JP4951044B2 - 不揮発性メモリ装置及びその製造方法 - Google Patents
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 229910001930 tungsten oxide Inorganic materials 0.000 description 2
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- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
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- QOQXJCPZNAIESJ-UHFFFAOYSA-N strontium oxygen(2-) zirconium(4+) Chemical compound [O--].[O--].[O--].[Sr++].[Zr+4] QOQXJCPZNAIESJ-UHFFFAOYSA-N 0.000 description 1
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- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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Description
図2は、第1の実施形態に係わる抵抗変化素子(不揮発性メモリセル)の素子構造を示す断面図である。基板20はシリコン等の半導体基板であり、21はこの基板上に形成された下部電極、22は下部電極21上に形成された中間層(絶縁性バッファ層)、23は導電性ナノマテリアルからなる抵抗変化層、24は上部電極を示している。
図3は、この発明の第2の実施形態に係わる抵抗変化素子(不揮発性メモリ素子)の素子構造を示す断面図である。図2と同一部分には同一符号を付して、その詳しい説明は省略する。
図4は、この発明の第3の実施形態に係わる抵抗変化素子(不揮発性メモリ素子)の素子構造を示す断面図である。図3と同一部分には同一符号を付して、その詳しい説明は省略する。
次に、この発明の第4の実施形態に係わるクロスポイント型の不揮発性記憶装置を説明する。
図5は、第4の実施形態に係わるクロスポイント型セルアレイの等価回路構成を示している。セルアレイ35には、複数本のワード線WL(WLi-1,WLi,WLi+1)がX方向に平行配置され、複数本のビット線BL(BLj-1,BLj,BLj+1)がY方向に並行配置されている。図ではワード線、ビット線とも3本のみを示すが、実際には更に多数のワード線WL及びビット線BLが配置される。
本実施形態の記憶装置の書き込み/消去/読み出し動作を説明する。ここでは、図5中に点線Aで囲んだメモリセルを選択し、これについて書き込み/消去/読み出し動作を実行するものとする。
メモリセル部の抵抗変化素子製造方法を次に説明する。
このようなナノマテリアルを用いた不揮発性メモリセルにより、高密度記録可能なメモリデバイスを実現することができる。また、上下電極間には、絶縁性の中間バッファ層を介在させ、或いは抵抗変化層内に絶縁材を分散させることにより、上下電極間の短絡は防止される。一方、抵抗変化層と電極の界面に化学的に結合された強固な密着性を持った導電体を介在させることにより、メモリ素子としての上下電極間の電気的導通を確保しながら、抵抗変化層の密着性不足による素子不良を防止することができる。
具体的な実施例を、図8〜図12の工程断面図を参照して説明する。
Claims (6)
- 基板と、
前記基板上に形成された下部電極と、
前記下部電極上に形成された炭素系ナノマテリアルを含む抵抗変化層と、
前記抵抗変化層上に形成された上部電極と、
前記下部電極と前記抵抗変化層の間に形成された、前記下部電極と前記抵抗変化層の間の電気的導通を確保する導電材を分散させた絶縁性バッファ層と、
を有し、
前記絶縁性バッファ層は、前記下部電極を酸化して得られる金属酸化膜と、この金属酸化膜内に前記導電材として分散形成された、前記金属酸化膜と前記炭素系ナノマテリアルの接合点での反応生成物である金属カーバイドとを有する
ことを特徴とする不揮発性メモリ装置。 - 前記炭素系ナノマテリアルは、その間隙に絶縁材が充填されている
ことを特徴とする請求項1記載の不揮発性メモリ装置。 - 前記抵抗変化層と前記上部電極との間に形成された金属カーバイドを更に有する
請求項1及び2記載の不揮発性メモリ装置。 - 基板上に下部電極を形成する工程と、
前記下部電極を酸化する工程と、
酸化処理された前記下部電極上に炭素系ナノマテリアルを含む抵抗変化層を形成する工程と、
前記抵抗変化層上に上部電極を形成する工程と、
前記下部電極と前記抵抗変化層との間にそれらの接点での反応により金属カーバイドを形成する工程と、
を有することを特徴とする不揮発性メモリ装置の製造方法。 - 前記金属カーバイドは、前記抵抗変化層を形成した後の還元性雰囲気下での熱処理により形成する
請求項4記載の不揮発性メモリ装置の製造方法。 - 前記金属カーバイドは、前記上部電極を形成した後の前記上部及び下部電極間の通電処理により形成する
請求項4記載の不揮発性メモリ装置の製造方法。
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JP2010165950A (ja) | 2009-01-16 | 2010-07-29 | Toshiba Corp | 不揮発性半導体メモリ及びその製造方法 |
JP5023177B2 (ja) * | 2010-03-24 | 2012-09-12 | 株式会社東芝 | 半導体記憶装置 |
JP2012019191A (ja) * | 2010-06-10 | 2012-01-26 | Toshiba Corp | 不揮発性記憶装置の製造方法 |
JP2012004277A (ja) | 2010-06-16 | 2012-01-05 | Toshiba Corp | 不揮発性半導体記憶装置および不揮発性半導体記憶装置の製造方法 |
JP5572056B2 (ja) | 2010-10-20 | 2014-08-13 | 株式会社東芝 | 記憶装置及びその製造方法 |
JP5591676B2 (ja) * | 2010-12-14 | 2014-09-17 | 株式会社東芝 | 半導体記憶装置 |
JP2012169563A (ja) * | 2011-02-16 | 2012-09-06 | Toshiba Corp | 記憶装置及びその製造方法 |
JP2012182233A (ja) | 2011-02-28 | 2012-09-20 | Toshiba Corp | 不揮発性記憶装置 |
CN102708919B (zh) * | 2011-03-28 | 2015-03-04 | 中国科学院微电子研究所 | 阻变存储器及其制造方法 |
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JP5502803B2 (ja) * | 2011-06-02 | 2014-05-28 | 株式会社東芝 | 不揮発性抵抗変化素子 |
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JP2013026459A (ja) | 2011-07-21 | 2013-02-04 | Toshiba Corp | 不揮発性抵抗変化素子 |
KR101371438B1 (ko) * | 2012-06-20 | 2014-03-10 | 인텔렉추얼디스커버리 주식회사 | 서로 다른 종류의 전극을 이용한 멀티비트 저항변화 메모리 소자 및 그 제조방법 |
US9165633B2 (en) | 2013-02-26 | 2015-10-20 | Honeywell International Inc. | Carbon nanotube memory cell with enhanced current control |
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GB2516841A (en) * | 2013-07-31 | 2015-02-11 | Ibm | Resistive memory element based on oxygen-doped amorphous carbon |
CN103794762B (zh) * | 2014-01-23 | 2016-03-23 | 上海海事大学 | 一种碳包覆不同种类纳米晶的低温氧化制备方法 |
JP5755782B2 (ja) * | 2014-05-26 | 2015-07-29 | 株式会社東芝 | 不揮発性抵抗変化素子 |
JP2017055082A (ja) * | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 不揮発性記憶装置の製造方法 |
CN107256924B (zh) * | 2017-06-09 | 2019-10-11 | 京东方科技集团股份有限公司 | 阻变器件及其制作方法、显示基板的制作方法、显示装置 |
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CN113517397B (zh) * | 2021-06-08 | 2022-08-16 | 华中科技大学 | 一种双极选通忆阻器的制备方法及双极选通忆阻器 |
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WO2009122569A1 (ja) | 2008-04-01 | 2009-10-08 | 株式会社 東芝 | 情報記録再生装置 |
US8183121B2 (en) * | 2009-03-31 | 2012-05-22 | Sandisk 3D Llc | Carbon-based films, and methods of forming the same, having dielectric filler material and exhibiting reduced thermal resistance |
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