JP5108202B2 - 圧力センサを製造する方法及び圧力センサ - Google Patents
圧力センサを製造する方法及び圧力センサ Download PDFInfo
- Publication number
- JP5108202B2 JP5108202B2 JP2004378095A JP2004378095A JP5108202B2 JP 5108202 B2 JP5108202 B2 JP 5108202B2 JP 2004378095 A JP2004378095 A JP 2004378095A JP 2004378095 A JP2004378095 A JP 2004378095A JP 5108202 B2 JP5108202 B2 JP 5108202B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- measuring cell
- pressure sensor
- diaphragm
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/22—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip
- B22F3/225—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces for producing castings from a slip by injection molding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
- G01L7/082—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type construction or mounting of diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Description
Claims (11)
- 圧力負荷可能なダイヤフラム(14)を備えた圧力測定セル(30)と圧力を受容する受容体(2)とを備える圧力検出器(1)を有する圧力センサを製作する方法において、前記受容体(2)を金属粉末射出成型法とそれに続く焼結プロセスとによって一体に製作し、前記受容体(2)の前記金属粉末射出成型に際して、圧力測定セル(30)を受容するためのインサート部分(3)を圧密に鋳包みかつ内部に焼結し、前記圧力測定セル(30)は側壁(31)を備え、該側壁(31)は円弧部(24)に沿って前記側壁(31)に直角に配置されたダイヤフラム(14)に移行していることを特徴とする、圧力センサを製造する方法。
- 前記金属粉末射出成型を150から1000barの領域の圧力と140から190℃までの領域の温度で行なう、請求項1記載の方法。
- 焼結プロセスを1000から1400℃の領域の温度と大気圧とで行なう、請求項1又は2記載の方法。
- 圧力検出器(1)を圧力負荷された構成部分の壁に固定するための雄ねじ(5)が前記受容体(2)に製作される、請求項1から3までのいずれか1項記載の方法。
- 前記受容体(2)に6角フランジ(4)を構成する、請求項1から4までのいずれか1項記載の方法。
- 前記6角フランジ(4)に第1の溝(16)及び/又は第2の溝(18)を形成する、請求項5記載の方法。
- 前記第1の溝(16)と前記第2の溝(18)との溝底から溝壁への移行部を円弧部(25,26)として構成する、請求項6記載の方法。
- 当該圧力検出器(1)をねじ込む構成部分の壁に向いた側で前記6角フランジ(4)に溝(20)を形成して、圧力負荷された構成部分に当該圧力検出器(1)を取付ける場合に付加的なシールとして役立つ支持部(35)を形成する、請求項5から7までのいずれか1項記載の方法。
- 前記圧力センサが一体の受容体(2)を有しており、前記受容体(2)内に、前記圧力測定セル(30)を受容するためのインサート部分(3)が受容されており、前記圧力測定セル(30)は側壁(31)を備え、該側壁(31)は円弧部(24)に沿って前記側壁(31)に直角に配置されたダイヤフラム(14)に移行していることを特徴とする、請求項1から8までのいずれか1項記載の方法で製作された圧力センサ。
- 前記受容体(2)内に圧力測定セル(30)が構成されている、請求項9記載の圧力センサ。
- 前記圧力測定セル(30)が前記インサート部分(3)と形状接続的に結合されている、請求項9または10記載の圧力センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10361769.8 | 2003-12-29 | ||
DE10361769.8A DE10361769B4 (de) | 2003-12-29 | 2003-12-29 | Druckaufnehmer mit einteiligem Gehäuse |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005195590A JP2005195590A (ja) | 2005-07-21 |
JP5108202B2 true JP5108202B2 (ja) | 2012-12-26 |
Family
ID=34683930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004378095A Expired - Fee Related JP5108202B2 (ja) | 2003-12-29 | 2004-12-27 | 圧力センサを製造する方法及び圧力センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7134345B2 (ja) |
JP (1) | JP5108202B2 (ja) |
DE (1) | DE10361769B4 (ja) |
IT (1) | ITMI20042469A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102263026B1 (ko) * | 2019-12-30 | 2021-06-10 | 주식회사 현대케피코 | 압력센서 및 이의 제조방법 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005053062B4 (de) * | 2005-11-04 | 2011-02-10 | Ifm Electronic Gmbh | Drucksensor |
DE102006033266B4 (de) * | 2006-07-18 | 2009-12-31 | Trafag Ag | Profiliertes Bauelement aus Metall für Fluidumhüllungen sowie Verfahren zum Vorsehen eines Drucksensors daran |
JP2008157740A (ja) * | 2006-12-22 | 2008-07-10 | Matsushita Electric Works Ltd | 圧力センサ |
DE102007024247B3 (de) * | 2007-05-15 | 2008-11-06 | Lechler Gmbh | Hochdruckdüse und Verfahren zum Herstellen einer Hochdruckdüse |
US7798010B2 (en) * | 2007-10-11 | 2010-09-21 | Honeywell International Inc. | Sensor geometry for improved package stress isolation |
DE102008029192A1 (de) * | 2008-03-13 | 2009-09-24 | Epcos Ag | Fühler zum Erfassen einer physikalischen Größe und Verfahren zur Herstellung des Fühlers |
DE102008046515A1 (de) * | 2008-09-10 | 2010-03-18 | Continental Automotive Gmbh | Sensorgehäuse |
US9354132B2 (en) | 2009-02-12 | 2016-05-31 | Continental Automotive Systems, Inc. | Jointless pressure sensor port |
US8365605B2 (en) * | 2009-02-12 | 2013-02-05 | Continental Automotive Systems, Inc. | Jointless pressure sensor port |
DE102009054689A1 (de) | 2009-12-15 | 2011-06-16 | Robert Bosch Gmbh | Verfahren zum Herstellen einer Drucksensoranordnung sowie Drucksensoranordnung |
JP6554979B2 (ja) * | 2015-07-31 | 2019-08-07 | 株式会社デンソー | 圧力センサ |
DE102016225652A1 (de) * | 2016-12-20 | 2018-06-21 | Piezocryst Advanced Sensorics Gmbh | Verfahren zur Herstellung eines Sensorgehäuses für einen Kraft- oder Drucksensor sowie Sensorgehäuse, Kraft- oder Drucksensor und Verwendung einer additiven Fertigungsvorrichtung |
WO2022015477A1 (en) * | 2020-07-15 | 2022-01-20 | Sensata Technologies, Inc. | Ball and socket articulating tpm sensor |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61259134A (ja) * | 1985-05-14 | 1986-11-17 | Sumitomo Electric Ind Ltd | 半導体圧力センサ |
JPH01296130A (ja) * | 1988-05-24 | 1989-11-29 | Nissan Motor Co Ltd | 圧力センサ |
DE4026044A1 (de) * | 1990-08-17 | 1992-02-20 | Pfister Gmbh | Keramische hohlkoerper und verfahren zu deren herstellung |
JPH04370727A (ja) * | 1991-06-19 | 1992-12-24 | Fujikura Ltd | 半導体圧力センサの製造方法 |
JP3252539B2 (ja) * | 1993-07-02 | 2002-02-04 | 株式会社ニコン | 超音波アクチュエーター |
JPH08136379A (ja) * | 1994-11-07 | 1996-05-31 | Tec Corp | 薄膜ゲージ圧力計 |
WO1998009145A1 (de) * | 1996-08-27 | 1998-03-05 | Robert Bosch Gmbh | Verfahren zur herstellung von drucksensoren |
JP3682142B2 (ja) * | 1997-03-12 | 2005-08-10 | 長野計器株式会社 | 静電容量式の圧力センサ |
US6167761B1 (en) * | 1998-03-31 | 2001-01-02 | Hitachi, Ltd. And Hitachi Car Engineering Co., Ltd. | Capacitance type pressure sensor with capacitive elements actuated by a diaphragm |
DE19844556A1 (de) * | 1998-09-29 | 2000-04-27 | Bosch Gmbh Robert | Druckgeber |
US6328918B1 (en) * | 1999-03-04 | 2001-12-11 | Honeywell International Inc. | Low pressure injection molding of metal and ceramic threaded components |
DE10014992C2 (de) | 2000-03-25 | 2002-01-31 | Bosch Gmbh Robert | Sensoranordnung |
JP3502807B2 (ja) * | 2000-04-14 | 2004-03-02 | 長野計器株式会社 | 圧力センサ |
EP1281947A1 (de) * | 2001-08-03 | 2003-02-05 | Trafag AG | Hochdrucksensor und Verfahren zur Herstellung eines Hochdrucksensors |
-
2003
- 2003-12-29 DE DE10361769.8A patent/DE10361769B4/de not_active Expired - Fee Related
-
2004
- 2004-11-29 US US10/999,707 patent/US7134345B2/en active Active
- 2004-12-23 IT IT002469A patent/ITMI20042469A1/it unknown
- 2004-12-27 JP JP2004378095A patent/JP5108202B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102263026B1 (ko) * | 2019-12-30 | 2021-06-10 | 주식회사 현대케피코 | 압력센서 및 이의 제조방법 |
Also Published As
Publication number | Publication date |
---|---|
JP2005195590A (ja) | 2005-07-21 |
ITMI20042469A1 (it) | 2005-03-23 |
US7134345B2 (en) | 2006-11-14 |
DE10361769B4 (de) | 2014-10-23 |
US20050139008A1 (en) | 2005-06-30 |
DE10361769A1 (de) | 2005-07-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5108202B2 (ja) | 圧力センサを製造する方法及び圧力センサ | |
US8038345B2 (en) | Sensor plug for combined pressure and temperature measurement | |
US7434448B2 (en) | Sensor | |
US8429956B2 (en) | Pressure-measuring plug for a combustion engine | |
JP3691069B2 (ja) | 弁ハウジングを製造する方法 | |
US9574926B2 (en) | Measuring tube for a flow measuring device and flow measuring device | |
KR101860570B1 (ko) | 압력 측정 플러그 및 압력 감지 요소 | |
JP2005279778A (ja) | 肉厚の構成部材と肉薄の構成部材との間の溶接結合部ならびに内燃機関に用いられる燃料高圧ポンプ | |
US11493416B2 (en) | Measurement tube for a measuring device, measuring device formed by means of such a measurement tube, and production method for such a measurement tube | |
JP6736732B2 (ja) | ステンレス製の水量計ハウジングにおけるブランク材と加工方法、ステンレス製の水量計ハウジング及び水量計 | |
US20160025575A1 (en) | Adapter for Measuring a Physical Variable | |
CN103562697A (zh) | 压力传感器和用于制造压力传感器的方法 | |
EP2322988A1 (en) | Waterproof camera sealing device and sealing method thereof | |
CN103547914A (zh) | 传感器构件壳体 | |
JP2005221315A (ja) | 圧力センサ | |
US20120227496A1 (en) | Measuring Device | |
CN100442035C (zh) | 带有扁平的可焊接的连接元件的弹簧式弹性测量元件 | |
CN106468300B (zh) | 用于衬套的紧固方法 | |
JP2017187014A (ja) | 感温式弁機構 | |
JPS6333950B2 (ja) | ||
US20050062285A1 (en) | Hydraulic port weld stud | |
JPS631156Y2 (ja) | ||
JP4551845B2 (ja) | センサ装置およびロウ付け固定方法 | |
CN204128604U (zh) | 一种奥氏t巴流量计 | |
CN114264431B (zh) | 用于泄漏检测的压力参考装置、装配方法及压力传感器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20071225 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110107 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110407 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110412 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110509 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110512 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110607 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111104 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120206 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120209 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120328 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120907 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121005 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5108202 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151012 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |