JP5117671B2 - 高品質単結晶及びその成長方法 - Google Patents
高品質単結晶及びその成長方法 Download PDFInfo
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- JP5117671B2 JP5117671B2 JP2005304318A JP2005304318A JP5117671B2 JP 5117671 B2 JP5117671 B2 JP 5117671B2 JP 2005304318 A JP2005304318 A JP 2005304318A JP 2005304318 A JP2005304318 A JP 2005304318A JP 5117671 B2 JP5117671 B2 JP 5117671B2
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/08—Germanium
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/42—Gallium arsenide
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
12 坩堝
14 融液
16、40 ヒータ
18 熱シールド
Claims (8)
- 坩堝に受容された融液から引き上げにより単結晶を成長させる方法であって、
融液の温度を単結晶の長手方向と平行した前記単結晶の中心を貫通する軸に沿って測定するにあたり、融液と単結晶との界面から単結晶と離れるほど前記融液の温度が徐々に上昇して、前記融液の全体の深さに対して前記融液の表面から1/5地点乃至2/3地点で最高点に到達してから徐々に下降し、前記上昇する融液温度の傾きが前記下降する融液温度の傾きより大きい状態を維持することを特徴とする単結晶成長方法。 - 前記最高点は、前記融液の全体の深さに対し、前記融液の表面から1/3地点乃至1/2の地点に存在することを特徴とする請求項1記載の単結晶成長方法。
- 前記融液の側方にヒータを設け、
前記ヒータにおいて、前記融液の全体の深さに対し、前記融液の表面から1/5地点乃至2/3地点に対応する部分の発熱量を、周囲に比して増加させた状態で前記単結晶を成長させることを特徴とする請求項1記載の単結晶成長方法。 - 前記融液の側方にヒータを設け、
前記ヒータにおいて、前記融液の全体の深さに対し、前記融液の表面から1/3地点乃至1/2地点に対応する部分の発熱量を、周囲に比して増加させた状態で前記単結晶を成長させることを特徴とする請求項1記載の単結晶成長方法。 - 前記融液の対流を坩堝の底部と側壁部に沿って融液の表面に上昇してから融液の表面に沿って単結晶側に循環する外側領域と、外側領域の内部傾斜面に沿って単結晶の下部近接部分で循環する内側領域とに区分し、前記内側領域の大きさが前記外側領域の大きさより小さな状態を維持しながら前記単結晶を成長させることを特徴とする請求項1記載の単結晶成長方法。
- 前記単結晶成長方法は、チョクラルスキー法、修正チョクラルスキー法、又はTSSG法であることを特徴とする請求項1〜6いずれか1項記載の単結晶成長方法。
- 前記単結晶は、Si、Geを含む単元素、または、GaAs、InP、LN(LiNbO3)、LT(LiTaO3)、YAG(yttrium aluminum garnet)、LBO(LiB3O5)及びCLBO(CsLiB6O10)を含む化合物であることを特徴とする請求項1〜6いずれか1項記載の単結晶成長方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2004-0083447 | 2004-10-19 | ||
KR1020040083447A KR100709798B1 (ko) | 2004-10-19 | 2004-10-19 | 고품질 단결정 성장 방법 |
KR1020040098530A KR100788018B1 (ko) | 2004-11-29 | 2004-11-29 | 실리콘 단결정 잉곳 및 그로부터 제조된 실리콘 웨이퍼 |
KR10-2004-0098530 | 2004-11-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006117524A JP2006117524A (ja) | 2006-05-11 |
JP5117671B2 true JP5117671B2 (ja) | 2013-01-16 |
Family
ID=36315032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005304318A Active JP5117671B2 (ja) | 2004-10-19 | 2005-10-19 | 高品質単結晶及びその成長方法 |
Country Status (2)
Country | Link |
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US (2) | US7416603B2 (ja) |
JP (1) | JP5117671B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4710247B2 (ja) * | 2004-05-19 | 2011-06-29 | 株式会社Sumco | 単結晶製造装置及び方法 |
JP2006069841A (ja) * | 2004-09-02 | 2006-03-16 | Sumco Corp | 磁場印加式シリコン単結晶の引上げ方法 |
US7371283B2 (en) * | 2004-11-23 | 2008-05-13 | Siltron Inc. | Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby |
US8221545B2 (en) * | 2008-07-31 | 2012-07-17 | Sumco Phoenix Corporation | Procedure for in-situ determination of thermal gradients at the crystal growth front |
US9023152B2 (en) * | 2009-09-17 | 2015-05-05 | Kla-Tencor Corporation | CLBO crystal growth |
CZ201188A3 (cs) * | 2011-02-17 | 2013-02-20 | Crytur Spol. S R. O. | Príprava monokrystalu granátové struktury s dotací o prumeru az 500 mm |
CN108977888A (zh) * | 2013-03-26 | 2018-12-11 | 吉坤日矿日石金属株式会社 | 化合物半导体晶片、光电转换元件、以及iii-v族化合物半导体单晶的制造方法 |
US11987899B2 (en) * | 2020-11-12 | 2024-05-21 | Globalwafers Co., Ltd. | Methods for preparing an ingot in an ingot puller apparatus and methods for selecting a side heater length for such apparatus |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60260498A (ja) * | 1984-06-04 | 1985-12-23 | Sanyo Electric Co Ltd | SiC単結晶成長方法 |
JPS6287477A (ja) * | 1985-10-14 | 1987-04-21 | Hitachi Cable Ltd | 3−v族化合物半導体単結晶の製造方法 |
JPH10130100A (ja) * | 1996-10-24 | 1998-05-19 | Komatsu Electron Metals Co Ltd | 半導体単結晶の製造装置および製造方法 |
JP3725280B2 (ja) * | 1997-03-10 | 2005-12-07 | 株式会社ニコン | 蛍石単結晶の製造装置及び製造方法 |
DE69801903T2 (de) * | 1997-04-09 | 2002-03-28 | Memc Electronic Materials, Inc. | Freistellenbeherrschendes silicium mit niedriger fehlerdichte |
JPH11157981A (ja) * | 1997-12-01 | 1999-06-15 | Sumitomo Electric Ind Ltd | 半導体単結晶の製造方法 |
KR100957729B1 (ko) * | 1998-09-02 | 2010-05-12 | 엠이엠씨 일렉트로닉 머티리얼즈 인코포레이티드 | 이상적 산소 침전 실리콘 웨이퍼의 제조 방법 |
TW554093B (en) * | 2000-02-28 | 2003-09-21 | Shinetsu Handotai Kk | Method for preparing silicon single crystal and silicon single crystal |
US7229495B2 (en) * | 2002-12-23 | 2007-06-12 | Siltron Inc. | Silicon wafer and method for producing silicon single crystal |
-
2005
- 2005-10-19 US US11/254,245 patent/US7416603B2/en active Active
- 2005-10-19 JP JP2005304318A patent/JP5117671B2/ja active Active
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2008
- 2008-07-02 US US12/166,366 patent/US20090272948A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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US20060096526A1 (en) | 2006-05-11 |
JP2006117524A (ja) | 2006-05-11 |
US7416603B2 (en) | 2008-08-26 |
US20090272948A1 (en) | 2009-11-05 |
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