JP5065614B2 - 渦電流式膜厚計 - Google Patents
渦電流式膜厚計 Download PDFInfo
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- JP5065614B2 JP5065614B2 JP2006111841A JP2006111841A JP5065614B2 JP 5065614 B2 JP5065614 B2 JP 5065614B2 JP 2006111841 A JP2006111841 A JP 2006111841A JP 2006111841 A JP2006111841 A JP 2006111841A JP 5065614 B2 JP5065614 B2 JP 5065614B2
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- 238000001514 detection method Methods 0.000 claims description 74
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Description
また、前記熱シ−ルドにスリットを設けたので、前記熱シ−ルドでの渦電流の前記ブリッジ回路出力への影響は小さくなった。
また、前記参照コイル近くにも前記熱シ−ルドと同じ形状のダミ−を置くので、前記熱シ−ルドの前記ブリッジ回路出力への影響は相殺される。
図1及び2の構成に関する例を述べる。熱シールド5による感度低下を簡略化したモデル(図14)で見積もった。
10・・・インダクタンスブリッジ(ブリッジ)、14・・・基準抵抗、15・・・基準抵抗、
20・・・渦電流センサ−(渦電流式膜厚計)、21・・・並列接続点、22・・・並列接続点、23・・・接続中点、24・・・接続中点、26・・・交流電圧源、27・・・測定回路
30・・・レ−ザ変位センサ−、
50・・・基板、51・・・導電膜、
71・・・渦電流センサ−(渦電流式膜厚計)、72・・・本体部、72a・・・凹部、73・・・平面コイル(検出コイル)、74・・・平面コイル(参照コイル)
91・・・膜厚測定装置、92・・・測定部、92a・・・支持部、93・・・駆動系(移動機構)、93a・・・基板ステ−ジ、94・・・コンピュ−タ、95・・・インダクタンスメ−タ、96・・・レ−ザセンサコントロ−ラ、
Claims (4)
- 参照コイルと検出コイルが直列に接続された回路と、2個の基準抵抗が直列に接続されたインダクタンスブリッジを用い、測定対象物の表面に形成された導電膜の近傍の所定の位置に配置可能に構成され、前記参照コイルよりも前記検出コイルを前記導電膜に近接した位置に配置可能であり、前記導電膜に対して所定の渦電流を発生させ且つ当該渦電流による磁界を検出する渦電流式膜厚計であって、
前記検出コイルと前記測定対象物との間に配置された熱シールドと、前記参照コイルと前記測定対象物との間に配置され前記熱シールドに対応する形状のダミーとを有し、
前記熱シールド及び前記ダミーはそれぞれ、複数のスリットによって分割された複数の導電性の切片の集合体で構成されることを特徴とする渦電流式膜厚計。 - 前記熱シ−ルドに接続された熱浴を有することを特徴とする請求項1に記載の渦電流式膜厚計。
- 前記熱シ−ルドと前記ダミーが導電性の材料からなる厚膜を有することを特徴とする請求項1又は2に記載の渦電流式膜厚計。
- 前記熱シ−ルドと前記ダミーの厚膜の導電性の材料が前記測定対象物表面の導電膜と同じ材料であることを特徴とする請求項3に記載の渦電流式膜厚計。
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JP5065614B2 true JP5065614B2 (ja) | 2012-11-07 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5513821B2 (ja) * | 2009-09-17 | 2014-06-04 | 株式会社荏原製作所 | 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法 |
JP2011247631A (ja) * | 2010-05-24 | 2011-12-08 | Jtekt Corp | 渦電流検出方法および渦電流検出センサ |
JP5481755B2 (ja) * | 2011-05-06 | 2014-04-23 | レーザーテック株式会社 | 反り測定装置、及び反り測定方法 |
JP5866890B2 (ja) * | 2011-09-06 | 2016-02-24 | 株式会社ジェイテクト | 渦電流検出方法および渦電流検出装置 |
JP6445241B2 (ja) * | 2014-03-13 | 2018-12-26 | 株式会社荏原製作所 | 渦電流センサ |
CN106441068A (zh) * | 2016-10-31 | 2017-02-22 | 天津因科新创科技有限公司 | 一种用于壁厚检测的脉冲涡流传感器 |
CN109668504B (zh) * | 2018-10-25 | 2020-11-17 | 合肥工业大学 | 一种适用于强电磁场干扰的电涡流位移传感探头及电桥电路 |
CN110133318A (zh) * | 2019-06-06 | 2019-08-16 | 哈尔滨工程大学 | 超高温电涡流传感器 |
CN113267118B (zh) * | 2021-06-23 | 2022-05-17 | 东南大学 | 一种半导体导电薄膜厚度在线测试结构及其测试方法 |
CN114152184A (zh) * | 2021-11-27 | 2022-03-08 | 北京工业大学 | 一种双层磁屏蔽式脉冲涡流传感器 |
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JPS59214758A (ja) * | 1983-05-20 | 1984-12-04 | Daido Steel Co Ltd | 熱間材渦流探傷用プロ−ブ |
FR2572175A1 (fr) * | 1984-10-24 | 1986-04-25 | Stein Heurtey | Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur |
JPS62225947A (ja) * | 1986-03-26 | 1987-10-03 | Kobe Steel Ltd | 渦流測定用プロ−ブ |
JPS62225903A (ja) * | 1986-03-27 | 1987-10-03 | Kobe Steel Ltd | ライナ被覆管の厚み測定装置 |
JPH0687444B2 (ja) * | 1986-12-22 | 1994-11-02 | 株式会社東芝 | 磁気共鳴映像装置 |
JPS6441855A (en) * | 1987-08-07 | 1989-02-14 | Hitachi Ltd | Eddy current flaw detector |
JPS6454347A (en) * | 1987-08-26 | 1989-03-01 | Honda Motor Co Ltd | Method for inspecting fiber reinforced composite layer by electromagnetic induction |
JP2651003B2 (ja) * | 1989-02-18 | 1997-09-10 | 古河電気工業株式会社 | 渦電流式変位センサ |
JPH03145104A (ja) * | 1989-10-30 | 1991-06-20 | Shimadzu Corp | 核磁気共鳴断層撮影装置における超電導マグネット用容器 |
DE4126921C2 (de) * | 1991-08-14 | 1996-01-18 | Elmeg | Vorrichtung zur induktiven Messung der Lage eines Metallbandes |
DE4402463C2 (de) * | 1994-01-28 | 1998-01-29 | Amepa Eng Gmbh | Vorrichtung zur diskontinuierlichen Erfassung der Dicke einer Schicht auf einer Metallschmelze |
JPH07303619A (ja) * | 1994-05-12 | 1995-11-21 | Ge Yokogawa Medical Syst Ltd | Mri装置における渦電流補正方法およびmri装置 |
JP2000046509A (ja) * | 1998-07-27 | 2000-02-18 | Nisshin Steel Co Ltd | スラグ厚み測定装置 |
ES2223151T3 (es) * | 1998-09-03 | 2005-02-16 | Georgsmarienhutte Gmbh | Dispositivo para el ensayo no destructivo de materiales, en especial de material laminado caliente y en forma de barras. |
JP4874465B2 (ja) * | 2000-03-28 | 2012-02-15 | 株式会社東芝 | 渦電流損失測定センサ |
JP2002075827A (ja) * | 2000-08-29 | 2002-03-15 | Nikon Corp | X線投影露光装置およびx線投影露光方法および半導体デバイス |
JP4467760B2 (ja) * | 2000-11-07 | 2010-05-26 | 株式会社アルバック | 膜厚測定方法 |
JP2002365007A (ja) * | 2001-06-07 | 2002-12-18 | Nippon Soken Inc | 磁気センサ |
JP4451111B2 (ja) * | 2003-10-20 | 2010-04-14 | 株式会社荏原製作所 | 渦電流センサ |
JP2005300352A (ja) * | 2004-04-12 | 2005-10-27 | Toyota Gakuen | 熱定数測定装置 |
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