JP5147167B2 - 決定方法及びプログラム - Google Patents
決定方法及びプログラム Download PDFInfo
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- JP5147167B2 JP5147167B2 JP2005220529A JP2005220529A JP5147167B2 JP 5147167 B2 JP5147167 B2 JP 5147167B2 JP 2005220529 A JP2005220529 A JP 2005220529A JP 2005220529 A JP2005220529 A JP 2005220529A JP 5147167 B2 JP5147167 B2 JP 5147167B2
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- 238000000034 method Methods 0.000 title claims description 33
- 230000003287 optical effect Effects 0.000 claims description 36
- 238000009826 distribution Methods 0.000 claims description 7
- 230000004075 alteration Effects 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 15
- 238000005457 optimization Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 238000013461 design Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 238000004088 simulation Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000005286 illumination Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 238000004422 calculation algorithm Methods 0.000 description 5
- 238000013041 optical simulation Methods 0.000 description 5
- 230000005476 size effect Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000000342 Monte Carlo simulation Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000007850 degeneration Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000012467 final product Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70653—Metrology techniques
- G03F7/70658—Electrical testing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
本発明の一側面としてのプログラムは、光源からの光と光学系を用いてレチクルのパターンを被露光体に露光する際の露光パラメータの値をコンピュータに決定させるためのプログラムであって、前記露光パラメータの値を設定するステップと、該設定された露光パラメータの値を用いて前記レチクルのパターンの光学像を計算することにより、前記被露光体に形成されるパターンの電気的特性を求めるステップと、前記被露光体に形成されたパターンの実測された電気的特性と前記露光パラメータとの関係を表す情報を用いて、該求められる電気的特性が所定の電気的特性を満足するように、該設定された露光パラメータの値を調整する調整ステップとを、コンピュータに実行させる。
(FAB内処理システムと演算システムは、FABの内外にある単一のコンピュータシステムであってもよいし、演算システムがFABの外にあってもよい。)
図1を参照するに、本実施例の最適化アルゴリズムは、まず、被露光体を露光するモードを決定する露光パラメータと、被露光体から得られる電気的特性との関係を取得する(ステップ1002)。なお、本実施例では、電気的特性として、デバイスの電源に対する電圧の変化としての電源電圧特性を使用している。
また、各電気的特性の最終的な歩留りへの貢献度にもとづいて重み付けを行う実施例としては、SRAMセル内のトランジスタQn1とQn2の電気的特性の不良率によって重み付けをすることができる。
Claims (8)
- 光源からの光を用いてレチクルのパターンを被露光体に露光する露光装置の露光パラメータの値をコンピュータに決定させる決定方法であって、
前記露光パラメータの値を設定するステップと、
該設定された露光パラメータの値を用いて前記レチクルのパターンの光学像を計算することにより、前記被露光体に形成されるパターンの電気的特性を求めるステップと、
前記被露光体に形成されたパターンの実測された電気的特性と前記露光パラメータとの関係を表す情報を用いて、該求められる電気的特性が所定の電気的特性を満足するように、該設定された露光パラメータの値を調整する調整ステップとを有することを特徴とする決定方法。 - 複数の露光パラメータが前記所定の電気的特性に影響を及ぼす場合、前記複数の露光パラメータのうち前記所定の電気的特性に最も影響を及ぼす露光パラメータの値を調整することを特徴とする請求項1に記載の決定方法。
- 複数の電気的特性が存在する場合に、前記複数の電気的特性の中で前記デバイスの歩留りに最も影響する電気的特性を求めることを特徴とする請求項1又は2に記載の決定方法。
- 前記露光パラメータは、前記レチクルのパターンを前記被露光体に投影する投影光学系の開口数と、前記レチクルを照明する前記光の有効光源分布を含むことを特徴とする請求項1乃至3のいずれか一項に記載の決定方法。
- 前記所定の電気的特性に対して複数の露光パラメータが関係する場合に、前記調整ステップにおいて、前記複数の露光パラメータの中で変更時に前記所定の電気的特性に対する変動が最も大きな露光パラメータの値を調整することを特徴とする請求項1乃至4のいずれか一項に記載の決定方法。
- 前記所定の電気的特性に対して複数の露光パラメータが関数として関連する場合に、前記調整ステップにおいて、前記複数の露光パラメータの中で、前記関数を微分した微分関数に該設定された露光パラメータの値を代入したときの値が最も大きな露光パラメータの値を調整することを特徴とする請求項1乃至4のいずれか一項に記載の決定方法。
- 請求項1乃至6のいずれか一項に記載の決定方法をコンピュータによって実行するためのプログラム。
- 光源からの光と光学系を用いてレチクルのパターンを被露光体に露光する際の露光パラメータの値をコンピュータに決定させるためのプログラムであって、
前記露光パラメータの値を設定するステップと、
該設定された露光パラメータの値を用いて前記レチクルのパターンの光学像を計算することにより、前記被露光体に形成されるパターンの電気的特性を求めるステップと、
前記被露光体に形成されたパターンの実測された電気的特性と前記露光パラメータとの関係を表す情報を用いて、該求められる電気的特性が所定の電気的特性を満足するように、該設定された露光パラメータの値を調整する調整ステップとを、
コンピュータに実行させるためのプログラム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005220529A JP5147167B2 (ja) | 2005-07-29 | 2005-07-29 | 決定方法及びプログラム |
KR1020060070511A KR100771759B1 (ko) | 2005-07-29 | 2006-07-27 | 노광방법 |
US11/460,663 US20070035716A1 (en) | 2005-07-29 | 2006-07-28 | Exposure method |
TW095127807A TWI342469B (en) | 2005-07-29 | 2006-07-28 | Determination method of determining a value of an exposure parameter of an exposure apparatus |
US12/402,095 US7771906B2 (en) | 2005-07-29 | 2009-03-11 | Exposure method |
Applications Claiming Priority (1)
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JP2005220529A JP5147167B2 (ja) | 2005-07-29 | 2005-07-29 | 決定方法及びプログラム |
Related Child Applications (1)
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JP2012156753A Division JP5638038B2 (ja) | 2012-07-12 | 2012-07-12 | 決定方法及びプログラム |
Publications (3)
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JP2007036100A JP2007036100A (ja) | 2007-02-08 |
JP2007036100A5 JP2007036100A5 (ja) | 2008-09-11 |
JP5147167B2 true JP5147167B2 (ja) | 2013-02-20 |
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JP2005220529A Expired - Fee Related JP5147167B2 (ja) | 2005-07-29 | 2005-07-29 | 決定方法及びプログラム |
Country Status (4)
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US (2) | US20070035716A1 (ja) |
JP (1) | JP5147167B2 (ja) |
KR (1) | KR100771759B1 (ja) |
TW (1) | TWI342469B (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5224687B2 (ja) * | 2006-12-22 | 2013-07-03 | キヤノン株式会社 | 露光条件算出プログラム及び露光条件算出方法 |
JP4254871B2 (ja) * | 2007-02-09 | 2009-04-15 | ソニー株式会社 | 光近接効果補正方法、光近接効果補正装置、光近接効果補正プログラム、半導体装置の製造方法、パターン設計制約策定方法および光近接効果補正条件算出方法 |
JP4857214B2 (ja) * | 2007-07-27 | 2012-01-18 | パナソニック株式会社 | 交通信号制御パラメータ設計装置及び交通信号制御パラメータ生成方法 |
JP2010044101A (ja) * | 2008-08-08 | 2010-02-25 | Toshiba Corp | パターン予測方法、プログラム及び装置 |
JP5383126B2 (ja) * | 2008-09-11 | 2014-01-08 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
EP2207064A1 (en) * | 2009-01-09 | 2010-07-14 | Takumi Technology Corporation | Method of selecting a set of illumination conditions of a lithographic apparatus for optimizing an integrated circuit physical layout |
JP5574749B2 (ja) * | 2010-02-24 | 2014-08-20 | キヤノン株式会社 | 露光条件及びマスクパターンのうち少なくとも一方を決定する決定方法及びプログラム、情報処理装置 |
JP5426637B2 (ja) * | 2011-11-09 | 2014-02-26 | 株式会社アドバンテスト | 半導体装置の製造方法及び半導体製造装置 |
DE102012205096B3 (de) * | 2012-03-29 | 2013-08-29 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage mit mindestens einem Manipulator |
JP5656905B2 (ja) * | 2012-04-06 | 2015-01-21 | キヤノン株式会社 | 決定方法、プログラム及び情報処理装置 |
WO2017102321A1 (en) * | 2015-12-14 | 2017-06-22 | Cymer, Llc | Optimization of source and bandwidth for new and existing patterning devices |
US10036963B2 (en) * | 2016-09-12 | 2018-07-31 | Cymer, Llc | Estimating a gain relationship of an optical source |
KR102540941B1 (ko) | 2017-06-18 | 2023-06-05 | 코벤터, 인크. | 가상 반도체 디바이스 제조 환경에서 키 파라미터 식별, 프로세스 모델 캘리브레이션 및 가변성 분석을 위한 시스템 및 방법 |
CN107566747B (zh) | 2017-09-22 | 2020-02-14 | 浙江大华技术股份有限公司 | 一种图像亮度增强方法及装置 |
US11764111B2 (en) * | 2019-10-24 | 2023-09-19 | Texas Instruments Incorporated | Reducing cross-wafer variability for minimum width resistors |
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2005
- 2005-07-29 JP JP2005220529A patent/JP5147167B2/ja not_active Expired - Fee Related
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2006
- 2006-07-27 KR KR1020060070511A patent/KR100771759B1/ko not_active IP Right Cessation
- 2006-07-28 US US11/460,663 patent/US20070035716A1/en not_active Abandoned
- 2006-07-28 TW TW095127807A patent/TWI342469B/zh not_active IP Right Cessation
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2009
- 2009-03-11 US US12/402,095 patent/US7771906B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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TWI342469B (en) | 2011-05-21 |
US20070035716A1 (en) | 2007-02-15 |
JP2007036100A (ja) | 2007-02-08 |
KR20070015009A (ko) | 2007-02-01 |
TW200720850A (en) | 2007-06-01 |
US20090180097A1 (en) | 2009-07-16 |
KR100771759B1 (ko) | 2007-10-30 |
US7771906B2 (en) | 2010-08-10 |
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