JP5429482B2 - 液体噴射ヘッド及び液体噴射装置 - Google Patents
液体噴射ヘッド及び液体噴射装置 Download PDFInfo
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- JP5429482B2 JP5429482B2 JP2010001593A JP2010001593A JP5429482B2 JP 5429482 B2 JP5429482 B2 JP 5429482B2 JP 2010001593 A JP2010001593 A JP 2010001593A JP 2010001593 A JP2010001593 A JP 2010001593A JP 5429482 B2 JP5429482 B2 JP 5429482B2
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- liquid ejecting
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- 239000007788 liquid Substances 0.000 title claims description 36
- 229910052719 titanium Inorganic materials 0.000 claims description 15
- 239000010936 titanium Substances 0.000 claims description 15
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 13
- 229910052726 zirconium Inorganic materials 0.000 claims description 10
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- 239000010408 film Substances 0.000 description 58
- 239000000758 substrate Substances 0.000 description 52
- 238000000034 method Methods 0.000 description 29
- 239000000463 material Substances 0.000 description 16
- 230000001681 protective effect Effects 0.000 description 16
- 239000012212 insulator Substances 0.000 description 14
- 238000005259 measurement Methods 0.000 description 13
- 238000004891 communication Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000002243 precursor Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000013078 crystal Substances 0.000 description 8
- 238000005238 degreasing Methods 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000000089 atomic force micrograph Methods 0.000 description 6
- 238000010304 firing Methods 0.000 description 6
- 150000002902 organometallic compounds Chemical class 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 229910052741 iridium Inorganic materials 0.000 description 5
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 238000010079 rubber tapping Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- MKFFGUZYVNDHIH-UHFFFAOYSA-N [2-(3,5-dihydroxyphenyl)-2-hydroxyethyl]-propan-2-ylazanium;sulfate Chemical compound OS(O)(=O)=O.CC(C)NCC(O)C1=CC(O)=CC(O)=C1.CC(C)NCC(O)C1=CC(O)=CC(O)=C1 MKFFGUZYVNDHIH-UHFFFAOYSA-N 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000010532 solid phase synthesis reaction Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
(実施形態1)
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図及びそのA−A′断面図であり、図3は、インクジェット式記録ヘッドの要部を拡大した断面図である。
装置名:NanoscopeIII(デジタルインスツルメンツ製)
AFM針:NCH(チップ形状:PointProbe、長さ125[μm]、バネ定数42[N/m]、共振周波数320[kHz])
測定モード:ACモード(タッピングモード)
測定範囲:5μm×5μm
測定解像度:1064×1064
上述した実施形態に従って、基板上に圧電体層70の焼成温度や鉛量を変化させた5種類の圧電素子A〜Eを形成した。具体的には、シリコン基板(流路形成基板10)を熱酸化して設けた弾性膜50上に酸化ジルコニウムからなる絶縁体膜55を設けた。次いで、この絶縁体膜55上に、スパッタ法により膜厚130nmの白金と5nmのイリジウムからなる第1電極60を形成した。そして、第1電極60上に、チタンからなるチタン層(種チタン)を形成し、このチタン層上に、鉛、ジルコニウム及びチタンをそれぞれ含有する有機金属化合物を有する前駆体溶液を用いて、塗布工程・乾燥工程・脱脂工程・焼成工程を得て、12層の圧電体膜72からなる厚さ1.3200μmの圧電体層70を形成した。各圧電素子A〜Eの圧電体層70の厚さ方向の断面を観察したところ、圧電体層70は厚さ方向に連続した複数の柱状のグレイン501で形成されており、表面では隣り合うグレイン501間に溝部502が存在した。
装置名:NanoscopeIII(デジタルインスツルメンツ製)
AFM針:NCH(チップ形状:PointProbe、長さ125[μm]、バネ定数42[N/m]、共振周波数320[kHz])
測定モード:ACモード(タッピングモード)
測定範囲:5μm×5μm
測定解像度:1064×1064
以上、本発明の一実施形態を説明したが、本発明の基本的な構成は上述したものに限定されるものではない。例えば、上述した実施形態1では、圧電体層70を柱状結晶で形成されたものとしたが、柱状結晶でなくてもよい。また、例えば、上述した実施形態では、流路形成基板10として、シリコン単結晶基板を例示したが、特にこれに限定されず、例えば、SOI基板、ガラス等の材料を用いるようにしてもよい。
Claims (3)
- ノズル開口に連通する圧力発生室と、
前記圧力発生室側から順に、第1電極と、前記第1電極上に形成され鉛、ジルコニウム及びチタンを含む圧電体層と、前記圧電体層の前記第1電極とは反対側に形成された第2電極と、を備え、前記圧力発生室に圧力変化を生じさせる圧電素子と、を具備し、
前記圧電体層の前記第2電極側表面のグレイン間に存在する溝部が、0<d/ρ≦0.900(d:溝部の深さ、w:溝部の幅、ρ:曲率半径(d2+w2/4)/2d)を満たすことを特徴とする液体噴射ヘッド。 - 前記圧電体層の厚さは6μm以下であることを特徴とする請求項1に記載の液体噴射ヘッド。
- 請求項1又は2に記載の液体噴射ヘッドを具備することを特徴とする液体噴射装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010001593A JP5429482B2 (ja) | 2010-01-06 | 2010-01-06 | 液体噴射ヘッド及び液体噴射装置 |
US12/983,441 US8491101B2 (en) | 2010-01-06 | 2011-01-03 | Liquid ejecting head and liquid ejecting apparatus |
EP11150067.4A EP2343188B1 (en) | 2010-01-06 | 2011-01-04 | Liquid ejecting head and liquid ejecting apparatus |
CN201110005276.5A CN102133814B (zh) | 2010-01-06 | 2011-01-06 | 液体喷头以及液体喷射装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010001593A JP5429482B2 (ja) | 2010-01-06 | 2010-01-06 | 液体噴射ヘッド及び液体噴射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011140153A JP2011140153A (ja) | 2011-07-21 |
JP5429482B2 true JP5429482B2 (ja) | 2014-02-26 |
Family
ID=43776631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010001593A Active JP5429482B2 (ja) | 2010-01-06 | 2010-01-06 | 液体噴射ヘッド及び液体噴射装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8491101B2 (ja) |
EP (1) | EP2343188B1 (ja) |
JP (1) | JP5429482B2 (ja) |
CN (1) | CN102133814B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5803528B2 (ja) * | 2011-09-30 | 2015-11-04 | ブラザー工業株式会社 | 圧電アクチュエータ、液体移送装置及び圧電アクチュエータの製造方法 |
JP2019162734A (ja) * | 2018-03-19 | 2019-09-26 | セイコーエプソン株式会社 | 液体吐出ヘッド、液体吐出装置、圧電デバイス |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3381473B2 (ja) * | 1994-08-25 | 2003-02-24 | セイコーエプソン株式会社 | 液体噴射ヘッド |
JP3636301B2 (ja) * | 2000-12-13 | 2005-04-06 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
JP2002316417A (ja) * | 2001-02-19 | 2002-10-29 | Seiko Epson Corp | インクジェット式記録ヘッド及びインクジェット式記録装置 |
JP2003127366A (ja) | 2001-10-26 | 2003-05-08 | Seiko Epson Corp | インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置 |
JP2004363489A (ja) * | 2003-06-06 | 2004-12-24 | Ngk Insulators Ltd | 圧電/電歪素子、圧電/電歪素子の製造方法、圧電/電歪デバイス及び圧電/電歪デバイスの製造方法 |
JP2005088441A (ja) * | 2003-09-18 | 2005-04-07 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
JP4058018B2 (ja) * | 2003-12-16 | 2008-03-05 | 松下電器産業株式会社 | 圧電素子及びその製造方法、並びにその圧電素子を備えたインクジェットヘッド、インクジェット式記録装置及び角速度センサ |
CN100527615C (zh) * | 2004-04-20 | 2009-08-12 | 株式会社东芝 | 薄膜压电谐振器及其制造方法 |
US7816847B2 (en) | 2004-07-15 | 2010-10-19 | Ngk Insulators, Ltd. | Dielectric electron emitter comprising a polycrystalline substance |
JP5168443B2 (ja) * | 2006-08-08 | 2013-03-21 | セイコーエプソン株式会社 | 圧電素子、アクチュエータ装置、液体噴射ヘッド及び液体噴射装置 |
JP4296441B2 (ja) * | 2006-10-11 | 2009-07-15 | セイコーエプソン株式会社 | アクチュエータ装置の製造方法 |
JP2008284781A (ja) * | 2007-05-17 | 2008-11-27 | Seiko Epson Corp | 液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
JP2008311290A (ja) | 2007-06-12 | 2008-12-25 | Seiko Epson Corp | 圧電体素子、圧電体素子の製造方法、流体噴射ヘッド、流体噴射装置 |
JP2009076819A (ja) * | 2007-09-25 | 2009-04-09 | Seiko Epson Corp | アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置 |
JP5475272B2 (ja) | 2008-03-21 | 2014-04-16 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
JP2010021375A (ja) | 2008-07-10 | 2010-01-28 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置並びに圧電素子 |
JP5320886B2 (ja) | 2008-07-28 | 2013-10-23 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置並びに圧電素子 |
JP5024564B2 (ja) * | 2009-02-20 | 2012-09-12 | セイコーエプソン株式会社 | アクチュエーター装置及び液体噴射ヘッド |
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CN102133814A (zh) | 2011-07-27 |
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