JP4976367B2 - 熱電子放出素子 - Google Patents
熱電子放出素子 Download PDFInfo
- Publication number
- JP4976367B2 JP4976367B2 JP2008328567A JP2008328567A JP4976367B2 JP 4976367 B2 JP4976367 B2 JP 4976367B2 JP 2008328567 A JP2008328567 A JP 2008328567A JP 2008328567 A JP2008328567 A JP 2008328567A JP 4976367 B2 JP4976367 B2 JP 4976367B2
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- carbon nanotube
- electrode
- electrode lead
- emission device
- lead line
- Prior art date
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 141
- 239000002041 carbon nanotube Substances 0.000 claims description 111
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 111
- 239000000758 substrate Substances 0.000 claims description 43
- 239000002238 carbon nanotube film Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 239000002079 double walled nanotube Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000002109 single walled nanotube Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000009987 spinning Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 239000002048 multi walled nanotube Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- -1 alkaline earth metal carbonate Chemical class 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002071 nanotube Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/14—Solid thermionic cathodes characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/19—Thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
Description
Kaili Jiang、Qunqing Li、Shoushan Fan、"Spinning continuous carbon nanotube yarns"、Nature、2002年、第419巻、p.801
145 カーボンナノチューブ
200 熱電子放出装置
202 絶縁性基板
204a 第一電極引き出し線
204b 第二電極引き出し線
206a 第三電極引き出し線
206b 第四電極引き出し線
208 熱電子放出素子
210 第一電極
212 第二電極
214 格子
216 絶縁部
218 溝
220 熱電子放出ユニット
Claims (7)
- 絶縁性基板と、前記絶縁性基板に形成された複数の格子と、を含み、
各々の前記格子が、該格子の周辺に設置された四つの電極引き出し線によって囲まれ、
各々の前記格子が、熱電子放出ユニットを含み、
前記熱電子放出ユニットが、二つの電極及び熱電子放出素子を含み、
前記二つの電極が前記熱電子放出素子と電気的に接続されていて、
前記熱電子放出素子がカーボンナノチューブ構造体を含み、
前記カーボンナノチューブ構造体が少なくとも一本のカーボンナノチューブワイヤを含むことを特徴とする熱電子放出装置。 - 前記熱電子放出素子が、前記二つの電極に設置されていて、
前記熱電子放出素子が、前記絶縁性基板に対して懸架されて設置されていることを特徴とする、請求項1に記載の熱電子放出装置。 - 前記四つの電極引き出し線において、
二つの前記電極引き出し線が第一方向に対して、平行に配列されていて、
もう二つの前記電極引き出し線が第二方向に対して、平行に配列されていることを特徴とする、請求項1に記載の熱電子放出装置。 - 前記二つの電極において、
一つの前記電極が、第一方向に対して配列された一つの前記電極引き出し線に電気的に接続されていて、
もう一つの前記電極が、第二方向に対して配列された一つの前記電極引き出し線に電気的に接続されていることを特徴とする、請求項1〜3のいずれか一項に記載の熱電子放出装置。 - 単一の前記格子に対応して、前記絶縁性基板に一つの溝が設置されていることを特徴とする、請求項1に記載の熱電子放出装置。
- 前記カーボンナノチューブ構造体におけるカーボンナノチューブワイヤが、相互に平行に配列されていることを特徴とする、請求項1に記載の熱電子放出装置。
- 前記カーボンナノチューブ構造体において、
各々の前記カーボンナノチューブワイヤの一つの端部が、一つの電極に電気的に接続され、
各々の前記カーボンナノチューブワイヤのもう一つの端部が、もう一つの電極に電気的に接続されていることを特徴とする、請求項1に記載の熱電子放出装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007101256617A CN101471212B (zh) | 2007-12-29 | 2007-12-29 | 热发射电子器件 |
CN200710125661.7 | 2007-12-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009164124A JP2009164124A (ja) | 2009-07-23 |
JP4976367B2 true JP4976367B2 (ja) | 2012-07-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008328567A Active JP4976367B2 (ja) | 2007-12-29 | 2008-12-24 | 熱電子放出素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7915798B2 (ja) |
JP (1) | JP4976367B2 (ja) |
CN (1) | CN101471212B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101471213B (zh) | 2007-12-29 | 2011-11-09 | 清华大学 | 热发射电子器件及其制备方法 |
CN101483123B (zh) * | 2008-01-11 | 2010-06-02 | 清华大学 | 场发射电子器件的制备方法 |
CN101893659B (zh) * | 2009-05-19 | 2012-06-20 | 清华大学 | 电磁波偏振方向检测方法及检测装置 |
CN102023297B (zh) * | 2009-09-11 | 2015-01-21 | 清华大学 | 声纳*** |
US9126836B2 (en) * | 2009-12-28 | 2015-09-08 | Korea University Research And Business Foundation | Method and device for CNT length control |
CN101881659B (zh) * | 2010-06-25 | 2013-07-31 | 清华大学 | 电磁波检测装置 |
CN101880035A (zh) | 2010-06-29 | 2010-11-10 | 清华大学 | 碳纳米管结构 |
CN102064071B (zh) * | 2010-12-16 | 2012-07-18 | 清华大学 | 场发射显示装置 |
CN102290304B (zh) * | 2011-08-07 | 2013-01-16 | 张研 | 一种带有聚焦栅极的碳纳米管场发射阵列 |
CN103366644B (zh) * | 2012-03-30 | 2015-09-30 | 清华大学 | 白炽光源及白炽光源显示装置的制备方法 |
US9053890B2 (en) | 2013-08-02 | 2015-06-09 | University Health Network | Nanostructure field emission cathode structure and method for making |
CN104795297B (zh) * | 2014-01-20 | 2017-04-05 | 清华大学 | 电子发射装置及电子发射显示器 |
CN104795294B (zh) * | 2014-01-20 | 2017-05-31 | 清华大学 | 电子发射装置及电子发射显示器 |
CN112835052B (zh) * | 2019-11-25 | 2023-09-05 | 京东方科技集团股份有限公司 | 超声波传感模块、超声波传感装置及控制方法、显示设备 |
Family Cites Families (11)
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DE69130252T2 (de) * | 1990-12-28 | 1999-04-29 | Canon Kk | Bilderzeugungsgerät |
JP3320294B2 (ja) * | 1995-02-03 | 2002-09-03 | キヤノン株式会社 | 電子線発生装置、及び、それを用いた画像形成装置 |
US5905335A (en) | 1995-02-03 | 1999-05-18 | Canon Kabushiki Kaisha | Electron generation using a fluorescent element and image forming using such electron generation |
JP3826022B2 (ja) * | 2000-12-15 | 2006-09-27 | キヤノン株式会社 | 配線を有する基板及び電子源及び画像表示装置 |
JP3857156B2 (ja) | 2002-02-22 | 2006-12-13 | 株式会社日立製作所 | 電子源用ペースト、電子源およびこの電子源を用いた自発光パネル型表示装置 |
KR20050088791A (ko) * | 2004-03-03 | 2005-09-07 | 삼성에스디아이 주식회사 | 평판 디스플레이 장치용 캐소드 기판의 제조 방법 및제조된 캐소드 기판을 포함하는 평판 디스플레이 장치 |
JP4393257B2 (ja) * | 2004-04-15 | 2010-01-06 | キヤノン株式会社 | 外囲器の製造方法および画像形成装置 |
KR20050104551A (ko) * | 2004-04-29 | 2005-11-03 | 삼성에스디아이 주식회사 | 전자 방출 소자와, 이를 이용한 평면 표시 장치 |
CN100372047C (zh) | 2005-09-09 | 2008-02-27 | 清华大学 | 一种薄膜场发射显示器件及其场发射阴极的制备方法 |
JP4613327B2 (ja) * | 2006-11-06 | 2011-01-19 | 学校法人 名城大学 | カーボンナノチューブ製フィラメントおよびその利用 |
CN101471211B (zh) | 2007-12-29 | 2010-06-02 | 清华大学 | 热发射电子器件 |
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2007
- 2007-12-29 CN CN2007101256617A patent/CN101471212B/zh active Active
-
2008
- 2008-10-23 US US12/288,996 patent/US7915798B2/en active Active
- 2008-12-24 JP JP2008328567A patent/JP4976367B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN101471212B (zh) | 2010-12-08 |
US20100039015A1 (en) | 2010-02-18 |
CN101471212A (zh) | 2009-07-01 |
US7915798B2 (en) | 2011-03-29 |
JP2009164124A (ja) | 2009-07-23 |
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