JP5127445B2 - レーザ原子プローブ - Google Patents
レーザ原子プローブ Download PDFInfo
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- JP5127445B2 JP5127445B2 JP2007504936A JP2007504936A JP5127445B2 JP 5127445 B2 JP5127445 B2 JP 5127445B2 JP 2007504936 A JP2007504936 A JP 2007504936A JP 2007504936 A JP2007504936 A JP 2007504936A JP 5127445 B2 JP5127445 B2 JP 5127445B2
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0004—Imaging particle spectrometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/067—Ion lenses, apertures, skimmers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
- H01J49/164—Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/285—Emission microscopes
- H01J2237/2855—Photo-emission
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Lasers (AREA)
Description
4.次に試料台102をイオン移動軸126に平行に移動させ、試料104の頂点その他の対象エリアが概ね開口平面112に位置するようにする(すなわち、試料104の頂点が対極開口110の内側またはすぐ外側に位置するようにする)。
ものである。
Claims (14)
- a.分析される試料を載置可能な試料台と、
b.試料台から離隔した検出器であって、分析される試料からイオンを受容し、イオン位置およびイオン同定データを発生する当該検出器と、
c.開口が形成された対極であって、
(1)前記試料台と前記検出器との間に配置されるとともに、
(2)前記試料台に面し、開口平面に沿って位置する開口入口を有する、
当該対極と、
d.前記対極および前記試料台から離隔したレーザであって、
(1)前記試料台とは前記開口平面の反対側に位置し、
(2)前記対極が前記試料に関連して帯電しているときに、前記試料台に向け、試料に突き当たるようレーザビームを放射する、
当該レーザと、
e.前記レーザと協働して前記試料に対しイオン化エネルギを供給するイオン化エネルギ源と、
を具えたことを特徴とする原子プローブ。 - 前記レーザは、前記対極の開口を通して前記レーザビームを放射するよう位置合わせされていることを特徴とする請求項1に記載の原子プローブ。
- 前記対極の開口は0.01mmより大きい直径を有することを特徴とする請求項2に記載の原子プローブ。
- 前記対極の開口は0.1mm以下の直径を有することを特徴とする請求項3に記載の原子プローブ。
- 前記対極の開口は0.05mm以下の直径を有することを特徴とする請求項2に記載の原子プローブ。
- 前記対極の開口は、その入口で受けたエネルギを集中して、反対側の出口から供給するよう構成されていることを特徴とする請求項2に記載の原子プローブ。
- 前記対極の開口は、前記開口の入口から前記開口の出口まで収束していることを特徴とする請求項6に記載の原子プローブ。
- 前記対極の開口を通して前記試料にエネルギを伝える補助的エネルギ源をさらに具えたことを特徴とする請求項6に記載の原子プローブ。
- a.前記対極の開口は、その入口で受けたエネルギを集中して、反対側の出口から供給するよう構成されるとともに、
b.前記対極の開口を通して前記試料にエネルギを伝える補助的エネルギ源をさらに具えた
ことを特徴とする請求項1に記載の原子プローブ。 - 前記レーザビームは前記試料台に達するときに1mm未満の直径を有していることを特徴とする請求項1に記載の原子プローブ。
- 前記レーザビームは前記試料台に達するときに0.5mm未満の直径を有していることを特徴とする請求項1に記載の原子プローブ。
- 前記レーザは前記検出器よりも前記試料台から離れていることを特徴とする請求項1に記載の原子プローブ。
- a.前記試料台および前記対極が配置される真空チャンバをさらに具え、
b.前記レーザが前記真空チャンバの外側に配置されている
ことを特徴とする請求項1に記載の原子プローブ。 - 前記レーザは、前記真空チャンバの窓を通ってから前記対極の開口を通るよう前記レーザビームを放射することを特徴とする請求項13に記載の原子プローブ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US55577204P | 2004-03-24 | 2004-03-24 | |
US60/555,772 | 2004-03-24 | ||
US57655604P | 2004-06-03 | 2004-06-03 | |
US60/576,556 | 2004-06-03 | ||
PCT/US2004/027062 WO2005104307A2 (en) | 2004-03-24 | 2004-08-19 | Laser atom probes |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007531218A JP2007531218A (ja) | 2007-11-01 |
JP5127445B2 true JP5127445B2 (ja) | 2013-01-23 |
Family
ID=35197632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007504936A Active JP5127445B2 (ja) | 2004-03-24 | 2004-08-19 | レーザ原子プローブ |
Country Status (5)
Country | Link |
---|---|
US (1) | US7683318B2 (ja) |
EP (1) | EP1735812A4 (ja) |
JP (1) | JP5127445B2 (ja) |
KR (1) | KR20070033332A (ja) |
WO (1) | WO2005104307A2 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008502104A (ja) * | 2004-06-03 | 2008-01-24 | イマゴ サイエンティフィック インストルメンツ コーポレーション | レーザ原子プロービング方法 |
US7772552B2 (en) * | 2004-06-21 | 2010-08-10 | Cameca Instruments, Inc. | Methods and devices for atom probe mass resolution enhancement |
JP2008524634A (ja) * | 2004-12-21 | 2008-07-10 | イマゴ サイエンティフィック インストルメンツ コーポレーション | レーザアトムプローブ |
GB0512411D0 (en) | 2005-06-17 | 2005-07-27 | Polaron Plc | Atom probe |
JP4528278B2 (ja) * | 2006-03-31 | 2010-08-18 | 学校法人金沢工業大学 | 分析装置及び分析方法 |
US7958563B2 (en) * | 2006-07-04 | 2011-06-07 | Consejo Superior De Investigaciones Cientificas | Method for using an atomic force microscope |
US20080083882A1 (en) * | 2006-10-06 | 2008-04-10 | Jian Bai | Laser desorption assisted field ionization device and method |
US20100282964A1 (en) * | 2007-09-04 | 2010-11-11 | Joseph Hale Bunton | Methods and apparatuses to align energy beam to atom probe specimen |
FR2932319B1 (fr) * | 2008-06-10 | 2016-10-21 | Cameca | Dispositif generateur d'impulsions laser a large bande spectrale notamment pour sonde atomique tomographique. |
FR2938963B1 (fr) * | 2008-11-21 | 2010-11-12 | Cameca | Sonde atomique tomographique comportant un generateur electro-optique d'impulsions electriques haute tension. |
US8653443B2 (en) * | 2011-06-29 | 2014-02-18 | Philip James Witham | Neutral particle microscope |
EP2880677A4 (en) * | 2012-07-30 | 2016-04-13 | Univ Oregon State | APPARATUS AND METHOD FOR DETERMINING A MOLECULAR STRUCTURE |
US8963081B2 (en) * | 2013-03-06 | 2015-02-24 | Canon Kabushiki Kaisha | Mass selector, and ion gun, ion irradiation apparatus and mass microscope |
US20150041652A1 (en) * | 2013-08-12 | 2015-02-12 | Kabushiki Kaisha Toshiba | Material inspection apparatus |
US10121636B2 (en) * | 2014-07-01 | 2018-11-06 | Atomnaut Inc. | Systems and methods for using multimodal imaging to determine structure and atomic composition of specimens |
US10615001B2 (en) | 2015-04-21 | 2020-04-07 | Cameca Instruments, Inc. | Wide field-of-view atom probe |
US10614995B2 (en) | 2016-06-27 | 2020-04-07 | Cameca Instruments, Inc. | Atom probe with vacuum differential |
JP6781616B2 (ja) * | 2016-12-07 | 2020-11-04 | 株式会社日立製作所 | アトムプローブ分析システムおよびアトムプローブ分析方法 |
JP7078382B2 (ja) * | 2017-11-22 | 2022-05-31 | 藤太郎 今坂 | 飛行時間型質量分析装置及び質量分析方法 |
US11340256B2 (en) * | 2018-01-31 | 2022-05-24 | Cameca Instruments, Inc. | Energy beam input to atom probe specimens from multiple angles |
GB201802234D0 (en) * | 2018-02-12 | 2018-03-28 | Micromass Ltd | Sample ionisation using a pulsed laser source |
US11087956B2 (en) * | 2018-06-29 | 2021-08-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Detection systems in semiconductor metrology tools |
JP7371771B2 (ja) | 2020-05-14 | 2023-10-31 | 株式会社島津製作所 | 質量分析方法及び質量分析装置 |
US11217424B2 (en) * | 2020-05-15 | 2022-01-04 | Globalfoundries U.S. Inc. | System and method for performing three-dimensional compositional analyses |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109655A (ja) * | 1987-10-23 | 1989-04-26 | Hitachi Ltd | アトムプローブ用試料 |
JPH03165447A (ja) * | 1989-11-24 | 1991-07-17 | Shimadzu Corp | レーザイオン化飛行時間型質量分析計 |
US5061850A (en) * | 1990-07-30 | 1991-10-29 | Wisconsin Alumni Research Foundation | High-repetition rate position sensitive atom probe |
US5641959A (en) * | 1995-12-21 | 1997-06-24 | Bruker-Franzen Analytik Gmbh | Method for improved mass resolution with a TOF-LD source |
GB9719697D0 (en) * | 1997-09-16 | 1997-11-19 | Isis Innovation | Atom probe |
JPH11309594A (ja) * | 1998-04-23 | 1999-11-09 | Matsushita Electric Ind Co Ltd | レーザ加工装置およびその加工部品 |
JP2001216933A (ja) * | 2000-02-04 | 2001-08-10 | Jeol Ltd | アトムプローブ電界イオン顕微鏡 |
EP1376650A4 (en) * | 2001-03-26 | 2008-05-21 | Kanazawa Inst Of Technology | SCANNING ATOMIC PROBE AND ANALYSIS PROCEDURE WITH THE SCANNING ATOMIC PROBE |
JP3902925B2 (ja) * | 2001-07-31 | 2007-04-11 | エスアイアイ・ナノテクノロジー株式会社 | 走査型アトムプローブ |
US6946653B2 (en) * | 2001-11-27 | 2005-09-20 | Ciphergen Biosystems, Inc. | Methods and apparatus for improved laser desorption ionization tandem mass spectrometry |
US6762415B1 (en) * | 2003-04-18 | 2004-07-13 | Imago Scientific Instruments Corporation | Vacuum chamber with recessed viewing tube and imaging device situated therein |
JP2008502104A (ja) * | 2004-06-03 | 2008-01-24 | イマゴ サイエンティフィック インストルメンツ コーポレーション | レーザ原子プロービング方法 |
-
2004
- 2004-08-19 JP JP2007504936A patent/JP5127445B2/ja active Active
- 2004-08-19 US US10/592,661 patent/US7683318B2/en active Active
- 2004-08-19 KR KR1020067021762A patent/KR20070033332A/ko not_active Application Discontinuation
- 2004-08-19 WO PCT/US2004/027062 patent/WO2005104307A2/en active Application Filing
- 2004-08-19 EP EP04809594A patent/EP1735812A4/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US20070205358A1 (en) | 2007-09-06 |
EP1735812A2 (en) | 2006-12-27 |
US7683318B2 (en) | 2010-03-23 |
WO2005104307A2 (en) | 2005-11-03 |
EP1735812A4 (en) | 2010-06-02 |
WO2005104307A3 (en) | 2005-12-29 |
KR20070033332A (ko) | 2007-03-26 |
JP2007531218A (ja) | 2007-11-01 |
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