JP5402481B2 - 表示装置、電子機器及び表示装置の製造方法 - Google Patents
表示装置、電子機器及び表示装置の製造方法 Download PDFInfo
- Publication number
- JP5402481B2 JP5402481B2 JP2009229063A JP2009229063A JP5402481B2 JP 5402481 B2 JP5402481 B2 JP 5402481B2 JP 2009229063 A JP2009229063 A JP 2009229063A JP 2009229063 A JP2009229063 A JP 2009229063A JP 5402481 B2 JP5402481 B2 JP 5402481B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- display device
- driving transistor
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 230000005684 electric field Effects 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 19
- 230000000903 blocking effect Effects 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 2
- 238000005304 joining Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 123
- 239000010410 layer Substances 0.000 description 53
- 238000005192 partition Methods 0.000 description 13
- 239000011229 interlayer Substances 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 3
- 229910017150 AlTi Inorganic materials 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000003125 aqueous solvent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229940005642 polystyrene sulfonic acid Drugs 0.000 description 2
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 1
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- -1 polyparaphenylene vinylene Polymers 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136218—Shield electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
- H01L29/78648—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate arranged on opposing sides of the channel
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Geometry (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Description
有機EL素子と、
ドレイン電極及びソース電極の一方及び他方が、それぞれ前記有機EL素子及びアノードラインに接続される駆動トランジスタと、
ゲート電極がセレクトラインに接続され、前記ドレイン電極及びソース電極の一方及び他方が、それぞれデータライン及び前記駆動トランジスタのゲート電極に接続されたスイッチトランジスタと、
を備え、
前記駆動トランジスタは、
基板上部に形成された半導体膜と、
前記半導体膜上に形成されたブロッキング膜と、
を備え、
前記駆動トランジスタの前記ドレイン電極及びソース電極は、前記ブロッキング膜上に対向して形成され、
前記ブロッキング膜は、前記基板側から第一絶縁膜、電界遮蔽膜、第二絶縁膜の三層を有し、
前記電界遮蔽膜は、前記第二絶縁膜を介して前記駆動トランジスタの前記ドレイン電極又は前記ソース電極のうちのいずれか一方と層方向に重なるように形成され、前記スイッチトランジスタは、前記ブロッキング膜を備えていないことを特徴とする。
前記電界遮蔽膜は、前記駆動トランジスタの前記ドレイン電極及び前記ソース電極と前記不純物半導体膜とで形成される電界を遮蔽するようにしてもよい。
上述の表示装置を備えたことを特徴とする。
前記表示装置が、
有機EL素子と、
ドレイン電極及びソース電極の一方及び他方が、それぞれ前記有機EL素子及びアノードラインに接続される駆動トランジスタと、
ゲート電極がセレクトラインに接続され、前記ドレイン電極及びソース電極の一方及び他方が、それぞれデータライン及び前記駆動トランジスタのゲート電極に接続されたスイッチトランジスタと、
を備え、
基板上部に形成された半導体膜上に、第一絶縁膜、電界遮蔽膜、第二絶縁膜の三層を有するブロッキング膜を形成する工程と、
前記第二絶縁膜上に導電性膜を形成し、形成した前記導電性膜を、前記第二絶縁膜を介して前記電界遮蔽膜と重なるようにパターニングして前記駆動トランジスタの前記ドレイン電極及びソース電極を形成する工程によって前記駆動トランジスタを形成し、
前記スイッチトランジスタには、前記ブロッキング膜を形成しない、
ことを特徴とする。
(実施形態1)
表示装置1は、図1に示すようなデジタルカメラ、図2に示すようなコンピュータ、図3に示すような携帯電話等の電子機器に組み込まれる。
また、画素回路11(i,j)は3つのトランジスタを備えたものであってもよい。
図10(a)に示すように、基板31上にゲート電極T1gが形成される。基板31は、ガラス基板等からなり、ゲート電極T1gは、例えば、Mo膜、Cr膜、Al膜、Cr/Al積層膜、AlTi合金膜又はAlNdTi合金膜、MoNb合金膜等からなる。ゲート電極T1gの形成には、スパッタ法、真空蒸着法等が用いられる。この工程において、スイッチトランジスタT2のゲート電極T2g、及びデータラインLd(i)も形成される。
Claims (9)
- 有機EL素子と、
ドレイン電極及びソース電極の一方及び他方が、それぞれ前記有機EL素子及びアノードラインに接続される駆動トランジスタと、
ゲート電極がセレクトラインに接続され、前記ドレイン電極及びソース電極の一方及び他方が、それぞれデータライン及び前記駆動トランジスタのゲート電極に接続されたスイッチトランジスタと、
を備え、
前記駆動トランジスタは、
基板上部に形成された半導体膜と、
前記半導体膜上に形成されたブロッキング膜と、
を備え、
前記駆動トランジスタの前記ドレイン電極及びソース電極は、前記ブロッキング膜上に対向して形成され、
前記ブロッキング膜は、前記基板側から第一絶縁膜、電界遮蔽膜、第二絶縁膜の三層を有し、
前記電界遮蔽膜は、前記第二絶縁膜を介して前記駆動トランジスタの前記ドレイン電極又は前記ソース電極のうちのいずれか一方と層方向に重なるように形成され、前記スイッチトランジスタは、前記ブロッキング膜を備えていないことを特徴とする表示装置。 - 前記電界遮蔽膜と前記駆動トランジスタの前記ドレイン電極及び前記ソース電極それぞれとの間に、前記駆動トランジスタの前記ドレイン電極及び前記ソース電極と前記半導体膜とを電気接合する不純物半導体膜が形成され、
前記電界遮蔽膜は、前記駆動トランジスタの前記ドレイン電極及び前記ソース電極と前記不純物半導体膜とで形成される電界を遮蔽する、
ことを特徴とする請求項1に記載の表示装置。 - 前記電界遮蔽膜は、予め設定された範囲の電圧に設定される、
ことを特徴とする請求項1又は2に記載の表示装置。 - 前記電界遮蔽膜は前記駆動トランジスタの前記ゲート電極と接続されていることを特徴とする請求項1乃至3のいずれか一項に記載の表示装置。
- 前記有機EL素子は、前記駆動トランジスタと接続された画素電極を備えたことを特徴とする請求項1乃至4のいずれか一項に記載の表示装置。
- 前記電界遮蔽膜は、前記画素電極と同じ材料で形成されることを特徴とする請求項5に記載の表示装置。
- 請求項1乃至6のいずれか一項に記載の表示装置を備えたことを特徴とする電子機器。
- 表示装置の製造方法であって、
前記表示装置は、
有機EL素子と、
ドレイン電極及びソース電極の一方及び他方が、それぞれ前記有機EL素子及びアノードラインに接続される駆動トランジスタと、
ゲート電極がセレクトラインに接続され、前記ドレイン電極及びソース電極の一方及び他方が、それぞれデータライン及び前記駆動トランジスタのゲート電極に接続されたスイッチトランジスタと、
を備え、
基板上部に形成された半導体膜上に、第一絶縁膜、電界遮蔽膜、第二絶縁膜の三層を有するブロッキング膜を形成する工程と、
前記第二絶縁膜上に導電性膜を形成し、形成した前記導電性膜を、前記第二絶縁膜を介して前記電界遮蔽膜と重なるようにパターニングして前記駆動トランジスタの前記ドレイン電極及びソース電極を形成する工程によって前記駆動トランジスタを形成し、
前記スイッチトランジスタには、前記ブロッキング膜を形成しない、
ことを特徴とする表示装置の製造方法。 - 前記駆動トランジスタの前記ドレイン電極及びソース電極を形成する工程は、前記第二絶縁膜上に、前記半導体膜との電気接合を行うコンタクト膜を形成してから、前記ドレイン電極及びソース電極を形成する工程である、
ことを特徴とする請求項8に記載の表示装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009229063A JP5402481B2 (ja) | 2009-09-30 | 2009-09-30 | 表示装置、電子機器及び表示装置の製造方法 |
US12/891,855 US8653569B2 (en) | 2009-09-30 | 2010-09-28 | Transistor, display device, electronic device, manufacturing method of transistor, and manufacturing method of display device |
TW099132933A TWI453917B (zh) | 2009-09-30 | 2010-09-29 | 顯示裝置、電子機器及顯示裝置之製造方法 |
KR1020100094618A KR101115974B1 (ko) | 2009-09-30 | 2010-09-29 | 트랜지스터, 표시장치, 전자기기 및 트랜지스터의 제조방법 |
CN2010105497582A CN102110715B (zh) | 2009-09-30 | 2010-09-30 | 晶体管、显示装置、电子设备和晶体管的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009229063A JP5402481B2 (ja) | 2009-09-30 | 2009-09-30 | 表示装置、電子機器及び表示装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011075946A JP2011075946A (ja) | 2011-04-14 |
JP5402481B2 true JP5402481B2 (ja) | 2014-01-29 |
Family
ID=44019982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009229063A Expired - Fee Related JP5402481B2 (ja) | 2009-09-30 | 2009-09-30 | 表示装置、電子機器及び表示装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8653569B2 (ja) |
JP (1) | JP5402481B2 (ja) |
KR (1) | KR101115974B1 (ja) |
CN (1) | CN102110715B (ja) |
TW (1) | TWI453917B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7086582B2 (ja) * | 2017-12-11 | 2022-06-20 | 株式会社ジャパンディスプレイ | 表示装置 |
CN110827762B (zh) * | 2018-08-14 | 2021-07-09 | 云谷(固安)科技有限公司 | 显示面板、显示屏及其控制方法以及显示终端 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2503615B2 (ja) * | 1988-12-28 | 1996-06-05 | カシオ計算機株式会社 | 薄膜トランジスタ及びその製造方法 |
JP2913737B2 (ja) | 1990-03-14 | 1999-06-28 | 富士通株式会社 | 薄膜トランジスタの製造方法 |
JPH04333284A (ja) | 1991-05-08 | 1992-11-20 | Toshiba Corp | 薄膜トランジスタ |
JPH06326310A (ja) * | 1993-05-14 | 1994-11-25 | Toshiba Corp | アクティブマトリクス型表示装置 |
US5640067A (en) | 1995-03-24 | 1997-06-17 | Tdk Corporation | Thin film transistor, organic electroluminescence display device and manufacturing method of the same |
KR100193650B1 (ko) | 1995-11-20 | 1999-06-15 | 김영환 | 액정 표시 소자의 박막 트랜지스터 제조방법 |
JP4337171B2 (ja) * | 1999-06-14 | 2009-09-30 | ソニー株式会社 | 表示装置 |
JP2002033481A (ja) * | 2000-07-14 | 2002-01-31 | Sony Corp | 薄膜半導体装置 |
KR200380682Y1 (ko) | 2000-11-10 | 2005-04-07 | 엔이씨 엘씨디 테크놀로지스, 엘티디. | 박막 트랜지스터 액정 표시 장치 |
KR100419244B1 (ko) * | 2002-04-10 | 2004-02-21 | 김성희 | Tbga의 투 메탈 접착용 열경화성 테이프 부착장치 |
KR100611886B1 (ko) | 2004-06-25 | 2006-08-11 | 삼성에스디아이 주식회사 | 개량된 구조의 트랜지스터를 구비한 화소 회로 및 유기발광 표시장치 |
US7342256B2 (en) * | 2004-07-16 | 2008-03-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device mounted with read function and electric appliance |
JP4892830B2 (ja) | 2004-11-19 | 2012-03-07 | カシオ計算機株式会社 | 薄膜トランジスタの製造方法 |
-
2009
- 2009-09-30 JP JP2009229063A patent/JP5402481B2/ja not_active Expired - Fee Related
-
2010
- 2010-09-28 US US12/891,855 patent/US8653569B2/en active Active
- 2010-09-29 TW TW099132933A patent/TWI453917B/zh not_active IP Right Cessation
- 2010-09-29 KR KR1020100094618A patent/KR101115974B1/ko active IP Right Grant
- 2010-09-30 CN CN2010105497582A patent/CN102110715B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2011075946A (ja) | 2011-04-14 |
KR20110035970A (ko) | 2011-04-06 |
TW201133861A (en) | 2011-10-01 |
CN102110715B (zh) | 2013-11-20 |
TWI453917B (zh) | 2014-09-21 |
US8653569B2 (en) | 2014-02-18 |
CN102110715A (zh) | 2011-06-29 |
KR101115974B1 (ko) | 2012-02-13 |
US20110220896A1 (en) | 2011-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10157971B2 (en) | Organic light-emitting diode display | |
US9536933B2 (en) | Display device having a light emitting layer on the auxiliary layer | |
US8294699B2 (en) | Luminescence device, method of driving luminescence device, and method of manufacturing luminescence device | |
JP4953166B2 (ja) | 表示パネルの製造方法 | |
JP5381836B2 (ja) | 画素回路基板、表示装置、電子機器、及び表示装置の製造方法 | |
KR100760346B1 (ko) | 유기 el 장치 및 전자 기기 | |
KR20140100357A (ko) | 유기 발광 표시 장치 및 이의 제조 방법 | |
KR102568516B1 (ko) | 표시장치용 어레이기판 및 그 제조방법 | |
JP2011119212A (ja) | 有機el装置の製造方法、有機el装置、及び電子機器 | |
JP2009244370A (ja) | 表示装置及び表示装置の製造方法 | |
JP4811292B2 (ja) | 表示装置の製造方法 | |
JP2011191434A (ja) | 発光装置及びその製造方法並びに電子機器 | |
JP2010287634A (ja) | トランジスタを有するトランジスタ基板及びトランジスタを有するトランジスタ基板の製造方法 | |
JP5402481B2 (ja) | 表示装置、電子機器及び表示装置の製造方法 | |
JP5267845B2 (ja) | 表示装置の製造方法 | |
JP5190709B2 (ja) | 表示パネル及びその製造方法 | |
JP2010161084A (ja) | 表示装置及び表示装置の製造方法 | |
JP2010225780A (ja) | 薄膜トランジスタ及び薄膜トランジスタの製造方法 | |
JP5109542B2 (ja) | 表示装置の製造方法 | |
JP5761392B2 (ja) | 有機el装置の製造方法及び電子機器 | |
JP2005159162A (ja) | 表示装置及びその製造方法 | |
JP2011065178A (ja) | 発光装置 | |
JP2011198830A (ja) | 発光装置 | |
JP2010205462A (ja) | 表示装置及びその製造方法 | |
JP2010192450A (ja) | 表示装置及び表示装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120327 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130314 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130416 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130617 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131001 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131014 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5402481 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |