JP5372346B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP5372346B2 JP5372346B2 JP2007186895A JP2007186895A JP5372346B2 JP 5372346 B2 JP5372346 B2 JP 5372346B2 JP 2007186895 A JP2007186895 A JP 2007186895A JP 2007186895 A JP2007186895 A JP 2007186895A JP 5372346 B2 JP5372346 B2 JP 5372346B2
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- semiconductor chip
- wiring board
- semiconductor
- semiconductor device
- wiring
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Description
[第1の実施形態]
図1及び図2は、本実施形態におけるBGA(Ball Grid Array)型の半導体装置1のパッケージ構造を示す図である。図1は側断面図であり、図2は平面図である。また、図3は、本発明の実施形態1である半導体装置のマザーボードへの実装形態を示す図である。
[第2の実施形態]
図9は、本実施形態の半導体装置1のパッケージ構造を示す側断面図である。図10は、本実施形態の半導体装置1を裏面側から見た斜視図である。
[第3の実施形態]
図12は、本実施形態の半導体装置のパッケージ構造を示す断面図である。
2 半導体チップ
2a 主面
3 電極パッド
2b、2c 端部
5 バンプ電極
6 配線基板
14 外部端子
15 アンダーフィル材
Claims (14)
- 略四角形の板状で、該略四角形の対向する2辺の各中点を結ぶ中心線に沿って一列又は二列で配置された複数の電極パッドを主面に有する半導体チップと、
前記半導体チップの前記電極パッド上に設けられた複数のバンプ電極と、
前記半導体チップの前記主面側に配置され、前記半導体チップの端部から少なくとも50μm以上離間するとともに、長辺が前記半導体チップの前記中心線に沿うように前記半導体チップの前記主面の中央領域に位置された略長方形状の配線基板と、
前記配線基板上に設けられ、前記複数のバンプ電極に前記配線基板の配線を介して電気的に接続された複数の外部端子と、
前記半導体チップと前記配線基板との間に設けられ、前記バンプ電極と前記配線との接続部を覆う絶縁性の封止部と、
前記半導体チップの主面とは反対の面に設けられた保護層と、を備える半導体装置。 - 前記配線基板は、四角形に形成され、角部が面取り加工されている、請求項1に記載の半導体装置。
- 前記配線基板が、前記半導体チップ上に複数配置されている、請求項1または2に記載の半導体装置。
- 前記配線基板は、フレキシブル配線基板である、請求項1ないし3のいずれか1項に記載の半導体装置。
- 前記配線基板は、前記バンプ電極に対応する位置に凹部が設けられ、該凹部が前記外部端子側の表層配線に電気的に接続されている、請求項1ないし4のいずれか1項に記載の半導体装置。
- 前記半導体チップは、前記主面側に第2の保護部材を有する、請求項1ないし5のいずれか1項に記載の半導体装置。
- 前記第2の保護部材は前記配線基板が設けられた領域を包囲するように形成されている請求項6に記載の半導体装置。
- 主面に所定の回路と複数の電極パッドとを備えた略四角形状の半導体チップであって、該略四角形の対向する2辺の各中点を結ぶ中心線に沿って前記複数の電極パッドが一列又は二列で配置されている、半導体チップが形成された半導体ウエハを準備する工程と、
前記半導体ウエハの主面とは反対の面の全面に保護層を形成する工程と、
前記複数の電極パッドにバンプ電極を形成する工程と、
前記半導体チップの面積より小さい面積であり、かつ前記半導体チップ上に形成された前記複数の電極パッドにそれぞれに対応したランド部と、前記電極パッドと前記ランド部とを電気的に接続するための配線とを有する略長方形状の配線基板を準備する工程と、
前記半導体ウエハ上に形成された前記半導体チップのうち良品と判定された前記半導体チップに、前記半導体チップの前記バンプ電極と、前記ランドと電気的に接続された前記配線とを電気的に接続するとともに、長辺が前記半導体チップの前記中心線に沿うように前記配線基板を搭載する工程と、
前記配線基板の搭載された前記半導体ウエハを個々の前記半導体チップ毎に切断して分離し、分離された該半導体チップをピックアップする工程とを有する半導体装置の製造方法。 - 前記配線基板を搭載する工程より前に、前記半導体ウエハの前記複数の電極パッドに封止材を塗布し、前記配線基板を搭載する工程にて前記半導体チップと前記配線基板との接合部に絶縁性の封止部を形成する、請求項8に記載の半導体装置の製造方法。
- 前記封止材の塗布工程は、前記半導体ウエハ上にマスクを搭載し、前記電極パッドに選択的に前記封止材を塗布する、請求項9に記載の半導体装置の製造方法。
- 前記封止材の塗布工程は、前記半導体ウエハに前記封止材をスピンナー塗布することで形成する、請求項9または10に記載の半導体装置の製造方法。
- 前記配線基板の複数の前記ランド部に導電性のボールを搭載することで外部端子を形成する工程を含む、請求項8ないし11のいずれか1項に記載の半導体装置の製造方法。
- 前記配線基板は、前記半導体チップの端部から少なくとも50μm以上離間するように前記半導体チップの前記主面の領域内に搭載される、請求項8ないし12のいずれか1項に記載の半導体装置の製造方法。
- 前記半導体チップをピックアップする工程は、前記配線基板が搭載された前記半導体チップのみをピックアップする、請求項8ないし13のいずれか1項に記載の半導体装置の製造方法。
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JP2007186895A JP5372346B2 (ja) | 2007-07-18 | 2007-07-18 | 半導体装置及びその製造方法 |
TW097123667A TWI433282B (zh) | 2007-07-18 | 2008-06-25 | 半導體裝置及其製造方法 |
DE102008031511A DE102008031511A1 (de) | 2007-07-18 | 2008-07-03 | Halbleitervorrichtung und Verfahren zur Herstellung derselben |
US12/173,245 US7964962B2 (en) | 2007-07-18 | 2008-07-15 | Method of manufacturing a semiconductor apparatus |
KR1020080070279A KR101014577B1 (ko) | 2007-07-18 | 2008-07-18 | 반도체 장치, 및 반도체 장치를 제조하는 방법 |
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JP5398773B2 (ja) * | 2011-04-07 | 2014-01-29 | 富士フイルム株式会社 | 放射線検出装置 |
KR101974191B1 (ko) * | 2012-11-29 | 2019-04-30 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 형성방법 |
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JP4206779B2 (ja) | 2002-02-25 | 2009-01-14 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
US6975035B2 (en) | 2002-03-04 | 2005-12-13 | Micron Technology, Inc. | Method and apparatus for dielectric filling of flip chip on interposer assembly |
JP4243117B2 (ja) * | 2002-08-27 | 2009-03-25 | 新光電気工業株式会社 | 半導体パッケージとその製造方法および半導体装置 |
JP2005032820A (ja) | 2003-07-08 | 2005-02-03 | Rohm Co Ltd | 半導体装置の製造方法および半導体装置 |
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2007
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- 2008-06-25 TW TW097123667A patent/TWI433282B/zh not_active IP Right Cessation
- 2008-07-03 DE DE102008031511A patent/DE102008031511A1/de not_active Withdrawn
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- 2008-07-18 KR KR1020080070279A patent/KR101014577B1/ko not_active IP Right Cessation
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DE102008031511A1 (de) | 2009-04-23 |
KR101014577B1 (ko) | 2011-02-16 |
US8441126B2 (en) | 2013-05-14 |
KR20090009164A (ko) | 2009-01-22 |
TW200905827A (en) | 2009-02-01 |
JP2009026860A (ja) | 2009-02-05 |
US20090020873A1 (en) | 2009-01-22 |
TWI433282B (zh) | 2014-04-01 |
US7964962B2 (en) | 2011-06-21 |
US20120119356A1 (en) | 2012-05-17 |
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