JP5267268B2 - 薄膜コンデンサ及びその製造方法 - Google Patents
薄膜コンデンサ及びその製造方法 Download PDFInfo
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- JP5267268B2 JP5267268B2 JP2009076361A JP2009076361A JP5267268B2 JP 5267268 B2 JP5267268 B2 JP 5267268B2 JP 2009076361 A JP2009076361 A JP 2009076361A JP 2009076361 A JP2009076361 A JP 2009076361A JP 5267268 B2 JP5267268 B2 JP 5267268B2
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- 239000010409 thin film Substances 0.000 title claims description 65
- 239000003990 capacitor Substances 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000010408 film Substances 0.000 claims description 111
- 239000004020 conductor Substances 0.000 claims description 48
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 239000011888 foil Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 20
- 238000000059 patterning Methods 0.000 claims description 12
- 238000001039 wet etching Methods 0.000 claims description 7
- 238000003475 lamination Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 112
- 229920002120 photoresistant polymer Polymers 0.000 description 29
- 239000000853 adhesive Substances 0.000 description 22
- 230000001070 adhesive effect Effects 0.000 description 22
- 230000000052 comparative effect Effects 0.000 description 16
- 239000012790 adhesive layer Substances 0.000 description 13
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 13
- 229910002113 barium titanate Inorganic materials 0.000 description 13
- 239000000428 dust Substances 0.000 description 11
- 239000000243 solution Substances 0.000 description 11
- 239000011521 glass Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 5
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000003522 acrylic cement Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000003094 microcapsule Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 239000013464 silicone adhesive Substances 0.000 description 2
- LDXJRKWFNNFDSA-UHFFFAOYSA-N 2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound C1CN(CC2=NNN=C21)CC(=O)N3CCN(CC3)C4=CN=C(N=C4)NCC5=CC(=CC=C5)OC(F)(F)F LDXJRKWFNNFDSA-UHFFFAOYSA-N 0.000 description 1
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 1
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 1
- 239000012935 ammoniumperoxodisulfate Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/86—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions
- H01L28/88—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions made by patterning layers, e.g. by etching conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/86—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Ceramic Capacitors (AREA)
Description
<実施例1−1>
<比較例1−1〜1−3>
<実施例2−1>
<比較例2−1〜2−4>
<実施例3−1>
<比較例3−1〜3−3>
<実施例4>
Claims (4)
- 金属箔上に設けられた2層以上の誘電体層と、
前記2層以上の誘電体層の間に設けられた内部電極層と、
前記2層以上の誘電体層のうち最上層の誘電体層上に設けられた上部電極層と、
を備える薄膜コンデンサであって、
当該薄膜コンデンサの積層方向から見て、これら各層の外形は下層に向かうにつれて広がっており、
前記2層以上の誘電体層のうち少なくとも一の誘電体層に関し、該一の誘電体層の外形から直下の内部電極層の外形が露出するギャップをAとし、当該一の誘電体層の外形が直上の内部電極層又は上部電極層の外形から露出するギャップをBとした場合、B>A>0の関係を満たし、
当該薄膜コンデンサの上面にはカバー層が設けられ、当該カバー層を通して前記内部電極層の前記ギャップAから端子電極が引き出されていることを特徴とする薄膜コンデンサ。 - 前記ギャップAは2μm以上であることを特徴とする請求項1に記載の薄膜コンデンサ。
- 金属箔上に誘電体膜と導電体膜とを交互に成膜し、前記金属箔と前記導電体膜との間に2層以上の誘電体膜が挟まれた積層体を作製する工程と、
前記金属箔から最も遠い前記導電体膜の側から各膜を順次パターニングすることにより、前記積層体の積層方向から見て、これら各層の外形が下層に向かうにつれて広がるように前記積層体を加工する工程と、
前記積層体の上面にカバー層を設け、前記カバー層を通して前記内部電極から端子電極を引き出す工程と、
を備え、
前記積層体を加工する工程では、少なくとも一の誘電体膜に関し、該一の誘電体膜の外形から直下の導電体膜の外形が露出するギャップをAとし、当該一の誘電体膜の外形が直上の導電体膜の外形から露出するギャップをBとした場合、B>A>0の関係を満たすように、前記誘電体膜と前記導電体膜とを加工し、
前記端子電極を引き出す工程では、前記ギャップAから前記端子電極を引き出すことを特徴とする薄膜コンデンサの製造方法。 - 前記積層体を加工する工程では、ウェットエッチングによりパターニングを行うことを
特徴とする請求項3に記載の薄膜コンデンサの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009076361A JP5267268B2 (ja) | 2009-03-26 | 2009-03-26 | 薄膜コンデンサ及びその製造方法 |
US12/726,846 US20100246091A1 (en) | 2009-03-26 | 2010-03-18 | Thin film capacitor and method of manufacturing the same |
US13/661,885 US8997321B2 (en) | 2009-03-26 | 2012-10-26 | Method of manufacturing a thin film capacitor having separated dielectric films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009076361A JP5267268B2 (ja) | 2009-03-26 | 2009-03-26 | 薄膜コンデンサ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010232304A JP2010232304A (ja) | 2010-10-14 |
JP5267268B2 true JP5267268B2 (ja) | 2013-08-21 |
Family
ID=42783948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009076361A Active JP5267268B2 (ja) | 2009-03-26 | 2009-03-26 | 薄膜コンデンサ及びその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US20100246091A1 (ja) |
JP (1) | JP5267268B2 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9082555B2 (en) * | 2011-08-22 | 2015-07-14 | Micron Technology, Inc. | Structure comprising multiple capacitors and methods for forming the structure |
CN103489639B (zh) * | 2012-06-12 | 2016-07-06 | 株式会社村田制作所 | 层叠电容器 |
JP5853976B2 (ja) | 2012-06-12 | 2016-02-09 | 株式会社村田製作所 | 積層コンデンサ |
JP2016162904A (ja) * | 2015-03-03 | 2016-09-05 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP6610159B2 (ja) * | 2015-10-20 | 2019-11-27 | Tdk株式会社 | 薄膜キャパシタ |
CN107768142A (zh) * | 2016-08-19 | 2018-03-06 | 钰邦电子(无锡)有限公司 | 用于提升介电常数的薄膜电容器及其制作方法 |
KR101853195B1 (ko) * | 2016-09-01 | 2018-04-27 | 삼성전기주식회사 | 박막 커패시터 |
JP6737118B2 (ja) | 2016-10-11 | 2020-08-05 | Tdk株式会社 | 薄膜コンデンサ |
JP6805702B2 (ja) | 2016-10-11 | 2020-12-23 | Tdk株式会社 | 薄膜コンデンサ |
JP2018063989A (ja) | 2016-10-11 | 2018-04-19 | Tdk株式会社 | 薄膜キャパシタ |
CN107369554A (zh) * | 2017-08-30 | 2017-11-21 | 苏州惠华电子科技有限公司 | 一种电容器的制造方法 |
CN110767450B (zh) * | 2018-07-27 | 2022-05-24 | 浙江清华柔性电子技术研究院 | 薄膜电容器 |
US11990470B2 (en) * | 2021-09-24 | 2024-05-21 | International Business Machines Corporation | Ferroelectric and paraelectric stack capacitors |
US11869725B2 (en) * | 2021-11-30 | 2024-01-09 | Texas Instruments Incorporated | Multi-stacked capacitor |
CN117651480B (zh) * | 2024-01-29 | 2024-06-14 | 荣耀终端有限公司 | 电容器的制备方法、电容器及电子设备 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5591112A (en) * | 1978-12-28 | 1980-07-10 | Fujitsu Ltd | Multilayer thin film capacitor |
US5208597A (en) * | 1988-10-13 | 1993-05-04 | Crystal Semiconductor | Compensated capacitors for switched capacitor input of an analog-to-digital converter |
JPH0878283A (ja) * | 1994-09-06 | 1996-03-22 | Toshiba Corp | 薄膜キャパシタ |
JP3076507B2 (ja) * | 1995-06-13 | 2000-08-14 | 松下電子工業株式会社 | 半導体装置、半導体集積回路装置及びその製造方法 |
US5745335A (en) * | 1996-06-27 | 1998-04-28 | Gennum Corporation | Multi-layer film capacitor structures and method |
JP2001185443A (ja) * | 1999-12-22 | 2001-07-06 | Hitachi Ltd | 薄膜コンデンサ |
US6411494B1 (en) * | 2000-04-06 | 2002-06-25 | Gennum Corporation | Distributed capacitor |
JP2002025855A (ja) * | 2000-06-30 | 2002-01-25 | Hitachi Ltd | 薄膜コンデンサ及びその製造方法 |
DE10260352A1 (de) * | 2002-12-20 | 2004-07-15 | Infineon Technologies Ag | Verfahren zum Herstellen einer Kondensatoranordnung und Kondensatoranordnung |
US6788522B1 (en) * | 2003-02-26 | 2004-09-07 | Tdk Corporation | Multi-layered unit including electrode and dielectric layer |
US7224040B2 (en) * | 2003-11-28 | 2007-05-29 | Gennum Corporation | Multi-level thin film capacitor on a ceramic substrate |
US8569142B2 (en) | 2003-11-28 | 2013-10-29 | Blackberry Limited | Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same |
JP2005243851A (ja) * | 2004-02-25 | 2005-09-08 | Kyocera Corp | コンデンサ内蔵ガラスセラミック配線基板 |
US7109090B1 (en) * | 2005-03-07 | 2006-09-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pyramid-shaped capacitor structure |
JP4674606B2 (ja) * | 2005-10-18 | 2011-04-20 | 株式会社村田製作所 | 薄膜キャパシタ |
JP4826593B2 (ja) | 2008-03-11 | 2011-11-30 | Tdk株式会社 | 電子部品の製造方法 |
US8680649B2 (en) * | 2008-08-22 | 2014-03-25 | Stmicroelectronics (Tours) Sas | Multi-layer film capacitor with tapered film sidewalls |
-
2009
- 2009-03-26 JP JP2009076361A patent/JP5267268B2/ja active Active
-
2010
- 2010-03-18 US US12/726,846 patent/US20100246091A1/en not_active Abandoned
-
2012
- 2012-10-26 US US13/661,885 patent/US8997321B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2010232304A (ja) | 2010-10-14 |
US8997321B2 (en) | 2015-04-07 |
US20100246091A1 (en) | 2010-09-30 |
US20130048596A1 (en) | 2013-02-28 |
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