JP5175842B2 - 透明基板の欠陥の特性評価のための装置及び方法 - Google Patents
透明基板の欠陥の特性評価のための装置及び方法 Download PDFInfo
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- JP5175842B2 JP5175842B2 JP2009510980A JP2009510980A JP5175842B2 JP 5175842 B2 JP5175842 B2 JP 5175842B2 JP 2009510980 A JP2009510980 A JP 2009510980A JP 2009510980 A JP2009510980 A JP 2009510980A JP 5175842 B2 JP5175842 B2 JP 5175842B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
12 透明基板
14 撮像システム
16 照明システム
18 画像処理システム
20 搬送システム
22 センサ
24 対物レンズ
26 線走査型カメラ
28,42 ガラス基板表面
30 線走査型カメラ光軸
32 表面法線
34,40,46 光源
36 レンズ
38,44,48 照明光軸
38',48' 反射光軸
45 ディフューザー
50 データバッファ
52 データ処理ユニット
55,56,57 データ回線
58 混入物
Claims (10)
- 透明基板(12)の欠陥を検出する方法であって、
第1の表面とこれに対向する第2の表面とを有する前記透明基板(12)を用意し、
前記透明基板(12)上を走査しつつ該透明基板を撮像するための走査型撮像システム(14)に対して暗視野照明を与えるために配置された少なくとも1つの暗視野光源(46)を用いて、前記透明基板(12)を照明する工程、
前記走査型撮像システムに対して明視野照明を与えるために配置された少なくとも1つの明視野光源(34)を用いて前記透明基板を照明する工程であって、前記明視野光源から発せられた光が前記第1の表面から前記透明基板へ入射し前記第2の表面で反射されるように照明する工程、
前記透明基板を、前記走査型撮像システムに対して、前記走査の方向と交わる方向へ平行移動させる工程、および
前記透明基板を平行移動させながら、前記走査型撮像システム(14)で前記透明基板上を走査しつつ撮像して、前記少なくとも1つの明視野光源から発せられて前記第1の表面から前記透明基板へ入射し前記第2の表面で反射され前記第1の表面から射出された光、及び前記少なくとも1つの暗視野光源から発せられた光を受けた前記透明基板中の欠陥によって散乱された光を同時に検出する工程、
を有してなる方法。 - 複数の暗視野光源で前記透明基板を照明する工程をさらに含むことを特徴とする請求項1に記載の方法。
- 複数の明視野光源で前記透明基板を照明する工程をさらに含むことを特徴とする請求項1に記載の方法。
- 前記明視野光源が白色光源であることを特徴とする請求項1に記載の方法。
- 前記暗視野光源がレーザであることを特徴とする請求項1に記載の方法。
- 前記明視野光源で前記透明基板を照明する工程に先立ち、前記明視野光源からの前記光を拡散させる工程をさらに含むことを特徴とする請求項1に記載の方法。
- 前記少なくとも1つの明視野光源及び前記少なくとも1つの暗視野光源の光強度が可変であることを特徴とする請求項1に記載の方法。
- 前記第1の表面及び前記第2の表面のいずれもが前記複数の明視野光源によって照明されることを特徴とする請求項3記載の方法。
- 透明基板(12)の欠陥を検出するための装置(10)であって、
前記透明基板の第1の表面の側から該透明基板へ第1の明視野光を入射させるように配された、前記第1の明視野光を発する第1の明視野光源(34)、
前記透明基板の前記第1の表面の側から該透明基板へ第1の暗視野光を入射させるように配された、該第1の暗視野光を発する暗視野光源(46)、
前記透明基板の第1の表面を通過して該第1の表面に対向する前記透明基板の第2の表面で反射し前記第1の表面から射出された前記第1の明視野光源からの光、及び前記透明基板中の欠陥によって散乱された前記暗視野光源からの光を同時に受け取るための、前記透明基板の前記第1の表面の側に配された該透明基板上を走査しつつこの透明基板を撮像する走査型撮像カメラである走査型撮像システム(14)、及び
前記走査型撮像システム(14)に対して前記基板(12)を、前記走査の方向と交わる方向へ平行移動させるための平行移動手段、
を備えることを特徴とする装置、 - さらに、前記透明基板の前記第2の表面の側に第2の明視野光源が配されていることを特徴とする請求項9に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US79989906P | 2006-05-12 | 2006-05-12 | |
US60/799,899 | 2006-05-12 | ||
PCT/US2007/011178 WO2007133581A2 (en) | 2006-05-12 | 2007-05-09 | Apparatus and method for characterizing defects in a transparent substrate |
Publications (2)
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JP2009537022A JP2009537022A (ja) | 2009-10-22 |
JP5175842B2 true JP5175842B2 (ja) | 2013-04-03 |
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JP2009510980A Expired - Fee Related JP5175842B2 (ja) | 2006-05-12 | 2007-05-09 | 透明基板の欠陥の特性評価のための装置及び方法 |
Country Status (7)
Country | Link |
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US (1) | US7567344B2 (ja) |
EP (1) | EP2018542A2 (ja) |
JP (1) | JP5175842B2 (ja) |
KR (1) | KR101326455B1 (ja) |
CN (1) | CN101473218B (ja) |
TW (1) | TWI372244B (ja) |
WO (1) | WO2007133581A2 (ja) |
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- 2007-05-09 JP JP2009510980A patent/JP5175842B2/ja not_active Expired - Fee Related
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US20070263206A1 (en) | 2007-11-15 |
CN101473218B (zh) | 2012-09-19 |
KR101326455B1 (ko) | 2013-11-20 |
EP2018542A2 (en) | 2009-01-28 |
WO2007133581A3 (en) | 2008-02-14 |
KR20090011020A (ko) | 2009-01-30 |
CN101473218A (zh) | 2009-07-01 |
WO2007133581A2 (en) | 2007-11-22 |
TW200809185A (en) | 2008-02-16 |
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