JP5257065B2 - Workpiece support and machining apparatus - Google Patents

Workpiece support and machining apparatus Download PDF

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JP5257065B2
JP5257065B2 JP2008334766A JP2008334766A JP5257065B2 JP 5257065 B2 JP5257065 B2 JP 5257065B2 JP 2008334766 A JP2008334766 A JP 2008334766A JP 2008334766 A JP2008334766 A JP 2008334766A JP 5257065 B2 JP5257065 B2 JP 5257065B2
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workpiece
workpiece support
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JP2010155304A (en
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賢二 荒井
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Description

本発明は、被加工物支持体および機械加工装置に関し、より詳細には、外周面に転接して回転自在に支持される被加工物を加工するようにした被加工物支持体および機械加工装置に関する。   The present invention relates to a workpiece support and a machining apparatus, and more specifically, a workpiece support and a machining apparatus configured to process a workpiece that is rotatably supported by rolling contact with an outer peripheral surface. About.

従来、軸受部品などの被加工物を砥石による研磨加工によって高精度に仕上げる精密加工において、被加工物支持体を被加工物の外周面に転接させて回転自在に支持しながら研磨加工する機械加工装置が多用されている。従来の被加工物支持体としては、セラミック製の玉軸受によって被加工物を回転自在に支持することにより、砥石から剥離した砥粒が支持回転体の表面に埋め込まれ難くして、軸受部品の損傷を抑制するようにした加工物支持装置が知られている（例えば、特許文献１参照。）。   Conventionally, in precision processing that finishes workpieces such as bearing parts with high precision by grinding with a grindstone, a machine that polishes while rotating the workpiece support to the outer peripheral surface of the workpiece and supporting it rotatably Processing equipment is frequently used. As a conventional workpiece support, by supporting a workpiece rotatably with a ceramic ball bearing, it is difficult for abrasive grains separated from the grindstone to be embedded in the surface of the support rotor, and 2. Description of the Related Art A workpiece support device that suppresses damage is known (see, for example, Patent Document 1).

また、被加工物にシューを摺接させて被加工物を回転自在に支持するシュータイプの加工物支持装置において、シューの支持面にパターンの異なる凹部や樹脂などの軟質部を設け、被加工物に形成されるシューマークによって製品仕様を判別可能とした加工物支持装置や（例えば、特許文献２参照。）、シューの支持面を樹脂で形成してシューマークの発生を防止するようにした加工物支持装置が開示されている（例えば、特許文献３参照。）。
特開２００８−２３６２４号公報 特開２００７−２８３４１４号公報 特開２００７−１６７９９６号公報 Also, in a shoe-type workpiece support device that slides a shoe against the workpiece and rotatably supports the workpiece, the shoe support surface is provided with a soft portion such as a recess or resin with a different pattern on the shoe support surface. Workpiece support device that makes it possible to discriminate product specifications from shoe marks formed on an object (see, for example, Patent Document 2), and the shoe support surface is made of resin to prevent the occurrence of shoe marks. A workpiece support device is disclosed (for example, see Patent Document 3).
JP 2008-23624 A JP 2007-283414 A JP 2007-167996 A

しかしながら、特許文献１に開示されている加工物支持装置は、セラミックが被加工物より硬いため、被加工物と被加工物支持体との間に入った脱落砥粒や切粉に逃げ場がなく、被加工物の表面を傷付ける原因となっていた。また、セラミックは、割れ易く取り扱いが容易でない問題点があった。   However, since the workpiece support device disclosed in Patent Document 1 has a ceramic that is harder than the workpiece, there is no escape space for the falling abrasive grains and chips that enter between the workpiece and the workpiece support. This has caused damage to the surface of the workpiece. Further, the ceramic has a problem that it is easy to crack and is not easy to handle.

特許文献２および３の加工物支持装置は、被加工物に摺接しながら被加工物を支持するシュータイプの支持体が用いられている。シューの支持面は柔らかい樹脂からなるので、脱落砥粒や切粉がシューの支持面に突き刺さり、この脱落砥粒や切粉が核となって突き刺さり現象が進行して、被加工物の表面を傷付ける虞があった。また、摺接部が潤滑不足となった場合、発熱によって樹脂が軟化、あるいは溶解して被加工物の支持が不安定となる可能性があり、改善の余地があった。   In the workpiece support devices of Patent Documents 2 and 3, a shoe-type support body that supports the workpiece while sliding on the workpiece is used. Since the supporting surface of the shoe is made of a soft resin, the falling abrasive grains and chips pierce the supporting surface of the shoe, and the piercing phenomenon proceeds with the falling abrasive grains and chips as the core, and the surface of the workpiece is There was a risk of injury. Further, when the sliding contact portion becomes insufficiently lubricated, the resin may be softened or melted by heat generation and the support of the workpiece may become unstable, and there is room for improvement.

本発明は、前述した課題に鑑みてなされたものであり、その目的は、加工中に脱落した砥粒や切粉による被加工物や被加工物支持体の傷付きを防止することができ、長い時間にわたって形状・粗さを保持することが可能であり、メンテナンス軽減にも寄与できる被加工物支持体および機械加工装置を提供することにある。   The present invention has been made in view of the above-described problems, and its purpose is to prevent the workpiece and workpiece support from being scratched by abrasive grains and chips that fall off during processing, An object of the present invention is to provide a workpiece support and a machining apparatus that can maintain shape / roughness for a long time and contribute to reduction of maintenance.

本発明の上記目的は、下記の構成により達成される。
（１） 機械加工される被加工物の外周面に転接して前記被加工物を回転自在に支持する被加工物支持体であって、
前記被加工物の外周面に接触する前記被加工物支持体の少なくとも外周面は、チタンメッキ処理が施されることを特徴とする被加工物支持体。
（２） 前記被加工物支持体は、焼入れ、焼戻しによる熱処理が施された後、チタンメッキ処理されることを特徴とする上記（１）に記載の被加工物支持体。
（３） 前記被加工物支持体の表面粗さは、チタンメッキ処理後において０．０５μｍＲａ以下であることを特徴とする上記（１）または（２）に記載の被加工物支持体。
（４） 内輪、外輪、および前記内輪と前記外輪との間に転動自在に配設された複数の玉を備える玉軸受と、
前記玉軸受の前記外輪に外嵌固定され、少なくとも前記被加工物の外周面に転接する外周面にチタンメッキ処理が施されたリング状部材と、
を備えることを特徴とする上記（１）から（３）のいずれか１項に記載の被加工物支持体。
（５） 上記（１）から（４）のいずれか１項に記載の被加工物支持体を備え、前記被加工物支持体によって回転自在に支持される前記被加工物を加工することを特徴とする機械加工装置。 The above object of the present invention can be achieved by the following constitution.
(1) A workpiece support that is in rolling contact with an outer peripheral surface of a workpiece to be machined and rotatably supports the workpiece,
At least the outer peripheral surface of the workpiece support that contacts the outer peripheral surface of the workpiece is subjected to titanium plating treatment.
(2) The workpiece support according to (1), wherein the workpiece support is subjected to titanium plating after being subjected to heat treatment by quenching and tempering.
(3) The workpiece support according to (1) or (2) above, wherein the surface roughness of the workpiece support is 0.05 μmRa or less after the titanium plating treatment.
(4) a ball bearing comprising an inner ring, an outer ring, and a plurality of balls that are rotatably arranged between the inner ring and the outer ring;
A ring-shaped member that is externally fitted and fixed to the outer ring of the ball bearing, and at least an outer peripheral surface that is in rolling contact with the outer peripheral surface of the workpiece is subjected to a titanium plating process;
The workpiece support according to any one of (1) to (3), wherein the workpiece support is provided.
(5) The workpiece support according to any one of (1) to (4) is provided, and the workpiece that is rotatably supported by the workpiece support is processed. Machining equipment.

本発明の被加工物支持体によれば、被加工物の外周面に転接して支持する被加工物支持体は、少なくとも被加工物に接触する外周面がチタンメッキ処理されているので、高い表面硬さを有し、脱落砥粒や切粉の突き刺さりが防止されて、被加工物の損傷を抑制することができる。また、被加工物支持体の耐摩耗性が向上する。   According to the workpiece support of the present invention, the workpiece support that is supported by rolling contact with the outer peripheral surface of the workpiece is high because at least the outer peripheral surface that contacts the workpiece is titanium-plated. It has surface hardness, prevents falling abrasive grains and chips from being pierced, and suppresses damage to the workpiece. In addition, the wear resistance of the workpiece support is improved.

また、被加工物支持体は、焼入れ、焼戻しによる熱処理が施された後、チタンメッキ処理されているので、表面硬さが高く、且つ内部が柔らかい構造となっており、加工時の脱落砥粒や切粉が被加工物支持体と被加工物との間に噛み込まれても、被加工物支持体の表面が凹んで被加工物の損傷を抑制することができる。   In addition, since the workpiece support is heat-treated by quenching and tempering, and then subjected to titanium plating, the surface has a high surface hardness and a soft structure inside, and the abrasive grains that fall off during processing Even when chips and chips are caught between the workpiece support and the workpiece, the surface of the workpiece support is recessed and damage to the workpiece can be suppressed.

更に、被加工物支持体の表面粗さは、チタンメッキ処理後において０．０５μｍＲａ以下であるので、被加工物の表面粗さをそれ以上の粗さに加工することができる。   Furthermore, since the surface roughness of the workpiece support is 0.05 μmRa or less after the titanium plating treatment, the surface roughness of the workpiece can be processed to a higher roughness.

また、被加工物支持体が、玉軸受と、外周面にチタンメッキ処理が施されて玉軸受の外輪に外嵌固定されたリング状部材とからなるので、被加工物支持体の表面が摩耗するなど、被加工物支持体のメンテナンスを要する際にも、リング状部材を交換するだけで容易、且つ短時間でメンテナンスを行うことができる。   Further, since the workpiece support is composed of a ball bearing and a ring-shaped member that is titanium-plated on the outer peripheral surface and is fitted and fixed to the outer ring of the ball bearing, the surface of the workpiece support is worn. Even when maintenance of the workpiece support is required, such as, it is possible to perform maintenance easily and in a short time by simply replacing the ring-shaped member.

更に、このような被加工物支持体を備える機械加工装置によれば、被加工物の表面に損傷を与えることなく、効率的に高精度の加工が可能となる。   Furthermore, according to the machining apparatus provided with such a workpiece support, high-precision machining can be efficiently performed without damaging the surface of the workpiece.

以下、本発明に係る被加工物支持体を備える機械加工装置としての超仕上げ装置を図面に基づいて詳細に説明する。   Hereinafter, a superfinishing apparatus as a machining apparatus including a workpiece support according to the present invention will be described in detail with reference to the drawings.

図１及び図２に示すように、本発明の超仕上げ装置１０は、被加工物である、例えば球面ころ１１の外周面１１ａを砥石１２によって高精度に研磨加工する。超仕上げ装置１０は、砥石旋回アーム及びシリンダを有して砥石１２を支持する砥石ホルダ（図示せず）と、球面ころ１１を回転させるスピンドル装置１３と、球面ころ１１を回動自在に支持する被加工物支持体である一対の回転支持装置１４と、球面ころ１１の両端面１１ｂ、１１ｃを支持するバッキングプレート１６及びクランプロール１７と、を主に備える。   As shown in FIGS. 1 and 2, the superfinishing apparatus 10 of the present invention polishes an outer peripheral surface 11 a of a spherical roller 11, which is a workpiece, with a grindstone 12 with high accuracy. The superfinishing device 10 has a grindstone turning arm and a cylinder and has a grindstone holder (not shown) that supports the grindstone 12, a spindle device 13 that rotates the spherical rollers 11, and a spherical roller 11 that rotatably supports the spherical rollers 11. A pair of rotation support devices 14 that are workpiece supports, and a backing plate 16 and a clamp roll 17 that support both end faces 11b and 11c of the spherical roller 11 are mainly provided.

被加工物である球面ころ１１の一方の端面１１ｂは、クランプロール１７の転がり軸受１８によってバッキングプレート１６に向けて押圧されており、他方の端面１１ｃがバッキングプレート１６に当接する。また、バッキングプレート１６はスピンドル装置１３に取り付けられており、球面ころ１１は、バッキングプレート１６の回転に伴って矢印Ｄ方向に回転する。また、球面ころ１１は、左右斜め下方の二箇所が、略９０°の方向から一対の回転支持装置１４によって回動自在に支持されている。   One end surface 11 b of the spherical roller 11, which is a workpiece, is pressed against the backing plate 16 by the rolling bearing 18 of the clamp roll 17, and the other end surface 11 c abuts against the backing plate 16. Further, the backing plate 16 is attached to the spindle device 13, and the spherical roller 11 rotates in the direction of arrow D as the backing plate 16 rotates. Further, the spherical roller 11 is supported by two pairs of rotation support devices 14 so that the spherical roller 11 can be rotated from a substantially 90 ° direction at two diagonally lower sides.

砥石１２は、球面ころ１１との当接面（加工面）１２ａが、球面ころ１１の外周面１１ａと同じ曲率半径を有する板状に形成されている。砥石１２は、球面ころ１１の外周面１１ａの円弧中心を中心として矢印ＥおよびＦ方向に揺動（図２参照）する砥石旋回アーム（図示せず）に固定されており、揺動しながら球面ころ１１の外周面１１ａに押圧される。   The grindstone 12 is formed in a plate shape in which the contact surface (processed surface) 12 a with the spherical roller 11 has the same radius of curvature as the outer peripheral surface 11 a of the spherical roller 11. The grindstone 12 is fixed to a grindstone turning arm (not shown) that swings in the directions of arrows E and F (see FIG. 2) around the center of the arc of the outer peripheral surface 11a of the spherical roller 11, and the spherical surface while swinging. The roller 11 is pressed against the outer peripheral surface 11a.

また、一対の回転支持装置１４で支持される球面ころ１１の下方には、略Ｌ字型に形成された補助支持体２６が基台４０に固定されている。補助支持体２６は、ローダ（図示せず）によって供給される球面ころ１１が、一対の回転支持装置１４によって正しく支持されるように、前方に突出する補助アーム２７によって補助する。尚、球面ころ１１の加工時には、補助支持体２６と球面ころ１１とは、非接触で加工される（球面ころ１１は、クランプロール１７でバッキングプレート１６に押圧したとき、補助支持体２６を離れる）。   An auxiliary support body 26 formed in a substantially L shape is fixed to the base 40 below the spherical roller 11 supported by the pair of rotation support devices 14. The auxiliary support body 26 is assisted by an auxiliary arm 27 protruding forward so that the spherical roller 11 supplied by a loader (not shown) is correctly supported by the pair of rotation support devices 14. When the spherical roller 11 is processed, the auxiliary support 26 and the spherical roller 11 are processed in a non-contact manner (the spherical roller 11 leaves the auxiliary support 26 when pressed against the backing plate 16 by the clamp roll 17). ).

回転支持装置１４は、図３も参照して、長穴３１が設けられて断面略Ｌ字型に形成された本体３０と、本体３０に回動自在に取り付けられた回転支持体３２とを備えている。回転支持体３２は、本体３０に設けられた穴３３に挿入固定された支持軸３４と、支持軸３４に外嵌する公知の玉軸受３５と、玉軸受３５の外輪３６に微小なすきまを介して嵌合され、止め輪４１によって固定されたリング状部材３７と、を備える。尚、玉軸受３５には、シール付軸受を用いて加工時にクーラントオイルなどの侵入を防止することが望ましい。   Referring to FIG. 3, the rotation support device 14 includes a main body 30 provided with a long hole 31 and having a substantially L-shaped cross section, and a rotation support body 32 rotatably attached to the main body 30. ing. The rotary support 32 includes a support shaft 34 inserted and fixed in a hole 33 provided in the main body 30, a known ball bearing 35 that is externally fitted to the support shaft 34, and an outer ring 36 of the ball bearing 35 through a minute clearance. And a ring-shaped member 37 fixed by a retaining ring 41. In addition, it is desirable to use a bearing with a seal for the ball bearing 35 to prevent entry of coolant oil or the like during processing.

リング状部材３７は鋼製であり、焼入れ、焼戻しによる熱処理が施された後、球面ころ１１と接触する少なくとも外周面３７ａにチタンメッキ処理が施されている。チタンメッキ処理されたリング状部材３７の外周面３７ａの表面硬さは、砥石１２の砥粒の硬度より高く、例えば、ＨＲＣ６０〜６５の硬度を有する。リング状部材３７の表面粗さは、チタンメッキ処理後において０．０５μｍＲａ以下となっている。   The ring-shaped member 37 is made of steel, and after being subjected to heat treatment by quenching and tempering, at least the outer peripheral surface 37a that contacts the spherical roller 11 is subjected to titanium plating. The surface hardness of the outer peripheral surface 37a of the ring-shaped member 37 subjected to titanium plating is higher than the hardness of the abrasive grains of the grindstone 12, and has a hardness of HRC 60 to 65, for example. The surface roughness of the ring-shaped member 37 is 0.05 μmRa or less after the titanium plating process.

回転支持体３２を有する一対の回転支持装置１４は、長穴３１に挿通されたボルト３８によって略９０°円周方向に離間して基台４０に固定される。このとき、一対の回転支持体３２によって回動自在に支持された球面ころ１１の中心Ｃ１は、不図示のプリセット台によって、常に同位置にくるようセットすることができる。又、球面ころ１１の外径が変わった場合の調整は、長穴３１と調整ねじ３９によって調整される。さらに、一対の回転支持装置１４を載せた板を回転装置１０に取り付けるときは、図１に示す３つのストッパーねじ５１に押し付けながら取り付ける。このとき、バッキングプレート芯Ｃ２と球面ころ芯Ｃ１とは偏芯量がεとなるように不図示のマスタープレートで調整してある。   The pair of rotation support devices 14 having the rotation support bodies 32 are fixed to the base 40 so as to be separated from each other by about 90 ° in the circumferential direction by bolts 38 inserted through the long holes 31. At this time, the center C1 of the spherical roller 11 rotatably supported by the pair of rotation supports 32 can be always set at the same position by a preset stand (not shown). The adjustment when the outer diameter of the spherical roller 11 is changed is adjusted by the elongated hole 31 and the adjusting screw 39. Furthermore, when the plate on which the pair of rotation support devices 14 are mounted is attached to the rotation device 10, it is attached while being pressed against the three stopper screws 51 shown in FIG. At this time, the backing plate core C2 and the spherical roller core C1 are adjusted by a master plate (not shown) so that the amount of eccentricity becomes ε.

次に、超仕上げ装置１０の作用について説明する。バッキングプレート１６と、クランプロール１７の転がり軸受１８で狭持されると共に、下部が一対の回転支持装置１４によって回動自在に支持された球面ころ１１は、バッキングプレート１６の回転に伴って矢印Ｄ方向に回転する。   Next, the operation of the superfinishing apparatus 10 will be described. The spherical roller 11, which is sandwiched between the backing plate 16 and the rolling bearing 18 of the clamp roll 17 and whose lower portion is rotatably supported by the pair of rotation support devices 14, has an arrow D as the backing plate 16 rotates. Rotate in the direction.

このとき、球面ころ１１の中心Ｃ１は、バッキングプレート１６の回転中心Ｃ２より僅かに右方向にずれているので、バッキングプレート１６の回転によって時計方向（矢印Ｄ方向）に回転駆動される球面ころ１１には常に下向きのモーメントが作用し、球面ころ１１は確実に一対のリング状部材３７の外周面３７ａに接触して位置決めされながら回転する。   At this time, since the center C1 of the spherical roller 11 is slightly shifted to the right from the rotation center C2 of the backing plate 16, the spherical roller 11 is rotationally driven in the clockwise direction (arrow D direction) by the rotation of the backing plate 16. A downward moment always acts on the spherical roller 11, and the spherical roller 11 rotates while being positioned in contact with the outer peripheral surfaces 37 a of the pair of ring-shaped members 37.

そして、砥石旋回アームが、球面ころ１１の外周面１１ａの円弧中心を中心として砥石１２を揺動（矢印ＥおよびＦ方向）させる。また、砥石１２は、不図示のシリンダによって回転する球面ころ１１に押圧されて、球面ころ１１の外周面１１ａを研磨加工する。   Then, the grindstone turning arm swings the grindstone 12 about the arc center of the outer peripheral surface 11a of the spherical roller 11 (in the directions of arrows E and F). The grindstone 12 is pressed by a spherical roller 11 that is rotated by a cylinder (not shown) to polish the outer peripheral surface 11 a of the spherical roller 11.

球面ころ１１の外周面１１ａと接触するリング状部材３７は、鋼製であり、焼入れ、焼戻しによる熱処理が施された後、外周面３７ａにチタンメッキ処理が施されている。これにより、外周面３７ａの表面硬さは砥石１２の砥粒の硬度より高く（例えば、ＨＲＣ６０〜６５）、且つ内部が柔らかい構造となっている。   The ring-shaped member 37 that comes into contact with the outer peripheral surface 11a of the spherical roller 11 is made of steel, and after being subjected to heat treatment by quenching and tempering, the outer peripheral surface 37a is subjected to titanium plating. Thereby, the surface hardness of the outer peripheral surface 37a is higher than the hardness of the abrasive grains of the grindstone 12 (for example, HRC 60 to 65), and the inside has a soft structure.

加工時に砥石１２から脱落した砥粒や、切粉などが球面ころ１１の外周面１１ａとリング状部材３７との間に噛み込まれても、リング状部材３７の表面が凹んで球面ころ１１に与える損傷を抑制することができる。   Even if abrasive grains or chips that fall off from the grindstone 12 during processing are caught between the outer peripheral surface 11 a of the spherical roller 11 and the ring-shaped member 37, the surface of the ring-shaped member 37 is recessed to form the spherical roller 11. The damage given can be suppressed.

また、球面ころ１１を支持するリング状部材３７の外周面３７ａの表面粗さは、０．０５μｍＲａ以下となっているので、球面ころ１１の表面粗さをそれ以上の粗さに超仕上げ加工することができる。   Further, since the surface roughness of the outer peripheral surface 37a of the ring-shaped member 37 that supports the spherical roller 11 is 0.05 μmRa or less, the surface roughness of the spherical roller 11 is superfinished to a higher roughness. be able to.

尚、本発明は、前述した実施形態に限定されるものではなく、適宜、変形、改良、等が可能である。
なお、本発明のリング状部材の外周面に施されるチタンメッキ処理は、上述した実施形態のものに限定されるものではなく、使用する砥石の砥粒より硬い硬度が得られるものであればよい。 In addition, this invention is not limited to embodiment mentioned above, A deformation | transformation, improvement, etc. are possible suitably.
In addition, the titanium plating process performed to the outer peripheral surface of the ring-shaped member of the present invention is not limited to that of the above-described embodiment, as long as the hardness is harder than the abrasive grains of the grindstone to be used. Good.

また、被加工物を回転自在に支持する回転支持体は、玉軸受の外輪に圧入されたチタンメッキ処理（熱処理）されたリング状部材として説明したが、リング状部材を用いずに玉軸受の外輪の外周面に直接、メッキ処理（熱処理）したものでもよい。更には、玉軸受を用いずに、外周面にメッキ処理（熱処理）が施されたすべり軸受とすることもできる。   In addition, the rotary support that rotatably supports the workpiece has been described as a titanium-plated (heat-treated) ring-shaped member that is press-fitted into the outer ring of the ball bearing. The outer ring may be directly plated (heat treated) on the outer circumferential surface. Furthermore, a slide bearing in which the outer peripheral surface is plated (heat treatment) can be used without using a ball bearing.

本発明に係る機械加工装置の要部正面図である。It is a principal part front view of the machining apparatus which concerns on this invention. 図１におけるII−II断面図である。It is II-II sectional drawing in FIG. 図１におけるIII−III断面図である。It is III-III sectional drawing in FIG.

符号の説明Explanation of symbols

１０ 超仕上げ装置（機械加工装置）
１１ 球面ころ（被加工物）
１１ａ 被加工物の外周面
１４ 回転支持装置（被加工物支持体）
３２ 回転支持体
３５ 玉軸受
３６ 外輪
３７ リング状部材
３７ａ リング状部材の外周面（被加工物支持体の外周面） 10 Super finishing equipment (machining equipment)
11 Spherical roller (workpiece)
11a Workpiece outer peripheral surface 14 Rotation support device (workpiece support)
32 Rotating support 35 Ball bearing 36 Outer ring 37 Ring-shaped member 37a The outer peripheral surface of the ring-shaped member (the outer peripheral surface of the workpiece support)

Claims (5)

機械加工される被加工物の外周面に転接して前記被加工物を回転自在に支持する被加工物支持体であって、
前記被加工物の外周面に接触する前記被加工物支持体の少なくとも外周面は、チタンメッキ処理が施されることを特徴とする被加工物支持体。 A workpiece support that rotatably contacts the outer peripheral surface of a workpiece to be machined and rotatably supports the workpiece,
At least the outer peripheral surface of the workpiece support that contacts the outer peripheral surface of the workpiece is subjected to titanium plating treatment. 前記被加工物支持体は、焼入れ、焼戻しによる熱処理が施された後、チタンメッキ処理されることを特徴とする請求項１に記載の被加工物支持体。   The workpiece support according to claim 1, wherein the workpiece support is subjected to a titanium plating treatment after being subjected to a heat treatment by quenching and tempering. 前記被加工物支持体の表面粗さは、チタンメッキ処理後において０．０５μｍＲａ以下であることを特徴とする請求項１または請求項２に記載の被加工物支持体。   3. The workpiece support according to claim 1, wherein the workpiece support has a surface roughness of 0.05 [mu] mRa or less after the titanium plating process. 内輪、外輪、および前記内輪と前記外輪との間に転動自在に配設された複数の玉を備える玉軸受と、
前記玉軸受の前記外輪に外嵌固定され、少なくとも前記被加工物の外周面に転接する外周面にチタンメッキ処理が施されたリング状部材と、
を備えることを特徴とする請求項１から請求項３のいずれか１項に記載の被加工物支持体。 A ball bearing comprising an inner ring, an outer ring, and a plurality of balls that are rotatably arranged between the inner ring and the outer ring;
A ring-shaped member that is externally fitted and fixed to the outer ring of the ball bearing, and at least an outer peripheral surface that is in rolling contact with the outer peripheral surface of the workpiece is subjected to a titanium plating process;
The workpiece support according to any one of claims 1 to 3, further comprising: 請求項１から請求項４のいずれか１項に記載の被加工物支持体を備え、前記被加工物支持体によって回転自在に支持される前記被加工物を加工することを特徴とする機械加工装置。   5. A machining comprising the workpiece support according to claim 1, wherein the workpiece is rotatably supported by the workpiece support. apparatus.
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