JP5228776B2 - Hole defect detection apparatus and hole defect detection method - Google Patents

Hole defect detection apparatus and hole defect detection method Download PDF

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JP5228776B2
JP5228776B2 JP2008262606A JP2008262606A JP5228776B2 JP 5228776 B2 JP5228776 B2 JP 5228776B2 JP 2008262606 A JP2008262606 A JP 2008262606A JP 2008262606 A JP2008262606 A JP 2008262606A JP 5228776 B2 JP5228776 B2 JP 5228776B2
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light
hole defect
light receiving
projecting unit
inspection object
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JP2010091460A (en
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達弥 高瀬
泰光 樫原
薫 佐藤
孝 青田
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Nippon Steel Corp
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Nippon Steel and Sumitomo Metal Corp
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Description

本発明は、たとえば各種鋼板等の被検査物の穴欠陥の検出する検出装置及び検出方法に関するもので、さらに詳しくは、被検査物の穴欠陥の位置を精度良く検出することができる穴欠陥検出装置及び穴欠陥検出方法に関するものである。   The present invention relates to a detection apparatus and a detection method for detecting a hole defect of an inspection object such as various steel plates, and more specifically, a hole defect detection capable of accurately detecting the position of a hole defect of the inspection object. The present invention relates to an apparatus and a hole defect detection method.

従来より、鋼板等の穴欠陥を検出するに際して、図４に示すように、光を照射する投光部１１と、該投光部１１と対向する位置に配置された複数の受光部１２との間に被検査物１３を通し、投光部１１から照射されて被検査物１３の穴欠陥１３ａを透過した光を受光１２部によって順次検出するものは広く知られている。
この種の穴欠陥の検出手段は、上記複数の受光部１２は、被検査物１３の移動方向（図４において前後方向）に対して直交する向き、即ち被検査物１３の幅方向（図４においては左右方向）に向けて直列的に配置されていて、被検査物１３を連続的且つ直線的に移動させて投光部１１から被検査物１３に光を連続的に照射することにより、被検査物１３全体を検査することができる構成となっている。そして、穴欠陥がある場合には、該穴欠陥を透過した光をいずれかの受光部が感知し、その感知した受光部の位置により被検査物の穴欠陥の位置を特定することができる。 Conventionally, when detecting a hole defect in a steel plate or the like, as shown in FIG. 4, a light projecting unit 11 that irradiates light and a plurality of light receiving units 12 arranged at positions facing the light projecting unit 11. It is widely known that the light receiving unit 12 sequentially detects the light passing through the inspection object 13 between them and being irradiated from the light projecting unit 11 and transmitted through the hole defect 13a of the inspection object 13.
In this kind of hole defect detecting means, the plurality of light receiving portions 12 are oriented in a direction perpendicular to the moving direction of the object to be inspected 13 (front-rear direction in FIG. 4), that is, the width direction of the object to be inspected 13 (FIG. 4 In the left and right direction), by continuously and linearly moving the inspection object 13 to irradiate the inspection object 13 with light from the light projecting unit 11, The entire inspection object 13 can be inspected. When there is a hole defect, one of the light receiving parts senses the light transmitted through the hole defect, and the position of the hole defect of the inspection object can be specified based on the sensed position of the light receiving part.

しかしながら、上記発光部１１から照射される光が、被検査物１３の穴欠陥１３ａに対して様々な入射角で入射し、透過することから、この種の検査装置においては、入射角の大きな光（図４中の符号１４の光）が穴欠陥１３ａの場所以外に位置する他の受光部に入射する可能性が高く、この結果、本来光を感知すべき穴欠陥の部分に位置する受光部以外にも、穴欠陥の位置とは関係のない他の受光部までが光を感知するという過剰検出が生じ、これにより、被検査物１３の穴欠陥１３ａの正確な位置が特定できないという問題があった。
さらに、被検査物１３の穴欠陥１３ａを透過した光が、受光部１２と被検査物１３の間で乱反射することがあり、その乱反射した光（図４中の符号１５の光）が、穴欠陥１３ａの場所とは全く関係ない位置にある受光部に入射することから、その乱反射する光も穴欠陥の過剰検出を生じさせる原因の一つになっていた。
特に、鋼板等の各種金属板の生産ラインにおいては、過剰検出によって穴欠陥の正確な位置検出ができないと、検査後の再検査ラインあるいは精整ライン等において穴欠陥を除去する際に、その穴欠陥の発見・確認作業のためにライン速度の減速や停止が必要以上に発生するだけでなく、穴欠陥を見落とすと、穴欠陥のある製品を出荷することにつながるため、過剰検出を防止して穴欠陥の正確な位置を検出するようにすることは非常に重要な課題となっていた。 However, since the light emitted from the light emitting unit 11 is incident on and transmitted through the hole defect 13a of the inspection object 13 at various incident angles, light of a large incident angle is used in this type of inspection apparatus. There is a high possibility that the light (reference numeral 14 in FIG. 4) is incident on another light receiving portion located outside the hole defect 13a. As a result, the light receiving portion located at the hole defect portion where light should be originally sensed. In addition to this, there is an over-detection in which light is detected by other light-receiving portions that are not related to the position of the hole defect, and this makes it impossible to specify the exact position of the hole defect 13a of the inspection object 13. there were.
Furthermore, the light transmitted through the hole defect 13a of the inspection object 13 may be irregularly reflected between the light receiving unit 12 and the inspection object 13, and the irregularly reflected light (light indicated by reference numeral 15 in FIG. 4) Since the light is incident on the light receiving portion at a position completely unrelated to the location of the defect 13a, the irregularly reflected light is one of the causes of excessive detection of hole defects.
In particular, in the production line of various metal plates such as steel plates, when the hole defect cannot be accurately detected due to excessive detection, the hole defect is removed when the hole defect is removed in the re-inspection line or the finishing line after inspection. Not only does the line speed slow down or stop more than necessary to detect and check for defects, but oversight of hole defects leads to shipment of products with hole defects, preventing over-detection. It has been a very important task to detect the exact position of a hole defect.

一方で、被検査物の穴欠陥を検出手段として、特許文献１には、金属板等における穴欠陥は介在物などの成分上の問題や製造工程上の問題によって生じることが多く、穴欠陥の周囲には穴発生原因となった疵欠陥が顕在化していることを利用して、穴欠陥の位置と疵欠陥の位置との両方を検出・比較して、穴欠陥を検出した位置に確実に穴欠陥があるか否かを判断し、穴欠陥の誤検出を減らす技術が開示されている。しかしながら、この特許文献１に記載のものは、穴欠陥と疵欠陥の両方を検出するためのシステムの構成が全体として非常に複雑である上、最終的な欠陥の検出を特定するために様々なステップを踏む必要があり、判断に至るまでの過程が複雑であるという欠点がある。
しかも、この特許文献１のものは、最終的な穴欠陥の誤検出を減らすことができても、上述したような受光部による穴欠陥の過剰検出そのものを防ぐことができないため、穴欠陥の過剰検出がなされた場合でも、その度に疵欠陥の位置といちいち照合していく必要が生じ、これにより、穴欠陥の検出を判断・特定するのに非常に手間がかかるという問題があった。 On the other hand, as a means for detecting a hole defect in an object to be inspected, Patent Document 1 discloses that a hole defect in a metal plate or the like is often caused by a component problem such as inclusions or a problem in a manufacturing process. Using the fact that the defect that caused the occurrence of holes in the surrounding area is obvious, both the position of the hole defect and the position of the defect are detected and compared to ensure the position where the hole defect is detected. A technique for determining whether there is a hole defect and reducing false detection of the hole defect is disclosed. However, the configuration described in Patent Document 1 has a very complicated system configuration for detecting both a hole defect and a flaw defect as a whole, and various methods are used to specify the final defect detection. There is a drawback in that it is necessary to take steps and the process up to the judgment is complicated.
In addition, even if the error detection of the final hole defect can be reduced, it is not possible to prevent the excessive detection of the hole defect by the light receiving unit as described above. Even when the detection is made, it is necessary to collate with the position of the flaw defect each time, which causes a problem that it takes much time to determine and specify the detection of the hole defect.

特開２００１−３４３３３１号公報JP 2001-343331 A

本発明の技術的課題は、受光部による被検査物の穴欠陥の過剰検出を確実に防止して、穴欠陥の有無、及び穴欠陥があった場合のその位置の検出を精度良く行うことができる穴欠陥検出装置及び穴欠陥検出方法を提供することにある。
本発明の他の技術的課題は、被検査物の穴欠陥の検出を従来に比べてきわめて簡易な構成で、簡単且つ確実に行うことができる穴欠陥検出装置及び穴欠陥検出方法を提供することにある。 The technical problem of the present invention is to reliably prevent excessive detection of hole defects in the inspection object by the light receiving unit, and to accurately detect the presence or absence of hole defects and their positions when there are hole defects. An object of the present invention is to provide a hole defect detection device and a hole defect detection method that can be used.
Another technical problem of the present invention is to provide a hole defect detection device and a hole defect detection method capable of easily and reliably performing detection of a hole defect of an object to be inspected with an extremely simple configuration as compared with the prior art. It is in.

上記課題を解決するため、本発明の穴欠陥検出装置は、光を照射する投光部と、該投光部と対向する位置に直列状に配置され、投光部からの光を受光する複数の受光部とを備え、これら投光部と受光部との間に被検査物を該受光部の配列方向と直行する方向に進入させて、上記投光部から照射されて該被検査物の穴欠陥を透過した光を上記受光部によって順次検出する構成の穴欠陥検出装置において、上記投光部と被検査物との間の空間及び上記受光部と被検査物との間の空間のうち少なくともいずれか一方の空間に、投光部及び／又は受光部から被検査物の方向に立ちあがって該空間を縦に仕切る複数の遮光板が並設され、上記各遮光板は、上記被検査物の進入方向に対してそれぞれ斜めの方向に延び且つ相互に平行なるように配設されていることを特徴とする。 In order to solve the above problems, a hole defect detection device of the present invention includes a light projecting unit that irradiates light, and a plurality of light receiving units that receive light from the light projecting unit, arranged in series at positions facing the light projecting unit. A light receiving unit, and an object to be inspected is inserted between the light projecting unit and the light receiving unit in a direction perpendicular to the arrangement direction of the light receiving unit, and is irradiated from the light projecting unit. In the hole defect detection device configured to sequentially detect light transmitted through the hole defect by the light receiving unit, among the space between the light projecting unit and the inspection object and the space between the light receiving unit and the inspection object In at least one of the spaces, a plurality of light shielding plates that stand in the direction of the object to be inspected from the light projecting unit and / or the light receiving unit are arranged in parallel, and each of the light shielding plates includes the object to be inspected. Each extending in an oblique direction with respect to the entry direction of the Characterized in that that.

本発明の具体的な構成態様によれば、上記投光部は被検査物の上部側に、上記受光部は被検査物の下部側にそれぞれ配置されていて、上記遮光板は鉛直方向に直立している。
また、本発明においては、上記遮光板は、被検査物の進入方向に対する角度が、２つ以上の受光部で検出されない角度に設定されているものとすることができる。 According to a specific configuration aspect of the present invention, the light projecting unit is disposed on the upper side of the inspection object, the light receiving unit is disposed on the lower side of the inspection object, and the light shielding plate stands upright in the vertical direction. doing.
In the present invention, the light shielding plate may have an angle with respect to the entry direction of the inspection object that is not detected by two or more light receiving units.

一方、本発明の穴欠陥検出方法は、光を照射する投光部と、該投光部と対向する位置に直列状に配置されて投光部からの光を受光する複数の受光部との間に、被検査物を該受光部の配列方向と直行する方向に進入させて、上記投光部から照射されて該被検査物の穴欠陥を透過した光を上記受光部によって順次検出する穴欠陥検出方法において、上記投光部と被検査物との間の空間及び上記受光部と被検査物との間の空間のうち少なくともいずれか一方の空間に、投光部及び／又は受光部から被検査物の方向に立ちあがって該空間を縦に仕切ると共に、上記被検査物の進入方向に対してそれぞれ斜めの方向に延び、且つ相互に平行なるように配設された複数の遮光板を並設した状態で上記投光部から被検査物に光を照射することを特徴とする。 On the other hand, the hole defect detection method of the present invention includes a light projecting unit that irradiates light and a plurality of light receiving units that are arranged in series at positions facing the light projecting unit and receive light from the light projecting unit. In the meantime, the inspection object is made to enter the direction orthogonal to the arrangement direction of the light receiving parts, and the light that is irradiated from the light projecting part and transmitted through the hole defect of the inspection object is sequentially detected by the light receiving part. In the defect detection method, from the light projecting unit and / or the light receiving unit to at least one of the space between the light projecting unit and the inspection object and the space between the light receiving unit and the test object. Standing up in the direction of the object to be inspected, the space is vertically divided , and a plurality of light shielding plates extending in an oblique direction with respect to the ingress direction of the object to be inspected and arranged parallel to each other are arranged in parallel. The inspection object is irradiated with light from the light projecting unit in the installed state.

本発明の具体的な構成態様によれば、上記投光部は被検査物の上部側に、上記受光部は被検査物の下部側にそれぞれ配置されていて、上記遮光板は鉛直方向に直立している。
さらに本発明においては、上記遮光板の被検査物の進入方向に対する角度を、２つ以上の受光部で検出されない角度に設定することができる。 According to a specific configuration aspect of the present invention, the light projecting unit is disposed on the upper side of the inspection object, the light receiving unit is disposed on the lower side of the inspection object, and the light shielding plate stands upright in the vertical direction. doing.
Furthermore, in this invention, the angle with respect to the approach direction of the to-be-inspected object of the said light shielding plate can be set to the angle which is not detected by two or more light-receiving parts.

本発明によれば、投光部と被検査物との間の空間及び上記受光部と被検査物との間の空間のうち少なくともいずれか一方の空間に、投光部及び／又は受光部から被検査物の方向に立ちあがって該空間を縦に仕切る複数の遮光板を並設したため、投光部と被検査物との間の空間に遮光板を配設した場合には、投光部から照射された光あるいは乱反射する光のうち、被検査物の穴欠陥の位置にある受光部以外の他の受光部に入射するような、比較的大きな入射角の光の穴欠陥への入射を、上記遮光板により穴欠陥を透過する前に予め遮ることができるため、本来光を受光すべき受光部のみが光を受光して、穴欠陥の過剰検出を防止することが可能となる。
一方、上記受光部と被検査物との間の空間に遮光板を配設した場合には、被検査物の穴欠陥の位置にある受光部以外の他の受光部に入射するような比較的大きな入射角の光が穴欠陥を透過したとしても、遮光板がその光を他の受光部に至る前に遮るため、この場合であっても、穴欠陥の過剰検出を防止することが可能となる。さらに、この場合においては、穴欠陥を透過した後被検査物と受光部との間で乱反射するような光であっても、上記遮光板が他の受光部への入射を遮るため、穴欠陥の過剰検出を一層確実に防止することができる。
また、本発明によれば、投光部と被検査物との間の空間及び上記受光部と被検査物との間の空間のうち少なくともいずれか一方の空間に上記遮光板を配置する構成であるため、従来のものに比べて全体の構成がきわめて簡易であり、しかも、この遮光板によって本来受光すべき受光部以外の他の受光部への光の入射を遮る構成としたことにより、穴欠陥の過剰検出を比較的簡単に、且つ確実に防ぐことができる。 According to the present invention, from the light projecting unit and / or the light receiving unit to at least one of the space between the light projecting unit and the test object and the space between the light receiving unit and the test object. Since a plurality of light shielding plates that stand in the direction of the object to be inspected and vertically divide the space are arranged side by side, when a light shielding plate is provided in the space between the light projecting part and the object to be inspected, the light projecting part Of the irradiated light or irregularly reflected light, incident light on a hole defect with a relatively large incident angle, such as entering a light receiving part other than the light receiving part at the position of the hole defect of the inspection object, Since the light shielding plate can block the hole defect before passing through it, it is possible to prevent the excessive detection of the hole defect only by receiving the light only from the light receiving unit that should receive the light.
On the other hand, when a light-shielding plate is disposed in the space between the light receiving unit and the inspection object, it is relatively difficult to enter the light receiving unit other than the light receiving unit at the position of the hole defect of the inspection object. Even if light with a large incident angle is transmitted through the hole defect, the light shielding plate blocks the light before reaching the other light receiving part, and even in this case, it is possible to prevent excessive detection of the hole defect. Become. Further, in this case, even if the light is diffusely reflected between the object to be inspected and the light receiving part after passing through the hole defect, the light shielding plate blocks the incident on the other light receiving part. Can be more reliably prevented.
Further, according to the present invention, the light shielding plate is arranged in at least one of the space between the light projecting unit and the inspection object and the space between the light receiving unit and the inspection object. Therefore, the overall structure is very simple compared to the conventional one, and the light shielding plate blocks the incidence of light on other light receiving parts other than the light receiving part that should receive light originally. Defect overdetection can be prevented relatively easily and reliably.

図１〜図３は、本発明の穴欠陥検出装置の一実施の形態を示すもので、この実施の形態の検出装置は、コイルに巻取られる鋼板等、長尺の金属板の穴欠陥の検出に使用するもので、被検査物である金属板１に光を照射する投光部２と、該投光部２と対向する位置に直列的に配置されて投光部２からの光を受光する複数の受光部３とを有している。そして、これら投光部２と受光部３との間に、図示しない搬送手段によって金属板１を受光部３の配列方向（図１では、左右方向）と直交する方向（図１では前後方向）から直線的且つ一定の高さで水平に進入させて、投光部２から照射されて金属板１の穴欠陥１ａを透過した光を受光部３によって順次検出することにより、その穴欠陥の有無及び穴欠陥の位置を検出する構成となっている。   1 to 3 show an embodiment of a hole defect detection device according to the present invention. The detection device of this embodiment is used to detect a hole defect in a long metal plate such as a steel plate wound around a coil. Used for detection, a light projecting unit 2 that irradiates light to the metal plate 1 that is an object to be inspected, and a light beam from the light projecting unit 2 arranged in series at a position facing the light projecting unit 2 And a plurality of light receiving portions 3 for receiving light. A direction (the front-rear direction in FIG. 1) perpendicular to the arrangement direction of the light-receiving units 3 (the left-right direction in FIG. 1) between the light projecting unit 2 and the light-receiving unit 3 by a conveying means (not shown). By detecting the light that is irradiated from the light projecting unit 2 and transmitted through the hole defect 1a of the metal plate 1 by the light receiving unit 3 sequentially, the presence or absence of the hole defect In addition, the position of the hole defect is detected.

上記投光部２は、上記金属板１の全幅に対して高光度で照射可能な光源を備えたもので、被検査物である金属板１の上部側に位置して、該金属板１の上面側の板面に向けて光を照射するようになっている。
なお、この実施の形態においては、光源として、上記受光部３の配列方向と平行に延びて、該配列方向の両端部に位置する受光部３，３にまで至る長さを有する棒状に形成された蛍光灯であって、緑色の光を発するものが用いられている。 The light projecting unit 2 includes a light source that can irradiate the entire width of the metal plate 1 with high luminous intensity. The light projecting unit 2 is positioned on the upper side of the metal plate 1 that is an object to be inspected. Light is emitted toward the plate surface on the upper surface side.
In this embodiment, the light source is formed in a rod shape that extends in parallel with the arrangement direction of the light receiving portions 3 and reaches the light receiving portions 3 and 3 located at both ends in the arrangement direction. Fluorescent lamps that emit green light are used.

上記各受光部３は、被検査物である金属板１の下部側に位置して、穴欠陥１ａを通じて金属板１の上面側から下面側に透過した光を受けるもので、これらの受光部３は、金属板１の幅方向長さよりも十分に長くなる程度に直線的に配置されて、金属板１の全幅に亘って検査を行うことができるようになっている。
また、各受光部３は、いずれも同型で、同じ性能のものを用いており、受光部３の上面側に位置して入射する光を集める集光レンズ（図示せず）と、該集光レンズの下面側に位置して、集光レンズによって集められた光を感知する光検出素子（図示せず）とをそれぞれ備えている。
この実施の形態においては、上記光検出素子として、フォトマル（光電子倍増管）を使用しているが、フォトダイオード等各種光検出素子を使用しても良い。また、上記受光部３は、配列可能な長さの限度内でできるだけ多く設けて、光の位置を可能な限り細かい範囲で検出できるようにすることが好ましい。 Each of the light receiving portions 3 is located on the lower side of the metal plate 1 that is an object to be inspected, and receives light transmitted from the upper surface side to the lower surface side of the metal plate 1 through the hole defect 1a. Are arranged linearly so as to be sufficiently longer than the length in the width direction of the metal plate 1 so that the inspection can be performed over the entire width of the metal plate 1.
Each of the light receiving units 3 is the same type and has the same performance, and is disposed on the upper surface side of the light receiving unit 3 and collects incident light and collects the light. A light detection element (not shown) for sensing the light collected by the condenser lens is provided on the lower surface side of the lens.
In this embodiment, a photomultiplier (photomultiplier tube) is used as the photodetecting element, but various photodetecting elements such as a photodiode may be used. Moreover, it is preferable to provide as many light receivers as possible within the limit of the length that can be arranged so that the position of light can be detected in the smallest possible range.

上記受光部３と金属板１との間の空間４には、受光部３から金属板１の方向に鉛直に立ち上がって、該空間４を縦に仕切る複数の遮光板５が等間隔で並設されており、この遮光板５の広い板面両面を、光を遮る遮光面５ａ，５ａとして機能させて、穴欠陥への入射角が大きくて穴欠陥１ａの場所から異なる位置にある受光部に入射しようとする光（図１中の符号６の光）や、一旦穴欠陥１ａから入射して受光部３と金属板１との間で乱反射している光等の不要な光を遮光し、穴欠陥１ａのほぼ真下に位置する受光部に直接的に入射する光（図１中の符号７の光）のみを進行させるようにしている。   In the space 4 between the light receiving unit 3 and the metal plate 1, a plurality of light shielding plates 5 standing vertically from the light receiving unit 3 toward the metal plate 1 and partitioning the space 4 vertically are arranged in parallel at equal intervals. The light-shielding plate 5 is made to function as both light-shielding surfaces 5a and 5a that shield light so that the incident angle to the hole defect is large and the light-receiving unit located at a different position from the hole defect 1a. Light that is about to enter (light 6 in FIG. 1) or unnecessary light such as light that is once incident from the hole defect 1a and irregularly reflected between the light receiving unit 3 and the metal plate 1 is shielded. Only the light (light 7 in FIG. 1) that is directly incident on the light receiving portion located almost directly below the hole defect 1a is allowed to travel.

上記各遮光板５は、上端が金属板１に接触しない範囲内で、できるだけ該金属板１近くにまで延びるような高さに形成されていて、上記１つの受光部３の上面に複数枚の遮光板５が位置するような間隔で配置されている。このように、各遮光板５を金属板１に近い高さにまで延ばした上、これらの遮光板５で空間４をできるだけ細かく仕切ることにより、上述のような不要な光が進行できる範囲を小さくして該不要な光を一層確実に遮ることができるため、その不要な光が他の受光部に与える影響を抑え、穴欠陥１ａのほぼ直下に位置する受光部のみに確実に光を受光させることができる。
図１においては、上記各遮光板５，５の間の間隔は、１つの受光部３上に２〜３枚程度が配設されるような間隔としているが、この遮光板５，５間の間隔は狭ければ狭いほど好ましく、また遮光板５はその間隔に合わせて何枚でも配設してもよい。 Each of the light shielding plates 5 is formed so as to extend as close as possible to the metal plate 1 within a range where the upper end does not contact the metal plate 1, and a plurality of light shielding plates 5 are formed on the upper surface of the one light receiving unit 3. The light shielding plates 5 are arranged at intervals such that they are located. Thus, by extending each light shielding plate 5 to a height close to the metal plate 1 and partitioning the space 4 as finely as possible by these light shielding plates 5, the range in which unnecessary light can travel is reduced. Since the unnecessary light can be blocked more reliably, the influence of the unnecessary light on other light receiving parts is suppressed, and the light is reliably received only by the light receiving part located almost immediately below the hole defect 1a. be able to.
In FIG. 1, the interval between the light shielding plates 5, 5 is such that about 2 to 3 sheets are arranged on one light receiving portion 3. The smaller the interval, the better. Further, any number of light shielding plates 5 may be arranged in accordance with the interval.

また、上記各遮光板５は、図２に示すように、それぞれ上記金属板１の進入方向（図２中の矢印方向）に対して角度βの方向に向けて斜めに延びる横長の薄板状に形成されていて、いずれの遮光板５も、すべて同型で且つ相互に平行なるように同じ方向に延びた状態で配設されている。これにより、金属板１の検査中において、遮光板５が一時的に穴欠陥１ａの場所、即ち穴欠陥１ａの真下に位置して該穴欠陥１ａと重なることがあっても、金属板１が直進することにより穴欠陥１ａの場所が遮光板５の位置からすぐにずれて、相互の重なりが解消されるため、遮光板５が穴欠陥１ａの場所に常時位置することがない。したがって、遮光板５自体が穴欠陥１ａを塞いで光の透過を妨げることがなく、これにより、遮光板５に起因する穴欠陥１ａの検出精度の低下が確実に防止される。   Further, as shown in FIG. 2, each of the light shielding plates 5 is a horizontally long thin plate extending obliquely in the direction of an angle β with respect to the entry direction of the metal plate 1 (the arrow direction in FIG. 2). All of the light shielding plates 5 are formed in the same shape and extended in the same direction so as to be parallel to each other. Thereby, during the inspection of the metal plate 1, even if the light shielding plate 5 is temporarily located at the position of the hole defect 1a, that is, directly below the hole defect 1a and overlaps with the hole defect 1a, the metal plate 1 By moving straight, the location of the hole defect 1a is immediately shifted from the position of the light shielding plate 5 and the mutual overlap is eliminated. Therefore, the light shielding plate 5 is not always located at the location of the hole defect 1a. Therefore, the light shielding plate 5 itself does not block the hole defect 1a and prevent light from being transmitted, thereby reliably preventing a decrease in detection accuracy of the hole defect 1a caused by the light shielding plate 5.

ここで、各遮光板５の、金属板１の進入方向に対する角度βは、０°及び９０°以外であれば穴欠陥１ａと遮光板５との重なりが解消されるため、該角度βは基本的に０°及び９０°を除いた適当な角度に設定することができる。ただし、この角度βが小さいと、１枚の遮光板５が２つ以上の受光部３にまたがってしまう場合があり、その際には、金属板１の進行中に穴欠陥１ａが複数の遮光板５上を通過することになることから、それらの遮光板間の隙間８内に入射した光が、各遮光板５の長手方向に拡散あるいは乱反射して複数の受光部に入射する可能性がある。その結果、穴欠陥１ａの正確な位置の特定が面倒になることがあることから、この様な事態を可及的に回避することができるように角度βは可能な限り大きい方が良く、穴欠陥の未検出が生じない限度で９０°に近い角度に設定することが好ましい。   Here, if the angle β of each light shielding plate 5 with respect to the entering direction of the metal plate 1 is other than 0 ° and 90 °, the overlap between the hole defect 1a and the light shielding plate 5 is eliminated. Therefore, it can be set to an appropriate angle excluding 0 ° and 90 °. However, if the angle β is small, one light shielding plate 5 may straddle two or more light receiving portions 3, and in this case, the hole defect 1 a is blocked by a plurality of light shieldings while the metal plate 1 is traveling. Since the light passes through the plate 5, there is a possibility that light incident in the gap 8 between the light shielding plates diffuses or diffusely reflects in the longitudinal direction of each light shielding plate 5 and enters a plurality of light receiving portions. is there. As a result, it may be troublesome to specify the exact position of the hole defect 1a. Therefore, the angle β should be as large as possible so that such a situation can be avoided as much as possible. It is preferable to set the angle close to 90 ° as long as no defect is not detected.

さらに、上記各遮光板５は、遮光板５の表面、特に遮光面５ａについては、光を吸収しやすいように黒色に着色されていて、できるだけ光の反射を抑えるようになっており、また、表面については、つやを少なくして光を反射しにくくしている。
なお、この実施の形態においては、各遮光板５全体を、ある程度剛性の高い黒色の厚紙で形成しているが、遮光板５の材質・色については、耐久性があって光の反射が生じにくいものであれば適宜選択することができる。 Further, each of the light shielding plates 5 is colored black so that the surface of the light shielding plate 5, particularly the light shielding surface 5a, can easily absorb light, and suppresses reflection of light as much as possible. On the surface, it is less glossy and less likely to reflect light.
In this embodiment, the entire light shielding plate 5 is formed of black cardboard having a certain degree of rigidity. However, the material and color of the light shielding plate 5 are durable and reflect light. If it is difficult, it can be selected as appropriate.

ところで、上記各遮光板５は、図２に示すように、高剛性で保形性を有する平面視略平行四辺形状の保持枠９内にすべて配設されている。これにより、遮光板５を設置すべき空間、即ちこの実施の形態の場合は受光部３と金属板との間の空間４に該遮光板５を簡単に設置することができ、該空間４内における各遮光板５の位置の設定も容易であるという利点がある。
具体的に、この保持枠９は、上記遮光板５とほぼ同じ高さ及び厚さに形成されていて、内壁部分に各遮光板５の長手方向の両端部がそれぞれ位置不動に固定されている。また、この保持枠９の長手方向の両端部分は、各遮光板５と平行となるように形成されていて、この部分も遮光板として機能するようになっている。
この場合において、上記保持枠９は、枠内に上記投光部２の投光面及び受光部３の受光面が収まるように形成されることが好ましい。 By the way, as shown in FIG. 2, each of the light shielding plates 5 is all disposed in a holding frame 9 having a high rigidity and a shape-retaining property and having a substantially parallelogram shape in plan view. Thereby, the light shielding plate 5 can be easily installed in the space in which the light shielding plate 5 is to be installed, that is, in the case of this embodiment, the space 4 between the light receiving unit 3 and the metal plate. There is an advantage that the setting of the position of each light shielding plate 5 is easy.
Specifically, the holding frame 9 is formed to have substantially the same height and thickness as the light shielding plate 5, and both end portions in the longitudinal direction of the light shielding plates 5 are fixed to the inner wall portion so as not to be moved. . Further, both end portions of the holding frame 9 in the longitudinal direction are formed so as to be parallel to the respective light shielding plates 5, and these portions also function as light shielding plates.
In this case, the holding frame 9 is preferably formed so that the light projecting surface of the light projecting unit 2 and the light receiving surface of the light receiving unit 3 are accommodated in the frame.

なお、この実施の形態の検出装置における上記投光部２及び受光部３並びに遮光板を配設する部分、金属板１を通す投光部２と受光部３との間の空間については、外部からの光が入射しないように遮蔽してあり、その外部からの光に起因する過剰検出や誤検出を防止するようにしている。   In addition, about the space | interval between the light projection part 2 and the light-receiving part 3 which let the light projection part 2, the light-receiving part 3, and the light-shielding plate in the detection apparatus of this embodiment arrange | position, the metal plate 1, and the outside, Is shielded from incident light so as to prevent over-detection and false detection due to light from the outside.

上記構成を有する穴欠陥検出装置は、投光部２と受光部３との間に金属板１を連続的に進入させる一方で、投光部２から金属板１に光を照射し、金属板１に穴欠陥１ａがあった場合には、穴欠陥１ａを透過した光が受光部３に入射することにより、穴欠陥１ａが存在すること及びその穴欠陥１ａの位置が検出される。
このとき、上記受光部３と被検査物である金属板１との間の空間４に、受光部３から金属板の方向に立ち上がって、該空間４を縦に仕切る複数の遮光板５が並設された状態で金属板１に光が照射されるため、穴欠陥１ａの位置にある受光部以外の他の受光部に入射するような比較的大きな入射角の光６が穴欠陥を透過するような場合でも、遮光板５がその光６を他の受光部３に至る前に遮る。そして、本来光を受光すべき受光部、即ち該穴欠陥１ａの場所に位置する受光部のみに光を入射させて受光させるため、穴欠陥１ａの過剰検出を防止することできる。また、穴欠陥１ａを透過した後、金属板１と受光部との間で乱反射するような光であっても、上記遮光板５が遮って他の受光部へ入射することを防ぐことができるため、穴欠陥の過剰検出を一層確実に防止して、穴欠陥の有無を精度よく検出すると共に、穴検出の位置を正確に検出することができる。 The hole defect detection apparatus having the above-described configuration allows the metal plate 1 to continuously enter between the light projecting unit 2 and the light receiving unit 3, while irradiating the metal plate 1 with light from the light projecting unit 2. 1 has a hole defect 1a, the light transmitted through the hole defect 1a is incident on the light receiving unit 3, whereby the presence of the hole defect 1a and the position of the hole defect 1a are detected.
At this time, in the space 4 between the light receiving unit 3 and the metal plate 1 as the object to be inspected, a plurality of light shielding plates 5 rising in the direction of the metal plate from the light receiving unit 3 and partitioning the space 4 vertically are arranged. Since the metal plate 1 is irradiated with light in the installed state, the light 6 having a relatively large incident angle that enters the light receiving part other than the light receiving part at the position of the hole defect 1a passes through the hole defect. Even in such a case, the light shielding plate 5 blocks the light 6 before reaching the other light receiving portions 3. Since light is incident only on the light receiving portion that should receive light, that is, the light receiving portion located at the position of the hole defect 1a, the excessive detection of the hole defect 1a can be prevented. Further, even if the light is diffusely reflected between the metal plate 1 and the light receiving part after passing through the hole defect 1a, it is possible to prevent the light shielding plate 5 from blocking and entering the other light receiving part. Therefore, excessive detection of hole defects can be prevented more reliably, the presence / absence of hole defects can be detected accurately, and the position of hole detection can be detected accurately.

さらに、上記構成の穴欠陥検出装置は、上記受光部３と金属板１との間の空間４に上記遮光板を配置するという比較的簡易な構成であるため、検出の精度を向上させために複雑な構成を採用している従来のものに比べて全体の構成がきわめて簡単であり、製造や設置、メンテナンス等もきわめて容易である。しかも、上記受光部３と金属板１との間の空間４に上記遮光板５を配置するだけで、過剰検出を防ぎながらの穴欠陥１ａの検出を容易に行うことができるため、検出作業を比較的簡単且つ確実に行うことができる。   Furthermore, since the hole defect detection apparatus having the above configuration is a relatively simple configuration in which the light shielding plate is disposed in the space 4 between the light receiving unit 3 and the metal plate 1, in order to improve detection accuracy. Compared to a conventional configuration that employs a complicated configuration, the overall configuration is extremely simple, and manufacturing, installation, maintenance, and the like are extremely easy. In addition, the hole defect 1a can be easily detected while preventing over-detection only by arranging the light shielding plate 5 in the space 4 between the light receiving unit 3 and the metal plate 1, so that the detection work can be performed. This can be done relatively easily and reliably.

上記実施の形態においては、複数の遮光板５を、受光部３と被検査物である金属板１との間の空間４に配設した例を示しているが、図３に示すように、遮光板を受光部３と金属板１との間の空間４、及び投光部２と金属板１との間の空間１０の両方の空間にそれぞれ配設するようにしても良い。具体的には、上記空間１０に、投光部から金属板１の方向に立ちあがって（この場合は鉛直方向に直立）、該空間１０を縦に仕切る複数の遮光板５´を並設することができる。
この場合、空間１０にある遮光板５´が、投光部２から照射された光あるいは乱反射する光のうち、金属板１の穴欠陥１ａの位置にある受光部以外の他の受光部に入射するような、比較的大きな入射角の光（図３中の符号６´の光）の穴欠陥１ａへの入射を、穴欠陥１ａを透過する前に予め遮るため、受光部３と金属板１との間の空間４に配設した遮光板５の作用と相まって、金属板１の穴欠陥１ａの過剰検出を一層確実に防止することができる。
なお、このように両方の空間４，１０に遮光板５，５´を設ける場合、上記空間１０に配置する各遮光板５´と、上記空間４に配置する各遮光板５とは、遮光板間の間隔を相互に異なるものとしてもよく、また、両空間４，１０の遮光板５，５´の枚数や高さ、配設位置、被検査物の進行方向に対する角度β等は、それぞれの空間４，１０ごとに別々に設定することができる。 In the said embodiment, although the example which has arrange | positioned the several light-shielding plate 5 in the space 4 between the light-receiving part 3 and the metal plate 1 which is a to-be-inspected object is shown, as shown in FIG. The light shielding plate may be disposed in both the space 4 between the light receiving unit 3 and the metal plate 1 and the space 10 between the light projecting unit 2 and the metal plate 1. Specifically, a plurality of light-shielding plates 5 ′ that stand vertically from the light projecting portion in the direction of the metal plate 1 (in this case, stand upright in the vertical direction) and vertically partition the space 10 are arranged in the space 10. Can do.
In this case, the light shielding plate 5 ′ in the space 10 is incident on a light receiving unit other than the light receiving unit at the position of the hole defect 1 a of the metal plate 1 among the light emitted from the light projecting unit 2 or the light that is irregularly reflected. Therefore, the light receiving unit 3 and the metal plate 1 are shielded in advance before the light having a relatively large incident angle (the light denoted by reference numeral 6 'in FIG. 3) enters the hole defect 1a before passing through the hole defect 1a. Combined with the action of the light shielding plate 5 disposed in the space 4 between the two, the excessive detection of the hole defect 1a of the metal plate 1 can be more reliably prevented.
When the light shielding plates 5 and 5 ′ are provided in both the spaces 4 and 10 as described above, the light shielding plates 5 ′ disposed in the space 10 and the light shielding plates 5 disposed in the space 4 are light shielding plates. The interval between them may be different from each other, and the number and height of the light shielding plates 5 and 5 'in both spaces 4 and 10, the arrangement position, the angle β with respect to the traveling direction of the inspection object, etc. Each space 4 and 10 can be set separately.

また、上記遮光板は、投光部２と被検査物との間の空間にのみ設けてもよく、この場合には、上述のように、他の受光部に入射するような比較的大きな入射角の光の穴欠陥への入射を、該穴欠陥を透過する前に予め遮ることができるため、この空間に遮光板を配設するだけでも穴欠陥の過剰検出を防止することが可能となる。   Further, the light shielding plate may be provided only in the space between the light projecting unit 2 and the object to be inspected. In this case, as described above, a relatively large incident light that enters the other light receiving unit. Since the incidence of corner light on the hole defect can be blocked in advance before passing through the hole defect, it is possible to prevent excessive detection of the hole defect simply by providing a light shielding plate in this space. .

さらに、上記実施の形態においては、投光部２を被検査物である金属板１の上部側に、受光部３を金属板１の下部側にそれぞれ配置し、上記遮光板５は鉛直方向に直立させた態様としているが、投光部及び受光部の位置関係は、上下逆転してもよいことは勿論である。
また、上記実施の形態の場合は、被検査物である金属板１を、投光部２と受光部３との間に水平に進入されるようにしているが、金属板１を傾斜させた状態で進入させる場合や、金属板を鉛直に進入させる場合であっても、投光部２の光の照射方向及び受光部３の受光方向を適正な方向、即ち光の照射及び受光・検出を最も適当に行うことができる方向に設定した上で、上記投光部２と被検査物との間の空間及び上記受光部３と被検査物との間の空間のうち少なくともいずれか一方の空間に、投光部２及び／又は受光部３から被検査物の方向に立ちあがって該空間を縦に仕切る複数の遮光板を並設することができれば、金属板１の搬送ラインの状況に合わせて適当な態様とすることが可能である。 Furthermore, in the said embodiment, the light projection part 2 is each arrange | positioned to the upper part side of the metal plate 1 which is a to-be-inspected object, and the light-receiving part 3 is arrange | positioned to the lower part side of the metal plate 1, respectively. Although it is set as an upright mode, it is needless to say that the positional relationship between the light projecting unit and the light receiving unit may be reversed upside down.
Moreover, in the case of the said embodiment, although the metal plate 1 which is a to-be-inspected object is made to approach horizontally between the light projection part 2 and the light-receiving part 3, the metal plate 1 was inclined. Even in the case of entering in a state or in the case of vertically approaching a metal plate, the light emitting direction of the light projecting unit 2 and the light receiving direction of the light receiving unit 3 are set in an appropriate direction, that is, light irradiation and light reception / detection. After setting in a direction that can be performed most appropriately, at least one of the space between the light projecting unit 2 and the inspection object and the space between the light receiving unit 3 and the inspection object In addition, if a plurality of light-shielding plates that stand up from the light projecting unit 2 and / or the light receiving unit 3 in the direction of the inspection object and vertically partition the space can be arranged side by side, according to the situation of the conveyance line of the metal plate 1 Appropriate embodiments are possible.

さらに、上記実施の形態においては、被検査物として金属板を採用した例を示しているが、被検査物としては、シート状のものあるいはブロック状等の板体以外の各種形状のものであってよく、また金属以外の素材であってもよい。   Furthermore, in the above embodiment, an example is shown in which a metal plate is used as the object to be inspected. However, the object to be inspected has various shapes other than a plate such as a sheet or block. It may be a material other than metal.

本発明に係る穴欠陥検出装置の概略的に示す正面図である。It is a front view showing roughly a hole defect detecting device concerning the present invention. 本発明の遮光板の平面図である。It is a top view of the light-shielding plate of this invention. 本発明に係る穴欠陥検出装置における図１とは異なる実施の形態を概略的に示す正面図である。It is a front view which shows schematically different embodiment from FIG. 1 in the hole defect detection apparatus which concerns on this invention. 従来の穴欠陥検出装置を概略的に示す正面図である。It is a front view which shows the conventional hole defect detection apparatus roughly.

符号の説明Explanation of symbols

１ 金属板（被検査物）
１ａ 穴欠陥
２ 投光部
３ 受光部
４，１０ 空間
５ 遮光板
β 被検査物の進入方向に対する遮光板の角度 1 Metal plate (inspection object)
1a hole defect 2 light projecting part 3 light receiving part 4,10 space 5 light shielding plate β angle of light shielding plate with respect to ingress direction of inspection object

Claims (6)

光を照射する投光部と、該投光部と対向する位置に直列状に配置され、投光部からの光を受光する複数の受光部とを備え、これら投光部と受光部との間に被検査物を該受光部の配列方向と直行する方向に進入させて、上記投光部から照射されて該被検査物の穴欠陥を透過した光を上記受光部によって順次検出する構成の穴欠陥検出装置において、
上記投光部と被検査物との間の空間及び上記受光部と被検査物との間の空間のうち少なくともいずれか一方の空間に、投光部及び／又は受光部から被検査物の方向に立ちあがって該空間を縦に仕切る複数の遮光板が並設され、
上記各遮光板は、上記被検査物の進入方向に対してそれぞれ斜めの方向に延び、且つ相互に平行なるように配設されていることを特徴とする穴欠陥検出装置。 A light projecting unit that irradiates light, and a plurality of light receiving units that are arranged in series at positions facing the light projecting unit and receive light from the light projecting unit. The inspection object is inserted in a direction perpendicular to the arrangement direction of the light receiving parts in between, and the light irradiated from the light projecting part and transmitted through the hole defect of the inspection object is sequentially detected by the light receiving part. In the hole defect detection device,
The direction of the object to be inspected from the light projecting unit and / or the light receiving unit to at least one of the space between the light projecting unit and the test object and the space between the light receiving unit and the test object A plurality of light shielding plates that stand up and partition the space vertically,
Each of the light shielding plates extends in an oblique direction with respect to the entry direction of the inspection object and is disposed so as to be parallel to each other . 上記投光部は被検査物の上部側に、上記受光部は被検査物の下部側にそれぞれ配置されていて、上記遮光板は鉛直方向に直立していることを特徴とする請求項１に記載の穴欠陥検出装置。 The light projecting unit is disposed on the upper side of the inspection object, the light receiving unit is disposed on the lower side of the inspection object, and the light shielding plate stands upright in the vertical direction. The hole defect detection apparatus described. 上記遮光板は、被検査物の進入方向に対する角度が、２つ以上の受光部で検出されない角度に設定されていることを特徴とする請求項１又は請求項２に記載の穴欠陥検出装置。 The hole defect detection device according to claim 1 , wherein the light shielding plate is set such that an angle with respect to an entry direction of the inspection object is not detected by two or more light receiving units. 光を照射する投光部と、該投光部と対向する位置に直列状に配置されて投光部からの光を受光する複数の受光部との間に、被検査物を該受光部の配列方向と直行する方向に進入させて、上記投光部から照射されて該被検査物の穴欠陥を透過した光を上記受光部によって順次検出する穴欠陥検出方法において、
上記投光部と被検査物との間の空間及び上記受光部と被検査物との間の空間のうち少なくともいずれか一方の空間に、投光部及び／又は受光部から被検査物の方向に立ちあがって該空間を縦に仕切ると共に、上記被検査物の進入方向に対してそれぞれ斜めの方向に延び且つ相互に平行なるように配設された複数の遮光板を並設した状態で上記投光部から被検査物に光を照射することを特徴とする穴欠陥検出方法。 An object to be inspected is placed between the light projecting unit that irradiates light and a plurality of light receiving units that are arranged in series at positions facing the light projecting unit and receive light from the light projecting unit. In the hole defect detection method in which light entering the direction orthogonal to the arrangement direction and sequentially radiated from the light projecting unit and transmitted through the hole defect of the inspection object is detected by the light receiving unit.
The direction of the object to be inspected from the light projecting unit and / or the light receiving unit to at least one of the space between the light projecting unit and the test object and the space between the light receiving unit and the test object The projection is performed in a state where the space is vertically partitioned and a plurality of light shielding plates arranged in parallel with each other and extending in an oblique direction with respect to the entry direction of the inspection object are arranged side by side. A hole defect detection method comprising irradiating light from an optical part to an inspection object. 上記投光部は被検査物の上部側に、上記受光部は被検査物の下部側にそれぞれ配置されていて、上記遮光板は鉛直方向に直立していることを特徴とする請求項４に記載の穴欠陥検出方法。 5. The light projecting unit according to claim 4, wherein the light projecting unit is disposed on an upper side of the inspection object, the light receiving unit is disposed on a lower side of the inspection object, and the light shielding plate stands upright in a vertical direction. The hole defect detection method as described. 上記遮光板の被検査物の進入方向に対する角度を、２つ以上の受光部で検出されない角度に設定することを特徴とする請求項１又は請求項２に記載の穴欠陥検出装置。 The hole defect detection device according to claim 1 or 2, wherein an angle of the light shielding plate with respect to an approaching direction of the inspection object is set to an angle that is not detected by two or more light receiving units.
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