JP5009507B2 - 圧電/電歪膜型素子 - Google Patents
圧電/電歪膜型素子 Download PDFInfo
- Publication number
- JP5009507B2 JP5009507B2 JP2005084990A JP2005084990A JP5009507B2 JP 5009507 B2 JP5009507 B2 JP 5009507B2 JP 2005084990 A JP2005084990 A JP 2005084990A JP 2005084990 A JP2005084990 A JP 2005084990A JP 5009507 B2 JP5009507 B2 JP 5009507B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrostrictive film
- diaphragm portion
- electrostrictive
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
Claims (1)
- 厚肉部を周縁部に持つ薄肉ダイヤフラム部を有するセラミックスからなる基板に下部電極及び補助電極と、圧電/電歪膜と、上部電極を順次積層させた圧電/電歪膜型素子であって、
前記上部電極の長さが、薄肉ダイヤフラム部の長さの30%以上70%以下であり、前記上部電極の幅が、薄肉ダイヤフラム部の幅の70%以上であり、前記上部電極の長さ方向における中心の、薄肉ダイヤフラム部の長さ方向における中心からのずれが、薄肉ダイヤフラム部の長さ方向において、薄肉ダイヤフラム部の長さの5%以下であることを特徴とする圧電/電歪膜型素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005084990A JP5009507B2 (ja) | 2004-04-05 | 2005-03-23 | 圧電/電歪膜型素子 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004111468 | 2004-04-05 | ||
JP2004111468 | 2004-04-05 | ||
JP2005084990A JP5009507B2 (ja) | 2004-04-05 | 2005-03-23 | 圧電/電歪膜型素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005322890A JP2005322890A (ja) | 2005-11-17 |
JP5009507B2 true JP5009507B2 (ja) | 2012-08-22 |
Family
ID=35469900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005084990A Expired - Fee Related JP5009507B2 (ja) | 2004-04-05 | 2005-03-23 | 圧電/電歪膜型素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5009507B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007123278A1 (ja) | 2006-04-24 | 2007-11-01 | Ngk Insulators, Ltd. | 圧電/電歪膜型素子 |
JP5669443B2 (ja) * | 2010-05-31 | 2015-02-12 | キヤノン株式会社 | 振動体とその製造方法及び振動波アクチュエータ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6438694A (en) * | 1987-08-04 | 1989-02-08 | Toshiba Corp | Shield plug of fast breeder |
JP3470691B2 (ja) * | 2000-08-31 | 2003-11-25 | 株式会社村田製作所 | 圧電共振子および圧電フィルタ |
JP3728623B2 (ja) * | 2001-03-02 | 2005-12-21 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
JP2004048639A (ja) * | 2002-05-17 | 2004-02-12 | Murata Mfg Co Ltd | 圧電共振子及びその製造方法等 |
-
2005
- 2005-03-23 JP JP2005084990A patent/JP5009507B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005322890A (ja) | 2005-11-17 |
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