JP5169738B2 - PCB cassette - Google Patents
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- JP5169738B2 JP5169738B2 JP2008277927A JP2008277927A JP5169738B2 JP 5169738 B2 JP5169738 B2 JP 5169738B2 JP 2008277927 A JP2008277927 A JP 2008277927A JP 2008277927 A JP2008277927 A JP 2008277927A JP 5169738 B2 JP5169738 B2 JP 5169738B2
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Description
本発明は、ガラス基板、その他各種の基板を互いに接触しないように分離して支持するための基板用カセットに関するものである。 The present invention relates to a substrate cassette for separating and supporting glass substrates and other various substrates so as not to contact each other.
液晶表示装置を初めとするフラットパネルディスプレイのガラス基板や半導体関連の各種配線基板等、剛性を有する平面基板上に種々のパターンを形成したり、様々な表面処理を施す工程が近年の電子部品製造分野で多用されている。特に、基板の薄型化かつ大サイズ化を要求される場合も多く、処理の効率も一段と求められるので、各工程処理における取り扱い手段に一層の工夫が必要になってきている。 Electronic component manufacturing is a process that forms various patterns on a rigid flat substrate such as glass substrates for flat panel displays such as liquid crystal display devices and various wiring substrates related to semiconductors and performs various surface treatments in recent years. Widely used in the field. In particular, there are many cases where the substrate is required to be thin and large, and the processing efficiency is further required. Therefore, further contrivance is required for the handling means in each process.
上記の各種の製造工程において、平面視矩形状の厚さの薄い基板を数枚〜数十枚の集合体として一つのカセットに一時収納した後、各種の処理工程に基板を一枚ずつ順次取り出して処理し、かつ、一連の処理終了時に再び基板を順次収納することが多い。また、複数の基板をカセットに収納した一体の状態で、ドライまたはウェットの処理工程を扱う場合もある。さらに各工程間の移動および一時保管も上記のカセットに収納された集合体を一体で扱う。 In the various manufacturing processes described above, a thin substrate having a rectangular shape in plan view is temporarily stored in a cassette as an assembly of several to several tens of sheets, and then the substrates are sequentially taken out one by one in various processing steps. In many cases, the substrates are sequentially stored again at the end of a series of processes. In some cases, a dry or wet process is handled in an integrated state in which a plurality of substrates are housed in a cassette. Further, movement and temporary storage between processes also handle the assembly stored in the cassette as a unit.
上記の各場面で多用される基板用カセットにおいて、一時収納される各基板を互いに接触しないように分離して支持する機能が重要であることは言うまでも無いが、繰り返し行われる基板の出し入れがスムーズに実施できることが可能であり、かつ、カセット専有スペースの使用効率も高く、耐久性にも優れていることが要求される。また、一般に発塵を嫌う環境で使用されるものであるため、基板、特にガラス基板のエッジが樹脂成型品のカセットとの接触部で樹脂の削り取りによる切削屑を発生させないことも重要であり、種々の改良がなされてきた(特許文献1参照)。 In the substrate cassette frequently used in each of the above scenes, it goes without saying that the function of separating and supporting the temporarily stored substrates so as not to contact each other is important. It is required to be able to be carried out smoothly, to have high use efficiency of the cassette exclusive space, and to be excellent in durability. In addition, since it is generally used in environments that do not want to generate dust, it is also important that the edge of the substrate, particularly the glass substrate, does not generate cutting waste due to resin scraping at the contact portion with the cassette of the resin molded product, Various improvements have been made (see Patent Document 1).
また、カセットの組み立てを容易にしたり、複数の基板をカセットに収納した一体の状態で、ドライまたはウェットの処理工程を扱うという使われ方に対して、使用工程中にカセットの構造間隙に残る液滴の液切れ不良や汚れを防ぐように簡単な構造体が提案されてきた(特許文献2参照)。 In addition, liquids that remain in the structural gap of the cassette during the use process are easier to assemble the cassette or handle dry or wet processing processes in an integrated state where multiple substrates are housed in the cassette. A simple structure has been proposed so as to prevent a drop of liquid droplets and dirt (see Patent Document 2).
一方、カセットに基板を収納するには、カセット内側に複数設けた棚片により、平面視矩形状の基板の4辺の内の向き合う2辺もしくは3辺を支える構造が通常使われており、前記棚片に載るように、基板を水平の方向に一枚ずつ一定の間隔を保って積み上げ状態に収納することが一般的であるが、基板を縦にして棚片を仕切りとするように縦に並べる方法もある。基板を縦に並べる場合も、2辺支持の場合を除いては、基板を水平に並べる場合と同一のカセットを向きを変えて使用することが多い。 On the other hand, in order to store a substrate in a cassette, a structure is generally used in which a plurality of shelves provided inside the cassette support two or three sides facing each other among four sides of a rectangular substrate in plan view. It is common to store boards one by one in a horizontal direction at regular intervals so that they are placed on a shelf piece. There is also a way to arrange them. Even when the substrates are arranged vertically, the same cassette as in the case where the substrates are arranged horizontally is often used except for the case of supporting two sides.
また、基板が一時収納された基板用カセットを、工程間の移動もしくは保管のために、ロボットまたは道具と人手により、運搬したり向きを変えたりする必要もあり、基板のエッジとカセットの棚片等との接触状態が変化する機会が多いため、小さな衝突の積み重ねによる双方の損傷または発塵が無視できない。また、基板サイズの大型化と基板の薄型化が進むと、基板の撓み量の増大を考慮する必要があるので、基板を支える棚片を基板端から内側に延ばす方向に設計変更される。上記の衝突により、基板を支える側の上方に隣接する側の棚片が基板表面の主な処理対象となる膜面側に接触することが多いが、その場合は、上述の設計変更される以前の従来の短い棚片によるよりも、新たに拡大された棚片による基板の内側寄りの膜面を損傷する可能性が大きくなる。
本発明は上記の問題に鑑みて提案するものであり、本発明が解決しようとする課題は、基板の出し入れ時の改良とは異なり、カセット内に収納後の基板の安定を確保する基板用カセットを提供するものであって、基板用カセットの棚片をカセット内側方向に長くした場合であっても、収納された基板が運搬中の振動や傾きによって、膜面側に隣接する棚片との接触により膜面の損傷を引き起こすことを防ぐ構造の基板用カセットを提供することを課題とする。 The present invention is proposed in view of the above problems, and the problem to be solved by the present invention is different from the improvement at the time of loading and unloading the substrate, and the cassette for the substrate which ensures the stability of the substrate after being stored in the cassette. Even if the shelf of the cassette for a substrate is elongated in the cassette inner direction, the stored substrate can be separated from the shelf adjacent to the film surface side due to vibration or inclination during transportation. It is an object of the present invention to provide a substrate cassette having a structure that prevents damage to the film surface due to contact.
本発明の請求項1に係る発明は、平面視矩形状の基板の4辺の内の向き合う2辺もしくは3辺を保持して、該基板を一定の間隔を保って積み上げ状態に収納するための基板用カセットであって、前記基板用カセットは対向する2組の側板と基板の端面を載せる棚片と基板位置抑制用爪部を有しており、前記棚片は前記基板用カセットの側板同士が対向する面に整列配置され、前記基板位置抑制用爪部は前記棚片付き側板と平行に独立して設けた可動性の爪部取り付け支柱に基板用カセットの内側向きに整列配置され、前記基板位置抑制用爪部が、爪部取り付け支柱の法線方向より基板の膜面が向く側に傾けて取り付けられ、棚片上にかかる基板の撓みによる最端部の反り上がりを、前記基板位置抑制用爪部の傾斜部で抑制することを特徴とする基板用カセットである。 The invention according to claim 1 of the present invention is for holding two or three sides facing each other among four sides of a rectangular substrate in plan view, and storing the substrates in a stacked state at a constant interval. A cassette for substrates, wherein the cassette for substrates has two sets of side plates facing each other, a shelf piece on which an end surface of the substrate is placed, and a claw portion for restraining the substrate position, and the shelf pieces are arranged between the side plates of the substrate cassette. There are aligned on opposite sides, the substrate position control claws are aligned inside facing the shelf Katazuki side plate parallel and independently provided with movable claws attachment struts to the substrate cassette, the substrate The position restraining claw part is attached to be inclined to the side where the film surface of the board faces from the normal direction of the claw part mounting column, and the warping of the extreme end due to the bending of the board on the shelf piece is It is characterized that you suppressed by the inclined portion of the claw portion It is a substrate for the cassette.
次に、本発明の請求項2に係る発明は、前記基板位置抑制用爪部が、前記爪部取り付け支柱を通じて、前記基板の動きを拘束して基板を位置抑制する位置と、前記基板の動きを拘束せず基板を位置抑制しない位置とに切り換え可能であることを特徴とする請求項1記載の基板用カセットである。 Next, in the invention according to claim 2 of the present invention, the position of the substrate position restraining claw restrains the position of the substrate by restraining the movement of the substrate through the claw portion mounting column, and the movement of the substrate. a substrate cassette according to claim 1 Symbol mounting, characterized in that it is switchable to a position not located inhibit substrate without restraining the.
次に、本発明の請求項3に係る発明は、前記爪部取り付け支柱を支柱の軸方向にスライドさせる機構を有することを特徴とする請求項2記載の基板用カセットである。 Next, the invention according to claim 3 of the present invention is the cassette for a substrate according to claim 2 , further comprising a mechanism for sliding the claw portion mounting column in the axial direction of the column.
次に、本発明の請求項4に係る発明は、予め指定位置に支柱上昇用ブロックが設置されたカセットステージ上に前記基板用カセットを移動載置することにより、前記支柱上昇用ブロックにて前記爪部取り付け支柱を支柱の軸方向にスライドさせることを特徴とする請求項3記載の基板用カセットである。 Next, in the invention according to claim 4 of the present invention, the substrate cassette is moved and placed on a cassette stage in which a column raising block is previously set at a specified position, whereby the column raising block is 4. The substrate cassette according to claim 3, wherein the claw portion mounting support is slid in the axial direction of the support.
次に、本発明の請求項5に係る発明は、前記爪部取り付け支柱を支柱の軸を中心に回転させる機構を有することを特徴とする請求項2記載の基板用カセットである。 Next, the invention according to claim 5 of the present invention is the cassette for a substrate according to claim 2 , further comprising a mechanism for rotating the claw portion mounting column around the axis of the column.
次に、本発明の請求項6に係る発明は、前記爪部取り付け支柱に設けたドグ(検出片)をカセットステージ側に設けた光センサが検知する機構を用いて、前記基板位置抑制用爪部の回転位置状態を確認できることを特徴とする請求項5記載の基板用カセットである。 Next, the invention according to claim 6 of the present invention uses the mechanism that the optical sensor provided on the cassette stage side detects the dog (detection piece) provided on the claw portion mounting column, and the substrate position suppressing claw. 6. The substrate cassette according to claim 5 , wherein the rotational position state of the part can be confirmed.
上記請求項1に係る発明によれば、棚片と基板位置抑制用爪部とが基板の端部を挟むことができるので、カセット内での収納基板の安定を確保することができ、基板用カセットの棚片をカセット内側方向に長くした場合であっても、収納された基板が運搬中の振動や傾きによって、膜面側の棚片との接触により膜面の損傷を引き起こすことを防ぐ構造を有
する基板用カセットを提供することができる。従って、基板サイズの大型化と基板の薄型化が進み、基板の撓み量の増大を考慮する必要がある場合の基板用カセットにも有用である。また、収納基板の置き方が通常の水平置きの場合だけでなく、縦置きや斜め置きの場合であっても、上記と同様にカセット内での収納基板の安定を確保することができ、前記膜面の損傷を防ぐことができる。また、基板を収納した状態の基板用カセットが、誤って基板が抜け出る方向に傾くような異常事態が生じた場合に対応して、基板の落下破損を防止する手段を有する基板用カセットを提供することも可能になる。
According to the first aspect of the present invention, since the shelf piece and the substrate position suppressing claw portion can sandwich the end portion of the substrate, the stability of the storage substrate in the cassette can be ensured, Structure that prevents damage to the membrane surface due to contact with the shelf on the membrane side due to vibration or tilt during transportation even when the cassette shelf is elongated in the cassette inner direction Can be provided. Accordingly, the substrate size is increased and the substrate is made thinner, which is useful for a substrate cassette when it is necessary to consider an increase in the amount of bending of the substrate. In addition to the case where the storage board is placed horizontally, the storage board can be secured in the cassette in the same manner as described above, even when the storage board is placed vertically or obliquely. Damage to the film surface can be prevented. Also provided is a substrate cassette having means for preventing a substrate from being dropped and damaged in response to an abnormal situation in which the substrate cassette in a state in which the substrate is stored is tilted in a direction in which the substrate is accidentally pulled out. It becomes possible.
また上記請求項1に係る発明によれば、前記基板位置抑制用爪部の先端部は浮かせた状態で、基板を位置抑制することができるので、位置抑制動作時に懸念される爪部の先端部による基板の膜面損傷も避けることができる。 According to the invention according to the claim 1, wherein the tip portion of the substrate position control pawl portion in a state of floating, it is possible to position control of the substrate, the tip portion of the claw portion of concern during the position control operation Damage to the film surface of the substrate due to can also be avoided.
上記請求項2に係る発明によれば、前記基板位置抑制用爪部の基板位置抑制のための動作、および基板位置抑制解除のための動作を、前記爪部取り付け支柱を通じて、一括して行えるので、各収納基板に対して均一に、抜けも無く、簡単に切り換え動作を実行できる。 According to the second aspect of the invention, the operation for suppressing the substrate position of the claw portion for suppressing the substrate position and the operation for releasing the suppression of the substrate position can be performed collectively through the claw portion mounting support column. The switching operation can be easily performed with respect to each storage board without any omission.
上記請求項3に係る発明によれば、上記請求項2に係る発明を実施するための簡便な具体策を提供できる。 According to the invention of claim 3 , a simple concrete measure for carrying out the invention of claim 2 can be provided.
上記請求項4に係る発明によれば、基板用カセットを載置するカセットステージに対する工夫により、上記請求項3に係る発明を確実に安定して実施するための簡便な具体策を提供できる。 According to the fourth aspect of the invention, a simple specific measure for reliably and stably carrying out the third aspect of the invention can be provided by devising the cassette stage on which the substrate cassette is placed.
上記請求項5に係る発明によれば、上記請求項2に係る発明を実施するための他の簡便な具体策を提供できる。 According to the invention of claim 5 , another simple concrete measure for carrying out the invention of claim 2 can be provided.
上記請求項6に係る発明によれば、基板位置抑制状態に関するON/OFFの状況を、電気信号として明示できるので、動作のミスを防ぐことができるとともに、他の装置の稼動状態との連携を電気的に自動制御するための手段として利用することができる。 According to the sixth aspect of the present invention, since the ON / OFF state relating to the substrate position suppression state can be clearly indicated as an electric signal, it is possible to prevent an operational error and to cooperate with the operating state of other devices. It can be used as means for automatically controlling electrically.
以下に本発明を図面に従って、詳しく説明する。図1は本発明の基板用カセットの一例を説明するための概念図であり、(a)は基板位置抑制時の正面透視図、(b)は基板位置抑制時の平面透視図、(c)は基板位置抑制解除時の正面透視図、(d)は基板位置抑制解除時の平面透視図である。平面透視図(b)(d)では、図を見やすくするため、天井側フレーム2も底面側フレーム3も表示せず、それらの外側の輪郭をカセット枠体の外郭線20として点線で表示するに留めた。 Hereinafter, the present invention will be described in detail with reference to the drawings. 1A and 1B are conceptual diagrams for explaining an example of a substrate cassette according to the present invention. FIG. 1A is a front perspective view when a substrate position is suppressed, FIG. 1B is a plan perspective view when a substrate position is suppressed, and FIG. Is a front perspective view when the substrate position suppression is released, and (d) is a planar perspective view when the substrate position suppression is released. In the plan perspective views (b) and (d), neither the ceiling-side frame 2 nor the bottom-side frame 3 is displayed, and the outer contours thereof are displayed as dotted lines as the outline 20 of the cassette frame in order to make the drawings easier to see. Fastened.
図1において、カセット枠体1は、天井側フレーム2、底面側フレーム3、縦フレーム4、で構成され、その内側に、対向する2組と他の1組の棚片付き側板5、側板に配設した棚片6、また、必要により棚片の突出部7を設けることは従来の基板用カセットと同様である。ガラス基板8が整列配置された棚片6のいずれかの段に、基板の4辺の内の向き合う2辺もしくは3辺を支持される状態で収納され、順次、隣接する棚片に他の基板が支持されて収納される。本実施形態においては、ガラス基板8の3辺が棚片6および棚片の突出部7を結合した棚片付き側板5の複数の組により支持される。但し、棚片の突出部7はすべての棚片に必要とされる訳ではなく、棚片の材質や加工形状によっては不要となる。棚片付き側板5の各辺に沿う方向の幅は、棚片6の幅とともに一定の強度が保たれれば特に限定されるものではないが、後述する爪部取り付け支柱11および爪部10を干渉させずに設置できる間隙を確保するように設計する。 In FIG. 1, a cassette frame 1 is composed of a ceiling side frame 2, a bottom side frame 3, and a vertical frame 4. Inside the cassette frame 1, two opposing sets and another set of side plates 5 with shelf pieces and side plates are arranged. The provided shelf piece 6 and, if necessary, the protruding portion 7 of the shelf piece are the same as in the conventional cassette for substrates. The glass substrate 8 is stored in a state in which two or three of the four sides of the substrate are supported in any stage of the shelf piece 6 in which the glass substrate 8 is arranged and arranged, and another substrate is sequentially placed on the adjacent shelf piece. Is supported and stored. In the present embodiment, three sides of the glass substrate 8 are supported by a plurality of sets of the side plates 5 with shelf pieces obtained by joining the shelf pieces 6 and the protruding portions 7 of the shelf pieces. However, the protruding portions 7 of the shelf pieces are not required for all the shelf pieces, and may be unnecessary depending on the material and the processing shape of the shelf pieces. The width in the direction along each side of the side plate 5 with the shelf piece is not particularly limited as long as a certain strength is maintained together with the width of the shelf piece 6, but it interferes with the later-described claw portion mounting column 11 and the claw portion 10. It is designed to secure a gap that can be installed without using it.
本発明は、上記の基板用カセットに、新たに、基板位置抑制用爪部10を基板用カセットの内側向きに整列配置させた可動性の爪部取り付け支柱11を加えることによって、従来の機能から一変させることができる。即ち、従来、ガラス基板8を棚片6および棚片の突出部7で下支えするか、基板を縦に並べる場合には隣り合う2つの棚片の間の狭い領域を位置抑制されずに立つのみであった状態から、本発明の収納後の基板は、基板位置抑制用爪部10で基板8からは反対側に位置する棚片6に押し付けられるか、自由な動きを抑制され、即ち、基板8の端部が挟まれて基板が位置抑制される状態に変わる。爪部により基板を強く押し付ける状態から爪部が基板表面の近傍に接近した状態まで、位置抑制をどの程度のレベルで実施するかは、具体的な設計により決めることができる。通常は、棚片6が基板の裏側を支え、基板位置抑制用爪部10が基板の膜面側を押さえる向きとなるため、基板位置抑制用爪部10の先端部による基板の膜面側の損傷に注意が必要である。上記の点に関しては後述する。 In the present invention, by adding a movable claw portion mounting column 11 in which a substrate position suppressing claw portion 10 is aligned and arranged inwardly of the substrate cassette, the above-described conventional function is improved. It can be transformed. That is, conventionally, when the glass substrate 8 is supported by the shelf piece 6 and the protruding portion 7 of the shelf piece, or when the substrates are arranged vertically, the narrow region between the two adjacent shelf pieces only stands without being restrained. From the state, the substrate after storage according to the present invention is pressed against the shelf piece 6 positioned on the opposite side from the substrate 8 by the substrate position suppressing claw 10 or the free movement is suppressed. The state is changed to a state in which the end portion of 8 is sandwiched and the position of the substrate is suppressed. The level at which the position suppression is performed from the state where the substrate is strongly pressed by the claw portion to the state where the claw portion approaches the vicinity of the substrate surface can be determined by a specific design. Usually, since the shelf piece 6 supports the back side of the substrate and the claw portion 10 for suppressing the substrate position presses the film surface side of the substrate, the front end portion of the claw portion 10 for suppressing the substrate position is provided on the film surface side of the substrate. Care must be taken for damage. The above points will be described later.
基板用カセットの主要部は各要素別に樹脂成形され、各部を接合して全体の構造物を得ることができる。使用される樹脂としては、使用工程を考慮した製品仕様により必要な、機械強度、耐熱性、耐溶剤性、耐酸、耐アルカリ性等を有する溶融成形が可能な樹脂が選択される。例えば、ポリイミド、ポリエーテルイミド、ポリエーテルアミド、ポリアミドイミド、ポリエーテルエーテルケトン、ポリフェニレンサルファイド、ポリアリレート、ポリスルホン、ポリプロピレン等、あるいは、上記の材料にガラス繊維、カーボン繊維、アラミド繊維、セラミックス繊維、金属繊維等を配合した繊維強化熱可塑性樹脂が用いられる。 The main part of the substrate cassette is resin-molded for each element, and the whole structure can be obtained by joining the parts. As the resin to be used, a resin that can be melt-molded and has mechanical strength, heat resistance, solvent resistance, acid resistance, alkali resistance, and the like necessary according to the product specifications considering the use process is selected. For example, polyimide, polyether imide, polyether amide, polyamide imide, polyether ether ketone, polyphenylene sulfide, polyarylate, polysulfone, polypropylene, etc., or glass fiber, carbon fiber, aramid fiber, ceramic fiber, metal, etc. A fiber reinforced thermoplastic resin containing fibers and the like is used.
前記溶融成形の方法としては、射出成形法、押出成形法、トランスファー成形法などが採用される。溶融成形において、充填剤、安定剤、滑剤、その他の添加剤を配合することもできる。 As the melt molding method, an injection molding method, an extrusion molding method, a transfer molding method, or the like is employed. In melt molding, fillers, stabilizers, lubricants, and other additives can be blended.
一般に、棚片6は棚片付き側板5とは分離形成し、後に少なくとも基板用カセットの内側に向けて複数個の棚片が一定の間隔を保つように整列配置して棚片付き側板と結合されるが、上述の内側に向けた棚片の張り出しが短い場合には、棚片付き側板5を溝切り加工することによって一体成形しても良いし、棚片と棚片付き側板を一括して溶融成形することもできる。また、その場合、基板用カセットの外側に向けても内側と対称的な構造として成形時の歪を避ける方法もある。 In general, the shelf piece 6 is formed separately from the shelf-attached side plate 5, and is later aligned and arranged at least at the inner side of the substrate cassette so as to maintain a constant spacing, and is coupled to the shelf-attached side plate. However, in the case where the above-described inward extension of the shelf piece is short, the side plate 5 with the shelf piece may be formed integrally by grooving, or the shelf piece and the side plate with the shelf piece may be melt-formed together. You can also. In that case, there is a method of avoiding distortion during molding as a structure symmetrical to the inside even when facing the outside of the substrate cassette.
基板位置抑制用爪部10は爪部取り付け支柱11とは分離成形し、後に少なくとも基板用カセットの内側に向けて複数個が一定の間隔を保つように整列配置して結合される。爪部取り付け支柱11は、前記棚片付き側板5の近傍に平行して立てるが、棚片付き側板5とは独立であって、支柱の軸方向に可動性を有する。前記爪部取り付け支柱11と天井側フレーム2および底面側フレーム3との結合部分は、支柱のスライド/支持機構12として、支柱の軸方向のみに可動性をもたせる状態と固定状態との切り換え機能を有する。爪部取り付け支柱11は、基板の対向する2辺に対等に機能させるために、各収納基板の厚み方向に縦断するように、基板の対向する2辺の1辺当たり、少なくとも、一箇所ずつ、望ましくは2箇所ずつ、棚片付き側板5や棚片6と干渉しない位置に設置する。 The substrate position restraining claw portion 10 is formed separately from the claw portion mounting support column 11, and later, a plurality of substrate position restraining claw portions 10 are aligned and connected at least toward the inside of the substrate cassette. The claw portion mounting column 11 stands upright in the vicinity of the side plate 5 with shelf pieces, but is independent of the side plate 5 with shelf pieces and has mobility in the axial direction of the column. The coupling portion between the claw portion mounting column 11 and the ceiling side frame 2 and the bottom frame 3 has a function of switching between a fixed state and a state in which only the axial direction of the column is movable as a column slide / support mechanism 12. Have. In order to make the claw portion mounting column 11 function equally on the two opposing sides of the substrate, at least one location per side of the two opposing sides of the substrate so as to run vertically in the thickness direction of each storage substrate, Desirably, two places are installed at positions that do not interfere with the side plates 5 with shelf pieces and the shelf pieces 6.
上記の例として、図1(c)に示す基板位置抑制解除時の正面透視図の状況で説明する。まず、基板用カセットの全体を図1(a)から(c)へ、図面のように横移動して、カセットステージ15の上に載せる。上記の動作に先立って、前記支柱のスライド/支持機構12において、軸方向の可動を可能にする状態を準備しておく。即ち、固定ピンや固定ネジ等により固定されていた前記支柱のスライド/支持機構12の可動状態を回復しておく。カセットステージ15上の所定の位置には、予め支柱上昇用ブロック14を設置しておき、基板用カセットがカセットステージ15上に載置される際に、該ブロックが前記支柱の下部に支柱に対して固定して設けた支柱上昇用ターゲット片13を押し上げるように位置決めする。上記基板用カセットがカセットステージ15上に載置される動作により、支柱上昇用ブロック14が支柱上昇用ターゲット片13を押し上げる高さに相当する距離だけ爪部取り付け支柱11が上昇し、爪部取り付け支柱11に結合された基板位置抑制用爪部10も同じ距離だけ上昇する。そのため、基板位置抑制用爪部10がガラス基板8の端部を棚片6との間で挟んでいた図1(a)に示す状態からは外れて、図1(c)に示すように、基板位置抑制解除された状態となる。なお、図中のブロック矢印は上記の各部の上昇を表す。また、上記の一連の説明は、各爪部取り付け支柱11に対応して、それぞれの関係する前記支柱のスライド/支持機構12や支柱上昇用ターゲット片13、支柱上昇用ブロック14との間で同様に機能させるものである。 As an example of the above, description will be made in the situation of a front perspective view when the substrate position suppression is released as shown in FIG. First, the entire substrate cassette is moved laterally as shown in FIGS. 1A to 1C and placed on the cassette stage 15. Prior to the above operation, a state is prepared in which the slide / support mechanism 12 of the support column is movable in the axial direction. That is, the movable state of the slide / support mechanism 12 of the support column fixed by a fixing pin or a fixing screw is restored. A column raising block 14 is set in advance at a predetermined position on the cassette stage 15, and when the substrate cassette is placed on the cassette stage 15, the block is placed below the column with respect to the column. Then, the column-lifting target piece 13 provided in a fixed manner is positioned so as to push up. By the operation of placing the substrate cassette on the cassette stage 15, the claw portion attaching column 11 is raised by a distance corresponding to the height at which the column raising block 14 pushes up the column raising target piece 13. The substrate position suppressing claw portion 10 coupled to the column 11 is also raised by the same distance. Therefore, the substrate position suppressing claw portion 10 is removed from the state shown in FIG. 1A in which the end portion of the glass substrate 8 is sandwiched between the shelf pieces 6, and as shown in FIG. The board position suppression is released. In addition, the block arrow in a figure represents the raise of said each part. Further, the series of explanations described above are the same among the corresponding slide support / support mechanism 12, the column raising target piece 13, and the column raising block 14 corresponding to each claw portion mounting column 11. To function.
上記の例では、基板位置抑制用爪部10が一定量上昇して基板位置抑制解除状態となる図1(c)、(d)の状態で、前記のカセットステージ15に基板用カセットを載置したまま、基板の出し入れを自動または手動ですることができる。その後、基板用カセットを前記のカセットステージ15から搬出するか、または、同一のカセットステージ15上であっても、支柱上昇用ブロック14の影響を受けない位置に移動するかすれば、基板用カセットは再び図1(a)、(b)の状態に戻り、基板を収納している棚片6に対応する位置の基板位置抑制用爪部10がガラス基板8の端部を位置抑制する。ただし、真に固定するためには、支柱のスライド/支持機構12を固定状態に切り換える必要がある。簡単な手段としては、上記固定ピンや固定ネジによる止め方も可能であるが、方法は制約されるものではない。 In the above example, the substrate cassette is placed on the cassette stage 15 in the state shown in FIGS. 1C and 1D in which the substrate position suppression claw portion 10 is raised by a certain amount to enter the substrate position suppression release state. The substrate can be taken in and out automatically or manually. Thereafter, if the substrate cassette is unloaded from the cassette stage 15 or moved to a position not affected by the column raising block 14 even on the same cassette stage 15, the substrate cassette is Returning to the state of FIGS. 1A and 1B again, the substrate position suppressing claw portion 10 at a position corresponding to the shelf piece 6 storing the substrate suppresses the end portion of the glass substrate 8. However, in order to be truly fixed, it is necessary to switch the support / sliding mechanism 12 of the column to the fixed state. As a simple means, it is possible to stop with the fixing pin or the fixing screw, but the method is not limited.
図2は本発明の基板用カセットの他の一例を説明するための概念図であり、(a)は基板位置抑制時の正面透視図、(b)は基板位置抑制時の平面透視図、(c)は基板位置抑制解除時の正面透視図、(d)は基板位置抑制解除時の平面透視図である。平面透視図(b)(d)では、図を見やすくするため、天井側フレーム2も底面側フレーム3も表示せず、それらの外側の輪郭をカセット枠体の外郭線20として点線で表示するに留めた。 2A and 2B are conceptual diagrams for explaining another example of the substrate cassette of the present invention, in which FIG. 2A is a front perspective view when the substrate position is suppressed, FIG. 2B is a plan perspective view when the substrate position is suppressed, c) is a front perspective view when the substrate position suppression is released, and (d) is a planar perspective view when the substrate position suppression is released. In the plan perspective views (b) and (d), neither the ceiling-side frame 2 nor the bottom-side frame 3 is displayed, and the outer contours thereof are displayed as dotted lines as the outline 20 of the cassette frame in order to make the drawings easier to see. Fastened.
図2において、図1と異なるのは、基板位置抑制用爪部10および爪部取り付け支柱11の動きであって、本例では、爪部による基板位置抑制を解除する手段として、前例のように軸方向にスライドして位置抑制を外すのではなく、回転により位置抑制を外す方法を用いる。図中のブロック矢印は回転方向を示す。 In FIG. 2, the difference from FIG. 1 is the movement of the claw portion 10 for restraining the substrate position and the claw portion mounting column 11, and in this example, as means for releasing the restraint of the substrate position by the claw portion, Instead of sliding in the axial direction and removing position restraint, a method of removing position restraint by rotation is used. The block arrow in the figure indicates the direction of rotation.
即ち、基板位置抑制用爪部10は爪部取り付け支柱11とは分離成形し、後に爪部の初期位置が基板用カセットの内側に向けて複数個が一定の間隔を保つように整列配置して支柱に結合される。爪部取り付け支柱11は、前記棚片付き側板5の近傍に平行して立てるが、棚片付き側板5とは独立であって、支柱の軸を中心とする円周方向に少なくとも90°程度の角度で回転可動性を有する。前記爪部取り付け支柱11と天井側フレーム2および底面側フレーム3との結合部分は、支柱の回転/支持機構18として、支柱の回転方向に可動性をもたせる状態と固定状態との切り換え機能を有する。 That is, the board position restraining claw part 10 is formed separately from the claw part mounting column 11, and is arranged in an aligned manner so that the initial position of the claw part is later directed toward the inside of the board cassette. Combined with the support. The claw portion mounting column 11 is erected parallel to the vicinity of the side plate 5 with shelf pieces, but is independent from the side plate 5 with shelf pieces and at an angle of at least about 90 ° in the circumferential direction around the axis of the column. Has rotational mobility. The coupling portion between the claw portion mounting column 11 and the ceiling side frame 2 and the bottom frame 3 has a function of switching between a fixed state and a movable state in the rotation direction of the column as a column rotation / support mechanism 18. .
支柱の回転は手動で簡単に行うことができる。レバー、ストッパー等の補助部品を適宜使用して、一定の回転量を着実に与えることができるようにすることが好ましいが、方法は特に制約されない。また、支柱の回転に先立って、爪部の固定を予め解除しておく手段として、支柱の回転/支持機構18を固定状態から解除状態に切り換える。その方法は上述の固定ピンや固定ネジによる止め方も可能であるが、方法は制約されるものではない。また、爪部が基板に接触している状態からの解除の場合には、支柱の軸方向に微量のスライド移動を加えて爪部を基板から微小量といえども離しておく方が支柱の回転時の摩擦を防止する上では好ましい。 The support can be easily rotated manually. It is preferable to use auxiliary parts such as levers and stoppers as appropriate so that a certain amount of rotation can be given steadily, but the method is not particularly limited. Prior to the rotation of the support column, the rotation / support mechanism 18 of the support column is switched from the fixed state to the released state as a means for releasing the fixation of the claw portion in advance. The method can be stopped by the fixing pin or the fixing screw described above, but the method is not limited. Also, when releasing from the state where the claw is in contact with the board, it is better to add a small amount of slide movement in the axial direction of the column and keep the claw part away from the board even if it is a minute amount. It is preferable for preventing friction at the time.
また、本発明においては、基板位置抑制用爪部10の位置を検知することにより、前記基板の動きを拘束して基板を位置抑制する位置と、前記基板の動きを拘束せず基板を位置抑制しない位置との状態を判別する手段とすることもできる。 In the present invention, by detecting the position of the substrate position suppressing claw portion 10, the position of the substrate is restrained by restraining the movement of the substrate, and the position of the substrate is restrained without restraining the movement of the substrate. It can also be a means for discriminating the state of the position not to be performed.
図2の例で、上記の基板位置抑制用爪部10の位置を検知する方法について説明する。図2(a)および(b)に示す、基板位置抑制時の基板位置抑制用爪部10は、いずれも基板用カセットの内側に向けて整列配置されているが、爪部取り付け支柱11の下部に爪部と同一方向に爪部より長く延びた形状のドグ(検出片)16を金属等の小片で予め設置する。該ドグ16は支柱の回転時には爪部と一緒に回転するように支柱に結合されている。一方、基板用カセットを載置するカセットステージ15を固定しておき、上記ドグ16が基板位置抑制時の爪部10と同じ方向、即ち、カセットの内側方向に向いている状態で、ドグ16の直下となるカセットステージ15上の位置に、光センサ17を設置する。 In the example of FIG. 2, a method for detecting the position of the substrate position suppressing claw 10 will be described. 2 (a) and 2 (b), the substrate position suppressing claw portions 10 at the time of substrate position suppression are all arranged in alignment toward the inside of the substrate cassette. In addition, a dog (detection piece) 16 having a shape extending in the same direction as the claw portion and extending longer than the claw portion is previously installed with a small piece of metal or the like. The dog 16 is coupled to the support so that it rotates together with the claw when the support is rotated. On the other hand, the cassette stage 15 on which the substrate cassette is placed is fixed, and the dog 16 is placed in the same direction as the claw portion 10 when the substrate position is suppressed, that is, in the state where the dog 16 is directed inward. The optical sensor 17 is installed at a position directly below the cassette stage 15.
上記光センサ17がドグ16を太い矢印で示す検出線により、検出することにより、基板位置抑制用爪部10が前記基板の動きを拘束して基板を位置抑制する位置にあることを電気的に確認することができる。また、支柱の回転とともに、図2(a)、(b)から図2(c)、(d)の状態に変化して、爪部、従ってドグ16も向きを変えると、上記光センサ17がドグ16を検出しなくなり、基板位置抑制用爪部10が前記基板の動きを拘束せず基板を位置抑制しない位置に変化したことを電気的に確認することができる。爪部取り付け支柱11は、基板の対向する2辺に対等に機能させるために、各収納基板の厚み方向に縦断するように、基板の対向する2辺の1辺当たり、少なくとも、一箇所ずつ、望ましくは2箇所ずつ、棚片付き側板5や棚片6と干渉しない位置に設置する。また、上記一連の説明は、複数の前記爪部取り付け支柱11の各々に対応して、それぞれの関係する前記支柱の回転/支持機構18やドグ16、光センサ17の間で同様に機能させるものである。 When the optical sensor 17 detects the dog 16 with a detection line indicated by a thick arrow, it is electrically confirmed that the substrate position suppressing claw portion 10 is in a position to restrain the substrate by restraining the movement of the substrate. Can be confirmed. Further, as the column is rotated, the state changes from the state shown in FIGS. 2A and 2B to the state shown in FIGS. 2C and 2D. The dog 16 is no longer detected, and it can be electrically confirmed that the substrate position suppressing claw portion 10 has changed to a position that does not restrain the substrate and does not restrain the position of the substrate. In order to make the claw portion mounting column 11 function equally on the two opposing sides of the substrate, at least one location per side of the two opposing sides of the substrate so as to run vertically in the thickness direction of each storage substrate, Desirably, two places are installed at positions that do not interfere with the side plates 5 with shelf pieces and the shelf pieces 6. In addition, the series of explanations described above function in the same manner between the rotation / support mechanism 18, the dog 16, and the optical sensor 17 of each of the related struts corresponding to each of the plurality of claw portion mounting struts 11. It is.
上記の本発明の他の例では、基板位置抑制用爪部10が一定量回転して基板位置抑制解除状態となる図2(c)、(d)の状態で、前記のカセットステージ15に基板用カセットを載置したまま、基板の出し入れを自動または手動ですることができる。その後、基板位置抑制用爪部10を逆回転して、基板用カセットを再び図2(a)、(b)の状態に戻し、基板を収納している棚片6に対応する位置の基板位置抑制用爪部10がガラス基板8の端部を位置抑制するように再設定する。ただし、真に固定するためには、支柱の回転/支持機構18を固定状態に切り換える必要がある。簡単な手段としては、上記固定ピンや固定ネジによる止め方も可能であるが、方法は制約されるものではない。 In the other example of the present invention described above, the substrate position restraining claw 10 rotates a certain amount to release the substrate position restraint state, and the substrate is placed on the cassette stage 15 in the state of FIGS. 2C and 2D. The substrate can be loaded and unloaded automatically or manually while the cassette is mounted. Thereafter, the substrate position suppressing claw portion 10 is reversely rotated to return the substrate cassette to the state shown in FIGS. 2A and 2B again, and the substrate position at the position corresponding to the shelf piece 6 storing the substrate. The suppression claw 10 is reset so that the position of the end of the glass substrate 8 is suppressed. However, in order to be truly fixed, it is necessary to switch the rotation / support mechanism 18 of the column to a fixed state. As a simple means, it is possible to stop with the fixing pin or the fixing screw, but the method is not limited.
基板が薄く大サイズ化していくに連れて、基板の撓みが大きくなり、前記棚片6および棚片の突出部7を加えた基板端部を支える部分は、内側に長く張り出す必要が生じる。このような場合で、本発明に述べる基板位置抑制用爪部10を有しないで、基板を収納した基板用カセットを運搬したり向きを変えたりすると、基板が大きく振動し、基板の端部に近い膜面の一部が膜面側の棚片6および/または棚片の突出部7と接触し、損傷を受け易い。上記の事情を図3を用いて説明する。 As the substrate becomes thinner and larger in size, the flexure of the substrate increases, and the portion that supports the end portion of the substrate including the shelf piece 6 and the protruding portion 7 of the shelf piece needs to extend long inward. In such a case, if the substrate cassette containing the substrate is transported or changed in direction without having the substrate position suppressing claw portion 10 described in the present invention, the substrate will vibrate greatly, and the substrate will be moved to the end of the substrate. A part of the near membrane surface comes into contact with the shelf piece 6 on the membrane surface side and / or the projection 7 of the shelf piece, and is easily damaged. The above situation will be described with reference to FIG.
図3は、基板支持の形態と、カセット内での基板の動きを説明するための概念図である。(a)は従来の場合、(b)は本発明の場合である。 FIG. 3 is a conceptual diagram for explaining the form of substrate support and the movement of the substrate in the cassette. (A) is a conventional case and (b) is a case of the present invention.
図3(a)において、棚片付き側板5に結合した棚片6および必要により棚片6の先端に設けた棚片の突出部7の間にガラス基板8が膜面9を上向きにして収納されれば、完全な静置状態では問題は無い。しかし、基板収納状態で、運搬による振動や傾斜が外部から基板用カセットに加わる場合は、最悪のケースでは、ガラス基板8’、膜面9’のように
膜面側の棚片6や棚片の突出部7と衝突することも生じる。図中のブロック矢印は、一枚のガラス基板およびその膜面の変動状態を同一図面中に示すことを意味している。特に、ガラス基板が薄型化し、サイズが大型化してくると、撓みの影響を考慮して棚片のカセット内側への張り出しを長くする設計に変更するため、上記の衝突が基板端近傍の無効領域に限定されることなく、より基板の内側に入る膜面をも損傷することがある。また、基板を水平ではなく、縦方向に並べて収納する場合は、収納された基板は、対向する各辺において、隣接する2つの棚片に挟まれた領域内を比較的自由に動ける状態であるため、膜面が棚片または棚片の突出部と衝突する可能性は、より増大する。
In FIG. 3A, a glass substrate 8 is stored with the film surface 9 facing upward between a shelf piece 6 coupled to the side plate 5 with a shelf piece and, if necessary, a projection 7 of the shelf piece provided at the tip of the shelf piece 6. If so, there is no problem in a completely stationary state. However, in the worst case, when the substrate is housed and vibration or inclination due to transportation is applied to the substrate cassette from the outside, in the worst case, the film surface side shelf pieces 6 and shelf pieces such as the glass substrate 8 ′ and the film surface 9 ′ are used. It may also collide with the protruding portion 7. The block arrows in the figure mean that one glass substrate and the variation state of the film surface are shown in the same drawing. In particular, when the glass substrate is thinned and the size is increased, the above-mentioned collision is ineffective in the vicinity of the substrate edge because the extension of the shelf piece to the inside of the cassette is changed in consideration of the influence of bending. Without being limited thereto, the film surface entering the inside of the substrate may be damaged. Further, when the substrates are stored side by side in the vertical direction instead of horizontally, the stored substrates are in a state where they can move relatively freely in an area sandwiched between two adjacent shelf pieces on each facing side. Therefore, the possibility that the film surface collides with the shelf piece or the protruding portion of the shelf piece is further increased.
図3(b)には、上述の図1および図2に示した本発明の可動性の爪部取り付け支柱に結合させる基板位置抑制用爪部10の結合状態を更に詳細に示す。基板位置抑制用爪部10が基板用カセットの内側向きに整列配置するように爪部取り付け支柱11に結合される。略水平に収納された基板の対向する2辺を位置抑制するための基板位置抑制用爪部10は、図3(b)の左右両側に位置し、自重により撓みを有して端部が僅かに棚片6から離れた状態の基板端部を上から抑制する。その際、基板位置抑制用爪部10の各々を爪部取り付け支柱11の法線方向より収納対象基板の膜面が向くべき方向、この場合は上方に傾けて取り付けておけば、基板位置抑制用爪部10の先端部を基板の膜面側に接触させることなく、基板端部を爪部の傾斜面で上から押さえるか、基板端部が上下の棚片間で揺れ動く可能性のある範囲を大幅に制限することができ、位置抑制動作時に懸念される爪部の先端部による基板の膜面損傷を避けることができる。 FIG. 3B shows in more detail the coupling state of the substrate position suppressing claw portion 10 to be coupled to the movable claw portion mounting column of the present invention shown in FIG. 1 and FIG. The board position restraining claw part 10 is coupled to the claw part mounting column 11 so as to be aligned and arranged inward of the board cassette. The board position restraining claws 10 for restraining the positions of the two opposing sides of the board stored substantially horizontally are located on both the left and right sides in FIG. 3B and are bent by their own weight and have a slight end. In addition, the substrate end in a state of being separated from the shelf piece 6 is suppressed from above. At that time, if each of the substrate position suppressing claw portions 10 is mounted in a direction in which the film surface of the substrate to be stored should be directed from the normal direction of the claw portion mounting column 11, in this case, tilted upward, Without bringing the tip of the claw part 10 into contact with the film surface side of the substrate, the end of the substrate is pressed from above with the inclined surface of the claw, or the range in which the substrate end may swing between the upper and lower shelf pieces. This can greatly limit the film surface damage of the substrate due to the tip of the claw portion, which is a concern during the position restraining operation.
上記基板位置抑制用爪部10の先端部を図3(b)の上向きに傾ける程度としては、前記棚片に水平に支持される場合の基板の自重に起因する撓みが引き起こす基板端部の傾斜に応じてそれを上回る角度に、爪部取り付け支柱の法線方向より上向きに取り付けられることが好ましい。棚片上にかかる基板8の最端部の反り上がりを、爪部取り付け支柱11から上向きに固定した基板位置抑制用爪部10の傾斜部で抑制することが可能である。 As the degree of tilting the tip of the substrate position suppressing claw 10 upward in FIG. 3 (b), the tilt of the end of the substrate caused by the flexure caused by the weight of the substrate when supported horizontally on the shelf piece. Accordingly, it is preferable to attach the claw part mounting column upward from the normal direction at an angle larger than that. It is possible to suppress the warping of the end of the substrate 8 on the shelf piece by the inclined portion of the substrate position suppressing claw portion 10 fixed upward from the claw portion mounting column 11.
以下、本発明の一例を実施例により説明するが、本発明はこの実施例により何ら限定されるものでない。 Hereinafter, an example of the present invention will be described with reference to examples. However, the present invention is not limited to the examples.
基板用カセットに収納するガラス基板の対向する2辺の収納位置にあたる両側の棚片付き側板の近傍に、上記側板と干渉しないように、基板位置抑制用爪部をカセット内向きに備えた爪部取り付け支柱を対向して設けた。ガラス基板は、板厚0.5mm、ヤング率が略70GPaで、対向する棚片で支える方向の基板長は550mmである。棚片はカセット内側に20段の構成とし、棚片付き側板は基板の対向する2辺側は8mm幅の側板を各4列、他の1辺側には5mm幅の側板を1列設ける。各棚片は片側60mm張り出しており、隣接する棚片間の間隔は15mm、棚片上では遊離端から平均55mmまで基板を支える設計とした。また、基板位置抑制用爪部は基板位置抑制時で、棚片が棚片付き側板に結合している高さより4mm高い位置に、幅5mm、長さ15mm、厚さ5mmのPEEK材の小片を、爪部取り付け支柱に結合させた。また、基板位置抑制用爪部は棚片に対して、11°の上向き角度で支柱に取り付けた。爪部取り付け支柱は、PEEK材で左右両側に各2本設置した。爪部取り付け支柱を可動性とするために、回転機構を設け、特定の支柱状態を固定するためにはネジを用いた。 A claw portion with a claw portion for restraining the substrate position facing the inside of the cassette so as not to interfere with the side plate in the vicinity of the side plates with shelf pieces on both sides corresponding to the storage positions on the opposite sides of the glass substrate stored in the substrate cassette. Supports were provided facing each other. The glass substrate has a plate thickness of 0.5 mm, a Young's modulus of approximately 70 GPa, and a substrate length in the direction supported by the opposing shelf pieces is 550 mm. The shelf pieces are configured in 20 steps inside the cassette, and the side plates with shelf pieces are provided with four rows of 8 mm width side plates on the two opposite sides of the substrate, and one row of 5 mm width side plates on the other side. Each shelf piece extends 60 mm on one side, the interval between adjacent shelf pieces is 15 mm, and the substrate is designed to support the substrate from the free end to an average of 55 mm on the shelf piece. In addition, the claw portion for suppressing the substrate position is a PEEK material piece having a width of 5 mm, a length of 15 mm, and a thickness of 5 mm at a position 4 mm higher than the height at which the shelf piece is coupled to the side plate with the shelf piece when the substrate position is suppressed. It was made to couple | bond with the nail | claw part attachment support | pillar. Moreover, the board | substrate position suppression nail | claw part was attached to the support | pillar at the upward angle of 11 degrees with respect to the shelf piece. The nail | claw part attachment support | pillar was installed in the left and right both sides with PEEK material. In order to make the claw portion mounting column movable, a rotation mechanism was provided, and a screw was used to fix a specific column state.
上記の基板用カセットを用いると、水平置きした基板に隣接する上側の棚片までのクリアランスを4mmとすることができた。基板位置抑制用爪部により基板を位置抑制して、通常の運搬を想定した移動実験を行った。移動実験は、基板を収納して位置抑制した状態での基板用カセットを水平置き状態から縦置き状態を経て、135度まで傾ける斜め置き状態に変化させるまでの動作を3往復繰り返した。その結果、移動中の振動やカセットの
傾きによって基板がずれたり、反ったりして膜面側の棚片との接触が起きた形跡は無く、汚れやキズなどの損傷を生じることも無かった。
When the above substrate cassette was used, the clearance to the upper shelf adjacent to the horizontally placed substrate could be 4 mm. The position of the substrate was suppressed by the nail portion for suppressing the substrate position, and a movement experiment assuming normal transportation was performed. In the movement experiment, the operation was repeated three times until the substrate cassette in the state in which the substrate was accommodated and the position was suppressed was changed from the horizontally placed state to the obliquely placed state tilted to 135 degrees through the vertically placed state. As a result, there was no evidence that the substrate was displaced or warped due to vibration during movement or the inclination of the cassette, and contact with the shelf on the film surface side occurred, and there was no damage such as dirt or scratches.
1・・・・カセット枠体
2・・・・天井側フレーム
3・・・・底面側フレーム
4・・・・縦フレーム
5・・・・棚片付き側板
6・・・・棚片
7・・・・棚片の突出部
8・・・・ガラス基板
8’・・・・ガラス基板(別状態)
9・・・・膜面
9’・・・・膜面(別状態)
10・・・基板位置抑制用爪部
11・・・爪部取り付け支柱
12・・・支柱のスライド/支持機構
13・・・支柱上昇用ターゲット片
14・・・支柱上昇用ブロック
15・・・カセットステージ
16・・・ドグ(検出片)
17・・・光センサ
18・・・支柱の回転/支持機構
20・・・カセット枠体の外郭線(点線)
DESCRIPTION OF SYMBOLS 1 ... Cassette frame 2 ... Ceiling side frame 3 ... Bottom side frame 4 ... Vertical frame 5 ... Side plate 6 with a shelf piece ... Shelf piece 7 ...・ Protruding part 8 of the shelf piece ··· Glass substrate 8 '···· Glass substrate (separate state)
9 ... Membrane surface 9 '... Membrane surface (different state)
DESCRIPTION OF SYMBOLS 10 ... Nail | claw part 11 for board position suppression ... Claw part attachment support | pillar 12 ... Support / slide mechanism 13 of support | pillar ... Target piece 14 for support | pillar raising ... Block 15 for support | pillar raising ... Cassette Stage 16 ... Dog (detection piece)
17... Optical sensor 18... Support / rotation mechanism 20. Outline line (dotted line) of cassette frame
Claims (6)
前記基板位置抑制用爪部が、爪部取り付け支柱の法線方向より基板の膜面が向く側に傾けて取り付けられ、棚片上にかかる基板の撓みによる最端部の反り上がりを、前記基板位置抑制用爪部の傾斜部で抑制することを特徴とする基板用カセット。 A substrate cassette for holding two or three sides facing each other out of four sides of a rectangular substrate in plan view, and storing the substrates in a stacked state at a constant interval. Has a pair of side plates facing each other, a shelf piece on which an end surface of the substrate is placed, and a claw portion for restraining the substrate position, and the shelf pieces are arranged in alignment with the surfaces on which the side plates of the substrate cassette face each other. The claw part for position suppression is arranged in alignment with the movable claw part mounting column provided independently in parallel with the side plate with the shelf piece so as to face the inside of the cassette for the substrate ,
The claw portion for suppressing the substrate position is attached to be inclined to the side where the film surface of the substrate is directed from the normal direction of the claw portion mounting column, and the warping of the extreme end due to the bending of the substrate on the shelf piece is cassette substrate characterized that you suppressed by the inclined portion of the suppression claws.
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JP2008277927A JP5169738B2 (en) | 2008-10-29 | 2008-10-29 | PCB cassette |
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JP2008277927A JP5169738B2 (en) | 2008-10-29 | 2008-10-29 | PCB cassette |
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JP2016128179A (en) * | 2015-01-09 | 2016-07-14 | 株式会社アマダホールディングス | Plate material stock device |
US11798829B2 (en) | 2020-06-05 | 2023-10-24 | Samsung Electronics Co., Ltd. | Open-ended type substrate receiving cassette and system thereof |
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KR101213538B1 (en) | 2011-06-28 | 2012-12-24 | (주) 씨앤아이테크놀로지 | A cassete for loading display pannels, rotating apparatus having the same and driving method thereof |
JP5993592B2 (en) * | 2012-03-21 | 2016-09-14 | 株式会社ディスコ | cassette |
KR101488584B1 (en) * | 2013-02-07 | 2015-02-02 | 주식회사 한일하이테크 | Cassette for loading lcd panel |
JP6621010B2 (en) * | 2014-09-17 | 2019-12-18 | 国立大学法人 岡山大学 | Radioisotope production equipment |
KR102576521B1 (en) * | 2016-03-31 | 2023-09-12 | 삼성디스플레이 주식회사 | Apparatus for transferring substrate |
JP6660246B2 (en) * | 2016-05-02 | 2020-03-11 | 株式会社エナテック | Drying device and coating system |
KR101904671B1 (en) * | 2017-09-29 | 2018-10-04 | 캐논 톡키 가부시키가이샤 | Structure for supporting substrate, vacuum deposition apparatus including the same and deposition method |
JP7183997B2 (en) * | 2019-08-29 | 2022-12-06 | Agc株式会社 | Glass substrate processing method |
CN117104886B (en) * | 2023-09-04 | 2024-04-19 | 深圳市博视科技有限公司 | Plate feeding and discharging device for electronic equipment production |
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JPS6484633A (en) * | 1987-09-28 | 1989-03-29 | Oki Electric Ind Co Ltd | Wafer storing jig |
JPH0644873Y2 (en) * | 1989-09-30 | 1994-11-16 | シャープ株式会社 | Work storage cassette |
JPH09290890A (en) * | 1996-04-25 | 1997-11-11 | Nikon Corp | Wafer carrier |
JP4427473B2 (en) * | 2005-03-24 | 2010-03-10 | シャープ株式会社 | Substrate storage container |
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2008
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Cited By (2)
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JP2016128179A (en) * | 2015-01-09 | 2016-07-14 | 株式会社アマダホールディングス | Plate material stock device |
US11798829B2 (en) | 2020-06-05 | 2023-10-24 | Samsung Electronics Co., Ltd. | Open-ended type substrate receiving cassette and system thereof |
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