JP5111962B2 - Liquefied gas supply method and apparatus - Google Patents

Liquefied gas supply method and apparatus Download PDF

Info

Publication number
JP5111962B2
JP5111962B2 JP2007185859A JP2007185859A JP5111962B2 JP 5111962 B2 JP5111962 B2 JP 5111962B2 JP 2007185859 A JP2007185859 A JP 2007185859A JP 2007185859 A JP2007185859 A JP 2007185859A JP 5111962 B2 JP5111962 B2 JP 5111962B2
Authority
JP
Japan
Prior art keywords
liquefied gas
gas
gas supply
amount
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007185859A
Other languages
Japanese (ja)
Other versions
JP2009024727A (en
Inventor
源太 川口
誠 坂根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Nippon Sanso Corp
Original Assignee
Taiyo Nippon Sanso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Nippon Sanso Corp filed Critical Taiyo Nippon Sanso Corp
Priority to JP2007185859A priority Critical patent/JP5111962B2/en
Publication of JP2009024727A publication Critical patent/JP2009024727A/en
Application granted granted Critical
Publication of JP5111962B2 publication Critical patent/JP5111962B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

本発明は、液化ガス供給方法及び装置に関し、詳しくは、半導体製造工場で使用する半導体用特殊材料ガスを連結配管で連結した複数の液化ガス容器から供給するためのガス供給方法及び装置に関する。   The present invention relates to a liquefied gas supply method and apparatus, and more particularly to a gas supply method and apparatus for supplying a semiconductor special material gas used in a semiconductor manufacturing factory from a plurality of liquefied gas containers connected by connecting pipes.

半導体製造工場で使用する半導体用特殊材料ガスを供給するためのシリンダーキャビネットや液化ガス供給設備において、液化ガス容器１本からの供給可能なガス量は、その充填量に応じた液層部表面積と外気からの自然対流による入熱とにより定まる。すなわち、容器への入熱量Ｑ［Ｊ／ｈ］は、Ｑ＝ｈ・Ａ・ΔＴ（ｈ：自然対流による熱伝達係数、Ａ：液層部表面積、ΔＴ：外気温度と液層温度差）で求められ、供給可能ガス量ｑ［ｋｇ／ｈ］は、ｑ＝Ｑ／Ｈ（Ｈ：蒸発潜熱）で求めることができる。このように供給可能なガス量は、気化熱に見合った外気からの入熱量で推算が可能である。   In cylinder cabinets and liquefied gas supply equipment for supplying special material gases for semiconductors used in semiconductor manufacturing factories, the amount of gas that can be supplied from one liquefied gas container is the surface area of the liquid layer according to the filling amount. It is determined by the heat input by natural convection from the outside air. That is, the heat input amount Q [J / h] into the container is Q = h · A · ΔT (h: heat transfer coefficient by natural convection, A: surface area of liquid layer part, ΔT: difference between outside air temperature and liquid layer temperature) The gas amount q [kg / h] that can be supplied can be obtained by q = Q / H (H: latent heat of vaporization). The amount of gas that can be supplied in this way can be estimated from the amount of heat input from the outside air commensurate with the heat of vaporization.

一般的に、使用ガス量が多く見込まれる場合には、蒸発表面積を増加させるために液化ガス容器の本数を増やし、各液化ガス容器を連結配管で接続してガスを供給することが行われている。これらの複数の液化ガス容器は、液化ガス容器内の液化ガスの残量を管理され、いずれか一つの液化ガス容器の残量があらかじめ設定した下限値に減少したときに、すべての液化ガス容器からのガス供給を停止し、すべての液化ガス容器を新しい液化ガス容器に同時に交換するようにしている。   In general, when a large amount of gas is expected, the number of liquefied gas containers is increased in order to increase the evaporation surface area, and gas is supplied by connecting each liquefied gas container with a connecting pipe. Yes. The plurality of liquefied gas containers are managed when the remaining amount of the liquefied gas in the liquefied gas container is managed, and when the remaining amount of any one liquefied gas container is reduced to a preset lower limit value, all the liquefied gas containers are The gas supply from is stopped, and all the liquefied gas containers are replaced with new liquefied gas containers at the same time.

一方、ＬＰガスの供給では周知の事実であるように、複数の液化ガス容器を連結配管で連結してガス供給を行う場合、計画したガス供給量に近い量のガスを定常的に供給しているときには、各液化ガス容器間は平衡状態となるので各液化ガス容器内の液化ガスは平均的に消費されていくが、計画量に比べてガス供給量が少ないときには、各液化ガス容器間の環境温度が異なると、温度の高い液化ガス容器で蒸発したガスが温度の低い液化ガス容器で凝縮することにより液化ガスが移動する現象、即ち液移動が発生する。   On the other hand, as is well known in the supply of LP gas, when gas is supplied by connecting a plurality of liquefied gas containers with connecting pipes, an amount of gas close to the planned gas supply amount is steadily supplied. When liquefied gas containers are in an equilibrium state, the liquefied gas in each liquefied gas container is consumed on average, but when the amount of gas supply is smaller than the planned amount, When the environmental temperature is different, a phenomenon in which the liquefied gas moves, that is, liquid movement, occurs because the gas evaporated in the liquefied gas container having a high temperature is condensed in the liquefied gas container having a low temperature.

このため、各液化ガス容器間で液化ガスの残量が異なる状態になることから、前述のようにすべての液化ガス容器を交換すると、液化ガスの残量が多い容器も交換することになるため、経済性に問題が発生する。なお、残量が下限値に達した液化ガス容器のみを交換することも可能であるが、一つ一つの容器交換を頻繁に行う必要があり、作業性、経済性の点から一般的には行われていない。   For this reason, since the remaining amount of the liquefied gas is different between the liquefied gas containers, if all the liquefied gas containers are replaced as described above, the containers having a large amount of liquefied gas are also replaced. There is a problem with economy. Although it is possible to replace only the liquefied gas container whose remaining amount has reached the lower limit, it is necessary to frequently replace each container, and in general from the viewpoint of workability and economy Not done.

このような液移動に対処するため、複数の液化ガス容器の各々に、前記液化ガス容器内の液化ガスの残量を測定する残量測定手段と、各液化ガス容器からのガス供給量を制御する制御手段とを備え、複数の制御手段を、各々対応する前記液化ガス容器に備えられた残量測定手段の測定結果に基づいて制御することにより、複数の液化ガス容器の各々について液化ガスが所定の残量になるまで使用することができ、効率的かつ経済的に液化ガス容器の交換を可能としたガス供給装置の制御方法が提案されている（例えば、特許文献１参照。）。
特開平１１−２２６３８６号公報 In order to cope with such liquid movement, each of the plurality of liquefied gas containers controls the remaining amount measuring means for measuring the remaining amount of the liquefied gas in the liquefied gas container, and the gas supply amount from each liquefied gas container. And controlling the plurality of control means based on the measurement results of the remaining amount measuring means provided in the corresponding liquefied gas containers, respectively, so that the liquefied gas is supplied to each of the plurality of liquefied gas containers. There has been proposed a control method for a gas supply device that can be used until a predetermined remaining amount is reached and that enables efficient and economical replacement of a liquefied gas container (see, for example, Patent Document 1).
JP-A-11-226386

しかし、特許文献１に記載された制御方法では、残量測定手段の測定結果が規定残量に達した液化ガス容器からのガス供給を停止し、他の液化ガス容器からのガス供給は続行するようにしているため、ガス供給を行っている液化ガス容器の本数が次第に減少し、最終的には１本の液化ガス容器からのガス供給になってしまうことから、計画したガス供給量に見合った量のガスを供給することができなくなってしまう。   However, in the control method described in Patent Document 1, the gas supply from the liquefied gas container whose measurement result of the remaining amount measuring means has reached the specified remaining amount is stopped, and the gas supply from the other liquefied gas containers is continued. As a result, the number of liquefied gas containers that supply gas gradually decreases, eventually resulting in gas supply from one liquefied gas container, which is commensurate with the planned gas supply volume. It becomes impossible to supply a large amount of gas.

そこで本発明は、計画したガス供給量に見合った量のガスを供給可能な状態を保つとともに、液移動が発生しても各液化ガス容器内の液化ガスの残量を平均化することができる液化ガス供給方法及び装置を提供することを目的としている。   Therefore, the present invention can maintain a state in which an amount of gas corresponding to the planned gas supply amount can be supplied, and can average the remaining amount of liquefied gas in each liquefied gas container even if liquid movement occurs. An object of the present invention is to provide a liquefied gas supply method and apparatus.

上記目的を達成するため、本発明の液化ガス供給方法は、複数の液化ガス容器から減圧弁を備えたガス供給管を介してガスを供給する液化ガス供給方法において、前記複数の液化ガス容器を前記減圧弁の一次側で連結配管で連結し、前記複数の液化ガス容器内の液化ガスの量をそれぞれ測定し、残量が最大の液化ガス容器に対して他の液化ガス容器内の液化ガスの残量との差があらかじめ設定された残量差の範囲内に収まるように各液化ガス容器からのガス供給量を制御することを特徴としている。 To achieve the above object, the liquefied gas supply method of the present invention is a liquefied gas supply method for supplying a gas via the gas supply pipe provided with a pressure reducing valve from a liquefied gas container of multiple, said plurality of liquefied gas containers Are connected by a connecting pipe on the primary side of the pressure reducing valve, and the amount of liquefied gas in each of the plurality of liquefied gas containers is measured, and liquefaction in another liquefied gas container is compared with the liquefied gas container having the largest remaining amount. It is characterized in that the gas supply amount from each liquefied gas container is controlled so that the difference from the remaining amount of gas falls within a preset remaining amount difference range.

さらに、本発明の液化ガス供給方法は、前記ガス供給量の制御が残量が最小の液化ガス容器からのガス供給のみを停止すること、ガス供給圧力があらかじめ設定した規定圧力以下になったときや、複数の液化ガス容器内の液化ガスの合計量があらかじめ設定した残量低下基準値に減少したときには、ガス供給停止中の液化ガス容器からのガス供給を再開すること、また、複数の液化ガス容器内の液化ガスの合計量があらかじめ設定した残量下限基準値に減少したときには、すべての液化ガス容器からのガス供給を停止すること、さらに、前記ガス供給量の制御は、現在のガス供給量に見合う液化ガス容器の本数を算出し、残量が多い液化ガス容器から順に算出した本数分の液化ガス容器を選択してガス供給を行うことを特徴としている。   Further, the liquefied gas supply method of the present invention is such that the control of the gas supply amount stops only the gas supply from the liquefied gas container with the smallest remaining amount, and the gas supply pressure becomes lower than a preset specified pressure. When the total amount of liquefied gas in multiple liquefied gas containers has decreased to a preset remaining amount reduction reference value, restart the gas supply from the liquefied gas container when the gas supply is stopped. When the total amount of liquefied gas in the gas container decreases to a preset remaining amount lower limit reference value, the gas supply from all the liquefied gas containers is stopped, and the control of the gas supply amount The number of liquefied gas containers corresponding to the supply amount is calculated, and gas supply is performed by selecting the number of liquefied gas containers calculated in order from the liquefied gas containers with the largest remaining amount.

また、本発明の液化ガス供給装置は、複数の液化ガス容器から減圧弁を備えたガス供給管を介してガスを供給する液化ガス供給装置において、前記複数の液化ガス容器を前記減圧弁の一次側で連結する連結配管と、前記複数の液化ガス容器内の液化ガスの量をそれぞれ測定する液化ガス量測定手段と、該液化ガス量測定手段で測定した各液化ガス容器内の液化ガスの残量を比較して残量が最大の液化ガス容器と残量が最小の液化ガス容器とを選出する残量比較手段と、選出された両液化ガス容器の残量の差があらかじめ設定した範囲から外れたときに残量が最小の液化ガス容器からのガス供給を停止するガス供給停止手段とを備えていることを特徴としている。 Further, the liquefied gas supply device of the present invention is a liquefied gas supply device for supplying a gas via the gas supply pipe provided with a pressure reducing valve from a liquefied gas container of multiple, a plurality of liquefied gas containers of the pressure reducing valve A connecting pipe connected on the primary side, a liquefied gas amount measuring means for measuring the amount of liquefied gas in each of the plurality of liquefied gas containers, and a liquefied gas in each liquefied gas container measured by the liquefied gas amount measuring means. The remaining amount comparison means for selecting the liquefied gas container having the largest remaining amount and the liquefied gas container having the smallest remaining amount by comparing the remaining amount, and the range in which the difference between the remaining amounts of the selected liquefied gas containers is set in advance. And a gas supply stop means for stopping the gas supply from the liquefied gas container having the smallest remaining amount when the fuel gas comes off.

本発明によれば、残量が最大の液化ガス容器に対して他の液化ガス容器内の液化ガス量との差があらかじめ設定された範囲内に収まるように各液化ガス容器からのガス供給量を制御することにより、例えば、残量が最小の液化ガス容器からのガス供給を停止したり、ガス供給量を絞ったりすることにより、残量が少ない液化ガス容器の液化ガス減少量を小さくすることができ、各液化ガス容器内の液化ガス残量を平均化することができる。   According to the present invention, the amount of gas supplied from each liquefied gas container so that the difference between the liquefied gas container in the remaining liquefied gas container and the amount of liquefied gas in other liquefied gas containers is within a preset range. For example, by stopping gas supply from the liquefied gas container with the smallest remaining amount or reducing the gas supply amount, the amount of decrease in liquefied gas in the liquefied gas container with little remaining amount can be reduced. The remaining amount of liquefied gas in each liquefied gas container can be averaged.

また、各液化ガス容器からのガス供給量の制御として、現在のガス供給量が計画量に比べて少ない場合には、現在のガス供給量に見合う本数で、残量が多い液化ガス容器から順にガス供給を行うことにより、残量が多い液化ガス容器の液化ガス減少量を大きくすることができ、前記同様に、各液化ガス容器内の液化ガス残量を平均化することができる。   In addition, as a control of the gas supply amount from each liquefied gas container, if the current gas supply amount is small compared to the planned amount, the number corresponding to the current gas supply amount, in order from the liquefied gas container with the remaining amount in order. By performing the gas supply, the amount of liquefied gas decreased in the liquefied gas container having a large remaining amount can be increased, and the liquefied gas remaining amount in each liquefied gas container can be averaged as described above.

さらに、各残量が設定範囲内にあるときには、すべての液化ガス容器からガス供給を行うことになるので、計画したガス供給量に見合った量のガスを供給可能な状態を保つことができる。   Further, when each remaining amount is within the set range, gas supply is performed from all the liquefied gas containers, so that it is possible to maintain a state in which an amount of gas corresponding to the planned gas supply amount can be supplied.

図１は、本発明の液化ガス供給方法を実施する液化ガス供給装置の一形態例を示す説明図である。   FIG. 1 is an explanatory view showing an example of a liquefied gas supply apparatus for carrying out the liquefied gas supply method of the present invention.

この液化ガス供給装置は、複数の液化ガス容器１１ａ，１１ｂ，１１ｃを、ガス供給弁１２ａ，１２ｂ，１２ｃを介して連結配管１３で連結し、該連結管１３から減圧弁１４、元弁１５及び圧力計１６を備えたガス供給管１７を介して使用先にガスを供給するようにしている。各液化ガス容器１１ａ，１１ｂ，１１ｃは、各液化ガス容器内の液化ガスの量をそれぞれ測定する液化ガス量測定手段である重量計１８ａ，１８ｂ，１８ｃに載置されており、重量によって各液化ガス容器内の液化ガスの残量を測定するようにしている。   In this liquefied gas supply device, a plurality of liquefied gas containers 11a, 11b, and 11c are connected by a connecting pipe 13 via gas supply valves 12a, 12b, and 12c, and the pressure reducing valve 14, the main valve 15 and the Gas is supplied to the user through a gas supply pipe 17 provided with a pressure gauge 16. The liquefied gas containers 11a, 11b, and 11c are placed on weighing scales 18a, 18b, and 18c, which are liquefied gas amount measuring means for measuring the amount of liquefied gas in the liquefied gas containers, respectively. The remaining amount of liquefied gas in the gas container is measured.

各液化ガス容器１１ａ，１１ｂ，１１ｃからのガス供給を制御するための制御手段１９は、重量計１８ａ，１８ｂ，１８ｃで測定した各液化ガス容器１１ａ，１１ｂ，１１ｃ内の液化ガスの残量を比較して残量が最大の液化ガス容器と残量が最小の液化ガス容器とを選出する残量比較手段と、選出された両液化ガス容器の残量の差があらかじめ設定した範囲から外れたときに残量が最小の液化ガス容器からのガス供給を停止するガス供給停止手段とを備えている。   The control means 19 for controlling the gas supply from each of the liquefied gas containers 11a, 11b, and 11c determines the remaining amount of the liquefied gas in each of the liquefied gas containers 11a, 11b, and 11c measured by the weigh scales 18a, 18b, and 18c. Compared with the remaining amount comparison means for selecting the liquefied gas container with the largest remaining amount and the liquefied gas container with the smallest remaining amount, the difference in the remaining amount between the selected liquefied gas containers is out of the preset range. Gas supply stopping means for stopping gas supply from the liquefied gas container with the smallest remaining amount is sometimes provided.

制御手段１９によるガス供給の制御を行うためには、まず、容器内の液化ガス残量を平均化するためのガス供給制御を開始する残量差ΔＷ_close及びガス供給制御を終了する残量差ΔＷ_open、減圧弁１４の一次側に要求される下限圧力Ｐ_min、合計残量が減少したときに前記ガス供給制御を終了するための残量低下基準値Ｗ_care及び液化ガス供給装置からのガス供給を停止するための残量下限基準値Ｗ_alarmをそれぞれ設定する。   In order to control the gas supply by the control means 19, first, the remaining amount difference ΔW_close for starting the gas supply control for averaging the remaining amount of the liquefied gas in the container and the remaining amount difference ΔW_open for ending the gas supply control. The lower limit pressure P_min required for the primary side of the pressure reducing valve 14, the remaining amount lowering reference value W_care for ending the gas supply control when the total remaining amount is reduced, and the gas supply from the liquefied gas supply device are stopped. The remaining amount lower limit reference value W_alarm for each is set.

以下、液化ガス容器１１ａ，１１ｂ，１１ｃの液化ガス初期充填量が３０ｋｇ、１本当たりのガス供給可能ガス量が毎分１．１ｋｇであり、前述のガス供給制御を開始する残量差ΔＷ_closeを３ｋｇ、ガス供給制御を終了する残量差ΔＷ_openを１ｋｇ、下限圧力Ｐ_minを０．４ＭＰａ、残量低下基準値Ｗ_careを１５ｋｇ、残量下限基準値Ｗ_alarmを９ｋｇにそれぞれ設定した場合で説明する。   Hereinafter, the initial amount of liquefied gas in the liquefied gas containers 11a, 11b, and 11c is 30 kg, the amount of gas that can be supplied per bottle is 1.1 kg per minute, and the residual amount difference ΔW_close for starting the above-described gas supply control is calculated. A case will be described where 3 kg, the remaining amount difference ΔW_open for ending the gas supply control is set to 1 kg, the lower limit pressure P_min is set to 0.4 MPa, the remaining amount lowering reference value W_care is set to 15 kg, and the remaining amount lower limit reference value W_alarm is set to 9 kg.

ガス供給を行っているときに、各液化ガス容器１１ａ，１１ｂ，１１ｃの重量を各重量計１８ａ，１８ｂ，１８ｃにて一定時間毎に測定し、最も重い液化ガス容器、すなわち、内部の液化ガスの残量が最大（最大残量Ｗ_max）であるガス容器、例えば液化ガス容器１１ａを選出するとともに、最も軽い液化ガス容器、すなわち、内部の液化ガスの残量が最小（最小残量Ｗ_min）であるガス容器、例えば液化ガス容器１１ｂを選出する。   When the gas is supplied, the weights of the liquefied gas containers 11a, 11b, and 11c are measured by the weighing scales 18a, 18b, and 18c at regular intervals, and the heaviest liquefied gas container, that is, the liquefied gas inside is measured. The gas container having the maximum remaining amount (maximum remaining amount W_max), for example, the liquefied gas container 11a is selected, and the lightest liquefied gas container, that is, the remaining amount of the internal liquefied gas is the minimum (minimum remaining amount W_min). A gas container, for example, a liquefied gas container 11b is selected.

次に、最大残量Ｗ_maxと最小残量Ｗ_minとの差が前記残量差ΔＷ_closeの範囲内に収まっているかを判定し、３ｋｇの範囲内に収まっている場合はそのままガス供給を継続し、３ｋｇの範囲を超えた場合は(Ｗ_max−Ｗ_min＞ΔＷ_close（３ｋｇ）)、ガス供給弁１２ｂを閉じて残量が最小の液化ガス容器１１ｂからのガス供給を停止する（図２参照）。   Next, it is determined whether the difference between the maximum remaining amount W_max and the minimum remaining amount W_min is within the range of the remaining amount difference ΔW_close. If the difference is within the range of 3 kg, the gas supply is continued and 3 kg Is exceeded (W_max−W_min> ΔW_close (3 kg)), the gas supply valve 12b is closed to stop the gas supply from the liquefied gas container 11b having the smallest remaining amount (see FIG. 2).

他の２本の液化ガス容器１１ａ，１１ｃからのガス供給を行って液化ガス容器１１ａの重量が減少し、最大残量Ｗ_maxと最小残量Ｗ_minとの差が前記残量差ΔＷ_openである１ｋｇを下回ったら(Ｗ_max−Ｗ_min＜ΔＷ_open（１ｋｇ）)、ガス供給弁１２ｂを開いて液化ガス容器１１ｂからのガス供給を再開する（図３参照）。   Gas is supplied from the other two liquefied gas containers 11a and 11c to reduce the weight of the liquefied gas container 11a, and the difference between the maximum remaining amount W_max and the minimum remaining amount W_min is 1 kg which is the remaining amount difference ΔW_open. If it falls below (W_max−W_min <ΔW_open (1 kg)), the gas supply valve 12b is opened and the gas supply from the liquefied gas container 11b is resumed (see FIG. 3).

なお、２本の液化ガス容器１１ａ，１１ｃからのガス供給を行っているときに、液化ガス容器１１ｃの重量が液化ガス容器１１ｂの重量を下回り、かつ、液化ガス容器１１ａと液化ガス容器１１ｃとの残量の差が前記残量差ΔＷ_closeを超えたときには、制御対象を液化ガス容器１１ｃに切り換え、ガス供給弁１２ｂを開いて液化ガス容器１１ｂからのガス供給を再開するとともに、ガス供給弁１２ｃを閉じて液化ガス容器１１ｃからのガス供給を停止するようにしてもよい。また、ガス供給量が少なく、１本の液化ガス容器からのガス供給で賄えるようなときには、ガス供給弁１２ｂを閉じた状態のまま、ガス供給弁１２ｃを閉じて液化ガス容器１１ａのみからガス供給を行うことも可能である（図４参照）。   When the gas is supplied from the two liquefied gas containers 11a and 11c, the weight of the liquefied gas container 11c is less than the weight of the liquefied gas container 11b, and the liquefied gas container 11a and the liquefied gas container 11c When the difference between the remaining amounts exceeds the remaining amount difference ΔW_close, the control target is switched to the liquefied gas container 11c, the gas supply valve 12b is opened to restart the gas supply from the liquefied gas container 11b, and the gas supply valve 12c. May be closed to stop the gas supply from the liquefied gas container 11c. When the gas supply amount is small and can be covered by gas supply from one liquefied gas container, the gas supply valve 12c is closed with the gas supply valve 12b closed, and the gas is supplied only from the liquefied gas container 11a. Can also be performed (see FIG. 4).

さらに、ガス供給中には、圧力計１６の測定圧力Ｐ_detと下限圧力Ｐ_minとを常時比較し、圧力計１６の測定圧力Ｐ_detが下限圧力Ｐ_min（０．４ＭＰａ）を下回ったときに（Ｐ_det＜Ｐ_min（０．４ＭＰａ））、ガス供給制御によって閉じられているガス供給弁があった場合には、そのガス供給弁を開いてすべての液化ガス容器１１ａ，１１ｂ，１１ｃからガス供給を行うようにしてガス供給圧力を所定圧力に保持する。これにより、液化ガス供給装置からのガス供給量を確保することができ、ガス使用先でのガス圧力の低下やガス流量の低下を防止することができる。   Further, during the gas supply, the measured pressure P_det of the pressure gauge 16 and the lower limit pressure P_min are always compared, and when the measured pressure P_det of the pressure gauge 16 falls below the lower limit pressure P_min (0.4 MPa) (P_det <P_min (0.4 MPa)), when there is a gas supply valve closed by the gas supply control, the gas supply valve is opened to supply gas from all the liquefied gas containers 11a, 11b, 11c. The gas supply pressure is maintained at a predetermined pressure. Thereby, the gas supply amount from a liquefied gas supply apparatus can be ensured, and the fall of the gas pressure in a gas use place and the fall of a gas flow rate can be prevented.

また、液化ガス容器内の液化ガス残量が少なくなると、外気からの入熱を受けるために必要な面積が確保できなくなり、容器内圧力が低下することになるため、ガス供給の継続によって全液化ガス容器１１ａ，１１ｂ，１１ｃの合計残量Ｗ_supが前記残量低下基準値Ｗ_careの１５ｋｇを下回った場合にも（Ｗ_sup＜Ｗ_care（１５ｋｇ））、ガス供給制御によって閉じられているガス供給弁を開いてすべての液化ガス容器１１ａ，１１ｂ，１１ｃからガス供給を行う。これにより、液化ガス容器における外気からの入熱面積を確保することができ、所定のガス供給を継続することができる。   In addition, if the remaining amount of liquefied gas in the liquefied gas container decreases, the area required to receive heat input from the outside air cannot be secured, and the pressure in the container will decrease. Even when the total remaining amount W_sup of the gas containers 11a, 11b, and 11c falls below 15 kg of the remaining amount decrease reference value W_care (W_sup <W_care (15 kg)), the gas supply valve closed by the gas supply control is opened. Then, gas is supplied from all the liquefied gas containers 11a, 11b, and 11c. Thereby, the heat input area from the outside air in a liquefied gas container can be ensured, and predetermined gas supply can be continued.

さらに、全液化ガス容器１１ａ，１１ｂ，１１ｃの合計残量Ｗ_supが残量下限基準値Ｗ_alarmの９ｋｇを下回ったときには（Ｗ_sup＜Ｗ_alarm（９ｋｇ））、すべてのガス供給弁１２ａ，１２ｂ，１２ｃを閉じ、この液化ガス供給装置からのガス供給を停止する。これにより、残液中に濃縮された不純物が使用先に供給されてしまうことを防止できる。なお、半導体製造工場における液化ガス供給設備では、同じような構成のガス供給装置を複数設けているため、一つのガス供給装置からのガス供給が停止したときには、自動的に他のガス供給装置からのガス供給が開始される。   Further, when the total remaining amount W_sup of all the liquefied gas containers 11a, 11b, and 11c is less than 9 kg of the remaining amount lower limit reference value W_alarm (W_sup <W_alarm (9 kg)), all the gas supply valves 12a, 12b, and 12c are closed. Then, the gas supply from the liquefied gas supply device is stopped. Thereby, it can prevent that the impurity concentrated in the residual liquid will be supplied to a use place. In the liquefied gas supply facility in the semiconductor manufacturing factory, since a plurality of gas supply devices having the same configuration are provided, when the gas supply from one gas supply device stops, the other gas supply device automatically The gas supply is started.

このようにして液化ガス容器からのガス供給を制御することにより、ガス供給量が計画量より少なくて液移動が発生した場合でも、複数の液化ガス容器内の液化ガス残量を平均化することができ、ガスの利用効率を向上させることができる。さらに、ガス供給圧力や全体の液化ガス残量に応じてガス供給弁１２ａ，１２ｂ，１２ｃのすべてを開くようにしているので、使用先へのガス供給を確実に行うことができる。   By controlling the gas supply from the liquefied gas containers in this way, even if the gas supply amount is less than the planned amount and liquid movement occurs, the remaining liquefied gas amounts in the plurality of liquefied gas containers can be averaged. And the utilization efficiency of gas can be improved. Furthermore, since all of the gas supply valves 12a, 12b, and 12c are opened according to the gas supply pressure and the total amount of the liquefied gas, the gas can be reliably supplied to the user.

また、ガス供給装置における液化ガス容器の設置本数が多く、ガス供給装置のガス供給能力に比べてガス供給量が少ない場合は、液化ガス残量の多い液化ガス容器を選択してガス供給を行うようにすることもできる。例えば、液化ガス容器が１０本設置されていて、ガス供給量が液化ガス容器５本分で賄えるまかなえる場合には、液化ガス残量の多い液化ガス容器から順に５本の液化ガス容器を選択してガス供給を行うこともでき、ガス供給量が大幅に少ない場合は、１本の液化ガス容器のみからガス供給することも可能である。逆に、液化ガス残量の少ない液化ガス容器から順にガス供給を停止していき、残りの液化ガス容器からガス供給を行うことができる。   If the number of liquefied gas containers installed in the gas supply device is large and the gas supply amount is small compared to the gas supply capacity of the gas supply device, the gas supply is performed by selecting a liquefied gas container with a large amount of liquefied gas remaining. It can also be done. For example, if ten liquefied gas containers are installed and the gas supply can be covered by five liquefied gas containers, select the five liquefied gas containers in order from the liquefied gas container with the largest amount of liquefied gas remaining. Gas can also be supplied. When the amount of gas supply is significantly small, it is also possible to supply gas from only one liquefied gas container. On the contrary, the gas supply can be stopped in order from the liquefied gas container with the small remaining amount of liquefied gas, and the gas can be supplied from the remaining liquefied gas containers.

この場合、各液化ガス残量の変化に応じてガス供給を停止する液化ガス容器を切り換えていくことにより、液化ガス残量を平均化することができる。また、ガス供給圧力が下限圧力を下回った場合や、液化ガスの合計残量が残量低下基準値を下回った場合には、前述のようにすべての液化ガス容器からガス供給を行うようにしてもよいが、ガス供給を停止しているガス容器の中で液化ガス残量の多い液化ガス容器から順にガス供給を再開させるようにしてもよい。   In this case, the remaining amount of liquefied gas can be averaged by switching the liquefied gas container that stops the gas supply in accordance with the change in the remaining amount of liquefied gas. When the gas supply pressure falls below the lower limit pressure, or when the total remaining amount of liquefied gas falls below the reference value for lowering the remaining amount, supply gas from all liquefied gas containers as described above. However, the gas supply may be resumed in order from the liquefied gas container having the largest remaining amount of liquefied gas among the gas containers in which the gas supply is stopped.

なお、液化ガスの種類、液化ガス容器の構造や大きさ及び本数、液化ガス量測定手段の種類、ガス供給弁の種類等は任意に選択することが可能であり、ガス供給量の制御は、ガス供給弁を開閉するものに限らず、流量を絞るような制御も可能である。   The type of liquefied gas, the structure and size and number of liquefied gas containers, the type of liquefied gas amount measuring means, the type of gas supply valve, etc. can be arbitrarily selected. Control is not limited to opening and closing the gas supply valve, and control to reduce the flow rate is also possible.

本発明の液化ガス供給方法を実施する液化ガス供給装置の一形態例を示す説明図である。It is explanatory drawing which shows one example of the liquefied gas supply apparatus which enforces the liquefied gas supply method of this invention. 残量が最小の液化ガス容器からのガス供給を停止した状態を示す説明図である。It is explanatory drawing which shows the state which stopped the gas supply from the liquefied gas container with the minimum remaining amount. 残量が最小の液化ガス容器からのガス供給を再開した状態を示す説明図である。It is explanatory drawing which shows the state which restarted the gas supply from the liquefied gas container with the residual amount minimum. １本の液化ガス容器のみからガス供給を行っている状態の説明図である。It is explanatory drawing of the state which is supplying the gas only from one liquefied gas container.

符号の説明Explanation of symbols

１１ａ，１１ｂ，１１ｃ…液化ガス容器、１２ａ，１２ｂ，１２ｃ…ガス供給弁、１３…連結配管、１４…減圧弁、１５…元弁、１６…圧力計、１７…ガス供給管、１８ａ，１８ｂ，１８ｃ…重量計、１９…制御手段   11a, 11b, 11c ... liquefied gas containers, 12a, 12b, 12c ... gas supply valve, 13 ... connection piping, 14 ... pressure reducing valve, 15 ... original valve, 16 ... pressure gauge, 17 ... gas supply pipe, 18a, 18b, 18c ... Weigh scale, 19 ... Control means

Claims (2)

複数の液化ガス容器から減圧弁を備えたガス供給管を介してガスを供給する液化ガス供給方法において、前記複数の液化ガス容器を前記減圧弁の一次側で連結配管で連結し、前記複数の液化ガス容器内の液化ガスの量をそれぞれ測定し、残量が最大の液化ガス容器に対して他の液化ガス容器内の液化ガスの残量との差があらかじめ設定された残量差の範囲内に収まるように各液化ガス容器からのガス供給量を制御し、前記ガス供給量の制御は、残量が最小の液化ガス容器からのガス供給のみを停止し、前記複数の液化ガス容器内の液化ガスの合計量があらかじめ設定した残量低下基準値に減少したときに、ガス供給停止中の液化ガス容器からのガス供給を再開することを特徴とする液化ガス供給方法。 In a liquefied gas supply method of supplying gas from a plurality of liquefied gas containers via a gas supply pipe provided with a pressure reducing valve, the plurality of liquefied gas containers are connected by a connecting pipe on a primary side of the pressure reducing valve, Measure the amount of liquefied gas in each liquefied gas container, and set the difference between the remaining liquefied gas container in the remaining liquefied gas container and the remaining amount of liquefied gas in the other liquefied gas container. The amount of gas supplied from each liquefied gas container is controlled so as to be within, and the control of the gas supply amount stops only the gas supply from the liquefied gas container with the smallest remaining amount, When the total amount of the liquefied gas is reduced to a preset remaining amount lowering reference value, the gas supply from the liquefied gas container in which the gas supply is stopped is resumed . 複数の液化ガス容器から減圧弁を備えたガス供給管を介してガスを供給する液化ガス供給方法において、前記複数の液化ガス容器を前記減圧弁の一次側で連結配管で連結し、前記複数の液化ガス容器内の液化ガスの量をそれぞれ測定し、残量が最大の液化ガス容器に対して他の液化ガス容器内の液化ガスの残量との差があらかじめ設定された残量差の範囲内に収まるように各液化ガス容器からのガス供給量を制御し、前記ガス供給量の制御は、現在のガス供給量に見合う液化ガス容器の本数を算出し、残量が多い液化ガス容器から順に算出した本数分の液化ガス容器を選択してガス供給を行うことを特徴とする液化ガス供給方法。 In a liquefied gas supply method of supplying gas from a plurality of liquefied gas containers via a gas supply pipe provided with a pressure reducing valve, the plurality of liquefied gas containers are connected by a connecting pipe on a primary side of the pressure reducing valve, Measure the amount of liquefied gas in each liquefied gas container, and set the difference between the remaining liquefied gas container in the remaining liquefied gas container and the remaining amount of liquefied gas in the other liquefied gas container. The amount of gas supply from each liquefied gas container is controlled so that it falls within the range, and the control of the gas supply amount calculates the number of liquefied gas containers corresponding to the current gas supply amount, A method for supplying a liquefied gas, wherein the gas supply is performed by selecting liquefied gas containers corresponding to the calculated number in order .
JP2007185859A 2007-07-17 2007-07-17 Liquefied gas supply method and apparatus Active JP5111962B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007185859A JP5111962B2 (en) 2007-07-17 2007-07-17 Liquefied gas supply method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007185859A JP5111962B2 (en) 2007-07-17 2007-07-17 Liquefied gas supply method and apparatus

Publications (2)

Publication Number Publication Date
JP2009024727A JP2009024727A (en) 2009-02-05
JP5111962B2 true JP5111962B2 (en) 2013-01-09

Family

ID=40396724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007185859A Active JP5111962B2 (en) 2007-07-17 2007-07-17 Liquefied gas supply method and apparatus

Country Status (1)

Country Link
JP (1) JP5111962B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019095029A (en) * 2017-11-27 2019-06-20 大陽日酸株式会社 Gas supply device and gas supply method
JP2021181816A (en) * 2020-05-20 2021-11-25 大陽日酸株式会社 Liquid gas supply device and liquid gas supply method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6128874B2 (en) * 2013-02-08 2017-05-17 エア・ウォーター・プラントエンジニアリング株式会社 Liquefied gas supply apparatus and method
JP5968836B2 (en) * 2013-07-18 2016-08-10 大陽日酸株式会社 Gas supply system and method for controlling gas supply system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5193417A (en) * 1975-02-13 1976-08-16
JP2944611B2 (en) * 1998-02-19 1999-09-06 山形日本電気株式会社 Control method of gas supply device
JP3960524B2 (en) * 2002-03-13 2007-08-15 本田技研工業株式会社 Gas fuel supply device for vehicles
JP4552399B2 (en) * 2003-08-07 2010-09-29 トヨタ自動車株式会社 Tank system comprising multiple tanks and control method thereof
JP2006269330A (en) * 2005-03-25 2006-10-05 Suzuki Motor Corp Hydrogen supply device
JP5091539B2 (en) * 2007-05-17 2012-12-05 ルネサスエレクトロニクス株式会社 Liquefied gas supply system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019095029A (en) * 2017-11-27 2019-06-20 大陽日酸株式会社 Gas supply device and gas supply method
JP2021181816A (en) * 2020-05-20 2021-11-25 大陽日酸株式会社 Liquid gas supply device and liquid gas supply method
JP7271472B2 (en) 2020-05-20 2023-05-11 大陽日酸株式会社 Liquefied gas supply device and liquefied gas supply method

Also Published As

Publication number Publication date
JP2009024727A (en) 2009-02-05

Similar Documents

Publication Publication Date Title
JP5091539B2 (en) Liquefied gas supply system
EP2772677B1 (en) Bulk cryogenic liquid pressurized dispensing system and method
JP5111962B2 (en) Liquefied gas supply method and apparatus
JP6784711B2 (en) Liquefied gas supply device and liquefied gas supply method
NO327866B1 (en) A procedure for control and / or monitoring
JP2007255666A (en) Gas supply device and gas supply method
JP4950518B2 (en) Gas supply method and gas supply apparatus
JP2011174528A (en) Method for filling hydrogen gas in hydrogen gas packing equipment
KR20110106238A (en) Systems and methods for gas supply and usage
EP1333224A2 (en) Gas supply apparatus and gas supply method
JP5792608B2 (en) Liquefied gas supply apparatus and method
JP2008196687A (en) Low-temperature liquefied gas supply method and device
KR20130062086A (en) System for controlling the pcv
JP6128874B2 (en) Liquefied gas supply apparatus and method
JP7228983B2 (en) A BOG recondenser and LNG supply system comprising the same.
JP5507304B2 (en) Vaporized gas production system
TWI530639B (en) Liquefied gas supply device and method
WO2014083810A1 (en) Refrigerant cooling device and method
JP5295298B2 (en) Method for suppressing boil-off gas in liquefied gas storage equipment
TWI616612B (en) Heating control system and method for liquefied gas distribution system
JP6316606B2 (en) Gas holder
Kulitsa et al. Advances in Geo-Energy Research
JP6681423B2 (en) Operation method of liquefied gas vaporizer
JP5583820B2 (en) Method for suppressing boil-off gas in liquefied gas storage equipment
JP7271472B2 (en) Liquefied gas supply device and liquefied gas supply method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100621

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120517

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120522

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120702

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120731

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120906

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121002

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121010

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151019

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 5111962

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151019

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250