JP5102816B2 - Gas analyzer with continuous concentration method - Google Patents

Gas analyzer with continuous concentration method Download PDF

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JP5102816B2
JP5102816B2 JP2009214083A JP2009214083A JP5102816B2 JP 5102816 B2 JP5102816 B2 JP 5102816B2 JP 2009214083 A JP2009214083 A JP 2009214083A JP 2009214083 A JP2009214083 A JP 2009214083A JP 5102816 B2 JP5102816 B2 JP 5102816B2
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真由美 松田
尚三 長沢
啓介 宇谷
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株式会社ジェイ・サイエンス・ラボ
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本発明は、分離フィルタを利用することで低濃度ガスを濃縮して分析するガス分析装置及び方法に関し、特に、濃縮器で連続的に濃縮して分析を行うことが可能なガス分析装置及び方法に関する。   The present invention relates to a gas analyzer and method for concentrating and analyzing a low-concentration gas by using a separation filter, and in particular, a gas analyzer and method capable of continuously concentrating and analyzing with a concentrator. About.

ガス分析装置の一例としてガスクロマトグラフ装置がある。ガスクロマトグラフによる測定装置は、例えば特許文献１に開示されている。そして、このガスクロマトグラフ測定において、サンプルガス中の検出対象ガスの濃度が低くて検出できない場合に、検出感度を向上させるために、サンプルガスを濃縮して検出対象ガスの濃度を高くして測定する。低濃度のサンプルガスを濃縮する器具は、例えば特許文献２に開示されている。   An example of the gas analyzer is a gas chromatograph device. A measuring apparatus using a gas chromatograph is disclosed in Patent Document 1, for example. In this gas chromatographic measurement, when the detection target gas concentration in the sample gas is low and cannot be detected, the sample gas is concentrated to increase the detection target gas concentration in order to improve the detection sensitivity. . An instrument for concentrating a low-concentration sample gas is disclosed in Patent Document 2, for example.

従来の濃縮器によれば、サンプルガスは、検出器に導入される前に、吸着剤を充填したトラップ管内を通過する。トラップ管は、液体窒素により極低温に冷却されており、サンプルガスがトラップ管内で凝縮される。その後、液体窒素からトラップ管を取り出し、トラップ管に外装されたヒータを加熱して、サンプルガスを吸着剤から分離する。これにより、サンプルガスは濃縮され、トラップ管に導入されるキャリヤーガスと共に分離カラムに導入される。   According to a conventional concentrator, the sample gas passes through a trap tube filled with an adsorbent before being introduced into the detector. The trap tube is cooled to a very low temperature by liquid nitrogen, and the sample gas is condensed in the trap tube. Thereafter, the trap tube is taken out from the liquid nitrogen, and the heater sheathed on the trap tube is heated to separate the sample gas from the adsorbent. Thereby, the sample gas is concentrated and introduced into the separation column together with the carrier gas introduced into the trap tube.

しかし、上記の濃縮器は、液体窒素やトラップ管、ヒータ等を用いるので非常に複雑で大掛かりな構成であって、操作も煩雑である。また、液体窒素などの冷媒はデュアー瓶での貯蔵が難しく、揮散するので随時補充しなければならず非常に煩雑である。また、上記の方式は、断続的な測定に適しており、連続的に濃縮サンプルガスを分析器に導入することができない。   However, the above-described concentrator uses liquid nitrogen, a trap tube, a heater, and the like, and thus has a very complicated and large-scale configuration and is complicated to operate. In addition, a refrigerant such as liquid nitrogen is difficult to store in a dewar and volatilizes, so it must be replenished at any time and is very complicated. Further, the above method is suitable for intermittent measurement, and the concentrated sample gas cannot be continuously introduced into the analyzer.

特開平５−９９９１０号公報JP-A-5-99910 特開平７−３１８０１号公報JP-A-7-31801

そこで、本発明が解決しようとする課題は、シンプルで操作や取り扱いが簡単な構造の濃縮器によって、サンプルガスを連続的に濃縮して測定することが可能なガス分析装置及び方法を提供することである。   Therefore, the problem to be solved by the present invention is to provide a gas analyzer and method capable of continuously concentrating and measuring a sample gas with a concentrator having a simple structure that is easy to operate and handle. It is.

上記課題を解決するために、本発明に係るガス分析装置は、
サンプルガスを濃縮器で濃縮して測定を行うガス分析装置において、濃縮器は、非多孔膜中空糸を多数本束ねた分離フィルタを備え、
分離フィルタは、収容管に収容されており、分離フィルタ（１２）の長手方向が収容管の長手方向に向けて配置され、
収容管は、その長手方向の一端にサンプルガスを供給するための供給流路と、その長手方向の他端に濃縮サンプルガスを排出する第１排出流路と、その外周面に透過ガスを排出する第２排出流路と、を備え、
第２排出流路は、一定速度で吸引する吸引ポンプと、吸引速度を可変するためのニードルバルブと、を備え、
サンプルガスは、分離フィルタを通過し、濃縮サンプルガスが第１排出流路から排出され、透過ガスが第２排出流路から排出され、濃縮サンプルガスを測定する。 In order to solve the above problems, a gas analyzer according to the present invention provides:
In a gas analyzer that performs measurement by concentrating sample gas with a concentrator, the concentrator includes a separation filter in which a large number of non-porous membrane hollow fibers are bundled ,
The separation filter is housed in the housing tube, the longitudinal direction of the separation filter (12) is arranged toward the longitudinal direction of the housing tube,
The storage tube has a supply channel for supplying sample gas to one end in the longitudinal direction, a first discharge channel for discharging concentrated sample gas to the other end in the longitudinal direction, and a permeate gas to the outer peripheral surface. A second discharge flow path,
The second discharge flow path includes a suction pump that sucks at a constant speed, and a needle valve for varying the suction speed,
The sample gas passes through the separation filter, the concentrated sample gas is discharged from the first discharge channel, the permeated gas is discharged from the second discharge channel, and the concentrated sample gas is measured.

好ましくは、濃縮サンプルガスは連続的に分析器に導入されて連続測定される。   Preferably, the concentrated sample gas is continuously introduced into the analyzer and continuously measured.

上記の通り、本発明に係るガス分析装置及び方法は、非多孔膜中空糸を多数本束ねた分離フィルタを備えた濃縮器を使用する。分離フィルタは非多孔膜中空糸で構成されているので、サンプルガスを分離フィルタに通過させることで、サンプルガス中における各気体を選択的に透過・不透過して分離する。   As described above, the gas analyzer and method according to the present invention uses a concentrator equipped with a separation filter in which a large number of non-porous membrane hollow fibers are bundled. Since the separation filter is composed of a non-porous membrane hollow fiber, each gas in the sample gas is selectively permeated and imperviously separated by passing the sample gas through the separation filter.

例えば、水素を主成分とするサンプルガス中におけるアルゴン、窒素等（検出対象ガス）を検出する場合、所定量の水素だけを分離フィルタに透過させて外側へ排出することで、分離フィルタの内側で水素中におけるアルゴン、窒素等（検出対象ガス）の濃度を高くできる。   For example, when detecting argon, nitrogen, etc. (detection target gas) in a sample gas containing hydrogen as a main component, only a predetermined amount of hydrogen permeates through the separation filter and is discharged to the inside. The concentration of argon, nitrogen, etc. (detection target gas) in hydrogen can be increased.

また逆に、アルゴン、窒素等を主成分とするサンプルガス中における水素（検出対象ガス）を検出する場合、分離フィルタに水素だけを外側に透過することによって、外側の水素（検出対象ガス）の濃度を高くできる。   Conversely, when detecting hydrogen (detection target gas) in a sample gas containing argon, nitrogen, or the like as a main component, by passing only hydrogen to the outside through the separation filter, the outer hydrogen (detection target gas) The concentration can be increased.

即ち、相対的にベースガスが低分子（例えば水素）中の微量高分子成分（例えばアルゴン、窒素）を濃縮して測定したり、ベースガスが高分子（例えばアルゴン、窒素）中の微量低分子成分（例えば水素）を濃縮して測定できるので、ベースガスが低分子・高分子の双方で濃縮測定可能となっている。   That is, a relatively small amount of a high molecular weight component (for example, argon, nitrogen) in a low molecular weight (for example, hydrogen) is measured, or a small amount of a low molecular weight in a high molecular weight (for example, argon, nitrogen) is measured. Since the component (for example, hydrogen) can be concentrated and measured, the base gas can be concentrated and measured for both low and high molecules.

このように、シンプルな構造の分離フィルタを用いてサンプルガスを濃縮できるので、操作及び取り扱いが非常に簡単なよう構成されている。さらに、サンプルガスを濃縮器に通過させて濃縮できるので、連続的に分析器に導入して連続測定を行うことができる。   As described above, since the sample gas can be concentrated using the separation filter having a simple structure, the operation and handling are very simple. Furthermore, since the sample gas can be concentrated by passing it through a concentrator, it can be continuously introduced into the analyzer for continuous measurement.

ガスクロマトグラフ装置の第１実施形態を示すブロック図である。It is a block diagram which shows 1st Embodiment of a gas chromatograph apparatus. 濃縮器を示す断面図である。It is sectional drawing which shows a concentrator. 非多孔膜中空糸を示す斜視図である。It is a perspective view which shows a non-porous membrane hollow fiber. ガスクロマトグラフ装置の第２実施形態を示すブロック図である。It is a block diagram which shows 2nd Embodiment of a gas chromatograph apparatus. ガスクロマトグラフ装置によって得られたクロマトグラムを示す図である。It is a figure which shows the chromatogram obtained by the gas chromatograph apparatus.

以下、図面に基づいて、本発明に係るガス分析装置及び方法について説明する。なお下記では、ガス分析装置及び方法について、ガスクロマトグラフ装置及び方法を適用して説明するが、ガスクロマトグラフ−質量分析計、ＮＯｘ計、ＳＯｘ計等その他のガス測定用分析器についても適用可能である。   The gas analyzer and method according to the present invention will be described below with reference to the drawings. In the following, the gas analyzer and method will be described by applying the gas chromatograph device and method. However, the present invention can also be applied to other gas measurement analyzers such as a gas chromatograph-mass spectrometer, NOx meter, and SOx meter. .

［第１実施形態］
先ず、ガスクロマトグラフ装置の第１実施形態について説明する。
図１の通り、ガスクロマトグラフ装置は、サンプルガスＳＧを濃縮するための濃縮器１を備える。サンプルガスＳＧは、例えば水素を主成分とする試料ガスである。サンプルガスＳＧは供給流路５ａを通じて濃縮器１へ供給される。供給流路５ａは、一定速度で一定流量のサンプルガスＳＧを計測して送るためのフローコントローラＦＣ及びストップバルブＳＴ１を備える。 [First Embodiment]
First, a first embodiment of a gas chromatograph apparatus will be described.
As shown in FIG. 1, the gas chromatograph apparatus includes a concentrator 1 for concentrating the sample gas SG. The sample gas SG is a sample gas mainly containing hydrogen, for example. The sample gas SG is supplied to the concentrator 1 through the supply channel 5a. The supply flow path 5a includes a flow controller FC and a stop valve ST1 for measuring and sending the sample gas SG having a constant flow rate at a constant speed.

図２の通り、濃縮器１は、円筒状の収容管１１を備えており、収容管１１に分離フィルタ１２が収納されている。分離フィルタ１２は、多数本の非多孔膜中空糸１０（図３）が平行に束ねられて構成されており、その長手方向が収納管１１の長手方向に向くように配置されている。   As shown in FIG. 2, the concentrator 1 includes a cylindrical storage tube 11, and a separation filter 12 is stored in the storage tube 11. The separation filter 12 is configured by bundling a large number of non-porous membrane hollow fibers 10 (FIG. 3) in parallel, and is arranged so that the longitudinal direction thereof faces the longitudinal direction of the storage tube 11.

図３の通り、非多孔膜中空糸１０は、空孔１０ａを備えた円筒状の膜１０ｂで構成されている。膜１０ｂはポリイミド等で構成されており、熱振動で生成する分子間隙によって、サンプルガスＳＧの主成分（例えば水素）を透過ガスＳＧ２として選択的に透過させるようになっている。   As shown in FIG. 3, the non-porous membrane hollow fiber 10 is composed of a cylindrical membrane 10b provided with pores 10a. The film 10b is made of polyimide or the like, and selectively transmits the main component (for example, hydrogen) of the sample gas SG as the permeating gas SG2 by molecular gaps generated by thermal vibration.

そして、図２の通り、収納管１１は、一端１ａが供給流路５ａに接続され、他端１ｂが第１排出流路５ｂに接続されている。これにより、供給流路５ａを通じて収納管１１に供給されたサンプルガスＳＧは、分離フィルタ１２における多数本の中空糸１０の空孔１０ａを通じて排出される。収納管１１は、外周面１ｃが第２排出流路７に接続されている。   As shown in FIG. 2, the storage tube 11 has one end 1a connected to the supply flow path 5a and the other end 1b connected to the first discharge flow path 5b. As a result, the sample gas SG supplied to the storage tube 11 through the supply channel 5 a is discharged through the holes 10 a of the multiple hollow fibers 10 in the separation filter 12. The storage tube 11 has an outer peripheral surface 1 c connected to the second discharge channel 7.

第２排出流路７は、吸引ポンプ４で吸引されている。従って、収納管１１に供給されたサンプルガスＳＧは、中空糸１０を通る際に、膜１０ｂを透過する所定量の透過ガスＳＧ２が第２排出流路７から排出される。これにより、サンプルガスＳＧは、所定量の主成分（例えば水素）が透過ガスＳＧ２として排出されるので、膜１０ｂを透過しない検出対象ガス（例えばアルゴン等）が多く含まれる濃縮された濃縮サンプルガス（分析ガス）ＳＧ１が第１排出流路５ｂから排出される。   The second discharge channel 7 is sucked by the suction pump 4. Accordingly, when the sample gas SG supplied to the storage tube 11 passes through the hollow fiber 10, a predetermined amount of permeated gas SG <b> 2 that permeates the membrane 10 b is discharged from the second discharge flow path 7. Thereby, since a predetermined amount of the main component (for example, hydrogen) is discharged as the permeation gas SG2, the sample gas SG is concentrated and concentrated sample gas containing a large amount of detection target gas (for example, argon) that does not pass through the membrane 10b. (Analysis gas) SG1 is discharged from the first discharge flow path 5b.

図１の通り、第２排出流路７は、透過ガスＳＧ２を一定速度で吸引する吸引ポンプ４と、濃縮率に応じて吸引速度を可変するニードルバルブＮＶ２とを備える。また、第１排出流路５ｂは、濃縮サンプルガスＳＧ１の濃縮量を調整するニードルバルブＮＶ１と、大気平衡を保つ大気平衡バルブＳＴ２とを備える。   As shown in FIG. 1, the second discharge channel 7 includes a suction pump 4 that sucks the permeate gas SG2 at a constant speed, and a needle valve NV2 that varies the suction speed according to the concentration rate. The first discharge channel 5b includes a needle valve NV1 that adjusts the concentration amount of the concentrated sample gas SG1, and an atmospheric balance valve ST2 that maintains atmospheric equilibrium.

また、図１の通り、測定前には、ストップバルブＳＴ３を制御して、濃縮器１に接続された流路６を通じてパージガスＰＧを流し、不要な空気成分等が残存している前ガスを取り除くためにパージする。   Further, as shown in FIG. 1, before the measurement, the stop valve ST3 is controlled, and the purge gas PG is caused to flow through the flow path 6 connected to the concentrator 1 so as to remove the previous gas in which unnecessary air components remain. Purge for.

そして、例えば、主成分ガス１０．０Ｌ／ｍｉｎに対して濃縮サンプルガスを１００ｍｌ／ｍｉｎにした場合、主成分ガス（透過ガスＳＧ２）は第２排出流路７から９．９Ｌ／ｍｉｎで排出され、濃縮サンプルガス(分析ガスＳＧ１)は第１排出流路５ｂから１００ｍｌ／ｍｉｎで排出される。ここで濃縮サンプルガス中には検出対象ガスが透過せずに残留するので、約１００倍の濃縮率で濃縮されることになる。なお、濃縮率は、サンプルガスＳＧの成分や検出器３の性能等に応じて、最も精度良く測定できる濃度にトライアルによって決定することができる。   For example, when the concentrated sample gas is 100 ml / min with respect to 10.0 L / min of the main component gas, the main component gas (permeate gas SG2) is discharged from the second discharge channel 7 at 9.9 L / min. The concentrated sample gas (analysis gas SG1) is discharged from the first discharge channel 5b at 100 ml / min. Here, since the detection target gas remains in the concentrated sample gas without passing through, it is concentrated at a concentration rate of about 100 times. The concentration rate can be determined by trial to a concentration that can be measured with the highest accuracy according to the components of the sample gas SG, the performance of the detector 3, and the like.

ガスクロマトグラフ装置は、サンプリングバルブＳＶ及び計量管ＳＬを備える。非測定時は、サンプリングバルブＳＶの流路は実線の状態になる。濃縮サンプルガスＳＧ１は、第１排出流路５ｂから導入され、計量管ＳＬを経てフローメータＦＭを通じて流路５ｅから廃棄される。キャリアガスＣＧは、流路５ｃを通じて制御弁ＰＲ及び圧力計ＰＭを経て、サンプリングバルブＳＶから流路５ｄを通じて分離カラム２に送られる。   The gas chromatograph apparatus includes a sampling valve SV and a measuring tube SL. At the time of non-measurement, the flow path of the sampling valve SV is in a solid line state. The concentrated sample gas SG1 is introduced from the first discharge channel 5b, and is discarded from the channel 5e through the flow meter FM via the measuring tube SL. The carrier gas CG is sent to the separation column 2 from the sampling valve SV through the flow path 5d through the control valve PR and the pressure gauge PM through the flow path 5c.

測定時（サンプルガス導入時）は、サンプリングバルブＳＶの流路は破線の状態になる。キャリアガスＣＧは、サンプリングバルブＳＶ及び計量管ＳＬを経て分離カラム２に流れる。計量管ＳＬにより採取された一定量の濃縮サンプルガスＳＧ１は、キャリアガスＣＧによって分離カラム２に送り込まれ、分離カラム２で分離した成分が検出器３により測定される。   At the time of measurement (when the sample gas is introduced), the flow path of the sampling valve SV is in a broken line state. The carrier gas CG flows to the separation column 2 through the sampling valve SV and the measuring pipe SL. A certain amount of concentrated sample gas SG1 collected by the measuring tube SL is sent to the separation column 2 by the carrier gas CG, and the components separated by the separation column 2 are measured by the detector 3.

［第２実施形態］
次に、図４の通り、ガスクロマトグラフ装置の第２実施形態について説明する。第２実施形態は、連続的に濃縮サンプルガスＳＧ１を測定できるよう構成されている。即ち、濃縮器１から排出された濃縮サンプルガスＳＧ１は、第１排出流路５ｂを通じて、サンプリングバルブＳＶ等を介することなく、検出器３に送り込まれ測定される。これにより、濃縮サンプルガスＳＧ１は、断片的な測定ではなく、連続的に測定を行うことが可能である。なお、第２実施形態では、連続的に測定するために、分離カラム２の代わりに流量制御用のキャピラリーチューブ（抵抗管）２’を備える。 [Second Embodiment]
Next, a second embodiment of the gas chromatograph apparatus will be described as shown in FIG. The second embodiment is configured to continuously measure the concentrated sample gas SG1. That is, the concentrated sample gas SG1 discharged from the concentrator 1 is sent to the detector 3 and measured through the first discharge channel 5b without passing through the sampling valve SV or the like. As a result, the concentrated sample gas SG1 can be measured continuously rather than in pieces. In the second embodiment, a capillary tube (resistance tube) 2 ′ for flow rate control is provided instead of the separation column 2 in order to perform continuous measurement.

また、被濃縮サンプルガスは１成分に限らず複数成分であっても、分離フィルタを介する非透過作用によって、濃縮サンプルガスを濃縮することができる。   Further, even if the sample gas to be concentrated is not limited to a single component but a plurality of components, the concentrated sample gas can be concentrated by the non-permeating action through the separation filter.

図５は、図１のガスクロマトグラフ装置によって得られたクロマトグラムの一例を示す。このデータでは、主成分は水素、低濃度測定成分としてＡｒ、Ｎ２、ＣＨ４、ＣＯが各々約２０ｐｐｍ含まれているサンプルガスについて測定した。濃縮率約２０倍で濃縮して測定した結果、Ａｒの測定値は約３９５ｐｐｍとなり、濃縮率に一致した（他成分も同様）。従って、ガスクロマトグラフの検出感度は一般的に１ｐｐｍ程度であるのに対し、検出下限値以下、例えば０．１ｐｐｍ以下の濃度であっても流量比率を２０〜１００倍に変えることによって簡単に濃縮率を上げ、測定可能な濃度範囲として測定することができる。濃縮率はサンプルガスの成分や検出器の性能等に応じて、また消費ガス流量を考慮した上、最も精度良く測定できる濃度にトライアルによって決定することができる。 FIG. 5 shows an example of a chromatogram obtained by the gas chromatograph apparatus of FIG. In this data, measurement was performed on a sample gas containing hydrogen as a main component and approximately 20 ppm of Ar, N 2 , CH 4 , and CO as low concentration measurement components. As a result of measurement after concentration at a concentration rate of about 20 times, the measured value of Ar was about 395 ppm, which coincided with the concentration rate (the same applies to other components). Therefore, while the detection sensitivity of gas chromatographs is generally about 1 ppm, even if the concentration is below the lower limit of detection, for example, 0.1 ppm or less, the concentration rate can be easily changed by changing the flow rate ratio to 20 to 100 times. Can be measured as a measurable concentration range. The concentration rate can be determined by trial according to the component of the sample gas, the performance of the detector, and the like, taking into account the consumption gas flow rate, to a concentration that can be measured with the highest accuracy.

１ 濃縮器
２ 分離カラム
２’ キャピラリーチューブ
３ 検出器
１ａ 収納管の一端
１ｂ 収納管の他端
１ｃ 収納管の外周面
１０ 非多孔膜中空糸
１１ 収容管
１２ 分離フィルタ
ＳＧ サンプルガス DESCRIPTION OF SYMBOLS 1 Concentrator 2 Separation column 2 'Capillary tube 3 Detector 1a One end 1b of a storage tube The other end 1c of a storage tube The outer peripheral surface 10 of a storage tube Non-porous membrane hollow fiber 11 Storage tube 12 Separation filter SG Sample gas

Claims (2)

サンプルガス（ＳＧ）を濃縮器（１）で濃縮して測定を行うガス分析装置において、
前記濃縮器（１）は、非多孔膜中空糸（１０）を多数本束ねた分離フィルタ（１２）を備え、
前記分離フィルタ（１２）は、収容管（１１）に収容されており、前記分離フィルタ（１２）の長手方向が前記収容管（１１）の長手方向に向けて配置され、
前記収容管（１１）は、その長手方向の一端（１ａ）に前記サンプルガス（ＳＧ）を供給するための供給流路（５ａ）と、その長手方向の他端（１ｂ）に濃縮サンプルガス（ＳＧ１）を排出する第１排出流路（５ｂ）と、その外周面（１ｃ）に透過ガス（ＳＧ２）を排出する第２排出流路（７）と、を備え、
前記第２排出流路（７）は、一定速度で吸引する吸引ポンプ（４）と、吸引速度を可変するためのニードルバルブ（ＮＶ２）と、を備え、
前記サンプルガス（ＳＧ）は、前記分離フィルタ（１２）を通過し、前記濃縮サンプルガス（ＳＧ１）が前記第１排出流路（５ｂ）から排出され、前記透過ガス（ＳＧ２）が前記第２排出流路（７）から排出され、前記濃縮サンプルガス（ＳＧ１）を測定することを特徴とするガス分析装置。 In a gas analyzer for measuring sample gas (SG) by concentrating it with a concentrator (1) ,
The concentrator (1) includes a separation filter (12) in which a large number of non-porous membrane hollow fibers (10) are bundled ,
The separation filter (12) is housed in the housing tube (11), and the longitudinal direction of the separation filter (12) is arranged toward the longitudinal direction of the housing tube (11),
The storage tube (11) includes a supply channel (5a) for supplying the sample gas (SG) to one end (1a) in the longitudinal direction and a concentrated sample gas (1b) to the other end (1b) in the longitudinal direction. SG1) is provided with a first discharge channel (5b), and an outer peripheral surface (1c) thereof is provided with a second discharge channel (7) for discharging permeate gas (SG2),
The second discharge channel (7) includes a suction pump (4) for suction at a constant speed, and a needle valve (NV2) for varying the suction speed,
The sample gas (SG) passes through the separation filter (12), the concentrated sample gas (SG1) is discharged from the first discharge channel (5b), and the permeate gas (SG2) is discharged to the second. A gas analyzer characterized by measuring the concentrated sample gas (SG1) discharged from the flow path (7) . 前記濃縮サンプルガス（ＳＧ１）は連続的に分析器（３）に導入されて連続測定されることを特徴とする請求項１に記載のガス分析装置。 The gas analyzer according to claim 1, wherein the concentrated sample gas (SG1) is continuously introduced into the analyzer (3) and continuously measured .
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