JP5215055B2 - 拡散装置支持体 - Google Patents
拡散装置支持体 Download PDFInfo
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- JP5215055B2 JP5215055B2 JP2008158915A JP2008158915A JP5215055B2 JP 5215055 B2 JP5215055 B2 JP 5215055B2 JP 2008158915 A JP2008158915 A JP 2008158915A JP 2008158915 A JP2008158915 A JP 2008158915A JP 5215055 B2 JP5215055 B2 JP 5215055B2
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- backing plate
- diffuser
- support member
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- frame structure
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- 238000009792 diffusion process Methods 0.000 claims description 51
- 238000007789 sealing Methods 0.000 claims description 13
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 39
- 239000007789 gas Substances 0.000 description 29
- 238000012545 processing Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 239000000725 suspension Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
本発明の実施形態は概してガス分散板又は拡散装置を支持するための装置及び方法に関する。
フラットパネルディスプレイの製造に使用する基板の寸法は、近年、劇的に大型化してきている。例えば、典型的には分割することでそこから複数のTFT−LCDフラットパネルディスプレイを形成する基板の寸法は約2000cm2であり、その寸法は約25000cm2以上にまで拡大されてきている。こういった基板は典型的には拡散装置を有したプラズマチャンバ内で処理する。拡散装置は一般的には基板に面して離間関係で支持されており、1つ以上の処理ガスを基板に向かって分散させて、堆積やエッチング等の基板への処理を行う複数のガス流路を備えている。基板寸法におけるこの大型化は拡散装置の寸法の上昇をもたらしたが、これは拡散装置の寸法が基板とほぼ同じだからである。
Claims (24)
- チャンバの内部容積内に配置された拡散装置と、
チャンバに配置され、内部容積の一部を画成するバッキングプレートと、
バッキングプレート内を動くように配置され、かつ拡散装置とチャンバ内部容積の外部に配置されたフレーム構造体に連結された拡散装置支持部材を備えているガス分散装置。 - バッキングプレートと拡散装置との間の間隔が可変である請求項1記載の装置。
- バッキングプレートが更に開口部を備え、拡散装置支持部材が開口部内を動くように配置されている請求項1記載の装置。
- 拡散装置支持部材と関連したシーリング装置を更に備えている請求項3記載の装置。
- シーリング装置によりバッキングプレートの開口部に真空シールが施される請求項4記載の装置。
- シーリング装置が拡散装置支持部材と滑り接触するOリングを備えている請求項5記載の装置。
- シーリング装置がバッキングプレートの開口部と滑り接触するOリングを備えている請求項5記載の装置。
- シーリング装置が可撓性蛇腹部を備えている請求項5記載の装置。
- 拡散装置支持部材が拡散装置の中央領域に連結されている請求項1記載の装置。
- バッキングプレートが拡散装置の縁部に連結されている請求項1記載の装置。
- 底部と壁部を含むチャンバ本体部と、
チャンバ本体部の上に配置されたバッキングプレートと、
チャンバ本体部とバッキングプレートによって画成されたチャンバ内部容積と、
チャンバ内部容積内に配置された拡散装置と、
バッキングプレート内を動くように配置され、かつ拡散装置とチャンバ内部容積の外部に配置されたフレーム構造体に連結された拡散装置支持部材を備えたガス分散装置。 - 構造体が拡散装置支持部材から電気的に隔離されている請求項11記載の装置。
- 拡散装置支持部材とフレーム構造体を連結する連結アセンブリを更に備えている請求項11記載の装置。
- 連結アセンブリがフレーム構造体に連結された吊具と、吊具と拡散装置支持部材に連結された支持リングを備えている請求項13記載の装置。
- 支持リングが絶縁材料を含む請求項14記載の装置。
- 支持リングが導電性材料を含む請求項14記載の装置。
- 拡散装置支持部材の周囲に少なくとも部分的に配置された絶縁スリーブを更に備えている請求項11記載の装置。
- 吊具の周囲に少なくとも部分的に配置された絶縁スリーブを更に備えている請求項14記載の装置。
- フレーム構造体を電気的に隔離するための、フレーム構造体を覆うカバーを更に備えている請求項11記載の装置。
- チャンバの内部容積内に配置された拡散装置と、
チャンバに配置され、内部容積の一部を画成するバッキングプレートと、
バッキングプレート内を動くように配置され、かつ拡散装置とチャンバ内部容積の外部に配置されたフレーム構造体に連結された拡散装置支持部材と、
バッキングプレートと拡散装置との間に可変の間隔を備えているガス分散装置。 - 真空力をバッキングプレートに加えるための真空ポンプを更に備えている請求項20記載の装置。
- バッキングプレートと拡散装置との間の可変の間隔がバッキングプレートに印加された真空圧の関数である請求項20記載の装置。
- バッキングプレートの運動がバッキングプレートと拡散装置との間に可変の間隔を生じさせる請求項20記載の装置。
- バッキングプレートが拡散装置の縁部に連結されている請求項20記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/767,307 US20080317973A1 (en) | 2007-06-22 | 2007-06-22 | Diffuser support |
US11/767,307 | 2007-06-22 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009065121A JP2009065121A (ja) | 2009-03-26 |
JP2009065121A5 JP2009065121A5 (ja) | 2011-08-04 |
JP5215055B2 true JP5215055B2 (ja) | 2013-06-19 |
Family
ID=40136792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008158915A Active JP5215055B2 (ja) | 2007-06-22 | 2008-06-18 | 拡散装置支持体 |
Country Status (5)
Country | Link |
---|---|
US (2) | US20080317973A1 (ja) |
JP (1) | JP5215055B2 (ja) |
KR (1) | KR101016860B1 (ja) |
CN (2) | CN101333651B (ja) |
TW (1) | TWI389172B (ja) |
Families Citing this family (25)
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2008
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- 2008-06-19 KR KR1020080057715A patent/KR101016860B1/ko active IP Right Grant
- 2008-06-20 CN CN2008101269486A patent/CN101333651B/zh active Active
- 2008-06-20 TW TW097123127A patent/TWI389172B/zh active
- 2008-06-20 CN CN2011101921429A patent/CN102251227B/zh active Active
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CN101333651A (zh) | 2008-12-31 |
US9580804B2 (en) | 2017-02-28 |
JP2009065121A (ja) | 2009-03-26 |
US20100181024A1 (en) | 2010-07-22 |
CN102251227B (zh) | 2013-11-27 |
TWI389172B (zh) | 2013-03-11 |
US20080317973A1 (en) | 2008-12-25 |
TW200908079A (en) | 2009-02-16 |
CN101333651B (zh) | 2011-08-24 |
KR20080112961A (ko) | 2008-12-26 |
KR101016860B1 (ko) | 2011-02-22 |
CN102251227A (zh) | 2011-11-23 |
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