) | 2007-02-21 |
JP5699269B2 (ja) | 2015-04-08 |
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