JP5064210B2 - 電子モジュール及びその製造方法 - Google Patents
電子モジュール及びその製造方法 Download PDFInfo
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- JP5064210B2 JP5064210B2 JP2007510062A JP2007510062A JP5064210B2 JP 5064210 B2 JP5064210 B2 JP 5064210B2 JP 2007510062 A JP2007510062 A JP 2007510062A JP 2007510062 A JP2007510062 A JP 2007510062A JP 5064210 B2 JP5064210 B2 JP 5064210B2
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- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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- Y10T29/49204—Contact or terminal manufacturing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49204—Contact or terminal manufacturing
- Y10T29/49208—Contact or terminal manufacturing by assembling plural parts
- Y10T29/49218—Contact or terminal manufacturing by assembling plural parts with deforming
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- Production Of Multi-Layered Print Wiring Board (AREA)
Description
例えばマイクロプロセッサ又はメモリ回路のような埋め込み構成要素は、例えば何十何百もの接点端子を具えることがあり、回路の大きさの意味で、接点端子を構成要素の両側に製造することが有利であることが多い。本発明による電子モジュールでは、モジュールが薄く構成要素及び電子モジュールの表面領域が共に有効利用可能な際には、こうした両面型構成要素を利用することができる。
段階Aでは、適切な導体層4をプロセスのための出発材料として選択する。導体層4が支持ベース12の表面上に配置された層状シートも出発材料として選択することができる。層状シートは例えば、処理に適した支持ベース12を用意し、適切な導体膜をこの支持ベース12の表面に取り付けて導体層4を作製することによって製造することができる。
段階Bでは、接着層5が、導電層4上の構成要素6が取り付けられる領域内に展開される。これらの領域を接続領域と称する。接着層5は、例えばスルーホール3を用いることによって位置合わせすることができる。接着層の厚さは、構成要素6を接着層5上に押圧する際に、接着剤が構成要素6と導体層4と間の空間を完全に満たすような厚さに選択する。構成要素6が接触突起7を有する場合には、構成要素6と導体層4との間の空間が良好に満たされるよう、接着層5の厚さを接触突起7の高さの例えば1.5〜10倍にすべきである。構成要素6用に形成される接着層5の表面積は、構成要素6に相当する表面積より僅かに大きくすることもでき、これにより、不適切な充填の恐れを減らすことにも役立つ。
段階Cでは、構成要素6を電子モジュールの定位置に配置する。このことは、例えば構成要素6を接着層5中に押し込む組立機械を用いることによって行うことができる。組み立て段階では、位置合わせ用に作製されたスルーホール3又は他の利用可能な位置合わせマークを用いて構成要素6を位置合わせする。
図4では、構成要素6を導体層4に接着するための既製のホール2又は凹部が存在する絶縁材料層1が、導体層4上に配置される。絶縁材料層1は適切なポリマー基材から製造することができ、絶縁材料層1内のホール又は凹部は、構成要素6の大きさ及び位置に応じて選択し、何らかの適切な方法を用いて作製する。このポリマー基材は例えばプリプレグ基材とすることができ、プリプレグ基材は回路基板産業において知られ、広範に使用され、グラスファイバマット及び所謂b−ステート・エポキシから作製される。段階Dは、接着層5が硬化しきるか、さもなければ絶縁材料層1が定位置に配置されている間に構成要素6が定位置に留まるよう十分固まった後に初めて実行することが最良である。
一実施例によれば、段階Eでは、パターン化されていない絶縁材料層11が絶縁材料層1上に設定され、次に導体層9がその上に設定される。絶縁材料層1のように、絶縁材料層11も例えば前述したプリプレグ基材のような適切なポリマー基材から作製することができる。導体層9は、例えば銅箔、あるいは目的に適う他の膜とすることができる。絶縁材料層11は、接点端子7’と導体層9との間の距離が大きくならないよう薄くすることが好ましく、この場合には、後の段階における絶縁材料層9を貫くホール17の作製及び導体層の配置が促進される。
段階Fでは、層1及び9、並びにこれらの層間に残る層11は、(層1及び11内の)ポリマーが、一体化され強固で耐久性のある層を形成するように、熱及び圧力を用いて加圧され、この層は、導体層4と9との間にある構成要素6の周囲で構成要素6を良好に保護する。この手順は、第2導体層9を非常に均一かつ平坦にする。しかしながら、この方法は平坦でない電子モジュールの製造にも適用することができる。
段階Gでは、支持ベース12を構造から取り外すか、さもなければ除去される。この除去は、例えば機械的に、あるいはエッチングによって行うことができる。支持ベース12を使用しない実施例では当然、段階Gを省略することができる。従って次の段階の始めには、ベースの両側は同じになる。
段階Hでは、接触バイア用のホール17を作製する。ホール17はベースの両側に作製し、構成要素の接点端子7及び7’が露出するように、導体層4及び9、及び必要ならば接着剤層5を貫くように作製する。段階Aにおいて接触ホール2が導体層4内に作製されており、接点端子7の導体材料がむき出しである場合には、ベースのこの側にはホール17を作製することは必須ではない。ホール17は、例えばレーザーを用いた穿孔によって作製することができる。ホール17は、例えばホール3又は2を用いて位置合わせすることができる。
段階Iでは、導体材料18をホール17内、及び段階Hにおいて作製され存在し得るホール23中に成長させてバイアを作製する。この例のプロセスでは、ベース上の他の部分でも導体材料を同時に成長させ、このため導体層4及び9の厚さも増加する。
段階Jでは、ベース表面上に所望の導体パターン14及び19を、導体層4及び9から作製する。導体パターン14及び19は、導体層4及び9の導体材料を導体パターンの外側から除去することによって作製することができる。この導体材料は、例えばエッチングのような、回路基板産業で広範に使用され周知であるパターン化及びエッチング法を用いて除去することができる。
Claims (17)
- 対向する2つの面を有する絶縁材料層(1)を有する電子モジュールであって、前記電子モジュールは、第1接点端子(7)が存在する第1接触面を有する少なくとも1つの埋め込み構成要素(6)を含み、前記構成要素(6)は、前記第1接点端子から前記電子モジュール内に含まれる導体構造に電気的に接続され、前記構成要素(6)は、前記第1接触面の反対側に第2接触面を有し、前記第2接触面内に少なくとも1つの第2接点端子(7’)が存在し、前記構成要素(6)は、前記少なくとも1つの第2接点端子(7’)から前記電子モジュール内に含まれる導体構造に電気的に接続され、前記第1接点端子(7)は、前記絶縁材料層(1)の第1面上に配置された導体構造(14)に電気的に接続され、前記少なくとも1つの第2接点端子は、前記絶縁材料層内に作製された接触ホール(17)内に配置された導体材料を用いて、前記絶縁材料層(1)の第2面上に配置された導体構造(19)に電気的に接続されている電子モジュールにおいて、
前記絶縁材料層(1)は、本質的に同一材料から成る一体化された層であり、前記第2接点端子(7‘)の接触面から前記絶縁材料層(1)の前記第2面上に配置された前記導体構造(19)までの距離が、前記接触ホール(17)の径より小さいことを特徴とする電子モジュール。 - 前記絶縁材料層は、硬化していないかあるいは事前に硬化させた少なくとも1つのポリマーを含む材料層を硬化させることによって形成されることを特徴とする請求項1に記載の電子モジュール。
- 前記第2接点端子(7‘)から、前記絶縁材料層(1)の前記第2面上に配置されパターン化された前記導体構造(19)までの距離が、一般に最大50μm、好適には最大30μmであることを特徴とする請求項1または2に記載の電子モジュール。
- 前記絶縁材料層(1)の前記第2面に設けられた少なくとも1つのバイアが、例えば半導体材料である前記構成要素(6)の本体材料と前記絶縁材料層の前記第2面上の前記導体構造(19)との間に電気接触を形成して、例えば接地接触を生成することを特徴とする請求項1〜3のいずれかに記載の電子モジュール。
- 前記導体構造(14、19)が、バイア(23)を通して電気的に相互に接続されて、全体としての動作を生成することを特徴とする請求項1〜4のいずれかに記載の電子モジュール。
- 前記第1面上の前記導体構造(14)は、前記絶縁材料層(1)の前記第1面上に配置されパターン化された1つ以上の導体層(4)を含み、前記第2面の前記導体構造(19)は、前記絶縁材料層(1)の前記第2面上に配置されパターン化された1つ以上の導体層(9)を含むことを特徴とする請求項1〜5のいずれかに記載の電子モジュール。
- 前記第1接点端子(7)の接触面から前記絶縁材料層(1)の前記第1面上に配置された前記導体構造(14)までの距離が、前記接触ホール(17)の径より小さく、一般に最大50μm、好適には最大30μmであることを特徴とする請求項1〜6のいずれかに記載の電子モジュール。
- 前記第2接点端子(7‘)が少なくとも2個、好適には少なくとも4個存在することを特徴とする請求項1〜7のいずれかに記載の電子モジュール。
- 前記少なくとも1つの第2接点端子(7’)を通して、接地面電位、信号電圧、または電源電圧が前記構成要素(6)に与えられることを特徴とする請求項1〜8のいずれかに記載の電子モジュール。
- 電子モジュールを製造する方法であって、第1接点端子(7)が存在する第1接触面を有する少なくとも1つの構成要素(6)が、対向する2つの面を具えた絶縁材料層(1)の内部に埋め込まれ、前記構成要素(6)を前記接点端子(7)から前記電子モジュール内に含まれる導体構造に電気的に接続する接触を形成し、前記構成要素(6)は、少なくとも1つの第2接点端子(7’)が存在する接触面を前記第1接触面の反対側に有し、前記構成要素(6)を前記第2接点端子(7’)から前記電子モジュール内に含まれる前記導体構造に電気的に接続する接触を形成し、前記絶縁材料層の第1面上に第1導体層(4)を配置し、前記絶縁材料層の第2面上に第2導体層(9)を配置し、前記構成要素(6)の前記少なくとも1つの第2接点端子(7‘)を、前記絶縁材料層の前記第2面に設けた接触ホール(17)内に配置した導体材料を用いて、前記第2導体層(9)に電気的に接続する電子モジュールの製造方法において、
前記絶縁材料層(1)は、本質的に同一材料から成る一体化された層であり、前記第2接点端子(7‘)の接触面から前記絶縁材料層(1)の前記第2面上に配置されパターン化された前記導体構造(19)までの距離が、前記接触ホール(17)の径より小さいことを特徴とする電子モジュールの製造方法。 - 前記絶縁材料層(1)の前記第1面上に前記導体層(4)を配置する前に、接触ホール(2)及び/または位置合わせホール(3)を前記導体層(4)内に作製することを特徴とする請求項10に記載の方法。
- 前記構成要素(6)の前記第1接触面を前記導体層(4)に接着することを特徴とする請求項10または11に記載の方法。
- 前記構成要素(6)を接着した後に、前記絶縁材料層(1、11)の少なくとも一部を前記電子モジュール上に配置することを特徴とする請求項12に記載の方法。
- 前記絶縁材料層(1、11)が少なくとも2つの別個の材料のシートから成り、これらのシートを互いに圧着して一体化された単一の絶縁材料層(1)を形成することを特徴とする請求項10〜13のいずれかに記載の方法。
- バイア(23)を作製して前記導体層(4、9)を互いに電気的に接続することを特徴とする請求項10〜14のいずれかに記載の方法。
- 前記第2接点端子(7’)が少なくとも2個、好適には少なくとも4個存在することを特徴とする請求項10〜15のいずれかに記載の方法。
- 少なくとも1つの前記第2接点端子(7’)を通して、接地面電位、信号電圧、または電源電圧が前記構成要素(6)に与えられることを特徴とする請求項10〜16のいずれかに記載の方法。
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US7719851B2 (en) | 2010-05-18 |
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US20100214750A1 (en) | 2010-08-26 |
CN101027948A (zh) | 2007-08-29 |
US20080192450A1 (en) | 2008-08-14 |
US8351214B2 (en) | 2013-01-08 |
WO2005104636A1 (en) | 2005-11-03 |
JP2007535157A (ja) | 2007-11-29 |
GB2429848B (en) | 2008-01-30 |
GB2429848A (en) | 2007-03-07 |
DE112005000952T5 (de) | 2007-04-05 |
CN101027948B (zh) | 2011-08-03 |
FI20041680A (fi) | 2005-10-28 |
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