JP5379811B2 - 高アスペクト比ナノ構造体を用いた光起電デバイス及びその作成方法 - Google Patents
高アスペクト比ナノ構造体を用いた光起電デバイス及びその作成方法 Download PDFInfo
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Description
Claims (27)
- 光起電デバイスであって、
第一光活性層と、
前記第一光活性層上に隣接する第二光活性層であって、前記第一光活性層と前記第二光活性層との間にヘテロ接合が形成されている、前記第二光活性層と、
前記第二光活性層の一つ以上の面上の、入射光に対する散乱媒体として作用するように作られた複数のn−型ドープされたまたはp−型ドープされた高アスペクト比ナノ構造体であって、前記複数の高アスペクト比ナノ構造体は、隣接するナノ構造体との間に、約100ナノメートル〜約3マイクロメートルの間隔を有し、及び各高アスペクト比ナノ構造体は、約0.1マイクロメートル〜約100マイクロメートルの長さを有する、前記複数の高アスペクト比ナノ構造体と
を含む、前記光起電デバイス。 - 前記複数の高アスペクト比ナノ構造体は、前記入射光中に光学共鳴効果を生成するようさらに作られている、請求項1に記載のデバイス。
- 前記第一光活性層は、n−型ドーパントまたはp−型ドーパントの一つを使ってドープされており、
前記第二光活性層は、前記第一光活性層と前記第二光活性層との間にp−n接合が形成されるように前記n−型ドーパントまたは前記p−型ドーパントの他方を使ってドープされている、
請求項1又は2に記載のデバイス。 - 前記第一光活性層が、シリコン、ゲルマニウム、III〜V族元素化合物、および有機材料の一つ以上を含む、請求項1〜3のいずれか一項に記載のデバイス。
- 前記第一光活性層が、カルコゲナイド結晶構造を持つ光活性材料、又は銅・インジウム・ガリウム・セレン化物材料を含む、請求項1〜3のいずれか一項に記載のデバイス。
- 前記第二光活性層は、半導体材料、シリコン、ゲルマニウム、III〜V族元素化合物および有機材料、カルコゲナイド結晶構造を持つ光活性材料、銅・インジウム・ガリウム・セレン化物材料、硫化カドミウム、および酸化亜鉛のうちの一つ以上を含む、請求項1〜5のいずれか一項に記載のデバイス。
- 前記第一光活性層が、約20マイクロメートル〜約1,000マイクロメートルの厚さを有し、前記第二光活性層が、約2×10−3マイクロメートル〜約150マイクロメートルの厚さを有する、請求項1〜6のいずれか一項に記載のデバイス。
- 前記第一光活性層および前記第二光活性層の各々は、約1ナノメートル〜約100ナノメートルの厚さを有する、請求項1〜7のいずれか一項に記載のデバイス。
- 各高アスペクト比ナノ構造体は、約5ナノメートル〜約200ナノメートルの直径を有する、請求項1〜8のいずれか一項に記載のデバイス。
- 各高アスペクト比ナノ構造体は、約3マイクロメートル〜約30マイクロメートルの長さを有する、請求項1〜9のいずれか一項に記載のデバイス。
- 前記複数の高アスペクト比ナノ構造体は、ナノワイヤ、マイクロカラム、およびナノチューブの一つ以上を含む、請求項1〜10のいずれか一項に記載のデバイス。
- 前記複数の高アスペクト比ナノ構造体は、ナノワイヤ林を含む、請求項1〜11のいずれか一項に記載のデバイス。
- 前記複数の高アスペクト比ナノ構造体を覆うシェル層をさらに含む、請求項1〜12のいずれか一項に記載のデバイス。
- 前記シェル層は、n−型ドーパントまたはp−型ドーパントの一つを使ってドープされており、
前記複数の高アスペクト比ナノ構造体は、前記n−型ドーパントまたは前記p−型ドーパントの他方を使ってドープされている、
請求項13に記載のデバイス。 - 各高アスペクト比ナノ構造体は、半導体材料、誘電体材料、および金属の一つ以上を含む、請求項1〜14のいずれか一項に記載のデバイス。
- 前記半導体材料は、シリコン、ゲルマニウム、およびシリコン−ゲルマニウムの一つ以上を含む、請求項15に記載のデバイス。
- 前記光活性層に隣接し、前記複数の高アスペクト比ナノ構造体の少なくとも一部に取り巻かれた透明電極をさらに含む、請求項1〜16のいずれか一項に記載のデバイス。
- 前記第一光活性層の前記第二光活性層と反対の側に隣接する基板をさらに含む、請求項1〜17のいずれか一項に記載のデバイス。
- 前記第二光活性層上に形成された金属層をさらに含み、
前記金属層と、前記第一光活性層、前記第二光活性層及び前記第1光活性層を含む光活性層との間にショットキー接合が形成されている、
請求項1〜18のいずれか一項に記載のデバイス。 - 前記金属層が、前記複数の高アスペクト比ナノ構造体の一部を覆うように前記第二光活性層上に形成されている、請求項19に記載のデバイス。
- 光起電デバイスを作製する方法であって、
第一光活性層を生成するステップと、
前記第一光活性層上に隣接する第二光活性層を形成して、前記第一光活性層と前記第二光活性層との間にヘテロ接合を形成するステップと、
前記第二光活性層の一つ以上の面上に、入射光に対する散乱媒体として作用するように作られた複数のn−型ドープされたまたはp−型ドープされた高アスペクト比ナノ構造体を形成するステップであって、前記複数の高アスペクト比ナノ構造体は、隣接するナノ構造体との間に、約100ナノメートル〜約3マイクロメートルの間隔を有し、及び各高アスペクト比ナノ構造体は、約0.1マイクロメートル〜約100マイクロメートルの長さを有する、前記形成するステップと
を含む、前記方法。 - 前記第二光活性層を形成するステップが、
化学気相堆積技法を使って、前記第一光活性層上に隣接する前記第二光活性層を成長させるステップ
をさらに含む、請求項21に記載の方法。 - 前記複数の高アスペクト比ナノ構造体を形成するステップが、
前記第二光活性層の上に触媒層を堆積するステップと、
気相−液相−固相−化学蒸着堆積技法によって、前記第一光活性層の前記一つ以上の面上に前記複数の高アスペクト比ナノ構造体を成長させるステップと
をさらに含む、請求項21又は22に記載の方法。 - 前記複数の高アスペクト比ナノ構造体を覆うシェル層を形成するステップをさらに含む、請求項21〜23のいずれか一項に記載の方法。
- 前記第二光活性層上に金属層を形成するステップをさらに含み、
前記金属層と、前記第一光活性層、前記第二光活性層及び前記第1光活性層を含む光活性層との間にショットキー接合が形成される、
請求項21〜23のいずれか一項に記載の方法。 - 前記金属層が、前記複数の高アスペクト比ナノ構造体の一部を覆うように前記第二光活性層上に形成される、請求項25に記載の方法。
- 前記金属層が、蒸着技法を用いて、約10ナノメートル〜約150nmの厚さで堆積される、請求項25又は26に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/039,953 US8551558B2 (en) | 2008-02-29 | 2008-02-29 | Techniques for enhancing efficiency of photovoltaic devices using high-aspect-ratio nanostructures |
US12/039,900 US8592675B2 (en) | 2008-02-29 | 2008-02-29 | Photovoltaic devices with enhanced efficiencies using high-aspect-ratio nanostructures |
US12/039,953 | 2008-02-29 | ||
US12/039,900 | 2008-02-29 | ||
PCT/EP2009/051541 WO2009109445A2 (en) | 2008-02-29 | 2009-02-11 | Photovoltaic devices with high-aspect-ratio nanostructures |
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WO2011158722A1 (en) | 2010-06-18 | 2011-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method thereof |
JP5920758B2 (ja) * | 2011-03-02 | 2016-05-18 | 本田技研工業株式会社 | ナノワイヤ太陽電池 |
KR101304643B1 (ko) * | 2011-04-08 | 2013-09-05 | 알티솔라 주식회사 | 인듐 도핑된 산화아연 나노로드 박막층을 포함하는 태양전지용 전극 및 이의 제조 방법 |
CN102280588B (zh) * | 2011-08-02 | 2013-06-12 | 中国科学院苏州纳米技术与纳米仿生研究所 | 硅基核壳纳米线光伏电池及其制备工艺 |
US11637216B2 (en) | 2013-03-12 | 2023-04-25 | The Regents Of The University Of California | Highly efficient optical to electrical conversion devices and MElHODS |
KR102279914B1 (ko) * | 2013-03-12 | 2021-07-22 | 더 리젠츠 오브 더 유니버시티 오브 캘리포니아 | 매우 효율적인 광-전기 변환 디바이스들 |
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JP2697474B2 (ja) * | 1992-04-30 | 1998-01-14 | 松下電器産業株式会社 | 微細構造の製造方法 |
US5534056A (en) * | 1993-10-28 | 1996-07-09 | Manfred R. Kuehnle | Composite media with selectable radiation-transmission properties |
JP4486622B2 (ja) * | 1996-12-20 | 2010-06-23 | 三菱電機株式会社 | 太陽電池の製造方法 |
US7109517B2 (en) * | 2001-11-16 | 2006-09-19 | Zaidi Saleem H | Method of making an enhanced optical absorption and radiation tolerance in thin-film solar cells and photodetectors |
JP2004214300A (ja) * | 2002-12-27 | 2004-07-29 | National Institute Of Advanced Industrial & Technology | ヘテロ接合を有する太陽電池 |
US8309843B2 (en) * | 2004-08-19 | 2012-11-13 | Banpil Photonics, Inc. | Photovoltaic cells based on nanoscale structures |
US20060207647A1 (en) * | 2005-03-16 | 2006-09-21 | General Electric Company | High efficiency inorganic nanorod-enhanced photovoltaic devices |
CN101292365B (zh) * | 2005-06-17 | 2012-04-04 | 依路米尼克斯公司 | 纳米结构的光伏器件及其制造方法 |
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US20080006319A1 (en) * | 2006-06-05 | 2008-01-10 | Martin Bettge | Photovoltaic and photosensing devices based on arrays of aligned nanostructures |
US20090266415A1 (en) * | 2006-06-27 | 2009-10-29 | Liquidia Technologies , Inc. | Nanostructures and materials for photovoltaic devices |
EP1892769A2 (en) * | 2006-08-25 | 2008-02-27 | General Electric Company | Single conformal junction nanowire photovoltaic devices |
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WO2009109445A3 (en) | 2009-12-10 |
CN101960611B (zh) | 2013-01-23 |
CN101960611A (zh) | 2011-01-26 |
EP2253021A2 (en) | 2010-11-24 |
JP2011513962A (ja) | 2011-04-28 |
EP2253021B1 (en) | 2014-05-21 |
KR20100118605A (ko) | 2010-11-05 |
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