JPS582642A - Pinhole detecting device - Google Patents
Pinhole detecting deviceInfo
- Publication number
- JPS582642A JPS582642A JP9995381A JP9995381A JPS582642A JP S582642 A JPS582642 A JP S582642A JP 9995381 A JP9995381 A JP 9995381A JP 9995381 A JP9995381 A JP 9995381A JP S582642 A JPS582642 A JP S582642A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- cylindrical lens
- light
- pinhole
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/894—Pinholes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は製鉄所等の薄板圧延工程において薄板に発生し
たピンホールを連続的に検出するピンホール検出装置に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pinhole detection device that continuously detects pinholes generated in a thin plate during a thin plate rolling process in a steel mill or the like.
一般に薄板に発生する欠陥の一種にピンホールがある。Pinholes are a type of defect that generally occurs in thin plates.
そこで薄板圧延工程において薄板を連続的に検査して薄
板にピンホールが発生した時にはこれを検出してピンホ
ールの発生を認識するためのピンホール検出装置が使用
されていた。従来のピンホール検出装置について第１図
および第２図にしたがって説明する。１１図は被検査板
１の幅方向の断面図であり、第２図は長手方向の断面図
である。図中２・・・は複数の点光源であり、反射板３
に取付けられている。この点光源２・・・に対向配置さ
れた反射箱４の内面上部には複数の光検出器５・・・が
設けられている。Therefore, in the thin plate rolling process, a pinhole detection device has been used to continuously inspect the thin plate and detect when a pinhole occurs in the thin plate to recognize the occurrence of a pinhole. A conventional pinhole detection device will be explained with reference to FIGS. 1 and 2. FIG. 11 is a cross-sectional view in the width direction of the board 1 to be inspected, and FIG. 2 is a cross-sectional view in the longitudinal direction. 2... in the figure is a plurality of point light sources, and the reflection plate 3
installed on. A plurality of photodetectors 5 are provided at the upper part of the inner surface of the reflection box 4, which is placed opposite to the point light source 2.
上記反射板３と反射箱４は基台６に固定されている。こ
の反射板３と反射箱４は長手方向ニ進行する被検査板１
をはさんで対向配置されている。この被検査板１の巾方
向端部８を遮光する遮光体７が基台６に取付けられてい
る。このように構成された従来のピンホール検出装置に
おいて、被検出ＮＪに発生したピンホールから漏出した
漏出光は反射箱内で反射・拡散され光検出器により検出
される。被検出板１の幅方向端部８から反射箱４内に光
が入射するとピンホールがなくてもピンホールが発生し
ている時と同様に光検出器５・・・により検出される誤
動作が生じるので、遮光体７を幅方向端部８に重ね合せ
てこのような誤動作を防止している。ところが、このよ
うな従来のピンホール検出装置ではピンホールからの漏
出光は反射箱４内で反射・拡散するため光検出器５・・
・に入射する光量が減少し感度が低下する不具合があっ
た。また、被検査板１の中方向端部８には遮光体７が被
検出板１を覆い隠す部分が発生し、た、とえこの部分に
ピンホールが発生していても検出できない不感帯が生じ
る不具合もあった。さらに互いにある定位置に設定され
た複数の点光源２・・・と光検出器５・・・でピンホー
ルを検出するので被検出板１の幅方向に感度の不均一が
発生する不具合もあった。The reflecting plate 3 and the reflecting box 4 are fixed to a base 6. The reflecting plate 3 and the reflecting box 4 are connected to the inspected plate 1 which moves in the longitudinal direction.
They are placed facing each other across the A light shielding body 7 is attached to the base 6 to shield the width direction end portion 8 of the inspection target board 1 from light. In the conventional pinhole detection device configured as described above, the leaked light leaked from the pinhole generated in the detection target NJ is reflected and diffused within the reflection box and detected by the photodetector. When light enters the reflection box 4 from the widthwise end 8 of the detection plate 1, a malfunction will be detected by the photodetector 5 even if there is no pinhole, just as when a pinhole has occurred. Therefore, the light shielding body 7 is overlapped with the width direction end portion 8 to prevent such malfunction. However, in such a conventional pinhole detection device, since the light leaking from the pinhole is reflected and diffused within the reflection box 4, the light detector 5...
- There was a problem in which the amount of light incident on the sensor decreased, resulting in a decrease in sensitivity. In addition, there is a part at the middle end 8 of the board 1 to be inspected where the light shielding body 7 covers the board 1 to be detected, and even if a pinhole occurs in this part, a dead zone is created where it cannot be detected. There were also some glitches. Furthermore, since pinholes are detected by a plurality of point light sources 2 and photodetectors 5 that are set at fixed positions relative to each other, there is also the problem of uneven sensitivity in the width direction of the detection plate 1. Ta.
′本発明は以上の欠点を考慮してなされたもので、ピン
ホールを通過した漏出光だけを収束させ、反射・拡散さ
せずに光検出器器へ入射させて光検出器に入射する光量
の減少を少なくして感度の向上を企ると共に不感帯をな
くすことを目的とする。すなわち、本発明にかかるピン
ホール検出器は被検出板を照射する線光υを被検出板の
中方向に配置し、被検出板をはさんで線光源と対向配置
された円筒レンズにより被検出板の巾方向の光を光検出
器に収束させ、円筒レンズを透過した被検出板の長平方
向の光は曲面鏡により１度だけ反射させて光検出器に入
射させるよう構成されたものである。'The present invention was made in consideration of the above drawbacks, and it focuses only the leaked light that has passed through the pinhole and allows it to enter the photodetector without being reflected or diffused, thereby reducing the amount of light that enters the photodetector. The purpose is to improve sensitivity by reducing the decrease in sensitivity, and to eliminate dead zones. That is, in the pinhole detector according to the present invention, the line light υ that illuminates the plate to be detected is placed in the direction of the plate to be detected, and the cylindrical lens placed opposite the line light source across the plate to be detected is used to detect the plate. The structure is such that the light in the width direction of the plate is converged on the photodetector, and the light in the longitudinal direction of the plate to be detected that has passed through the cylindrical lens is reflected only once by a curved mirror and then enters the photodetector. .
以下本発明の一実施例を第３図および第４図にしたがっ
て説明する。＄３図は被検出板１の巾方向の断面図、第
４図は長手方向の断面図である。図中９はたとえば螢光
灯、水銀灯等の線光源である。被検出板１をはさんで線
光源９と対向する円筒レンズ１０が被検出板１の進行方
向に平行な一定線上に光を収束させるよう配置されてい
る。そして円筒レンズ１０の収束線上゛にたとえば二次
−子増倍形光奄管等の光検出器１１が設けられている。An embodiment of the present invention will be described below with reference to FIGS. 3 and 4. Figure 3 is a sectional view in the width direction of the detection plate 1, and Figure 4 is a sectional view in the longitudinal direction. In the figure, numeral 9 is a line light source such as a fluorescent lamp or a mercury lamp. A cylindrical lens 10 facing a linear light source 9 with the detection plate 1 in between is arranged so as to converge light onto a constant line parallel to the traveling direction of the detection plate 1. On the convergence line of the cylindrical lens 10, a photodetector 11 such as a secondary-element multiplier type photodetector tube is provided.
また、所定の角度範囲θ以外の光を速断するスリット板
１２が上記円筒レンズ１０と光検出器１１の間に設けら
れている。そして、上記円筒レンズ１０を直進した光を
１度だけ反射させて上記光検出器１１へ入射させるＱＩ
Ｉ田１晩１３・・・が設けられている。この凹面睨ノ３
・・・の一方の焦点は被検出板１が進行する平面に設定
されており、他方の焦点は光検出器１に設定されている
。そして被検出板の幅方向端部には遮光体１４が被検出
板１と非接触で設けられＯ’２Ｆｊ２出板１に発生板１
ピンホールを通過せずに上記遮光体１４と上記被検出板
１との間隙から入射する光を上記光検出器１１へ入射す
る１ＪＩＩ定の角度範囲θから外れるように上記円筒レ
ンズ１０へ入射させている。また、上記たピンホールは
被検出板１の幅方向では垂直であるが長手方向では圧延
工程で傾斜するものが多い。このように構成された一実
施例では被検出板１に発生したピンホールからの漏出光
は被検出板１の幅方向では上記円筒レンズ１ｏで光検出
器１１に収束され、被検出板１の長手方向では円筒レン
ズ１０内を直進し凹面鏡１３・・・で１度だけ反射され
光検出器１ノに入射されるので検出すべきピンホールか
らの漏出光の光量が減少するのを少なくできるので感度
が向上し従来発見し得なかった小さなピンホールをも発
見できる利点を有する。Further, a slit plate 12 is provided between the cylindrical lens 10 and the photodetector 11, which quickly cuts off light outside the predetermined angular range θ. Then, the QI allows the light that has gone straight through the cylindrical lens 10 to be reflected only once and enters the photodetector 11.
Ida 1 night 13... is provided. This concave glare 3
One focal point of . A light shielding body 14 is provided at the end of the detection plate in the width direction without contacting the detection plate 1.
The light that enters from the gap between the light shielding body 14 and the detection plate 1 without passing through the pinhole is made to enter the cylindrical lens 10 so as to be outside the 1JII fixed angle range θ for entering the photodetector 11. ing. Further, the pinholes mentioned above are vertical in the width direction of the detection target plate 1, but are often inclined in the longitudinal direction due to the rolling process. In one embodiment configured in this way, the leaked light from the pinhole generated in the detection plate 1 is focused on the photodetector 11 by the cylindrical lens 1o in the width direction of the detection plate 1, and the light leaks from the pinhole generated in the detection plate 1. In the longitudinal direction, the light travels straight through the cylindrical lens 10, is reflected only once by the concave mirror 13, and enters the photodetector 1, so that it is possible to reduce the amount of light leaking from the pinhole to be detected. It has the advantage of improved sensitivity and the ability to detect small pinholes that were previously undetectable.
そして、円筒レンズ１ｏとスリット板１２を設け、ある
所定の角度範囲θ内の光のみが光検出器１１に入射する
ようにしたことにより遮光体１４は、遮光体１４と被検
出板１との間隙からの漏洩光を上記角度範囲０から外れ
るように上記内筒レンズ１０に入射させるように配置す
ればよく、このような漏洩光は光検出器１ノに達せず誤
動作の原因となることはないので、従来のように遮光体
１４と被検出板１とを重ね合せる必要がｔｒ （被検出
板１の幅方向端部の不感帯をなく−ｒことができる。ま
た、被検出板１のピンホールを通過した検出すべき漏出
光はぎンホールの位置にかかわらず円筒レンズ１ｏによ
−っで光検出器１１に集光されるのでピンホールの位置
によって感度が変化することもない。さらに円筒レンズ
１０の幅りと焦点距離Ｆを適切な値に設定することによ
り円筒レンズ１０の収差は実用Ｅ問題にならない程度に
減少させることができる。そして被検出板の幅寸法にし
たが・浸
レンズ１０．スリツト板１２、光検出器１１を蜆数耕並
列に設けることもできや。By providing the cylindrical lens 1o and the slit plate 12 so that only light within a certain predetermined angle range θ is incident on the photodetector 11, the light shielding body 14 becomes The arrangement may be such that the leaked light from the gap is incident on the inner cylinder lens 10 so as to be outside the angle range 0, and such leaked light will not reach the photodetector 1 and cause malfunction. Therefore, there is no need to overlap the light shielding body 14 and the detection target plate 1 as in the conventional case (the dead zone at the widthwise end of the detection target plate 1 can be eliminated). The leaked light to be detected that has passed through the hole is focused on the photodetector 11 by the cylindrical lens 1o regardless of the position of the pinhole, so the sensitivity does not change depending on the position of the pinhole.Furthermore, the cylindrical lens By setting the width of the cylindrical lens 10 and the focal length F to appropriate values, the aberration of the cylindrical lens 10 can be reduced to such an extent that it does not become a problem in practical use. It is also possible to provide the slit plate 12 and the photodetector 11 in parallel.
オ発明は以−Ｌのような一実施例に限らず光を検出して
被検圧体の認識・識別を行なう等種々の装置に利用でき
るものである。The present invention is applicable not only to the embodiment described above but also to various devices such as those that detect light to recognize and identify a pressure body to be tested.
以上説明したように本発明に係るピンホール検出装置は
被検出板の幅方向に線光源な段け、被検出板をはさんで
円筒レンズを対向配置し。As explained above, the pinhole detection device according to the present invention has linear light sources arranged in the width direction of the detection target plate, and cylindrical lenses are arranged facing each other across the detection target plate.
この円筒レンズの収束線上に光検出器を配置し。Place a photodetector on the convergence line of this cylindrical lens.
この光検出器と円筒レンズとの間にスリット板を設け、
上記円筒レンズを透過した直進光を光検出器へ反射・集
光させる凹面鏡を設け、上記被検出板の幅方向端部に誤
動作を招くような光を遮断する總光体を設けたものであ
る。したがって被検出板のピンホールを通過した検出す
べき光は収束・集光され幸巷噂光検出器へ入射する光量
の減少を少なくすることができるので感度が同上し、よ
り小さなピンホールをも発見できる。また、所定角度範
囲を外れた光は光検出器に達しないので、誤動作を防止
するための遮光体と被検出板との重なり合いを必要とせ
ず、たとえピンホールが兄承していても検出することの
できない不感帯をなくすことができる等。A slit plate is provided between this photodetector and the cylindrical lens,
A concave mirror is provided to reflect and focus the straight light transmitted through the cylindrical lens onto a photodetector, and a light body is provided at the widthwise end of the detection plate to block light that may cause malfunction. . Therefore, the light to be detected that has passed through the pinhole in the detection plate is converged and focused, which reduces the decrease in the amount of light that enters the photodetector, which increases the sensitivity and allows even smaller pinholes to be detected. Can be discovered. In addition, since light outside a predetermined angle range does not reach the photodetector, there is no need for the light shield to overlap the detection plate to prevent malfunction, and even if there is a pinhole, it can be detected. It is possible to eliminate the impossible dead zone, etc.
その効果は大である。The effect is great.
第１図は従来例の被検出板の幅方向の断面図、第２図は
同長手方向の断面図、第３図は本発明の実施例を示す被
検出板の幅方向のに面図、第４図は同長手方向の断面図
である。
１・・・被検出器、９・・・線光源、１ｏ・・・円筒レ
ンズ、１１・・・光検出器、１２・・・スリット板％１
３・・・凹面鏡、１４・・・遮光体。
出−人代理人 弁理士 鈴 江 武 彦第１図
第２図FIG. 1 is a cross-sectional view in the width direction of a conventional detection plate, FIG. 2 is a cross-sectional view in the longitudinal direction, and FIG. 3 is a cross-sectional view in the width direction of a detection plate according to an embodiment of the present invention. FIG. 4 is a sectional view in the same longitudinal direction. DESCRIPTION OF SYMBOLS 1...Device to be detected, 9...Line light source, 1o...Cylindrical lens, 11...Photodetector, 12...Slit plate%1
3... Concave mirror, 14... Light shielding body. Representative Patent Attorney Takehiko Suzue Figure 1 Figure 2
Claims (1)
置された線光ｉ（この線光源に上記被検出板をはさんで
対向し被検出板の進行方向に平行な一定の線上に光を収
束させる向きに配置された円筒レンズと、上記円筒レン
ズの収束線上に配置された光検出器と、上記円筒レンズ
と光検出器との間に配置され円筒レンズを透過した光の
うち所定の角変範囲内の光のみを上記光検出器に入射さ
せるスリン）＆と、上記円筒レンズを透過した直進光を
上記光検出器へ反射・集光させる凹面鏡と、上記被検出
板の幅方向の端部に被検出板と非接触状態に配置され上
記被検出板のピンホールを通過せずに上記円筒レンズを
透過する光を上記所定の角度範囲から外れるように上記
円筒レンズへ入射させる遮光体とを具備したことを特徴
とするピンホール検出装置。Line light i arranged parallel to the width direction of a long plate to be detected traveling in a certain direction (on a certain line parallel to the direction of movement of the plate to be detected, facing this line light source with the plate to be detected sandwiched in between) A cylindrical lens arranged in a direction to converge light, a photodetector arranged on the convergence line of the cylindrical lens, and a cylindrical lens arranged between the cylindrical lens and the photodetector, out of the light transmitted through the cylindrical lens. a concave mirror that reflects and focuses the straight light transmitted through the cylindrical lens onto the photodetector, and a width of the detection plate. The light that is disposed at the end of the direction in a non-contact state with the detection plate and passes through the cylindrical lens without passing through the pinhole of the detection plate is incident on the cylindrical lens so as to be out of the predetermined angular range. A pinhole detection device characterized by comprising a light shielding body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9995381A JPS582642A (en) | 1981-06-27 | 1981-06-27 | Pinhole detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9995381A JPS582642A (en) | 1981-06-27 | 1981-06-27 | Pinhole detecting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS582642A true JPS582642A (en) | 1983-01-08 |
| JPS6324252B2 JPS6324252B2 (en) | 1988-05-19 |
Family
ID=14261054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9995381A Granted JPS582642A (en) | 1981-06-27 | 1981-06-27 | Pinhole detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS582642A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009042070A (en) * | 2007-08-09 | 2009-02-26 | Sei Hybrid Kk | Temperature measuring device for semiconductor manufacturing device, and semiconductor manufacturing device loaded therewith |
| JP2011185776A (en) * | 2010-03-09 | 2011-09-22 | Toshiba Corp | Pinhole detector |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5228776B2 (en) * | 2008-10-09 | 2013-07-03 | 新日鐵住金株式会社 | Hole defect detection apparatus and hole defect detection method |
-
1981
- 1981-06-27 JP JP9995381A patent/JPS582642A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009042070A (en) * | 2007-08-09 | 2009-02-26 | Sei Hybrid Kk | Temperature measuring device for semiconductor manufacturing device, and semiconductor manufacturing device loaded therewith |
| JP2011185776A (en) * | 2010-03-09 | 2011-09-22 | Toshiba Corp | Pinhole detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6324252B2 (en) | 1988-05-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4924086A (en) | Optical scanning apparatus for detecting faults on a surface | |
| KR910021571A (en) | Coating thickness measuring method and apparatus | |
| US4671663A (en) | Optical fault seeking apparatus | |
| US4095905A (en) | Surface-defect detecting device | |
| JPS6316247A (en) | Diffuse reflectance measuring device for noncontact measurement | |
| US3834822A (en) | Method and apparatus for surface defect detection using detection of non-symmetrical patterns of non-specularly reflected light | |
| JPS582642A (en) | Pinhole detecting device | |
| JPH11304724A (en) | Device and method for inspecting hole of light-transmission sheet | |
| US4705957A (en) | Wire surface monitor | |
| TW468151B (en) | Method and device for optical detection of local deformations, especially bubbles, in an optical data carrier | |
| US5559341A (en) | System for detecting defects in articles using a scanning width which is less than width of portion of the article scanned | |
| US3198946A (en) | Apparatus for sensing position of a radiation reflector | |
| US4291987A (en) | Hole seeking apparatus | |
| JPS622113A (en) | Surface roughness meter using reflected light | |
| JPH076753U (en) | Moisture measuring device for sheet-like objects | |
| JPS6129745A (en) | Detecting device for pinhole defect | |
| US3435241A (en) | Structure inspection equipment | |
| JP2666032B2 (en) | Measurement method of scattering light and scattering angle distribution | |
| JP3040131B2 (en) | Spherical surface scratch inspection device | |
| US3792262A (en) | Scanning initiation position detecting device | |
| KR0167652B1 (en) | Optical type automatic focusing device and the method thereof | |
| KR950025583A (en) | Fingerprint reader | |
| JPS6342224B2 (en) | ||
| JPH0569165B2 (en) | ||
| JPS63314449A (en) | Defect detection for mouth of bottle |