JP5295515B2 - 載置台の表面処理方法 - Google Patents
載置台の表面処理方法 Download PDFInfo
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- JP5295515B2 JP5295515B2 JP2007092378A JP2007092378A JP5295515B2 JP 5295515 B2 JP5295515 B2 JP 5295515B2 JP 2007092378 A JP2007092378 A JP 2007092378A JP 2007092378 A JP2007092378 A JP 2007092378A JP 5295515 B2 JP5295515 B2 JP 5295515B2
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- 238000000034 method Methods 0.000 title claims description 73
- 238000004381 surface treatment Methods 0.000 title claims description 48
- 239000000758 substrate Substances 0.000 claims abstract description 94
- 238000012545 processing Methods 0.000 claims abstract description 73
- 238000012546 transfer Methods 0.000 claims description 20
- 230000004308 accommodation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000003672 processing method Methods 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 145
- 239000007789 gas Substances 0.000 description 51
- 238000005530 etching Methods 0.000 description 9
- 238000009499 grossing Methods 0.000 description 9
- 238000005498 polishing Methods 0.000 description 9
- 239000003507 refrigerant Substances 0.000 description 8
- 238000005507 spraying Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/3288—Maintenance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
25枚のウエハWを準備し、該ウエハWを用いて図3の処理を実行した。このとき、ステップS33におけるガス導入シャワーヘッド29及びサセプタ12が供給する高周波電力をそれぞれ3300W及び3800Wに設定した。また、ステップS35における所定時間を20時間に設定した。なお、ウエハW1枚あたりの高周波電力供給時間を60秒に設定したので、本実施例ではウエハWが1200回交換された。
載置面が砥石によって研削されただけのESC13を有する基板処理装置10を準備し、該基板処理装置10によってウエハWにエッチング処理を施し、該エッチング処理におけるウエハWの温度を測定したところ、該温度はウエハWの中心から100mmの箇所で約52℃〜55.5℃であり、平均温度は約54℃であった。
10 基板処理装置
11 チャンバ
12 サセプタ
13 ESC
19 下部高周波電源
21 静電電極板
27 伝熱ガス供給孔
29 ガス導入シャワーヘッド
31 上部高周波電源
Claims (8)
- 基板にプラズマ処理を施す基板処理装置の収容室内に配置され、前記基板を載置する載置面を有する載置台の表面処理方法であって、
前記載置面を構成する材料の硬度よりも硬度の低い基板を、直接、前記載置台に吸着保持させる吸着保持ステップと、
前記載置台に吸着保持された基板を熱膨張させる膨張ステップとを有し、
前記吸着保持ステップにおいて前記載置面の微細な凸部を前記吸着保持された基板にめり込ませ、前記膨張ステップにおいて前記吸着保持された基板にめり込ませた前記凸部を前記載置面から分離させることにより、前記載置面の表面を平滑化することを特徴とする表面処理方法。 - 前記基板処理装置は、前記収容室内に処理ガスを導入するガス導入装置と、前記収容室内に高周波電力を供給する電極とを備え、
前記膨張ステップでは、前記供給された高周波電力によって前記処理ガスから生成されたプラズマが前記基板を加熱することを特徴とする請求項1記載の載置台の表面処理方法。 - 前記膨張ステップでは、前記電極が供給可能な最大の高周波電力を供給することを特徴とする請求項2記載の載置台の表面処理方法。
- 前記基板処理装置は、前記載置された基板及び前記載置面の間に伝熱ガスを供給するガス供給装置を備え、
前記膨張ステップでは、前記ガス供給装置が前記伝熱ガスの供給を停止することを特徴とする請求項1乃至3のいずれか1項に記載の載置台の表面処理方法。 - 前記載置台は、前記基板に静電吸着されることを特徴とする請求項1乃至4のいずれか1項に記載の載置台の表面処理方法。
- 前記膨張ステップを繰り返して実行する請求項1乃至5のいずれか1項に記載の載置台の表面処理方法。
- 前記膨張ステップを繰り返す毎に、前記載置される基板を交換することを特徴とする請求項6記載の載置台の表面処理方法。
- 前記膨張ステップの後に、前記載置された基板を前記収容室内から搬出する搬出ステップと、
該搬出された基板における前記載置台の載置面との接触面から付着物を除去する除去ステップと、
前記基板の接触面を再研磨する再研磨ステップを有することを特徴とする請求項6又は7記載の載置台の表面処理方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007092378A JP5295515B2 (ja) | 2007-03-30 | 2007-03-30 | 載置台の表面処理方法 |
KR1020080028971A KR100978167B1 (ko) | 2007-03-30 | 2008-03-28 | 탑재대의 표면 처리 방법 |
CN2008100869172A CN101276775B (zh) | 2007-03-30 | 2008-03-28 | 载置台的表面处理方法 |
US12/057,975 US8343372B2 (en) | 2007-03-30 | 2008-03-28 | Surface processing method for mounting stage |
TW097111203A TWI429015B (zh) | 2007-03-30 | 2008-03-28 | 載置台的表面處理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007092378A JP5295515B2 (ja) | 2007-03-30 | 2007-03-30 | 載置台の表面処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008251904A JP2008251904A (ja) | 2008-10-16 |
JP5295515B2 true JP5295515B2 (ja) | 2013-09-18 |
Family
ID=39792367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007092378A Active JP5295515B2 (ja) | 2007-03-30 | 2007-03-30 | 載置台の表面処理方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8343372B2 (ja) |
JP (1) | JP5295515B2 (ja) |
KR (1) | KR100978167B1 (ja) |
CN (1) | CN101276775B (ja) |
TW (1) | TWI429015B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107574426B (zh) * | 2013-03-15 | 2020-06-09 | 应用材料公司 | 用于基板的载具 |
US9338829B2 (en) | 2014-02-14 | 2016-05-10 | Varian Semiconductor Equipment Associates, Inc. | Heated platen with improved temperature uniformity |
JP6573231B2 (ja) * | 2016-03-03 | 2019-09-11 | パナソニックIpマネジメント株式会社 | プラズマ処理方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0750736B2 (ja) * | 1990-12-25 | 1995-05-31 | 日本碍子株式会社 | ウエハー加熱装置及びその製造方法 |
US5548470A (en) * | 1994-07-19 | 1996-08-20 | International Business Machines Corporation | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity |
US6365495B2 (en) * | 1994-11-14 | 2002-04-02 | Applied Materials, Inc. | Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature |
JPH09218104A (ja) * | 1996-02-14 | 1997-08-19 | Sony Corp | 基板の温度測定装置 |
US6106625A (en) * | 1997-12-02 | 2000-08-22 | Applied Materials, Inc. | Reactor useful for chemical vapor deposition of titanium nitride |
JP2001127041A (ja) * | 1999-10-26 | 2001-05-11 | Matsushita Electric Ind Co Ltd | 基板のプラズマ処理装置およびプラズマ処理方法 |
JP4312372B2 (ja) * | 2000-12-11 | 2009-08-12 | 日本碍子株式会社 | 静電チャックおよびその製造方法 |
US7843632B2 (en) * | 2006-08-16 | 2010-11-30 | Cymer, Inc. | EUV optics |
US7341673B2 (en) * | 2003-08-12 | 2008-03-11 | Lam Research Corporation | Methods and apparatus for in situ substrate temperature monitoring by electromagnetic radiation emission |
CN1685473A (zh) | 2002-09-19 | 2005-10-19 | 应用材料有限公司 | 具有低水平微粒生成的静电夹盘及其制造方法 |
JP2006286874A (ja) * | 2005-03-31 | 2006-10-19 | Komatsu Electronic Metals Co Ltd | ウェーハ熱処理用治具及び熱処理後のウェーハ |
KR100856153B1 (ko) * | 2005-07-14 | 2008-09-03 | 도쿄엘렉트론가부시키가이샤 | 기판 탑재 기구 및 기판 처리 장치 |
JP2007258240A (ja) | 2006-03-20 | 2007-10-04 | Tokyo Electron Ltd | 表面処理方法 |
US8450193B2 (en) * | 2006-08-15 | 2013-05-28 | Varian Semiconductor Equipment Associates, Inc. | Techniques for temperature-controlled ion implantation |
US7655933B2 (en) * | 2006-08-15 | 2010-02-02 | Varian Semiconductor Equipment Associates, Inc. | Techniques for temperature-controlled ion implantation |
-
2007
- 2007-03-30 JP JP2007092378A patent/JP5295515B2/ja active Active
-
2008
- 2008-03-28 US US12/057,975 patent/US8343372B2/en active Active
- 2008-03-28 KR KR1020080028971A patent/KR100978167B1/ko active IP Right Grant
- 2008-03-28 CN CN2008100869172A patent/CN101276775B/zh not_active Expired - Fee Related
- 2008-03-28 TW TW097111203A patent/TWI429015B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW200908197A (en) | 2009-02-16 |
US20080237030A1 (en) | 2008-10-02 |
TWI429015B (zh) | 2014-03-01 |
US8343372B2 (en) | 2013-01-01 |
CN101276775B (zh) | 2012-04-25 |
JP2008251904A (ja) | 2008-10-16 |
CN101276775A (zh) | 2008-10-01 |
KR20080089256A (ko) | 2008-10-06 |
KR100978167B1 (ko) | 2010-08-25 |
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