JP5065078B2 - ドライアイススノー洗浄装置および方法 - Google Patents
ドライアイススノー洗浄装置および方法 Download PDFInfo
- Publication number
- JP5065078B2 JP5065078B2 JP2008036751A JP2008036751A JP5065078B2 JP 5065078 B2 JP5065078 B2 JP 5065078B2 JP 2008036751 A JP2008036751 A JP 2008036751A JP 2008036751 A JP2008036751 A JP 2008036751A JP 5065078 B2 JP5065078 B2 JP 5065078B2
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- JP
- Japan
- Prior art keywords
- dry ice
- carbon dioxide
- injection
- ice snow
- dioxide gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims description 274
- 235000011089 carbon dioxide Nutrition 0.000 title claims description 82
- 238000004140 cleaning Methods 0.000 title claims description 34
- 238000000034 method Methods 0.000 title claims description 10
- 238000002347 injection Methods 0.000 claims description 106
- 239000007924 injection Substances 0.000 claims description 106
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 96
- 239000001569 carbon dioxide Substances 0.000 claims description 96
- 238000005507 spraying Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 99
- 238000001816 cooling Methods 0.000 description 16
- 238000009833 condensation Methods 0.000 description 9
- 230000005494 condensation Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 230000004044 response Effects 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
- B24C3/322—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0046—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a gaseous carrier
- B24C7/0053—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a gaseous carrier with control of feed parameters, e.g. feed rate of abrasive material or carrier
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
2:流通管
3:オリフィス
4:噴射ガス供給管
6:供給路
7:断熱材
8:炭酸ガス供給弁
9:圧力ゲージ
12:圧力調整弁
13:圧力ゲージ
14:噴射ガス供給弁
15:一次ヒータ
16:温度計
17:温度コントローラ
18:二次ヒータ
19:温度計
20:温度コントローラ
Claims (6)
- 加圧液化炭酸ガスを断熱膨張させることにより形成されたドライアイススノーを噴射ノズルから被洗浄物に対して噴射して洗浄をする装置であって、
加圧液化炭酸ガスの供給を開閉する供給バルブと、上記供給バルブから供給された液化炭酸ガスを断熱膨張させる絞り部と、上記絞り部から噴射ノズルに至る流通管とを備え、
上記供給バルブの弁座から絞り部までの流路の内容積が0.58cm3以下となるよう設定されていることを特徴とするドライアイススノー洗浄装置。 - 上記供給バルブを閉じてから噴射ノズルからのドライアイススノーの噴射が認められなくなるまでの時間が1秒以内である請求項1記載のドライアイススノー洗浄装置。
- 上記絞り部の開口面積を0.007mm2以上0.032mm2以内となるよう設定した請求項1または2記載のドライアイススノー洗浄装置。
- 液化炭酸ガスの供給圧力を7MPa±1MPa以内となるよう設定した請求項1〜3のいずれか一項に記載のドライアイススノー洗浄装置。
- 上記噴射ノズルの噴射口近傍に噴射ガスを供給する噴射ガス供給管が上記流通管とは熱的に隔離された状態で存在している請求項1〜4のいずれか一項に記載のドライアイススノー洗浄装置。
- 加圧液化炭酸ガスを断熱膨張させることにより形成されたドライアイススノーを噴射ノズルから被洗浄物に対して噴射して洗浄をする方法であって、
加圧液化炭酸ガスの供給を開閉する供給バルブから供給された液化炭酸ガスを絞り部で断熱膨張させ、上記絞り部から噴射ノズルに至る流通管内を流通させて噴射ノズルより噴射する際、上記供給バルブの弁座から絞り部までの流路の内容積を0.58cm3以下としたことを特徴とするドライアイススノー洗浄方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008036751A JP5065078B2 (ja) | 2008-02-19 | 2008-02-19 | ドライアイススノー洗浄装置および方法 |
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JP2008036751A JP5065078B2 (ja) | 2008-02-19 | 2008-02-19 | ドライアイススノー洗浄装置および方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009195762A JP2009195762A (ja) | 2009-09-03 |
JP5065078B2 true JP5065078B2 (ja) | 2012-10-31 |
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JP2008036751A Active JP5065078B2 (ja) | 2008-02-19 | 2008-02-19 | ドライアイススノー洗浄装置および方法 |
Country Status (1)
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JP (1) | JP5065078B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6897179B2 (ja) * | 2017-03-10 | 2021-06-30 | 株式会社デンソー岩手 | ドライアイス洗浄装置 |
DE102019118717A1 (de) * | 2019-07-10 | 2021-01-14 | acp systems AG | Verfahren zum Erzeugen eines CO2-Schnee-Strahls |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4806171A (en) * | 1987-04-22 | 1989-02-21 | The Boc Group, Inc. | Apparatus and method for removing minute particles from a substrate |
JPH06182306A (ja) * | 1992-12-22 | 1994-07-05 | Ebara Corp | 部材表面の洗浄方法及び装置 |
JP4578644B2 (ja) * | 1999-10-13 | 2010-11-10 | 大陽日酸株式会社 | ドライアイススノー噴射洗浄装置と洗浄方法 |
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