JP5039557B2 - シリコン−オン−インシュレータの半導体デバイスを形成する方法 - Google Patents
シリコン−オン−インシュレータの半導体デバイスを形成する方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 49
- 239000012212 insulator Substances 0.000 title claims description 11
- 239000004065 semiconductor Substances 0.000 title description 63
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 118
- 229910052710 silicon Inorganic materials 0.000 claims description 118
- 239000010703 silicon Substances 0.000 claims description 118
- 239000000758 substrate Substances 0.000 claims description 83
- 239000013078 crystal Substances 0.000 claims description 64
- -1 oxygen ions Chemical class 0.000 claims description 10
- 229910021332 silicide Inorganic materials 0.000 claims description 10
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 10
- 125000001475 halogen functional group Chemical group 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 8
- 238000000407 epitaxy Methods 0.000 claims description 4
- 239000007943 implant Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 118
- 230000015572 biosynthetic process Effects 0.000 description 33
- 229910052581 Si3N4 Inorganic materials 0.000 description 15
- 229920001296 polysiloxane Polymers 0.000 description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 15
- 239000002019 doping agent Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 238000005530 etching Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- 238000002513 implantation Methods 0.000 description 11
- 238000005468 ion implantation Methods 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 8
- 150000004767 nitrides Chemical class 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000011982 device technology Methods 0.000 description 2
- OKZIUSOJQLYFSE-UHFFFAOYSA-N difluoroboron Chemical compound F[B]F OKZIUSOJQLYFSE-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 210000002381 plasma Anatomy 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/78654—Monocrystalline silicon transistors
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- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
- Element Separation (AREA)
- Recrystallisation Techniques (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
さらに、この業界において、SOI技術および完全空乏化MOSFET技術を含む半導体装置を形成する方法が本技術に求められている。さらに、SOI技術および同一基板上に異なる結晶方位を有するシリコン上に形成されたMOSFETを形成する方法が求められている。さらに、SOI技術、完全空乏型MOSFET技術、および、同一基板上に形成された異なる結晶方位を有するシリコン上に形成されたMOSFETを形成する方法が求められている。
基板12は、典型的にはシリコンウェハである。絶縁層14は埋め込み酸化物(BOX)層である。図1に示しているように、SOI構造10は、SIMOX、スマートカット(登録商標)、あるいはウェハボンディング技術などの従来の技術によって形成され得る。他の形態では、SOIウェハは、Ibisテクノロジー社などの商業的供給源から入手可能である。本発明のある実施形態では、シリコンウェハ層16の層厚は約30nm以下であり、そのために、完全空乏型SOIデバイスの製造が可能になる。本発明のある実施形態では、BOX層14の層厚は約50nm〜約400nmである。本発明のある実施形態では、BOX層14の層厚は約200nm〜約300nmである。
(a)テトラエチルオルトシリケート(tetraethylorthosilicate)低圧化学蒸着(TEOSLPCVD)、
(b)非表面感受性TEOSオゾン大気圧化学蒸着法あるいは準大気圧化学蒸着法(APCVDあるいはSACVD)
(c)シラン酸化高密度プラズマCVD
が挙げられる。
本発明のある実施形態では、SOI構造70は、<100>結晶方位を有するシリコン基板72と、<110>結晶方位を有するシリコン層とを含む。本発明の他の実施形態では、基板72は<110>結晶方位を有するシリコンを含み、一方でシリコン層76は<100>結晶方位を有するシリコンを含む。ハイブリッド基板はウェハボンディング技術によって準備することができる。この技術において、<100>結晶方位を有する第1のシリコン基板が<110>結晶方位を有するシリコン基板に結合される。本発明のある実施形態では、シリコン層76は約30nm〜約100nmの層厚に、BOX層74は約200nm〜約300nmの範囲の層厚に形成される。
Claims (13)
- シリコン−オン−インシュレータ構造を提供するステップを含み、前記構造は基板、前記基板を覆うシリコン層と、前記基板とシリコン層との間に設けられた第1絶縁層とを含むものであり、
前記シリコン−オン−インシュレータ構造の第1領域に、前記シリコン層と前記第1絶縁層の一部を取り除くことによって開口部を形成し、前記基板層の一部をさらすステップと、
前記開口部にエピタキシャルシリコンを選択的に成長させるステップと、
前記第1領域の前記開口部に成長した前記シリコンに第2絶縁層を形成し、前記開口部に成長したシリコンと基板との間に絶縁層を提供するステップと、を含み、前記第1領域における前記第2絶縁層の層厚は、前記構造の第2領域における前記第1絶縁層の層厚よりも薄いものであって、
前記第1領域に一部空乏型MOSFETを形成し、前記第2領域に完全空乏型MOSFETを形成するステップと、前記シリコン層を覆う***したソースおよびドレイン領域を形成するステップと、を含む、半導体デバイスを形成する方法。 - 前記第2絶縁層を形成するステップは、前記蒸着したシリコンに酸素イオンを注入するステップを含む、請求項1記載の方法。
- 前記開口部のサイドウォールに絶縁サイドウォールスペーサを形成するステップをさらに含む、請求項1記載の方法。
- 前記第1領域を前記第2領域から絶縁するように、前記構造中に絶縁領域を形成するステップをさらに含む、請求項3記載の方法。
- 前記絶縁領域を形成するステップは、前記絶縁サイドウォールスペーサを取り除くステップを含む、請求項4記載の方法。
- 前記構造は、前記第1領域から離間された第2領域を含み、前記第1領域において前記第2絶縁層を覆う前記シリコン層は、第1の結晶方位を有するシリコンと、前記第2領域において前記第1絶縁層を覆う前記シリコン層は、第2結晶方位を有するシリコンを含む、請求項1に記載の方法。
- 前記基板は前記第1結晶方位を有するシリコンを含む、請求項6に記載の方法。
- 前記第1結晶方位および前記第2結晶方位は、<100>、<110>、<111>、<311>からなるシリコン結晶方位群と、これらの方位に向けられた結晶面から選択される、請求項7に記載の方法。
- 前記第1結晶方位を有する前記シリコンの結晶方位は<100>であり、前記第2結晶方位を有するシリコンの結晶方位は<110>である、請求項7記載の方法。
- 前記第1領域にNMOSFETを形成し、前記第2領域にPMOSFETを形成するステップをさらに含む、請求項9記載の方法。
- 前記***したソースおよびドレイン領域は、ドープした選択的エピタキシーによって成長される、請求項1記載の方法。
- 前記***したソースおよびドレイン領域にシリサイドコンタクトを形成するステップをさらに含む、請求項1記載の方法。
- 前記一部空乏型MOSFETにハロ注入を形成するステップをさらに含む、請求項1記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/976,780 US7235433B2 (en) | 2004-11-01 | 2004-11-01 | Silicon-on-insulator semiconductor device with silicon layers having different crystal orientations and method of forming the silicon-on-insulator semiconductor device |
US10/976,780 | 2004-11-01 | ||
PCT/US2005/036777 WO2006049833A1 (en) | 2004-11-01 | 2005-10-12 | Silicon-on-insulator semiconductor device with silicon layer having defferent crystal orientations and method of forming the silicon-on-insulator semiconductor device |
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JP2008518475A JP2008518475A (ja) | 2008-05-29 |
JP2008518475A5 JP2008518475A5 (ja) | 2009-02-12 |
JP5039557B2 true JP5039557B2 (ja) | 2012-10-03 |
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US (1) | US7235433B2 (ja) |
EP (1) | EP1815520B1 (ja) |
JP (1) | JP5039557B2 (ja) |
KR (1) | KR101124657B1 (ja) |
CN (1) | CN100477235C (ja) |
TW (1) | TWI382492B (ja) |
WO (1) | WO2006049833A1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US7253034B2 (en) * | 2004-07-29 | 2007-08-07 | International Business Machines Corporation | Dual SIMOX hybrid orientation technology (HOT) substrates |
US7851916B2 (en) * | 2005-03-17 | 2010-12-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Strain silicon wafer with a crystal orientation (100) in flip chip BGA package |
US7432149B2 (en) * | 2005-06-23 | 2008-10-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | CMOS on SOI substrates with hybrid crystal orientations |
US7611937B2 (en) * | 2005-06-24 | 2009-11-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | High performance transistors with hybrid crystal orientations |
US7737532B2 (en) * | 2005-09-06 | 2010-06-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Hybrid Schottky source-drain CMOS for high mobility and low barrier |
US7396407B2 (en) * | 2006-04-18 | 2008-07-08 | International Business Machines Corporation | Trench-edge-defect-free recrystallization by edge-angle-optimized solid phase epitaxy: method and applications to hybrid orientation substrates |
US7452784B2 (en) * | 2006-05-25 | 2008-11-18 | International Business Machines Corporation | Formation of improved SOI substrates using bulk semiconductor wafers |
WO2008007748A1 (fr) * | 2006-07-13 | 2008-01-17 | National University Corporation Tohoku University | dispositif semi-conducteur |
FR2905519B1 (fr) * | 2006-08-31 | 2008-12-19 | St Microelectronics Sa | Procede de fabrication de circuit integre a transistors completement depletes et partiellement depletes |
FR2915318B1 (fr) * | 2007-04-20 | 2009-07-17 | St Microelectronics Crolles 2 | Procede de realisation d'un circuit electronique integre a deux portions de couches actives ayant des orientations cristallines differentes |
KR101461206B1 (ko) * | 2007-05-17 | 2014-11-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 및 그의 제조방법 |
JP2009072845A (ja) * | 2007-09-19 | 2009-04-09 | Oki Semiconductor Co Ltd | 半導体デバイスの製造方法 |
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KR101124657B1 (ko) | 2012-04-19 |
EP1815520B1 (en) | 2012-05-02 |
CN101044621A (zh) | 2007-09-26 |
TWI382492B (en) | 2013-01-11 |
WO2006049833A1 (en) | 2006-05-11 |
US7235433B2 (en) | 2007-06-26 |
EP1815520A1 (en) | 2007-08-08 |
US20060091427A1 (en) | 2006-05-04 |
JP2008518475A (ja) | 2008-05-29 |
CN100477235C (zh) | 2009-04-08 |
TW200620537A (en) | 2006-06-16 |
KR20070065902A (ko) | 2007-06-25 |
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